KR20210007947A - 광학 디바이스 - Google Patents

광학 디바이스 Download PDF

Info

Publication number
KR20210007947A
KR20210007947A KR1020207024826A KR20207024826A KR20210007947A KR 20210007947 A KR20210007947 A KR 20210007947A KR 1020207024826 A KR1020207024826 A KR 1020207024826A KR 20207024826 A KR20207024826 A KR 20207024826A KR 20210007947 A KR20210007947 A KR 20210007947A
Authority
KR
South Korea
Prior art keywords
movable
axis
softening
movable part
movable portion
Prior art date
Application number
KR1020207024826A
Other languages
English (en)
Korean (ko)
Inventor
다이키 스즈키
다쿠마 오사키
Original Assignee
하마마츠 포토닉스 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 하마마츠 포토닉스 가부시키가이샤 filed Critical 하마마츠 포토닉스 가부시키가이샤
Publication of KR20210007947A publication Critical patent/KR20210007947A/ko

Links

Images

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/085—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by electromagnetic means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0018—Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0035—Constitution or structural means for controlling the movement of the flexible or deformable elements
    • B81B3/004—Angular deflection
    • B81B3/0045—Improve properties related to angular swinging, e.g. control resonance frequency
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/101—Scanning systems with both horizontal and vertical deflecting means, e.g. raster or XY scanners
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/03—Microengines and actuators
    • B81B2201/032—Bimorph and unimorph actuators, e.g. piezo and thermo
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B81B2201/042—Micromirrors, not used as optical switches
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/01—Suspended structures, i.e. structures allowing a movement
    • B81B2203/0145—Flexible holders
    • B81B2203/0154—Torsion bars
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/05—Type of movement
    • B81B2203/058—Rotation out of a plane parallel to the substrate
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Electromagnetism (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Combustion & Propulsion (AREA)
  • Power Engineering (AREA)
  • Micromachines (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Mechanical Optical Scanning Systems (AREA)
KR1020207024826A 2018-05-11 2019-05-10 광학 디바이스 KR20210007947A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JPJP-P-2018-092108 2018-05-11
JP2018092108 2018-05-11
PCT/JP2019/018794 WO2019216424A1 (ja) 2018-05-11 2019-05-10 光学デバイス

Publications (1)

Publication Number Publication Date
KR20210007947A true KR20210007947A (ko) 2021-01-20

Family

ID=68467444

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020207024826A KR20210007947A (ko) 2018-05-11 2019-05-10 광학 디바이스

Country Status (6)

Country Link
US (1) US11899199B2 (ja)
EP (1) EP3792678A4 (ja)
JP (1) JP7221180B2 (ja)
KR (1) KR20210007947A (ja)
CN (1) CN112074766B (ja)
WO (1) WO2019216424A1 (ja)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2022115298A (ja) * 2021-01-28 2022-08-09 浜松ホトニクス株式会社 アクチュエータデバイスの製造方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000330067A (ja) 1999-05-20 2000-11-30 Olympus Optical Co Ltd ねじり揺動体

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002023097A (ja) 2000-07-10 2002-01-23 Olympus Optical Co Ltd ねじり揺動体
JP2003029190A (ja) * 2001-07-11 2003-01-29 Canon Inc 光偏向器、それを用いた画像表示装置及び画像形成装置、並びに光偏向器の作製方法
US20040184124A1 (en) 2002-11-13 2004-09-23 Olympus Corporation Optical deflection device
JP4663550B2 (ja) 2006-02-27 2011-04-06 株式会社リコー 光走査装置および画像形成装置
JP4626596B2 (ja) 2006-09-26 2011-02-09 パナソニック電工株式会社 可動構造体及びそれを備えた光学素子
KR100958977B1 (ko) 2007-07-25 2010-05-20 주식회사 포스코 자동차의 후륜 현가장치용 튜브형 토션 빔 및 그 제조방법
JP5322844B2 (ja) 2009-08-19 2013-10-23 日本信号株式会社 プレーナ型アクチュエータ
JP5736766B2 (ja) * 2010-12-22 2015-06-17 ミツミ電機株式会社 光走査装置
CN102200667B (zh) * 2011-05-06 2013-08-21 中国科学院上海微系统与信息技术研究所 一种体硅可调谐光学滤波器及制作方法
JP5987510B2 (ja) 2011-10-03 2016-09-07 ミツミ電機株式会社 光走査装置及び光走査制御装置
WO2013111266A1 (ja) * 2012-01-24 2013-08-01 パイオニア株式会社 アクチュエータ
JP5976132B2 (ja) * 2013-02-08 2016-08-23 パイオニア株式会社 アクチュエータ
JP6148055B2 (ja) * 2013-03-29 2017-06-14 日本信号株式会社 プレーナ型アクチュエータ
CN105556383B (zh) * 2013-09-25 2018-07-06 日本电产三协株式会社 带抖动修正功能的光学单元
JP2015161878A (ja) * 2014-02-28 2015-09-07 セイコーエプソン株式会社 アクチュエーター、光スキャナー、画像表示装置およびヘッドマウントディスプレイ
JP6343994B2 (ja) * 2014-03-25 2018-06-20 セイコーエプソン株式会社 光スキャナー、画像表示装置およびヘッドマウントディスプレイ
JP6492914B2 (ja) 2015-04-15 2019-04-03 株式会社デンソー 光走査装置
JP6691784B2 (ja) 2016-01-21 2020-05-13 浜松ホトニクス株式会社 アクチュエータ装置
JP2018060168A (ja) * 2016-09-30 2018-04-12 セイコーエプソン株式会社 光スキャナー、光スキャナーの製造方法、画像表示装置、ヘッドマウントディスプレイ及びヘッドアップディスプレイ

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000330067A (ja) 1999-05-20 2000-11-30 Olympus Optical Co Ltd ねじり揺動体

Also Published As

Publication number Publication date
JP2019215583A (ja) 2019-12-19
EP3792678A4 (en) 2022-02-23
CN112074766A (zh) 2020-12-11
JP7221180B2 (ja) 2023-02-13
US20210033848A1 (en) 2021-02-04
EP3792678A1 (en) 2021-03-17
US11899199B2 (en) 2024-02-13
WO2019216424A1 (ja) 2019-11-14
CN112074766B (zh) 2023-04-18

Similar Documents

Publication Publication Date Title
US20100290142A1 (en) Mems scanning micromirror with reduced dynamic deformation
WO2009044331A9 (en) Mems scanning micromirror
CN111417884B (zh) 致动器装置
US20240190695A1 (en) Actuator device
CN111344623A (zh) 光学器件
JP2024050649A (ja) アクチュエータ装置、及びアクチュエータ装置の製造方法
JP2024055944A (ja) ミラー装置
KR20210007947A (ko) 광학 디바이스
JP2019530019A (ja) マイクロミラー装置およびマイクロミラー装置の操作方法
JP6591135B1 (ja) 光学デバイス
JP2012243974A (ja) アクチュエータ