KR20180104777A - 임프린트 장치, 임프린트 방법 및 물품의 제조 방법 - Google Patents

임프린트 장치, 임프린트 방법 및 물품의 제조 방법 Download PDF

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Publication number
KR20180104777A
KR20180104777A KR1020187026503A KR20187026503A KR20180104777A KR 20180104777 A KR20180104777 A KR 20180104777A KR 1020187026503 A KR1020187026503 A KR 1020187026503A KR 20187026503 A KR20187026503 A KR 20187026503A KR 20180104777 A KR20180104777 A KR 20180104777A
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KR
South Korea
Prior art keywords
imprint material
substrate
imprint
mold
map
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
KR1020187026503A
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English (en)
Korean (ko)
Inventor
히로미츠 야마구치
야스유키 다무라
요시카즈 미야지마
아키오 사이토
Original Assignee
캐논 가부시끼가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 캐논 가부시끼가이샤 filed Critical 캐논 가부시끼가이샤
Publication of KR20180104777A publication Critical patent/KR20180104777A/ko
Ceased legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
    • B29C59/02—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing
    • B29C59/022—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing characterised by the disposition or the configuration, e.g. dimensions, of the embossments or the shaping tools therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B1/00—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
    • B05B1/30—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means designed to control volume of flow, e.g. with adjustable passages
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B12/00—Arrangements for controlling delivery; Arrangements for controlling the spray area
    • B05B12/02—Arrangements for controlling delivery; Arrangements for controlling the spray area for controlling time, or sequence, of delivery
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
    • B05D3/12—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by mechanical means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J3/00—Typewriters or selective printing or marking mechanisms characterised by the purpose for which they are constructed
    • B41J3/407—Typewriters or selective printing or marking mechanisms characterised by the purpose for which they are constructed for marking on special material
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
    • H01L21/0274—
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P76/00—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography
    • H10P76/20—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography of masks comprising organic materials
    • H10P76/204—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography of masks comprising organic materials of organic photoresist masks
    • H10P76/2041—Photolithographic processes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P76/00—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography
    • H10P76/40—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography of masks comprising inorganic materials
    • H10P76/408—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography of masks comprising inorganic materials characterised by their sizes, orientations, dispositions, behaviours or shapes
    • H10P76/4085—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography of masks comprising inorganic materials characterised by their sizes, orientations, dispositions, behaviours or shapes characterised by the processes involved to create the masks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D2203/00—Other substrates
    • B05D2203/30—Other inorganic substrates, e.g. ceramics, silicon
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29L—INDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RELATING TO PARTICULAR ARTICLES
    • B29L2031/00—Other particular articles
    • B29L2031/34—Electrical apparatus, e.g. sparking plugs or parts thereof

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Shaping Of Tube Ends By Bending Or Straightening (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Casting Or Compression Moulding Of Plastics Or The Like (AREA)
KR1020187026503A 2014-05-02 2015-04-16 임프린트 장치, 임프린트 방법 및 물품의 제조 방법 Ceased KR20180104777A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2014095502A JP6329425B2 (ja) 2014-05-02 2014-05-02 インプリント装置、インプリント方法、および物品の製造方法
JPJP-P-2014-095502 2014-05-02
PCT/JP2015/062315 WO2015166870A1 (en) 2014-05-02 2015-04-16 Imprint apparatus, imprint method, and method of manufacturing article

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
KR1020167032829A Division KR101900585B1 (ko) 2014-05-02 2015-04-16 임프린트 장치, 임프린트 방법 및 물품의 제조 방법

Publications (1)

Publication Number Publication Date
KR20180104777A true KR20180104777A (ko) 2018-09-21

Family

ID=54358600

Family Applications (2)

Application Number Title Priority Date Filing Date
KR1020187026503A Ceased KR20180104777A (ko) 2014-05-02 2015-04-16 임프린트 장치, 임프린트 방법 및 물품의 제조 방법
KR1020167032829A Active KR101900585B1 (ko) 2014-05-02 2015-04-16 임프린트 장치, 임프린트 방법 및 물품의 제조 방법

Family Applications After (1)

Application Number Title Priority Date Filing Date
KR1020167032829A Active KR101900585B1 (ko) 2014-05-02 2015-04-16 임프린트 장치, 임프린트 방법 및 물품의 제조 방법

Country Status (7)

Country Link
US (1) US10406743B2 (https=)
JP (1) JP6329425B2 (https=)
KR (2) KR20180104777A (https=)
CN (1) CN106256014B (https=)
SG (1) SG11201608330YA (https=)
TW (1) TWI564935B (https=)
WO (1) WO2015166870A1 (https=)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20200040678A (ko) * 2018-10-10 2020-04-20 캐논 가부시끼가이샤 분배된 액적을 광학적으로 분석함으로써 표면 품질을 평가하는 시스템 및 방법
KR20200144199A (ko) * 2019-06-17 2020-12-29 삼성디스플레이 주식회사 광학측정장치
KR20220097738A (ko) * 2020-12-31 2022-07-08 (주)유니젯 잉크방울 측정패드와 이를 구비한 잉크젯 프린터 장치 및 잉크방울 측정방법

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6329437B2 (ja) * 2014-06-10 2018-05-23 キヤノン株式会社 インプリント装置、インプリント方法、および物品の製造方法
JP6566843B2 (ja) * 2015-11-12 2019-08-28 キヤノン株式会社 パターン形成方法、インプリントシステムおよび物品製造方法
JP6666039B2 (ja) * 2016-03-07 2020-03-13 キヤノン株式会社 インプリント方法、インプリント装置、プログラム、および物品の製造方法
JP6726987B2 (ja) * 2016-03-17 2020-07-22 キヤノン株式会社 インプリント装置および物品製造方法
SG10201709153VA (en) * 2016-12-12 2018-07-30 Canon Kk Fluid droplet methodology and apparatus for imprint lithography
US10493672B2 (en) * 2017-06-26 2019-12-03 Canon Kabushiki Kaisha Imprint apparatus, method of manufacturing article, information processing apparatus, method of supporting map editing, and storage medium
US10725375B2 (en) 2018-12-04 2020-07-28 Canon Kabushiki Kaisha Using non-linear fluid dispensers for forming thick films
JP7149870B2 (ja) * 2019-02-08 2022-10-07 キヤノン株式会社 インプリント装置および物品製造方法
JP7171468B2 (ja) * 2019-02-20 2022-11-15 キヤノン株式会社 情報処理装置、プログラム、リソグラフィ装置、物品の製造方法、物品の製造システム、及び出力方法
CN110143061B (zh) * 2019-07-02 2020-07-24 敏达环保科技（嘉兴）有限公司 一种铁皮专用压印装置
JP7271352B2 (ja) * 2019-07-17 2023-05-11 キオクシア株式会社 インプリント装置、インプリント方法、および半導体装置の製造方法
KR102776383B1 (ko) * 2020-03-18 2025-03-10 삼성디스플레이 주식회사 표시 장치의 제조장치 및 표시 장치의 제조방법
JP7532234B2 (ja) * 2020-12-10 2024-08-13 キヤノン株式会社 平坦化装置、平坦化方法及び物品の製造方法
JP2023012047A (ja) * 2021-07-13 2023-01-25 東京エレクトロン株式会社 機能液測定装置および機能液測定方法
JP7667047B2 (ja) * 2021-09-22 2025-04-22 キオクシア株式会社 ドロップレシピの作成方法、パターン形成方法、半導体装置の製造方法
EP4250006A1 (en) * 2022-03-23 2023-09-27 Koninklijke Philips N.V. Quality control method for imprint lithography
JP2025140831A (ja) * 2024-03-14 2025-09-29 キオクシア株式会社 インプリント方法および半導体装置の製造方法

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US13011A (en) * 1855-06-05 Daniel mint horn
JP2004337701A (ja) 2003-05-14 2004-12-02 Seiko Epson Corp 液滴吐出方法、及び液滴吐出装置
JP2007326003A (ja) * 2006-06-06 2007-12-20 Sharp Corp 液滴吐出装置およびその制御方法
US8480933B2 (en) * 2008-10-22 2013-07-09 Molecular Imprints, Inc. Fluid dispense device calibration
JP2010240503A (ja) * 2009-04-01 2010-10-28 Seiko Epson Corp 液滴吐出量測定方法および有機エレクトロルミネッセンス装置の製造方法
JP5520612B2 (ja) * 2010-01-04 2014-06-11 東芝機械株式会社 ディスペンサを備えた転写装置、ディスペンサの吐出量検出方法、及びディスペンサの吐出量制御方法
JP2011159764A (ja) * 2010-01-29 2011-08-18 Toshiba Corp パターン形成方法、レジスト塗布分布算出装置及びレジスト塗布分布算出プログラム
JP5744422B2 (ja) 2010-06-17 2015-07-08 キヤノン株式会社 インプリント方法及びインプリント装置、サンプルショット抽出方法、並びにそれを用いた物品の製造方法
JP5489887B2 (ja) * 2010-06-30 2014-05-14 富士フイルム株式会社 液体塗布装置及び液体塗布方法並びにナノインプリントシステム
JP5337114B2 (ja) * 2010-07-30 2013-11-06 株式会社東芝 パタン形成方法
JP2012114157A (ja) * 2010-11-22 2012-06-14 Toshiba Corp ドロップレシピ作成方法およびデータベース作成方法
JP5727905B2 (ja) * 2011-09-15 2015-06-03 富士フイルム株式会社 インクジェットヘッドの吐出量補正方法、吐出量補正装置、及びナノインプリントシステム
JP6180131B2 (ja) 2012-03-19 2017-08-16 キヤノン株式会社 インプリント装置、それを用いた物品の製造方法
JP2014033069A (ja) * 2012-08-03 2014-02-20 Toshiba Corp パターン形成方法及びディスペンサー
JP5813603B2 (ja) 2012-09-04 2015-11-17 株式会社東芝 インプリント装置およびインプリント方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20200040678A (ko) * 2018-10-10 2020-04-20 캐논 가부시끼가이샤 분배된 액적을 광학적으로 분석함으로써 표면 품질을 평가하는 시스템 및 방법
KR20200144199A (ko) * 2019-06-17 2020-12-29 삼성디스플레이 주식회사 광학측정장치
KR20220097738A (ko) * 2020-12-31 2022-07-08 (주)유니젯 잉크방울 측정패드와 이를 구비한 잉크젯 프린터 장치 및 잉크방울 측정방법

Also Published As

Publication number Publication date
TWI564935B (zh) 2017-01-01
JP2015213130A (ja) 2015-11-26
KR20160146956A (ko) 2016-12-21
US10406743B2 (en) 2019-09-10
JP6329425B2 (ja) 2018-05-23
KR101900585B1 (ko) 2018-09-19
SG11201608330YA (en) 2016-11-29
TW201545205A (zh) 2015-12-01
US20170015045A1 (en) 2017-01-19
CN106256014B (zh) 2019-06-21
WO2015166870A1 (en) 2015-11-05
CN106256014A (zh) 2016-12-21

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