JP6691784B2 - アクチュエータ装置 - Google Patents
アクチュエータ装置 Download PDFInfo
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- JP6691784B2 JP6691784B2 JP2016009891A JP2016009891A JP6691784B2 JP 6691784 B2 JP6691784 B2 JP 6691784B2 JP 2016009891 A JP2016009891 A JP 2016009891A JP 2016009891 A JP2016009891 A JP 2016009891A JP 6691784 B2 JP6691784 B2 JP 6691784B2
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- 239000007769 metal material Substances 0.000 claims description 64
- 230000006866 deterioration Effects 0.000 description 19
- 230000004048 modification Effects 0.000 description 9
- 238000012986 modification Methods 0.000 description 9
- 238000009792 diffusion process Methods 0.000 description 8
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 8
- 229910052721 tungsten Inorganic materials 0.000 description 8
- 239000010937 tungsten Substances 0.000 description 8
- 239000010949 copper Substances 0.000 description 6
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 4
- 229910052802 copper Inorganic materials 0.000 description 4
- 239000010931 gold Substances 0.000 description 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 3
- 230000008878 coupling Effects 0.000 description 3
- 238000010168 coupling process Methods 0.000 description 3
- 238000005859 coupling reaction Methods 0.000 description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 3
- 229910052737 gold Inorganic materials 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 238000013459 approach Methods 0.000 description 2
- 229910003460 diamond Inorganic materials 0.000 description 2
- 239000010432 diamond Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/085—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by electromagnetic means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
- B81B3/0064—Constitution or structural means for improving or controlling the physical properties of a device
- B81B3/0067—Mechanical properties
- B81B3/0075—For improving wear resistance
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
- B81B3/0018—Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators
- B81B3/0021—Transducers for transforming electrical into mechanical energy or vice versa
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
- B81B7/0032—Packages or encapsulation
- B81B7/0045—Packages or encapsulation for reducing stress inside of the package structure
- B81B7/0048—Packages or encapsulation for reducing stress inside of the package structure between the MEMS die and the substrate
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
- G02B26/101—Scanning systems with both horizontal and vertical deflecting means, e.g. raster or XY scanners
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K33/00—Motors with reciprocating, oscillating or vibrating magnet, armature or coil system
- H02K33/18—Motors with reciprocating, oscillating or vibrating magnet, armature or coil system with coil systems moving upon intermittent or reversed energisation thereof by interaction with a fixed field system, e.g. permanent magnets
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/04—Optical MEMS
- B81B2201/042—Micromirrors, not used as optical switches
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2203/00—Basic microelectromechanical structures
- B81B2203/01—Suspended structures, i.e. structures allowing a movement
- B81B2203/0145—Flexible holders
- B81B2203/0154—Torsion bars
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2203/00—Basic microelectromechanical structures
- B81B2203/05—Type of movement
- B81B2203/058—Rotation out of a plane parallel to the substrate
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2207/00—Microstructural systems or auxiliary parts thereof
- B81B2207/07—Interconnects
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Electromagnetism (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Micromachines (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Mechanical Optical Scanning Systems (AREA)
- Reciprocating, Oscillating Or Vibrating Motors (AREA)
Description
Claims (8)
- 支持部と、
可動部と、
前記可動部が所定の軸線周りに揺動可能となるように、前記軸線上において前記可動部を前記支持部に連結する連結部と、
前記連結部の表面上に設けられた第1配線と、
前記支持部上に設けられた第2配線と、を備え、
前記第1配線を構成する第1金属材料は、前記第2配線を構成する第2金属材料よりも剛性が高く、
前記第2配線は、前記第1配線のうち前記支持部上に位置する第1接続部分における前記支持部の反対側の表面に接続されている、アクチュエータ装置。 - 前記第1接続部分は、前記軸線から所定の距離離れている、請求項1記載のアクチュエータ装置。
- 前記距離は、前記連結部の最小幅の1/2よりも大きい、請求項2記載のアクチュエータ装置。
- 前記第1配線の断面積は、前記第2配線の断面積よりも大きい、請求項1〜3のいずれか一項記載のアクチュエータ装置。
- 前記第1配線の幅は、前記第2配線の幅よりも大きい、請求項4記載のアクチュエータ装置。
- 前記可動部に設けられたコイルと、
前記コイルに磁界を作用させる磁界発生部と、
前記可動部上に設けられ、前記コイルと電気的に接続された第3配線と、を更に備え、
前記第1金属材料は、前記第3配線を構成する第3金属材料よりも剛性が高く、
前記第3配線は、前記第1配線のうち前記可動部上に位置する第2接続部分における前記可動部の反対側の表面に接続されている、請求項1〜5のいずれか一項記載のアクチュエータ装置。 - 前記支持部及び前記可動部を支持する枠部を更に備え、
前記支持部は、前記軸線と交差する軸線周りに揺動可能となるように、前記枠部に連結されている、請求項1〜6のいずれか一項記載のアクチュエータ装置。 - 前記可動部に設けられたミラーを更に備える、請求項1〜7のいずれか一項記載のアクチュエータ装置。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016009891A JP6691784B2 (ja) | 2016-01-21 | 2016-01-21 | アクチュエータ装置 |
PCT/JP2016/088437 WO2017126290A1 (ja) | 2016-01-21 | 2016-12-22 | アクチュエータ装置 |
KR1020187013094A KR20180104592A (ko) | 2016-01-21 | 2016-12-22 | 액츄에이터 장치 |
EP16886529.3A EP3407111A4 (en) | 2016-01-21 | 2016-12-22 | actuator |
CN201680079469.6A CN108474941B (zh) | 2016-01-21 | 2016-12-22 | 致动器装置 |
US16/071,558 US10759655B2 (en) | 2016-01-21 | 2016-12-22 | Actuator device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016009891A JP6691784B2 (ja) | 2016-01-21 | 2016-01-21 | アクチュエータ装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2017129783A JP2017129783A (ja) | 2017-07-27 |
JP6691784B2 true JP6691784B2 (ja) | 2020-05-13 |
Family
ID=59361664
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2016009891A Active JP6691784B2 (ja) | 2016-01-21 | 2016-01-21 | アクチュエータ装置 |
Country Status (6)
Country | Link |
---|---|
US (1) | US10759655B2 (ja) |
EP (1) | EP3407111A4 (ja) |
JP (1) | JP6691784B2 (ja) |
KR (1) | KR20180104592A (ja) |
CN (1) | CN108474941B (ja) |
WO (1) | WO2017126290A1 (ja) |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11187872B2 (en) | 2017-07-06 | 2021-11-30 | Hamamatsu Photonics K.K. | Optical device |
JP7112876B2 (ja) | 2017-07-06 | 2022-08-04 | 浜松ホトニクス株式会社 | 光学デバイス |
EP3650911B1 (en) | 2017-07-06 | 2023-08-30 | Hamamatsu Photonics K.K. | Optical device |
US11635613B2 (en) | 2017-07-06 | 2023-04-25 | Hamamatsu Photonics K.K. | Optical device |
JP6924090B2 (ja) * | 2017-07-21 | 2021-08-25 | 浜松ホトニクス株式会社 | アクチュエータ装置 |
JP7015653B2 (ja) * | 2017-08-10 | 2022-02-03 | 浜松ホトニクス株式会社 | 光モジュール、及び、光モジュールの製造方法 |
EP4160295A1 (en) | 2017-11-15 | 2023-04-05 | Hamamatsu Photonics K.K. | Optical device production method |
EP3719558B1 (en) | 2017-12-01 | 2024-03-20 | Hamamatsu Photonics K.K. | Actuator device |
WO2019216424A1 (ja) | 2018-05-11 | 2019-11-14 | 浜松ホトニクス株式会社 | 光学デバイス |
US11970389B2 (en) | 2018-08-10 | 2024-04-30 | Hamamatsu Photonics K.K. | Actuator device and method for manufacturing actuator device |
JP7243174B2 (ja) * | 2018-12-19 | 2023-03-22 | 株式会社リコー | 可動装置、距離測定装置、画像投影装置、及び車両 |
WO2021181618A1 (ja) * | 2020-03-12 | 2021-09-16 | 三菱電機株式会社 | 光走査装置、測距装置および光走査装置の製造方法 |
WO2022180736A1 (ja) * | 2021-02-25 | 2022-09-01 | パイオニア株式会社 | アクチュエーター |
CN116931253A (zh) * | 2022-03-30 | 2023-10-24 | 华为技术有限公司 | 电磁振镜及振镜系统 |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3425814B2 (ja) * | 1994-12-28 | 2003-07-14 | 日本信号株式会社 | 電磁アクチュエータ及びその製造方法 |
JP2001264677A (ja) * | 2000-03-15 | 2001-09-26 | Olympus Optical Co Ltd | 走査ミラー |
JP4385937B2 (ja) * | 2004-12-15 | 2009-12-16 | セイコーエプソン株式会社 | アクチュエータ |
JP2007111847A (ja) * | 2005-10-24 | 2007-05-10 | Olympus Corp | アクチュエータ |
JP5383065B2 (ja) * | 2008-03-05 | 2014-01-08 | 日本信号株式会社 | プレーナ型電磁アクチュエータ及びその製造方法 |
JP2009251002A (ja) * | 2008-04-01 | 2009-10-29 | Seiko Epson Corp | アクチュエータ、画像形成装置及びアクチュエータの製造方法 |
JP5634670B2 (ja) * | 2008-10-20 | 2014-12-03 | 日本信号株式会社 | プレーナ型アクチュエータ |
US8218218B2 (en) | 2009-04-08 | 2012-07-10 | Microvision, Inc. | Fatigue resistant MEMS apparatus and system |
US9036231B2 (en) * | 2010-10-20 | 2015-05-19 | Tiansheng ZHOU | Micro-electro-mechanical systems micromirrors and micromirror arrays |
JP2013035081A (ja) * | 2011-08-04 | 2013-02-21 | Seiko Epson Corp | アクチュエーターの製造方法、アクチュエーター、光スキャナーおよび画像形成装置 |
JP6175305B2 (ja) * | 2013-08-01 | 2017-08-02 | インテル・コーポレーション | ミラー駆動装置 |
WO2014109170A1 (ja) * | 2013-01-11 | 2014-07-17 | 浜松ホトニクス株式会社 | ミラー駆動装置 |
JP2014182225A (ja) * | 2013-03-18 | 2014-09-29 | Seiko Epson Corp | 光スキャナー、アクチュエーター、画像表示装置およびヘッドマウントディスプレイ |
KR101511145B1 (ko) * | 2013-05-27 | 2015-04-10 | 주식회사 센플러스 | 전자력 구동 액추에이터 |
JP6253915B2 (ja) * | 2013-08-01 | 2017-12-27 | 浜松ホトニクス株式会社 | アクチュエータ装置及びミラー駆動装置 |
JP6250323B2 (ja) * | 2013-08-01 | 2017-12-20 | 浜松ホトニクス株式会社 | ミラー駆動装置 |
-
2016
- 2016-01-21 JP JP2016009891A patent/JP6691784B2/ja active Active
- 2016-12-22 US US16/071,558 patent/US10759655B2/en active Active
- 2016-12-22 CN CN201680079469.6A patent/CN108474941B/zh active Active
- 2016-12-22 EP EP16886529.3A patent/EP3407111A4/en active Pending
- 2016-12-22 WO PCT/JP2016/088437 patent/WO2017126290A1/ja active Application Filing
- 2016-12-22 KR KR1020187013094A patent/KR20180104592A/ko unknown
Also Published As
Publication number | Publication date |
---|---|
CN108474941A (zh) | 2018-08-31 |
WO2017126290A1 (ja) | 2017-07-27 |
US10759655B2 (en) | 2020-09-01 |
EP3407111A1 (en) | 2018-11-28 |
KR20180104592A (ko) | 2018-09-21 |
US20190031500A1 (en) | 2019-01-31 |
JP2017129783A (ja) | 2017-07-27 |
EP3407111A4 (en) | 2019-10-30 |
CN108474941B (zh) | 2020-11-20 |
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