CA1205784A - Contaminant free high purity liquid dispensing system - Google Patents
Contaminant free high purity liquid dispensing systemInfo
- Publication number
- CA1205784A CA1205784A CA000457008A CA457008A CA1205784A CA 1205784 A CA1205784 A CA 1205784A CA 000457008 A CA000457008 A CA 000457008A CA 457008 A CA457008 A CA 457008A CA 1205784 A CA1205784 A CA 1205784A
- Authority
- CA
- Canada
- Prior art keywords
- liquid
- reservoir
- container
- high purity
- dispenser
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B67—OPENING, CLOSING OR CLEANING BOTTLES, JARS OR SIMILAR CONTAINERS; LIQUID HANDLING
- B67B—APPLYING CLOSURE MEMBERS TO BOTTLES JARS, OR SIMILAR CONTAINERS; OPENING CLOSED CONTAINERS
- B67B7/00—Hand- or power-operated devices for opening closed containers
- B67B7/24—Hole-piercing devices
- B67B7/26—Hole-piercing devices combined with spouts
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65B—MACHINES, APPARATUS OR DEVICES FOR, OR METHODS OF, PACKAGING ARTICLES OR MATERIALS; UNPACKING
- B65B3/00—Packaging plastic material, semiliquids, liquids or mixed solids and liquids, in individual containers or receptacles, e.g. bags, sacks, boxes, cartons, cans, or jars
- B65B3/04—Methods of, or means for, filling the material into the containers or receptacles
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Devices For Dispensing Beverages (AREA)
- Containers And Packaging Bodies Having A Special Means To Remove Contents (AREA)
Abstract
ABSTRACT
CONTAMINANT FREE HIGH PURITY LIQUID DISPENSING SYSTEM
Apparatus is provided for transferring into a dis-penser reservoir free of contamination from a sealed bulk container, such as a bottle used in shipping high purity liquid, e.g. electronic chemicals. The dispenser is provided with an adapter to interlock on the bottle and thereafter to perforate the sealed opening in the bottle and allow transfer of the liquid without exposure to ambient contamination. The dispenser is provided with a check valve which halts the flow of liquid from the reservoir before the liquid supply is depleted to prevent air from being pulled into the system. The dis-penser reservoir compartment is formed with a liquid accumulating bottom provided with the check valve at the lower end of the compartment.
CONTAMINANT FREE HIGH PURITY LIQUID DISPENSING SYSTEM
Apparatus is provided for transferring into a dis-penser reservoir free of contamination from a sealed bulk container, such as a bottle used in shipping high purity liquid, e.g. electronic chemicals. The dispenser is provided with an adapter to interlock on the bottle and thereafter to perforate the sealed opening in the bottle and allow transfer of the liquid without exposure to ambient contamination. The dispenser is provided with a check valve which halts the flow of liquid from the reservoir before the liquid supply is depleted to prevent air from being pulled into the system. The dis-penser reservoir compartment is formed with a liquid accumulating bottom provided with the check valve at the lower end of the compartment.
Description
D~SCRIPTIVN
_ C~NTAMINANT FREE HIGH P~RITY LIQUI~ DI~PEN~ING SY~TEM
_ BACKGROUND OF TH~ INV~NTION
Various liquids which are shi~ped in bulk con-tainers are exposed to conditions which adversely affect the level of purity of these liquids. In many situa-tions the maintenance of hiyh purity is necessary for _the practical acceptance of the liqui~. For example, in semiconductor manufacturiny processes it is essential that chemicals of high purity be used, otherwise the resulting product is likely to be unacceptable. The source of contamination for these hiyh ~urity li~uids may be encountered at various stages in the handling of such liquids. ~or exam~le, contaminants may be intro-duced when the liguid in the bulk container, for which great care has been expended to avoid impurities, is withdrawn usin~ dip tubes which may be exposed to con-taminants through re~eated use; or when contact is made with contaminated dis~ensiny equi~ment that comes into contact with the opening of the container, or its liquid is being dispensed from the openiny, of tAe shiuping container; or when the container is reca~ped to ~raserve the balance of unused contents for later use. In these and other situations the contaminant comes from sources that are oft~ntimes di~ficult to trace or it may evsn come from contaminated air which displaces the liquid withdrawn from the container. In some instances, to avoid pulling air into the system, a quantity of liquid is allowed to remain in the bulk ~shipping) container ` "~"
.' :
~57~
whan the chanye to a fresh container is made. This pre-cludes the possibility of introduciny unwante~ air into the system as well as impurities with the air which would contaminate the liquia. However, such residual amounts of liquid which is left in the container and discarded, in the agyre~ate, constitute a considerable economic waste.
In the past various means to minimi~e sources o~
contamination have been employed. ~ Patent 3,941,27Q, for example, discloses a ~ulk liquid con-tainer with a seal which may be perforated by a hollow spike perforator when the liquid from the container is to be dispensed. In the arrangement of U.~. Patent 3,941,~70 the toU of the bulk container is inverted on the perforatiny device to remove the liquid impervious seal and allow the liquid to flow. In that arran~ement considerable risk of contamination is present at the contact between the container openiny, which is rela-tively loose fitting and which sometimes results in pre-mature perforation of the seal.
It is ap~arent, accordinyly, that a need exists ~or a system that prevents contamination of high purity liquids in a bulk container in the process o~ transfer- A
rin~, i.e. dispensin~, the liquid from the container, in a more reliable and efficient manner while maintainin~
the necessary high level of ~urity of the liquid ana precludiny the entry of air into the liquid dispensin~
line.
~UMMA~Y ~ T~ INVE~TI~N
The invention com~rises a container devised for secure shipment and dispensiny o~ a high purity liquiar a dispenser haviny a liquid reservoir for dispensin~ the - liquid and a valving means to prevent entry of air into the line tnrouyh which the liqui~ is withdrawn ~rom the dispenser. The disuenser is closed against con-tamination and is provided with a float or other means ; to stop flow of the liguid when the liquid therein is near de~letion. Tne dispenser is ~rovided with a ~unc-~ ' turin~ device to perforate the seal of a bulk (shi~pin~) container from which the liquid is introduced into the dispenser. The dis~enser and bulk container are pro-vided with mating mechanical interlocking means, such as mating threads, so that as the container is positioned on the dispenser, perforation of ~he seal on the bulk container occurs when the container is inserted on the opening of the dispenser and then lockea to prevent con-tamination. The system of the ~resent invention, comprising the dispenser, the bulk container (which is penetrated to feed the li~uid into the dispenser only when the two are interconnected and exposure from contamination into the liquid is ~recluded) and the air interlock means affords novel and highly practical advantayes~
The aispenser of the invention comprises a con-tainer preferably with a slanted or interior concave bottom having a suitable capacity such as about 3 liters or more. At the lower part of the bottom a flow control ~ 20 means is used such as a float valve which leads to a feed tube attached outside the container. The feed tube leads to a pump which delivers high purity liquid, such as a photoresist to a coating or other dispensing eguip-ment used for example in semi-conductor manufacturin~.
The f loat valve closes when the liquid level becomes low, thus shutting off Xlow and eliminating the ~ossi-bility of air entering the feed tube.
The top o~ the dispensiny container is removable and contains in its center a fitting which has a depressed center with drain holes that permit li~uid material to flow into the container In the middle of this fitting is a hollow ~erforating or ~uncturing device which is hollow and contains openin~s to ~ermit liquid to flow into the container througn the drain hôles in the fitting.
The bulk shi~ping container or bottle of hi~h pur-ity li~uid, such as photoresist, used in the system of the invention utilizes a cap with a round hole in the ~-center which exposes a perforatable flexiDle plastic cap liner which seals the container. A second lar~er set o~
threads match threads ~n the interior of the center fit-ting and enable the bottle of photoresist to be rigidly held in place once it is seated. In feeding the dis-penser from the bulk container, an outer protective ca~
is removed from the bulk container or bottle~ ex~osin~
the bottle cap with the perforatable plastic cap liner. The shipping bottle is inverted and the ~unc-turing device is pushed into the cen~er hole of the capand into the bottle. The ~lexi~le cap liner is ~usned aside or perforated and the liquid flows into the dis-penser reservoir. The float valve which controls flow from the reservoir then rises, permittin~ flow of the liquid into the feed tube of the pumpO
~ nce the bottle is empty, it can be removed ana replaced by a full bottle~ The ca~acity of the dis-penser reservoir permits continuous operation of the dispensing equipment, even if an empty bottle is not immediately replaced by a full bottle of the high purity liquid.
The dispenser may employ a sight ~lass or other gauge to si~nal the level of the hi~h purity liguid in the dispenser reservoir.
~RI~ D~CRIPTI~N OF T~E D~AWING~
FIG~ 1 is a diayramatic view of an inverted bulk container positioned over the high ~urity liquid dis-penser equipped with a perforating device to puncture the container sealed openiny.
kIG~ ~ is a fra~mentary view o~ the pouring ena of a bulk container with closure cap and overcap shown in cross-section.
~IG. 3 is a fraymentary view in cross-section of the bulk container pourin~ end, ~rom which the over cap has been removea, positioned above the ~eed entry to the dispenser with the perforating device positioned in the feed entry to the dispenser reservoir.
FIG. 4 is a fraymentary view similar to ~IG. 3 7~
showing the ~ouring end of the bulk container with con-tainer seal punctured and in locked position on the dis-penser.
FIG. 5 is a cross-section of a float valve that may be employed with the invention to function in cuttiny off flow when the level in the reservoir is near de~le-tion and before air can enter the piping system.
FIG. 6 illustrates an alternative embodiment of the invention wherein the reservoir comprises a slanted bOttom.
FI~. 7 illustrates another embodiment wherein the reservoir comprises a cone~shape~ bottom.
PRE}~'~RR~:D EMBODIMENT C)~;' l`H~ VENTI()N
In accordance with the invention a system ~or dis-pensing high purity liquids is provided. As shown byreference to FIG. 1, the system comprises a dispenser unit shown generally at 2U wnich is adapted to receive a bulk container shown yenerally at 10 in which tne high ~urity liquid is ship~ed. The system is devise~ to ; ~0 receive the mouth or nozzle 16 of the shippin~ container or bottle 10 while it is still in a sealed condition into a receiving adaptor 22 of the dis~enser 20. After the bottle 10 is insexted and is in proper position with the bottle nozzle 16 into the adapter 2~, the seal 34 on the bottle opening is perforated when the bottle opening is positioned on the puncture mecnanism 48 and inter-locked by rotatiny it as will be described hereafter in greater detail. This interlockin~ precludes contamina-tion duriny the transfer from the bulk container to the dispenser 20.
The dispenser 20 comprises a container which may generally be cylindrical in cross-section having a reservoir 21 of suitable capacity, for exam~le 3 liters or more. The reservoir 21 is ~referably forme~ 50 that it has a domed bottom ~la ~o better utilize the li~ui~
remaininy in the reservoir as the liquid nears deple-tion. The reservoir may also be $ormed to have a slanted bottom as shown at 21b in FIG. 6.
~L2~?57~3~
At the lower part of the dome bottom 21a (~ 1) is a float valve, shown in phantom at 26, which leads to a feed tube 28 attached ou~side the dispenser container 20. When the liquid to be dispensed is an electronic chemical, such as a liquid photoresist composition, which must necessarily be maintained in hign purity, the feed tube 28 may leaa~to a pump (not shown) which delivers photoresist to the coatiny or other equipment~ The float valve 26 shown in greater detail in FIG. 5 closes when the liquid level becomes low, thus shutting off flow and eliminatiny the possi~ility of air enteriny the feed tube ~.
The top of the dispensiny container ~0 is removable and contains in its center a fitting 22 which has a depressed center with drain holes 42 that permit li~ui~
material to flow into the container reservoir 21. In the middle of this fittiny 22 is a round pointed ~unc-turin~ device 40 which will be described by reference to FIG~. 4 and S. The puncturing device 40 i9 also per-forated at 41 to permit liquid flow into the containerthrou~h the interisr of the puncturiny device 40.
The bottles of high purity liquid used with thîs invention utilize a cap 17 with a roun~ hole in the cen ter 17a which exposes a per~oratable plastic cap liner held on a first set of threads 18. A second lar~er set of threads 14 match threads on the interior of the cen-ter fittiny and enable t~e bottle of photoresist to be rigidly held in place once it is seated on the dis-penser.
In use, an outer protective over cap 11 is removea from the shippiny container or bottle 10, exposiny the bottle ca~ 17 with the ~lastic cap liner or seal 3U.
The bottle 10 is inverted and the puncturiny device 40 penetrates the seal 30 which comprises an inner seal 34 and an outer seal member 3~, the latter preferably is provided with a central perforation as described in greater detail in U.S. Patent 3,941,270. As the bottle 10 is lowerea on the puncture mechanism penetratiny the ca~ 17 and pushiny aside the seal ~U, i~ is rotate~
locking threads 14 and 24. The li~uid flows into the container reservoir 21 from the openin~ thus proviaed.
When sufficient liquid is present in the reservoir 21 of dispenser 20, the float valve ~6 rises, ~ermittiny flow into the feed tube 2~ to the pump ~not shown).
~ nce the bottle i5 em~ty, it can be removed ana replaced by a full bottle. ~he capacity of the dis-penser reservoir permits continuous operation o~ the equipment even if an empty bottle is not immediately replce~ by a full bottle of photoresist.
The float valve snOwn in FI~. S is typical ana com-prises a body 50 containin~ therein a float 51 formed with precision matiny surfaces to effect a tiyht seal between the surfaces 50a and 51a wnen the float is in the down position. As shown the float 51 is in the elevatea position restiny a~ainst the retainer rod 52 which keeps the float Sl in place. Li~uid enters the annular space 53 from the top at 54 and/or from openin~s 55 in the sides of the body 50. When the li~uid is diminished in the reservoir to a level about mid-way o~
; the vertical height of the float 51, the float sits on the mating body (base) surface 50a and shuts off flow to tubing 2~ (FIG. 1). The ~unction of the float valve, as will be apparent to one skilled in the art, and may be performed by other flow control means such as a level control operating a solenoia valve 63 (shown in FI~. 6).
As disclosed in U.~. Patent 3,941,270~ the bottle or bulk container 10 is appropriately sealed to maintain high purity of the liquid durin~ shipment. As describea herein the flexible liquid impervious sealing member 3 comprises first ana secon~ adjacent flexible discs 32 and 34 respectively. The first aisc 32 may be proviaec with a centrally located circular perforation as shown by reference to U.~. Yatent 3,941,270 and the second disc is imper~orate and covers ~he circular per~oration in the first disc. rhe circular per~oration in the first disc is provided so that the ti~ of the puncture ~?5~
mechanism 40 wi]l engage the perforation and carry the first disc 32 and adjacent second disc 34 away ~rom the top wall of the screw closure cap 17 so that after the discs are removed, they will not interEere with flow of liquid ~ronl the container throuqh the perEorate portlon 17a of the top wall 17b.
~ sin~le flexible sealing disc may be used. How-ever, a pair of discs is preferred. When more than one disc is used, the first disc 32 provides support for the second disc 34 and therefore may be less Elexible than the second disc. The second disc 34 may be gas perme-able so that if the liquid in the container produces gas upon exposure to heat or light, the gas will pass through. The sealing disc combination 30 may include additional elementsO For example, when the second disc is a thin qas permeable disc it may be disposed between third and fourth discs which are provided for structural support of the second disc with the third and fourth discs provided with centrally located slits, the third disc being in contact with the first end of the cylin-drical member and the fourth disc being disposed between the first and second discs. The -thickness, properties and character, e.g. gas permeability, of the seal ele-ments are selected to provide the necessary protection under ambient conditions.
~etails of the sealing elements Eor the shipping container comprising the inner cap 17 and seal combina-tion 30 of elements within the cap 17 are provided in U.S. Patent 3,941,270.
In operation, the sealing member 30 may be removed from the open end of the bulk container 10 by applying pressure upon the sealing member 30. When such pressure is applied by the perforator An, the sealing member dis-engages or is perforated thus permitting communication through the perforate portion through the perforator 40 to the dispenser reservoir 21 from the bottle lOo The pressure may be applied through the perforate 1 "''' ,, , portion by a hollow spike perforator 40 which is pro-vided with openings 41 to permit entry o~ liquid from the hollow portion into the hollow spike 40 for carryin~
the li~uid through the hollow spike to the dispenser reservoir 21. The hollow spike 40 is conveniently attached to a supporting surface 22 by suitable means.
The supportiny fixture 22 is secured on the reservoir cover 23.
As shown in FIG. 6 the solenoid operated level con-trol 60 comprises a sensor 61 which is partially sub-mer~ed and senses the liquid level 62. When the level falls below the predetermined level 62a, the level sensor 60 causes solenoid valve 63 to close until the liquid level is again raised, thus preventing air from enterin9 pipiny 28.
FIG. 7 illustrates a cone shaped reservoir 65 pro-vided with a valve 26a and discharye tube 28a whicn cor-respond in function to valve 26 and line ~ respectively described by reference to FIG. l.
Althou~h the invention has been described and illustrated in connection with preferred embodiments, it will be understood that modifications and variations may be made without departing from the essence and scope of the invention as defined in the appended claims.
_ C~NTAMINANT FREE HIGH P~RITY LIQUI~ DI~PEN~ING SY~TEM
_ BACKGROUND OF TH~ INV~NTION
Various liquids which are shi~ped in bulk con-tainers are exposed to conditions which adversely affect the level of purity of these liquids. In many situa-tions the maintenance of hiyh purity is necessary for _the practical acceptance of the liqui~. For example, in semiconductor manufacturiny processes it is essential that chemicals of high purity be used, otherwise the resulting product is likely to be unacceptable. The source of contamination for these hiyh ~urity li~uids may be encountered at various stages in the handling of such liquids. ~or exam~le, contaminants may be intro-duced when the liguid in the bulk container, for which great care has been expended to avoid impurities, is withdrawn usin~ dip tubes which may be exposed to con-taminants through re~eated use; or when contact is made with contaminated dis~ensiny equi~ment that comes into contact with the opening of the container, or its liquid is being dispensed from the openiny, of tAe shiuping container; or when the container is reca~ped to ~raserve the balance of unused contents for later use. In these and other situations the contaminant comes from sources that are oft~ntimes di~ficult to trace or it may evsn come from contaminated air which displaces the liquid withdrawn from the container. In some instances, to avoid pulling air into the system, a quantity of liquid is allowed to remain in the bulk ~shipping) container ` "~"
.' :
~57~
whan the chanye to a fresh container is made. This pre-cludes the possibility of introduciny unwante~ air into the system as well as impurities with the air which would contaminate the liquia. However, such residual amounts of liquid which is left in the container and discarded, in the agyre~ate, constitute a considerable economic waste.
In the past various means to minimi~e sources o~
contamination have been employed. ~ Patent 3,941,27Q, for example, discloses a ~ulk liquid con-tainer with a seal which may be perforated by a hollow spike perforator when the liquid from the container is to be dispensed. In the arrangement of U.~. Patent 3,941,~70 the toU of the bulk container is inverted on the perforatiny device to remove the liquid impervious seal and allow the liquid to flow. In that arran~ement considerable risk of contamination is present at the contact between the container openiny, which is rela-tively loose fitting and which sometimes results in pre-mature perforation of the seal.
It is ap~arent, accordinyly, that a need exists ~or a system that prevents contamination of high purity liquids in a bulk container in the process o~ transfer- A
rin~, i.e. dispensin~, the liquid from the container, in a more reliable and efficient manner while maintainin~
the necessary high level of ~urity of the liquid ana precludiny the entry of air into the liquid dispensin~
line.
~UMMA~Y ~ T~ INVE~TI~N
The invention com~rises a container devised for secure shipment and dispensiny o~ a high purity liquiar a dispenser haviny a liquid reservoir for dispensin~ the - liquid and a valving means to prevent entry of air into the line tnrouyh which the liqui~ is withdrawn ~rom the dispenser. The disuenser is closed against con-tamination and is provided with a float or other means ; to stop flow of the liguid when the liquid therein is near de~letion. Tne dispenser is ~rovided with a ~unc-~ ' turin~ device to perforate the seal of a bulk (shi~pin~) container from which the liquid is introduced into the dispenser. The dis~enser and bulk container are pro-vided with mating mechanical interlocking means, such as mating threads, so that as the container is positioned on the dispenser, perforation of ~he seal on the bulk container occurs when the container is inserted on the opening of the dispenser and then lockea to prevent con-tamination. The system of the ~resent invention, comprising the dispenser, the bulk container (which is penetrated to feed the li~uid into the dispenser only when the two are interconnected and exposure from contamination into the liquid is ~recluded) and the air interlock means affords novel and highly practical advantayes~
The aispenser of the invention comprises a con-tainer preferably with a slanted or interior concave bottom having a suitable capacity such as about 3 liters or more. At the lower part of the bottom a flow control ~ 20 means is used such as a float valve which leads to a feed tube attached outside the container. The feed tube leads to a pump which delivers high purity liquid, such as a photoresist to a coating or other dispensing eguip-ment used for example in semi-conductor manufacturin~.
The f loat valve closes when the liquid level becomes low, thus shutting off Xlow and eliminating the ~ossi-bility of air entering the feed tube.
The top o~ the dispensiny container is removable and contains in its center a fitting which has a depressed center with drain holes that permit li~uid material to flow into the container In the middle of this fitting is a hollow ~erforating or ~uncturing device which is hollow and contains openin~s to ~ermit liquid to flow into the container througn the drain hôles in the fitting.
The bulk shi~ping container or bottle of hi~h pur-ity li~uid, such as photoresist, used in the system of the invention utilizes a cap with a round hole in the ~-center which exposes a perforatable flexiDle plastic cap liner which seals the container. A second lar~er set o~
threads match threads ~n the interior of the center fit-ting and enable the bottle of photoresist to be rigidly held in place once it is seated. In feeding the dis-penser from the bulk container, an outer protective ca~
is removed from the bulk container or bottle~ ex~osin~
the bottle cap with the perforatable plastic cap liner. The shipping bottle is inverted and the ~unc-turing device is pushed into the cen~er hole of the capand into the bottle. The ~lexi~le cap liner is ~usned aside or perforated and the liquid flows into the dis-penser reservoir. The float valve which controls flow from the reservoir then rises, permittin~ flow of the liquid into the feed tube of the pumpO
~ nce the bottle is empty, it can be removed ana replaced by a full bottle~ The ca~acity of the dis-penser reservoir permits continuous operation of the dispensing equipment, even if an empty bottle is not immediately replaced by a full bottle of the high purity liquid.
The dispenser may employ a sight ~lass or other gauge to si~nal the level of the hi~h purity liguid in the dispenser reservoir.
~RI~ D~CRIPTI~N OF T~E D~AWING~
FIG~ 1 is a diayramatic view of an inverted bulk container positioned over the high ~urity liquid dis-penser equipped with a perforating device to puncture the container sealed openiny.
kIG~ ~ is a fra~mentary view o~ the pouring ena of a bulk container with closure cap and overcap shown in cross-section.
~IG. 3 is a fraymentary view in cross-section of the bulk container pourin~ end, ~rom which the over cap has been removea, positioned above the ~eed entry to the dispenser with the perforating device positioned in the feed entry to the dispenser reservoir.
FIG. 4 is a fraymentary view similar to ~IG. 3 7~
showing the ~ouring end of the bulk container with con-tainer seal punctured and in locked position on the dis-penser.
FIG. 5 is a cross-section of a float valve that may be employed with the invention to function in cuttiny off flow when the level in the reservoir is near de~le-tion and before air can enter the piping system.
FIG. 6 illustrates an alternative embodiment of the invention wherein the reservoir comprises a slanted bOttom.
FI~. 7 illustrates another embodiment wherein the reservoir comprises a cone~shape~ bottom.
PRE}~'~RR~:D EMBODIMENT C)~;' l`H~ VENTI()N
In accordance with the invention a system ~or dis-pensing high purity liquids is provided. As shown byreference to FIG. 1, the system comprises a dispenser unit shown generally at 2U wnich is adapted to receive a bulk container shown yenerally at 10 in which tne high ~urity liquid is ship~ed. The system is devise~ to ; ~0 receive the mouth or nozzle 16 of the shippin~ container or bottle 10 while it is still in a sealed condition into a receiving adaptor 22 of the dis~enser 20. After the bottle 10 is insexted and is in proper position with the bottle nozzle 16 into the adapter 2~, the seal 34 on the bottle opening is perforated when the bottle opening is positioned on the puncture mecnanism 48 and inter-locked by rotatiny it as will be described hereafter in greater detail. This interlockin~ precludes contamina-tion duriny the transfer from the bulk container to the dispenser 20.
The dispenser 20 comprises a container which may generally be cylindrical in cross-section having a reservoir 21 of suitable capacity, for exam~le 3 liters or more. The reservoir 21 is ~referably forme~ 50 that it has a domed bottom ~la ~o better utilize the li~ui~
remaininy in the reservoir as the liquid nears deple-tion. The reservoir may also be $ormed to have a slanted bottom as shown at 21b in FIG. 6.
~L2~?57~3~
At the lower part of the dome bottom 21a (~ 1) is a float valve, shown in phantom at 26, which leads to a feed tube 28 attached ou~side the dispenser container 20. When the liquid to be dispensed is an electronic chemical, such as a liquid photoresist composition, which must necessarily be maintained in hign purity, the feed tube 28 may leaa~to a pump (not shown) which delivers photoresist to the coatiny or other equipment~ The float valve 26 shown in greater detail in FIG. 5 closes when the liquid level becomes low, thus shutting off flow and eliminatiny the possi~ility of air enteriny the feed tube ~.
The top of the dispensiny container ~0 is removable and contains in its center a fitting 22 which has a depressed center with drain holes 42 that permit li~ui~
material to flow into the container reservoir 21. In the middle of this fittiny 22 is a round pointed ~unc-turin~ device 40 which will be described by reference to FIG~. 4 and S. The puncturing device 40 i9 also per-forated at 41 to permit liquid flow into the containerthrou~h the interisr of the puncturiny device 40.
The bottles of high purity liquid used with thîs invention utilize a cap 17 with a roun~ hole in the cen ter 17a which exposes a per~oratable plastic cap liner held on a first set of threads 18. A second lar~er set of threads 14 match threads on the interior of the cen-ter fittiny and enable t~e bottle of photoresist to be rigidly held in place once it is seated on the dis-penser.
In use, an outer protective over cap 11 is removea from the shippiny container or bottle 10, exposiny the bottle ca~ 17 with the ~lastic cap liner or seal 3U.
The bottle 10 is inverted and the puncturiny device 40 penetrates the seal 30 which comprises an inner seal 34 and an outer seal member 3~, the latter preferably is provided with a central perforation as described in greater detail in U.S. Patent 3,941,270. As the bottle 10 is lowerea on the puncture mechanism penetratiny the ca~ 17 and pushiny aside the seal ~U, i~ is rotate~
locking threads 14 and 24. The li~uid flows into the container reservoir 21 from the openin~ thus proviaed.
When sufficient liquid is present in the reservoir 21 of dispenser 20, the float valve ~6 rises, ~ermittiny flow into the feed tube 2~ to the pump ~not shown).
~ nce the bottle i5 em~ty, it can be removed ana replaced by a full bottle. ~he capacity of the dis-penser reservoir permits continuous operation o~ the equipment even if an empty bottle is not immediately replce~ by a full bottle of photoresist.
The float valve snOwn in FI~. S is typical ana com-prises a body 50 containin~ therein a float 51 formed with precision matiny surfaces to effect a tiyht seal between the surfaces 50a and 51a wnen the float is in the down position. As shown the float 51 is in the elevatea position restiny a~ainst the retainer rod 52 which keeps the float Sl in place. Li~uid enters the annular space 53 from the top at 54 and/or from openin~s 55 in the sides of the body 50. When the li~uid is diminished in the reservoir to a level about mid-way o~
; the vertical height of the float 51, the float sits on the mating body (base) surface 50a and shuts off flow to tubing 2~ (FIG. 1). The ~unction of the float valve, as will be apparent to one skilled in the art, and may be performed by other flow control means such as a level control operating a solenoia valve 63 (shown in FI~. 6).
As disclosed in U.~. Patent 3,941,270~ the bottle or bulk container 10 is appropriately sealed to maintain high purity of the liquid durin~ shipment. As describea herein the flexible liquid impervious sealing member 3 comprises first ana secon~ adjacent flexible discs 32 and 34 respectively. The first aisc 32 may be proviaec with a centrally located circular perforation as shown by reference to U.~. Yatent 3,941,270 and the second disc is imper~orate and covers ~he circular per~oration in the first disc. rhe circular per~oration in the first disc is provided so that the ti~ of the puncture ~?5~
mechanism 40 wi]l engage the perforation and carry the first disc 32 and adjacent second disc 34 away ~rom the top wall of the screw closure cap 17 so that after the discs are removed, they will not interEere with flow of liquid ~ronl the container throuqh the perEorate portlon 17a of the top wall 17b.
~ sin~le flexible sealing disc may be used. How-ever, a pair of discs is preferred. When more than one disc is used, the first disc 32 provides support for the second disc 34 and therefore may be less Elexible than the second disc. The second disc 34 may be gas perme-able so that if the liquid in the container produces gas upon exposure to heat or light, the gas will pass through. The sealing disc combination 30 may include additional elementsO For example, when the second disc is a thin qas permeable disc it may be disposed between third and fourth discs which are provided for structural support of the second disc with the third and fourth discs provided with centrally located slits, the third disc being in contact with the first end of the cylin-drical member and the fourth disc being disposed between the first and second discs. The -thickness, properties and character, e.g. gas permeability, of the seal ele-ments are selected to provide the necessary protection under ambient conditions.
~etails of the sealing elements Eor the shipping container comprising the inner cap 17 and seal combina-tion 30 of elements within the cap 17 are provided in U.S. Patent 3,941,270.
In operation, the sealing member 30 may be removed from the open end of the bulk container 10 by applying pressure upon the sealing member 30. When such pressure is applied by the perforator An, the sealing member dis-engages or is perforated thus permitting communication through the perforate portion through the perforator 40 to the dispenser reservoir 21 from the bottle lOo The pressure may be applied through the perforate 1 "''' ,, , portion by a hollow spike perforator 40 which is pro-vided with openings 41 to permit entry o~ liquid from the hollow portion into the hollow spike 40 for carryin~
the li~uid through the hollow spike to the dispenser reservoir 21. The hollow spike 40 is conveniently attached to a supporting surface 22 by suitable means.
The supportiny fixture 22 is secured on the reservoir cover 23.
As shown in FIG. 6 the solenoid operated level con-trol 60 comprises a sensor 61 which is partially sub-mer~ed and senses the liquid level 62. When the level falls below the predetermined level 62a, the level sensor 60 causes solenoid valve 63 to close until the liquid level is again raised, thus preventing air from enterin9 pipiny 28.
FIG. 7 illustrates a cone shaped reservoir 65 pro-vided with a valve 26a and discharye tube 28a whicn cor-respond in function to valve 26 and line ~ respectively described by reference to FIG. l.
Althou~h the invention has been described and illustrated in connection with preferred embodiments, it will be understood that modifications and variations may be made without departing from the essence and scope of the invention as defined in the appended claims.
Claims (6)
1. A dispensing apparatus for transferring high purity liquids from a bulk container to the dispensing apparatus without exposing said liquid to ambient conditions comprising:
(a) a dispenser which includes a closed reservoir compartment for receiving and dispensing high purity liquid through a dispensing line;
(b) a valve means on said dispensing apparatus to automatically stop the flow of liquid from the dispenser reservoir when the liquid in the reservoir is substantially depleted and before air is pulled into the dispensing line from the air space in the reservoir; and (c) a bulk container adapter on said dispensing apparatus to receive and to hold the opening of a sealed bulk container of high purity liquid when the container is in position on said adapter and including a perfor-ating member to perforate the sealed opening of the bulk container, when the hulk container is interlocked on said adapter and exposure from air contamination into the liquid is precluded, said sealed opening being constructed so as to mate with said adapter.
(a) a dispenser which includes a closed reservoir compartment for receiving and dispensing high purity liquid through a dispensing line;
(b) a valve means on said dispensing apparatus to automatically stop the flow of liquid from the dispenser reservoir when the liquid in the reservoir is substantially depleted and before air is pulled into the dispensing line from the air space in the reservoir; and (c) a bulk container adapter on said dispensing apparatus to receive and to hold the opening of a sealed bulk container of high purity liquid when the container is in position on said adapter and including a perfor-ating member to perforate the sealed opening of the bulk container, when the hulk container is interlocked on said adapter and exposure from air contamination into the liquid is precluded, said sealed opening being constructed so as to mate with said adapter.
2. The apparatus of claim 1 wherein the reservoir compartment is formed with a slanted bottom and the valve means are positioned at a lower end of said slanted bottom.
3. The apparatus of claim 1 wherein the reservoir compartment is formed with a dome-shaped bottom.
4. The apparatus of claim 1 wherein the reservoir compartment is formed with a cone-shaped bottom.
5. The apparatus of claim 1 wherein the reservoir compartment is provided with a liquid depth gauge to indicate the level of liquid content in said compart-ment.
6. The apparatus of claim 1 wherein the perforat-ing member comprises a hollow member with perforations permitting a flow of liquid from the perforated contain-er opening through the hollow member to the reservoir compartment.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US52426383A | 1983-08-18 | 1983-08-18 | |
| US524,263 | 1983-08-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA1205784A true CA1205784A (en) | 1986-06-10 |
Family
ID=24088470
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA000457008A Expired CA1205784A (en) | 1983-08-18 | 1984-06-20 | Contaminant free high purity liquid dispensing system |
Country Status (3)
| Country | Link |
|---|---|
| EP (1) | EP0137908A1 (en) |
| JP (1) | JPS6058393A (en) |
| CA (1) | CA1205784A (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01254597A (en) * | 1988-04-05 | 1989-10-11 | Sanden Corp | Mixing valve for after-mix soda drink distributer |
| EP0440477B2 (en) * | 1990-01-31 | 2001-02-14 | George Ray | Aerosol can filler |
| GB2268168A (en) * | 1992-06-23 | 1994-01-05 | Orbital Engine | Refilling oil reservoirs |
| US9458002B2 (en) * | 2014-04-11 | 2016-10-04 | Suss Microtec Lithography Gmbh | Bottle supply system and bottle cap adapter |
| FR3108325B1 (en) * | 2020-03-20 | 2022-04-01 | Le Mans Process Agro | Device for extracting a fluid content from a container made of at least one material capable of being perforated |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US1346898A (en) * | 1916-02-07 | 1920-07-20 | Kingsbury John Mclean | Fluid-flow-control mechanism |
| DE1081682B (en) * | 1955-05-14 | 1960-05-12 | Siemens Ag | Liquid level regulator with lead |
| US3941270A (en) * | 1974-01-25 | 1976-03-02 | Allied Chemical Corporation | Removable seal for liquid containers |
| US3929157A (en) * | 1974-06-17 | 1975-12-30 | Juan R Serur | Fluid flow regulator |
-
1984
- 1984-06-09 EP EP84106644A patent/EP0137908A1/en not_active Withdrawn
- 1984-06-20 CA CA000457008A patent/CA1205784A/en not_active Expired
- 1984-08-07 JP JP16553984A patent/JPS6058393A/en active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6058393A (en) | 1985-04-04 |
| EP0137908A1 (en) | 1985-04-24 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MKEX | Expiry |