KR20240144285A - 기판의 화학적 및/또는 전해 표면 처리에서 기판을 고정하는 기판 홀더 - Google Patents

기판의 화학적 및/또는 전해 표면 처리에서 기판을 고정하는 기판 홀더 Download PDF

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Publication number
KR20240144285A
KR20240144285A KR1020247028971A KR20247028971A KR20240144285A KR 20240144285 A KR20240144285 A KR 20240144285A KR 1020247028971 A KR1020247028971 A KR 1020247028971A KR 20247028971 A KR20247028971 A KR 20247028971A KR 20240144285 A KR20240144285 A KR 20240144285A
Authority
KR
South Korea
Prior art keywords
substrate
substrate holder
holder
carrier
unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
KR1020247028971A
Other languages
English (en)
Korean (ko)
Inventor
안드레아스 글레이스너
게오르크 호퍼
Original Assignee
젬시스코 게엠베하
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 젬시스코 게엠베하 filed Critical 젬시스코 게엠베하
Publication of KR20240144285A publication Critical patent/KR20240144285A/ko
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
    • C25D17/06—Suspending or supporting devices for articles to be coated
    • C25D17/08—Supporting racks, i.e. not for suspending
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
    • C25D17/001—Apparatus specially adapted for electrolytic coating of wafers, e.g. semiconductors or solar cells
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
    • C25D17/005—Contacting devices
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D21/00—Processes for servicing or operating cells for electrolytic coating
    • C25D21/12—Process control or regulation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Automation & Control Theory (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Sustainable Development (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
KR1020247028971A 2022-01-31 2022-12-23 기판의 화학적 및/또는 전해 표면 처리에서 기판을 고정하는 기판 홀더 Pending KR20240144285A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP22154314.3 2022-01-31
EP22154314.3A EP4219800A1 (en) 2022-01-31 2022-01-31 Substrate holder for holding a substrate in a chemical and/or electrolytic surface treatment of the substrate
PCT/EP2022/087732 WO2023143842A1 (en) 2022-01-31 2022-12-23 Substrate holder for holding a substrate in a chemical and/or electrolytic surface treatment of the substrate

Publications (1)

Publication Number Publication Date
KR20240144285A true KR20240144285A (ko) 2024-10-02

Family

ID=80218702

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020247028971A Pending KR20240144285A (ko) 2022-01-31 2022-12-23 기판의 화학적 및/또는 전해 표면 처리에서 기판을 고정하는 기판 홀더

Country Status (7)

Country Link
US (1) US20250137161A1 (https=)
EP (1) EP4219800A1 (https=)
JP (1) JP2025503298A (https=)
KR (1) KR20240144285A (https=)
CN (1) CN118660992A (https=)
TW (1) TW202334515A (https=)
WO (1) WO2023143842A1 (https=)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20060289302A1 (en) * 2005-06-28 2006-12-28 Semitool, Inc. Electroprocessing workpiece contact assemblies, and apparatus with contact assemblies for electroprocessing workpieces
US10066311B2 (en) * 2011-08-15 2018-09-04 Lam Research Corporation Multi-contact lipseals and associated electroplating methods
JP5782398B2 (ja) * 2012-03-27 2015-09-24 株式会社荏原製作所 めっき方法及びめっき装置
JP6747859B2 (ja) * 2016-05-09 2020-08-26 株式会社荏原製作所 基板ホルダ及びこれを用いためっき装置

Also Published As

Publication number Publication date
US20250137161A1 (en) 2025-05-01
TW202334515A (zh) 2023-09-01
EP4219800A1 (en) 2023-08-02
CN118660992A (zh) 2024-09-17
WO2023143842A1 (en) 2023-08-03
JP2025503298A (ja) 2025-01-30

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