KR20250019627A - 기판수납용기 및 뚜껑측 기판지지부 - Google Patents

기판수납용기 및 뚜껑측 기판지지부 Download PDF

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Publication number
KR20250019627A
KR20250019627A KR1020247037674A KR20247037674A KR20250019627A KR 20250019627 A KR20250019627 A KR 20250019627A KR 1020247037674 A KR1020247037674 A KR 1020247037674A KR 20247037674 A KR20247037674 A KR 20247037674A KR 20250019627 A KR20250019627 A KR 20250019627A
Authority
KR
South Korea
Prior art keywords
lid
substrates
substrate
support
container body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
KR1020247037674A
Other languages
English (en)
Korean (ko)
Inventor
고지 구보타
고이치 니시자카
Original Assignee
미라이얼 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 미라이얼 가부시키가이샤 filed Critical 미라이얼 가부시키가이샤
Publication of KR20250019627A publication Critical patent/KR20250019627A/ko
Pending legal-status Critical Current

Links

Classifications

    • H01L21/67383—
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
    • H10P72/19—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers
    • H10P72/1921—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers characterised by substrate supports
    • H01L21/67379—
    • H01L21/67386—
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
    • H10P72/14—Vertical carrier comprising wall type elements whereby the substrates are horizontally supported, e.g. comprising sidewalls
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
    • H10P72/19—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers
    • H10P72/1918—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers characterised by coupling elements, kinematic members, handles or elements to be externally gripped
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
    • H10P72/19—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers
    • H10P72/1922—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers characterised by the construction of the closed carrier
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
    • H10P72/76—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches
    • H10P72/7604—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches the wafers being placed on a susceptor, stage or support
    • H10P72/7614—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a plurality of individual support members, e.g. support posts or protrusions
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
    • H10P72/76—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches
    • H10P72/7604—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches the wafers being placed on a susceptor, stage or support
    • H10P72/7624—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches the wafers being placed on a susceptor, stage or support characterised by the mechanical construction of the susceptor, stage or support

Landscapes

  • Packaging Frangible Articles (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
KR1020247037674A 2022-05-31 2022-05-31 기판수납용기 및 뚜껑측 기판지지부 Pending KR20250019627A (ko)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2022/022223 WO2023233554A1 (ja) 2022-05-31 2022-05-31 基板収納容器及び蓋体側基板支持部

Publications (1)

Publication Number Publication Date
KR20250019627A true KR20250019627A (ko) 2025-02-10

Family

ID=89025941

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020247037674A Pending KR20250019627A (ko) 2022-05-31 2022-05-31 기판수납용기 및 뚜껑측 기판지지부

Country Status (6)

Country Link
US (1) US20260026299A1 (https=)
JP (1) JPWO2023233554A1 (https=)
KR (1) KR20250019627A (https=)
CN (1) CN119343766A (https=)
TW (1) TW202348529A (https=)
WO (1) WO2023233554A1 (https=)

Family Cites Families (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH069850Y2 (ja) * 1987-06-15 1994-03-16 日本板硝子株式会社 車両用窓ガラス
JPH062272Y2 (ja) * 1988-02-25 1994-01-19 信越ポリマー株式会社 ウェーハ容器の上部緩衝板
JP3778958B2 (ja) * 1994-05-12 2006-05-24 ミライアル株式会社 薄板用支持容器
JP3145252B2 (ja) * 1994-07-29 2001-03-12 淀川化成株式会社 基板支承用側板およびそれを用いたカセット
JP3180693B2 (ja) * 1996-11-21 2001-06-25 三菱マテリアル株式会社 ウェーハ収納容器のウェーハ押え部材
JPH11121601A (ja) * 1997-10-20 1999-04-30 Dainippon Ink & Chem Inc ウエハ収納容器
JP3938293B2 (ja) * 2001-05-30 2007-06-27 信越ポリマー株式会社 精密基板収納容器及びその押さえ部材
MY134341A (en) * 2001-11-14 2007-12-31 Entegris Inc Wafer carrier with wafer retaining system
KR100615761B1 (ko) * 2002-09-11 2006-08-28 신에츠 폴리머 가부시키가이샤 기판 수납 용기
JP4667769B2 (ja) * 2004-06-11 2011-04-13 信越ポリマー株式会社 基板収納容器
US7523830B2 (en) * 2004-11-23 2009-04-28 Entegris, Inc. Wafer container with secondary wafer restraint system
JP2006269771A (ja) * 2005-03-24 2006-10-05 Miraial Kk 気密容器
JP4668053B2 (ja) * 2005-12-07 2011-04-13 信越ポリマー株式会社 リテーナ及び基板収納容器
US8528738B2 (en) * 2006-06-13 2013-09-10 Entegris, Inc. Reusable resilient cushion for wafer container
JP5270668B2 (ja) * 2008-04-25 2013-08-21 信越ポリマー株式会社 リテーナ、及びリテーナを備えた基板収納容器
TWI384577B (zh) * 2008-07-31 2013-02-01 家登精密工業股份有限公司 門上凹陷區域兩旁配置有晶圓限制件模組之前開式晶圓盒
TWD176128S (zh) * 2010-03-11 2016-06-01 安堤格里斯公司 用於晶圓載運器之襯墊
JP6114193B2 (ja) * 2010-10-20 2017-04-12 インテグリス・インコーポレーテッド ドア・ガイドおよびシールを備えたウェーハ容器
KR20150066540A (ko) * 2012-10-12 2015-06-16 미라이얼 가부시키가이샤 기판 수납 용기
KR102062672B1 (ko) * 2012-11-20 2020-01-06 미라이얼 가부시키가이샤 기판 수납 용기
KR20140092548A (ko) * 2013-01-16 2014-07-24 삼성전자주식회사 웨이퍼 보관 장치
US9887116B2 (en) * 2014-03-26 2018-02-06 Miraial Co., Ltd. Substrate storing container
JP6391333B2 (ja) * 2014-07-10 2018-09-19 ミライアル株式会社 基板収納容器及びリテーナ
SG11201707411QA (en) * 2015-04-10 2017-10-30 Shinetsu Polymer Co Substrate storage container
KR102363033B1 (ko) * 2015-07-03 2022-02-15 미라이얼 가부시키가이샤 기판 수납 용기
WO2018185894A1 (ja) * 2017-04-05 2018-10-11 ミライアル株式会社 基板収納容器
JP7445741B2 (ja) * 2019-07-19 2024-03-07 インテグリス・インコーポレーテッド ウェハクッション、ウェハキャリアおよびウェハを支持する方法
JP7414982B2 (ja) * 2020-05-19 2024-01-16 ミライアル株式会社 基板収納容器
TWI855914B (zh) * 2023-05-04 2024-09-11 家登精密工業股份有限公司 基板容器保護裝置

Also Published As

Publication number Publication date
US20260026299A1 (en) 2026-01-22
JPWO2023233554A1 (https=) 2023-12-07
TW202348529A (zh) 2023-12-16
CN119343766A (zh) 2025-01-21
WO2023233554A1 (ja) 2023-12-07

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St.27 status event code: A-0-1-A10-A15-nap-PA0105

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