DE3465970D1 - Method and apparatus for feeding drug liquid from hermetic returnable can - Google Patents

Method and apparatus for feeding drug liquid from hermetic returnable can

Info

Publication number
DE3465970D1
DE3465970D1 DE8484402079T DE3465970T DE3465970D1 DE 3465970 D1 DE3465970 D1 DE 3465970D1 DE 8484402079 T DE8484402079 T DE 8484402079T DE 3465970 T DE3465970 T DE 3465970T DE 3465970 D1 DE3465970 D1 DE 3465970D1
Authority
DE
Germany
Prior art keywords
returnable
hermetic
drug liquid
feeding drug
feeding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE8484402079T
Other languages
English (en)
Inventor
Masahiro Yamazaki
Shigeru Iizuka
Shigemitsu Kamiya
Yoshiro Oka
Katsuhiro Fujino
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Zeon Corp
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Nippon Zeon Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP19251483A external-priority patent/JPS6084136A/ja
Priority claimed from JP19251583A external-priority patent/JPS6084137A/ja
Application filed by Fujitsu Ltd, Nippon Zeon Co Ltd filed Critical Fujitsu Ltd
Application granted granted Critical
Publication of DE3465970D1 publication Critical patent/DE3465970D1/de
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B67—OPENING, CLOSING OR CLEANING BOTTLES, JARS OR SIMILAR CONTAINERS; LIQUID HANDLING
    • B67D—DISPENSING, DELIVERING OR TRANSFERRING LIQUIDS, NOT OTHERWISE PROVIDED FOR
    • B67D7/00—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes
    • B67D7/06—Details or accessories
    • B67D7/72—Devices for applying air or other gas pressure for forcing liquid to delivery point
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/6715—Apparatus for applying a liquid, a resin, an ink or the like
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/2931—Diverse fluid containing pressure systems
    • Y10T137/3115—Gas pressure storage over or displacement of liquid
    • Y10T137/3124—Plural units
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/2931—Diverse fluid containing pressure systems
    • Y10T137/3115—Gas pressure storage over or displacement of liquid
    • Y10T137/3127—With gas maintenance or application
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/2931—Diverse fluid containing pressure systems
    • Y10T137/3115—Gas pressure storage over or displacement of liquid
    • Y10T137/3127—With gas maintenance or application
    • Y10T137/314—Unitary mounting for gas pressure inlet and liquid outlet

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
DE8484402079T 1983-10-17 1984-10-16 Method and apparatus for feeding drug liquid from hermetic returnable can Expired DE3465970D1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP19251483A JPS6084136A (ja) 1983-10-17 1983-10-17 密閉型通い缶からの薬液の供給方法並びに供給看視装置
JP19251583A JPS6084137A (ja) 1983-10-17 1983-10-17 密閉型通い缶からの薬液供給看視装置

Publications (1)

Publication Number Publication Date
DE3465970D1 true DE3465970D1 (en) 1987-10-15

Family

ID=26507363

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8484402079T Expired DE3465970D1 (en) 1983-10-17 1984-10-16 Method and apparatus for feeding drug liquid from hermetic returnable can

Country Status (4)

Country Link
US (1) US4676404A (de)
EP (1) EP0138718B1 (de)
KR (1) KR930000225B1 (de)
DE (1) DE3465970D1 (de)

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ES2013223A4 (es) * 1988-07-25 1990-05-01 Nalco Chemical Co Almacenamiento quimico automatico y sistema de alimentacion quimico.
US4979545A (en) * 1988-10-31 1990-12-25 Olin Corporation Bubbler container automatic refill system
US4982036A (en) * 1989-09-21 1991-01-01 Phillips Petroleum Company Transfer of acid catalyst
US5038840A (en) * 1990-07-31 1991-08-13 Olin Corporation Bubbler container automatic refill system
US5417346A (en) * 1990-09-17 1995-05-23 Applied Chemical Solutions Process and apparatus for electronic control of the transfer and delivery of high purity chemicals
JPH0692558A (ja) * 1990-09-28 1994-04-05 Otis Elevator Co 発進時の揺れ及び過剰加速を低減するエレベータの発進制御装置
DE4035588A1 (de) * 1990-11-09 1992-05-14 Jens Pannenborg Verfahren und mobile vorrichtung fuer das automatische befuellen und nachfuellen von temperierkreislaeufen in temperiergeraeten mit speziell konditioniertem wasser und anderen medien fuer den waermetransport
DE4305387A1 (en) * 1992-03-17 1993-09-23 Hinrich Haake System for distributing liq. received at low pressure - has level regulating system and compressed air source with valves for delivering pressurised liq. e.g. for producing pig swill
US5310087A (en) * 1992-08-24 1994-05-10 National Semiconductor Corporation Continuous feed, chemical switching unit
US5270079A (en) * 1992-12-18 1993-12-14 Specialty Coatings Systems, Inc. Methods of meniscus coating
US5339842A (en) * 1992-12-18 1994-08-23 Specialty Coating Systems, Inc. Methods and apparatus for cleaning objects
US6029717A (en) * 1993-04-28 2000-02-29 Advanced Delivery & Chemical Systems, Ltd. High aspect ratio containers for ultrahigh purity chemicals
US6557593B2 (en) 1993-04-28 2003-05-06 Advanced Technology Materials, Inc. Refillable ampule and method re same
US5964254A (en) * 1997-07-11 1999-10-12 Advanced Delivery & Chemical Systems, Ltd. Delivery system and manifold
US6260588B1 (en) 1993-04-28 2001-07-17 Advanced Technology Materials, Inc. Bulk chemical delivery system
US5878793A (en) * 1993-04-28 1999-03-09 Siegele; Stephen H. Refillable ampule and method re same
US5465766A (en) * 1993-04-28 1995-11-14 Advanced Delivery & Chemical Systems, Inc. Chemical refill system for high purity chemicals
US5950693A (en) * 1993-04-28 1999-09-14 Advanced Delivery & Chemical Systems, Ltd. Bulk chemical delivery system
US5607002A (en) * 1993-04-28 1997-03-04 Advanced Delivery & Chemical Systems, Inc. Chemical refill system for high purity chemicals
US5363513A (en) * 1993-09-22 1994-11-15 Karl Blankenburg Pressurized flushing toilet
DE4332353A1 (de) * 1993-09-23 1995-03-30 Thesys Ges Fuer Mikroelektroni Verfahren zur kontinuierlichen drucklosen Befüllung von Versorgungssystemen
US5607000A (en) * 1994-10-31 1997-03-04 Motorola, Inc. Hazardous material liquid dispensing system and method
US5568882A (en) * 1995-02-03 1996-10-29 Abc Techcorp Precise volume fluid dispenser
KR0175048B1 (ko) * 1996-03-19 1999-04-01 김광호 포토레지스트 분사장치
DE69738136T2 (de) * 1996-12-17 2008-06-12 Advanced Technology Materials, Inc., Danbury Reagenzzuführbehälter für cvd
US6199599B1 (en) 1997-07-11 2001-03-13 Advanced Delivery & Chemical Systems Ltd. Chemical delivery system having purge system utilizing multiple purge techniques
US6296026B1 (en) 1997-06-26 2001-10-02 Advanced Technology Materials, Inc. Chemical delivery system having purge system utilizing multiple purge techniques
US6296025B1 (en) 1997-07-11 2001-10-02 Advanced Technology Materials, Inc. Chemical delivery system having purge system utilizing multiple purge techniques
US6435229B1 (en) * 1997-07-11 2002-08-20 Advanced Technology Materials, Inc. Bulk chemical delivery system
US6637475B2 (en) 1997-07-11 2003-10-28 Advanced Technology Materials, Inc. Bulk chemical delivery system
TW387979B (en) * 1997-07-11 2000-04-21 Advanced Delivery & Chemical S Bulk chemical delivery system
US6021921A (en) * 1997-10-27 2000-02-08 Taiwan Semiconductor Manufacturing Co., Ltd. Liquid dispensing system and method for dispensing
DE19914202C2 (de) * 1999-03-29 2001-05-03 Steag Hamatech Ag Verfahren und Vorrichtung zum Einfüllen eines Fluids in einen Drucktank
US6186745B1 (en) 1999-04-28 2001-02-13 Chemand Corporation Gas pressurized liquid pump with intermediate chamber
US6435379B2 (en) * 1999-12-16 2002-08-20 Ebac Limited Bottled liquid dispensers
US6681813B2 (en) 2000-02-11 2004-01-27 Hydac Technology Gmbh Device for removing fluid from a container
JP2002143751A (ja) * 2000-10-17 2002-05-21 L'air Liquide Sa Pour L'etude & L'exploitation Des Procede S Georges Claude 処理液分配装置及び方法
DE10200786B4 (de) * 2002-01-11 2004-11-11 Dockweiler Ag Sicherheitsbehälter
US7077388B2 (en) * 2002-07-19 2006-07-18 Asm America, Inc. Bubbler for substrate processing
JP4387091B2 (ja) * 2002-11-05 2009-12-16 株式会社半導体エネルギー研究所 薄膜トランジスタの作製方法
DE502004012396D1 (de) * 2004-02-20 2011-05-26 Cs Clean Systems Ag Vorrichtung und Verfahren zum Nachfüllen eines Blasenverdampfers
US20060107898A1 (en) * 2004-11-19 2006-05-25 Blomberg Tom E Method and apparatus for measuring consumption of reactants
US20060133955A1 (en) * 2004-12-17 2006-06-22 Peters David W Apparatus and method for delivering vapor phase reagent to a deposition chamber
KR101312237B1 (ko) 2005-04-25 2013-09-26 도쿄엘렉트론가부시키가이샤 비어 있음 검출 능력을 갖는 라이너 기반의 액체 저장 및분배 시스템
SG162759A1 (en) 2005-06-06 2010-07-29 Advanced Tech Materials Fluid storage and dispensing systems and processes
US7467890B2 (en) * 2005-11-04 2008-12-23 Custom Ultrasonics, Inc. Portable chemical transfer/neutralizing containment system
US20070102044A1 (en) * 2005-11-04 2007-05-10 Custom Ultrasonics, Inc. Disinfectant transfer system
US8016000B2 (en) * 2006-04-19 2011-09-13 W. R. Grace & Co.-Conn. Processes and systems for transferring particulate substances from containers
JP4697882B2 (ja) * 2006-05-19 2011-06-08 東京エレクトロン株式会社 処理液供給装置及び処理液供給方法並びに処理液供給用制御プログラム
US8518482B2 (en) * 2007-01-29 2013-08-27 Praxair Technology, Inc. Bubbler apparatus and method for delivering vapor phase reagent to a deposition chamber
JP5231028B2 (ja) * 2008-01-21 2013-07-10 東京エレクトロン株式会社 塗布液供給装置
US20090214777A1 (en) * 2008-02-22 2009-08-27 Demetrius Sarigiannis Multiple ampoule delivery systems
CN102177374B (zh) * 2008-08-18 2013-06-19 西格玛-奥吉奇公司 阀组件
US8002247B2 (en) * 2008-08-22 2011-08-23 Air Products And Chemicals, Inc. Cross purge valve and container assembly
US8151814B2 (en) * 2009-01-13 2012-04-10 Asm Japan K.K. Method for controlling flow and concentration of liquid precursor
US20130068327A1 (en) * 2010-06-02 2013-03-21 Nissan Motor Co., Ltd. Electrolyte supplying apparatus
EP2715781B1 (de) 2011-05-28 2020-07-01 Entegris Inc. Nachfüllbare ampulle mit entlüftungsfähigkeit
GB2561370A (en) * 2017-04-11 2018-10-17 Brealey Julian A Liquid Return Apparatus
CH713909A1 (de) * 2017-06-21 2018-12-28 Soudronic Ag Vorrichtung zur unterbruchlosen Beschichtung von Dosenzargen und Betriebsverfahren.
CN210449065U (zh) * 2019-08-09 2020-05-05 深圳市帝拓电子有限公司 一种气压推送式精油定量滴注装置

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Also Published As

Publication number Publication date
KR850003066A (ko) 1985-05-28
KR930000225B1 (ko) 1993-01-14
EP0138718A2 (de) 1985-04-24
EP0138718B1 (de) 1987-09-09
EP0138718A3 (en) 1985-06-05
US4676404A (en) 1987-06-30

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee