KR20180048275A - Apparatus for dividing substrate - Google Patents

Abstract

The present invention provides a substrate breaking apparatus capable of breaking a substrate with a simple configuration. According to the present invention, the substrate breaking apparatus (1) comprises first and second dividing units (17, 19). The first dividing unit (17) includes: a pair of first backup bars (25) disposed on a first substrate (W1) side and disposed on both sides of a substrate transfer direction of a second scribe line (S2) upon breaking a second substrate (W2); and a first break bar (27) disposed between the first backup bars (25) to be able to relatively move and disposed to face a first scribe line (S1) upon breaking the first substrate (W1). The second dividing unit (19) includes: a pair of second backup bars (29) disposed on a second substrate (W2) side and disposed on both sides of a substrate transfer direction of a first scribe line (S1) upon breaking the first substrate (W1); and a second break bar (31) disposed between the second backup bars (29) to be able to relatively move and disposed to face a first scribe line (S2) upon breaking the second substrate (W2).

Description

[0001] APPARATUS FOR DIVIDING SUBSTRATE [0002]

More particularly, the present invention relates to a substrate dividing apparatus for dividing an adjoining substrate formed by bonding a first substrate on which a first scribing line is formed and a second substrate on which a second scribing line is formed will be.

Conventionally, the division of the substrate has been carried out by forming a scribe line on both sides of the substrate and then applying a predetermined force to the upper and lower surfaces of the substrate along the scribe line to break the substrate (see, for example, Patent Document 1 Reference).

The substrate breaking apparatus disclosed in Patent Document 1 includes a transport unit for transporting a substrate from upstream to downstream, a first brake unit for breaking the lower substrate along a scribe line formed on the lower surface, and a second brake unit for moving the upper substrate along the scribe line formed on the upper surface And has a second brake unit that breaks. The first brake unit and the second brake unit each have a brake bar and a backup bar arranged at positions opposed to each other in the vertical direction.

Japanese Laid-Open Patent Publication No. 2014-200940

However, in the above substrate separation apparatus, the first brake unit and the second brake unit are arranged so as to be arranged in the substrate transfer direction. For this reason, there is a problem that the apparatus becomes large and the configuration becomes complicated.

An object of the present invention is to provide a substrate dividing apparatus capable of breaking a substrate with a simple structure.

Hereinafter, a plurality of aspects will be described as means for solving the problems. These aspects may be arbitrarily combined as needed.

A substrate dividing apparatus according to one aspect of the present invention is an apparatus for dividing an adjoining substrate formed by bonding a first substrate on which a first scribing line is formed and a second substrate on which a second scribing line is formed. The substrate dividing apparatus includes a first dividing unit and a second dividing unit.

The first division unit includes a pair of first accommodation members arranged on the first substrate side and disposed on both sides of the second scribe line in the substrate transfer direction at the time of division of the second substrate, And has a first brake member arranged to correspond to the first scribe line at the time of division of the first substrate.

The second division unit includes a pair of second housing members arranged on the second substrate side and disposed on both sides of the first scribe line in the substrate transfer direction at the time of division of the first substrate, And a second brake member disposed so as to be able to move relative to the second substrate and corresponding to the second scribe line at the time of division of the second substrate.

In this apparatus, in the operation of dividing the second scribe line, a pair of first housing members of the first division unit serves as a backup bar, and a second brake member of the second division unit functions as a backup bar, Lt; / RTI >

In the operation of dividing the first scribe line, a pair of second housing members of the second division unit functions as a backup bar, and the first brake member of the first division unit contacts the first scribe line at the brake bar.

Since each of the first division unit and the second division unit has the break bar and the backup bar, the first scribing line and the second scribing line can be divided only by the first dividing unit and the second dividing unit. As a result, the dimension of the substrate dividing device in the substrate conveying direction is shortened, so that the substrate can be braked with a simple structure.

The first division unit may further include a first moving mechanism and a second moving mechanism. The first moving mechanism moves the pair of first housing members and the first brake member in the approaching and separating directions with respect to the first substrate. The second moving mechanism is configured to move the first brake member relative to the pair of first receiving members such that the tip end of the first brake member is in the operative position protruded from the tip end of the pair of first housing members, 1 non-operating position that is inserted from the tip of the housing member.

The second division unit may further include a third movement mechanism and a fourth movement mechanism. The third moving mechanism may move the pair of second housing members and the second brake member in the approaching and leaving directions with respect to the second substrate. The fourth moving mechanism is configured to move the second brake member relative to the pair of second accommodation members such that the tip end of the second brake member is in the operative position protruded from the tip end of the pair of second accommodation members, The non-operation position may be shifted from the non-operation position.

The first brake member of the first divisional unit abuts against the first scribing line of the first substrate to give a load in a state in which the pair of second housing members of the second divisional unit support the second substrate, One scribe line may be divided.

The second brake member of the second division unit abuts against the second scribing line of the second substrate to give a load in a state where the pair of first housing members of the first division unit support the first substrate, 2 scribe lines may be divided.

In the substrate cutting apparatus according to the present invention, the substrate can be braked with a simple structure.

1 is a schematic perspective view of a substrate dividing apparatus according to an embodiment of the present invention;
2 is a schematic diagram showing a principle structure of a first division unit;
3 is a block diagram showing a control arrangement of a substrate dividing apparatus;
4 is a flowchart of a brake control operation.
5 is a schematic diagram showing the arrangement of a first division unit and a second division unit for explaining the division operation of the first substrate.
6 is a schematic diagram showing the arrangement of a first division unit and a second division unit for explaining the division operation of the first substrate;
7 is a schematic diagram showing the arrangement of a first division unit and a second division unit for explaining the division operation of the second substrate.
8 is a schematic diagram showing the arrangement of a first division unit and a second division unit for explaining the division operation of the second substrate;

1. First Embodiment

(1) Outline of the substrate separation apparatus

The substrate dividing apparatus 1 (an example of the substrate dividing apparatus) will be described with reference to Fig. 1 is a schematic perspective view of a substrate cutting apparatus according to an embodiment of the present invention. 1 is the substrate transport direction (arrow X), and the left side is the upstream side and the right side is the downstream side.

The substrate dividing apparatus 1 is an apparatus for breaking the bonded substrate along a scribe line S formed on both surfaces of an associated substrate W (hereinafter referred to as " substrate W "). The substrate dividing apparatus 1 is a device for dividing the substrate W. The substrate W is formed by bonding a first substrate W1 on which a first scribing line S1 is formed and a second substrate W2 on which a second scribing line S2 is formed.

The substrate dividing apparatus 1 has a first transfer unit 3, a brake unit 5 and a second transfer unit 7 in this order from the upstream side. Further, each of these units can be moved to the upstream side or the downstream side so that the interval between them can be changed.

The substrate W constitutes, for example, a liquid crystal layer between the second substrate W2 and the first substrate W1. In the substrate W, a plurality of seal members (not shown) are disposed between the second substrate W2 and the first substrate W1, and the seal member surrounds the liquid crystal layer. This seal member is arranged as many as the number of bonded substrates after the break.

The substrate W is transported with the second substrate W2 on the upper side and the first substrate W1 on the lower side. The substrate W has a plurality of second scribe lines S2 formed on the upper surface (the surface on the second substrate W2 side) at a predetermined pitch in the substrate transport direction. In the present embodiment, the direction in which the first scribe line S1 and the second scribe line S2 extend extends in the direction (arrow Y) perpendicular to the substrate transport direction, but the direction of the scribe line is not particularly limited . A plurality of first scribe lines S1 are formed on the lower surface (the surface on the first substrate W1 side) of the substrate W. The first scribing line S1 and the second scribing line S2 are formed at positions corresponding to each other.

The first transfer unit 3 is a device for transferring the substrate W toward the downstream side in the substrate transfer direction, and is constituted by, for example, a belt conveyor. Specifically, the first transport unit 3 has a pair of rollers 11a and 11b and a belt 13 wound around the rollers 11a and 11b. The belt 13 rotates the rollers 11a and 11b in the clockwise direction by the first drive motor 71 (Fig. 3) to transport the substrate W to the downstream side in the substrate transfer direction.

The brake unit 5 is provided on the downstream side of the first transfer unit 3 in the substrate transfer direction. The brake unit 5 has a first division unit 17 and a second division unit 19. The first division unit 17 and the second division unit 19 are arranged at positions opposed to each other in the vertical direction. More specifically, the first division unit 17 and the second division unit 19 are disposed at positions opposed to each other via the transfer path of the substrate W. The first division unit 17, And the second division unit 19 is disposed above the transport path.

The first division unit 17 has a pair of first backup bars 25 (an example of a pair of first housing members). The pair of first backup bars 25 are arranged on the first substrate W1 side and arranged so as to be located on both sides of the second scribe line S2 in the substrate transport direction at the time of division of the second substrate W2 . Each first backup bar 25 extends parallel to the transport surface 21 of the first transport unit 3 and in a direction perpendicular to the substrate transport direction. The upper portion of each first backup bar 25 is formed in a triangular column shape extending parallel to the transport surface 21 and perpendicular to the substrate transport direction. In addition, the upper portion of each first backup bar 25 has a tapered shape that tapers toward the front end. The ridge line portion at the front end of each first backup bar 25 is a support portion that contacts the substrate W. [

The first division unit 17 has a first brake bar 27 (an example of the first brake member). The first brake bar 27 is disposed between the pair of first backup bars 25 so as to be movable in the vertical direction relative to each other and corresponds to the first scribe line S1 at the time of division of the first substrate W1 . The first brake bar 27 extends parallel to the conveying surface 21 of the first conveying unit 3 and in a direction perpendicular to the substrate conveying direction. The lower portion of the first brake bar 27 is formed in a triangular prism shape parallel to the carrying surface 21 and extending in a direction orthogonal to the substrate carrying direction and has a tapered shape tapering toward the front end. The ridge line portion at the tip end of each first brake bar 27 is a pressing portion that makes contact with the substrate W during the brake operation.

The first brake bar 27 is provided so as to be movable up and down between the operating position and the non-operating position with respect to the pair of first backup bars 25. [ The first brake bar 27 protrudes from the front end of the pair of first backup bars 25 at the operating position. The first brake bar 27 is located at the tip end of the pair of first backup bars 25 in the non-operating position.

The second division unit 19 has a pair of second backup bars 29 (an example of a pair of second housing members). The pair of second backup bars 29 are disposed on the second substrate W2 side and disposed on both sides of the first scribe line S1 in the substrate transfer direction at the time of division of the first substrate W1 . Each second backup bar 29 extends parallel to the transport surface 21 of the first transport unit 3 and in a direction perpendicular to the substrate transport direction. The upper portion of each second backup bar 29 is formed in a triangular column shape parallel to the transport surface 21 and extending in a direction orthogonal to the substrate transport direction. In addition, the upper portion of each second backup bar 29 has a tapered shape that tapers toward the front end. The ridge line portion at the tip of each second backup bar 29 is a support portion that contacts the substrate W. [

The second division unit 19 has a second brake bar 31 (an example of the second brake member). The second brake bar 31 is disposed between the pair of second backup bars 29 so as to be relatively movable in the vertical direction and corresponds to the second scribe line S2 when the second substrate W2 is divided . The second brake bar 31 extends parallel to the carrying surface 21 of the first transfer unit 3 and in a direction perpendicular to the substrate transfer direction. The upper portion of the second brake bar 31 is formed in a triangular column shape parallel to the carrying surface 21 and extending in a direction orthogonal to the substrate carrying direction and has a tapered shape tapering toward the front end. The ridge line portion at the tip end of the second brake bar 31 is a pressing portion that contacts the substrate W during the brake operation.

The second brake bar 31 is provided so as to be able to move up and down between the operating position and the non-operating position with respect to the pair of second backup bars 29. At the operating position, the second brake bar (31) projects from the tip end of the pair of second backup bars (29). The second brake bar (31) enters the tip end of the pair of second backup bars (29) in the non-operating position.

The second transfer unit 7 transfers the divided substrates placed on the transfer surface 34 toward downstream. The second transport unit 7 has a pair of rollers 35a and 35b, a belt 37 wound around them, and a second drive motor 72 (Fig. 3). Since the second transfer unit 7 has the same configuration as that of the first transfer unit 3 described above, detailed description thereof will be omitted.

(2) Details of the first division unit and the second division unit

2, the first division unit 17 and the second division unit 19 will be further described. Fig. 2 is a schematic diagram showing a principle structure of the first division unit. Fig.

The first division unit (17) has a first moving mechanism (51). The first moving mechanism 51 moves the pair of first backup bars 25 and the first brake bar 27 together in the vertical direction. Thus, the pair of first backup bars 25 can be moved between an out-of-position position where the tip ends away from the substrate W and a contact position where the tip ends abut the substrate W. The first moving mechanism 51 is a known device such as a ball screw mechanism, an air cylinder, or the like.

The first division unit (17) has a second moving mechanism (53). The second moving mechanism (53) moves the first brake bar (27) in the vertical direction between the operating position and the non-operating position with respect to the pair of first backup bars (25). In this embodiment, the second moving mechanism 53 is a ball screw mechanism. The second moving mechanism 53 may be a different device.

The second division unit 19 has the same structure as the first division unit 17. Therefore, the description using the drawings is omitted.

The second division unit 19 has a third movement mechanism 55 (Fig. 3). The third moving mechanism 55 moves the pair of second backup bars 29 and the second brake bars 31 together in the vertical direction. Thereby, the pair of second backup bars 29 can move between an out-of-position position where the tip ends away from the substrate W and a contact position where the tip ends abut the substrate W.

The second division unit 19 has a fourth movement mechanism 57 (Fig. 3). The fourth moving mechanism 57 moves the second brake bar 31 in the vertical direction between the operating position and the non-operating position with respect to the pair of second backup bars 29.

(3) Control configuration of brake unit

The control arrangement of the substrate dividing apparatus 1 will be described with reference to Fig. 3 is a block diagram showing a control configuration of the substrate dividing device.

The substrate dividing apparatus 1 has a controller 81. The controller 81 includes a processor (for example, a CPU), a storage device (for example, ROM, RAM, HDD, SSD or the like), various interfaces (for example, an A / D converter, a D / , Communication interface, etc.). The controller 81 performs various control operations by executing a program stored in a storage unit (corresponding to a part or all of the storage area of the storage device).

The controller 81 may be composed of a single processor, but may be composed of a plurality of independent processors for each control.

The function of each element of the controller 81 may be realized as a program that can be partially or wholly executed by a computer system constituting the controller 81. [ In addition, some of the functions of the elements of the control unit may be configured by a custom IC.

The controller 81 is connected to the first driving motor 71, the second driving motor 72, the first moving mechanism 51, the second moving mechanism 53, the third moving mechanism 55, A mechanism 57 is connected. The controller 81 can drive these devices.

Although not shown, the controller 81 is connected to a sensor for detecting the size, shape and position of the substrate W, a sensor and a switch for detecting the state of each device, and an information input device.

(4) Brake operation

The breaking operation of the substrate W by the substrate dividing apparatus 1 will be described with reference to Figs. 4 to 8. Fig. 4 is a flowchart of the brake control operation. 5 and 6 are schematic diagrams showing the arrangement of the first division unit and the second division unit for explaining the division operation of the first substrate. Figs. 7 and 8 are schematic diagrams showing the arrangement of the first division unit and the second division unit for explaining the division operation of the second substrate. Fig.

The control flow chart described below is an example, and each step can be omitted and replaced as necessary. A plurality of steps may be executed at the same time or a part or all of them may be executed in duplicate.

In addition, each block in the control flow chart is not limited to a single control operation, but can be replaced by a plurality of control operations represented by a plurality of blocks.

First, a substrate W on which scribe lines are formed on both surfaces by a scribe device (not shown) is placed on the transport surface 21 of the first transport unit 3.

In step S1, the first transfer unit 3 transfers the substrate W to the downstream side in the substrate transfer direction. Specifically, the controller 81 drives the first driving motor 71 to move the belt 13 by a predetermined distance (a distance between the scribing lines). Thereby, the first scribing line S1 and the second scribing line S2 of the substrate W are disposed at the divided positions of the brake unit 5.

At this time, the first division unit 17 and the second division unit 19 are vertically away from the substrate W together. In addition, the first brake bar 27 and the second brake bar 31 are in a non-operating position together.

5, the pair of second backup bars 29 is moved to the abutting position where the pair of second backup bars 29 abuts on the substrate W in the second partitioning unit 19, as shown in Fig. Specifically, the controller 81 drives the third moving mechanism 55 to bring the pair of second backup bars 29 into contact with the second substrate W2 of the substrate W. At this time, the tips of the pair of second backup bars 29 abut on both sides of the second scribe line S2 in the substrate transport direction.

In step S3, as shown in Fig. 6, in the first division unit 17, the first brake bar 27 is moved to a position where it abuts the first substrate W1 of the substrate W. More specifically, the controller 81 drives the second moving mechanism 53 to move the first brake bar 27 to the first scribing line S1 of the first substrate W1 of the substrate W . Thereby, the first substrate W1 is broken along the first scribe line S1. Further, during this brake operation, the substrate W is supported from above by the pair of second backup bars 29.

In step S4, in the first division unit 17, the first brake bar 27 moves to the inoperative position. More specifically, the controller 81 drives the second moving mechanism 53 to move the first brake bar 27 to the inoperative position.

In step S5, as shown in Fig. 7, in the second division unit 19, the pair of second backup bars 29 move to the off-axis position away from the substrate W. Specifically, the controller 81 drives the third moving mechanism 55 to move the pair of second backup bars 29.

In step S6, as shown in Fig. 7, in the first partitioning unit 17, the pair of first backup bars 25 are moved to a position where they abut the substrate W. Specifically, the controller 81 drives the first moving mechanism 51 to bring the pair of first backup bars 25 into contact with the first substrate W1 of the substrate W. At this time, the tips of the pair of first backup bars 25 abut both sides of the first scribe line S1 in the substrate transport direction.

In step S7, as shown in Fig. 8, in the second division unit 19, the second brake bar 31 is moved to the abutment position where the second brake bar 31 abuts against the second substrate W2 of the substrate W. More specifically, the controller 81 drives the fourth moving mechanism 57 to move the second brake bar 31 to the second scribe line S2 of the second substrate W2 of the substrate W . Thereby, the second substrate W2 is broken along the second scribe line S2. During the braking operation, the substrate W is supported from the lower side by the pair of first backup bars 25.

In step S8, in the second division unit 19, the second brake bar 31 moves to the inoperative position. Specifically, the controller 81 drives the fourth moving mechanism 57 to move the second brake bar 31 to the non-operating position.

In step S9, in the first division unit 17, the pair of first backup bars 25 move to the off-axis position away from the substrate W. Specifically, the controller 81 drives the first moving mechanism 51 to move the pair of first backup bars 25.

5 and 6, in the operation of dividing the first scribe line S1, the tip of the second brake bar 31 is connected to the pair of second backup bars 29, The tips of the pair of second backup bars 29 are brought into contact with the second substrate W2. The tip end of the first brake bar 27 is projected to the tip end of the pair of first backup bars 25 so that the tip end of the first brake bar 27 contacts the first scribe line (S1) so as to apply a load.

7 and 8, in the operation of dividing the second scribe line S2, the tip end of the first brake bar 27 is positioned at the position where the tip end of the pair of first backup bars 25 enters The tips of the pair of first backup bars 25 abut against the first substrate W1. The tip end of the second brake bar 31 protrudes from the tip end of the pair of second backup bars 29 so that the tip end of the second brake bar 31 contacts the second scribe line 29 of the second substrate W2, (S2) so as to apply a load.

To summarize the above, in the operation of dividing the first scribe line S1 in the substrate dividing apparatus 1, the pair of second backup bars 29 of the second division unit 19 functions as a backup bar , The first brake bar 27 of the first division unit 17 contacts the first scribe line S1 at the brake bar.

In the operation of dividing the second scribe line S2, a pair of the first backup bar 25 of the first division unit 17 functions as a backup bar, and the second brake bar of the second division unit 19 (31) abuts the second scribe line (S2) at the brake bar.

The first dividing unit 17 and the second dividing unit 19 each have the break bar and the backup bar so that only the first dividing unit 17 and the second dividing unit 19 are used to form the first scribing line S1, And the second scribe line S2 can be divided. As a result, the size of the substrate dividing device 1 in the substrate transfer direction is shortened, so that the substrate W can be braked with a simple structure.

2. Other Embodiments

Although the embodiment of the present invention has been described above, the present invention is not limited to the above embodiment, and various modifications are possible without departing from the gist of the invention. In particular, the plurality of embodiments and modifications described in this specification may be arbitrarily combined as needed.

In the above embodiment, the brake lever is moved to the operating position to break the bonded substrate, but the invention is not limited thereto. For example, the backup bar may be raised and lowered to break the substrate, or both the brake bar and the backup bar may be simultaneously raised and lowered.

In the above-described embodiment, the brake bars come into contact with the substrate W by relative movement with respect to the pair of backup bars, but the invention is not limited thereto. For example, the brake bar may come into contact with the substrate W by being moved integrally with the backup bar while protruding from the backup bar.

INDUSTRIAL APPLICABILITY The present invention can be widely applied to a substrate dividing apparatus for dividing an adjoining substrate in which a first substrate on which a first scribing line is formed and a second substrate on which a second scribing line is formed are combined.

1: Substrate separation device
3: First transfer unit
5: Brake unit
7: Second transfer unit
17: First partitioning unit
19: Second partitioning unit
25: 1st backup bar
27: first brake bar
29: Second backup bar
31: second brake bar
51: first moving mechanism
53: second moving mechanism
55: third moving mechanism
57: Fourth movement mechanism
71: first drive motor
72: second drive motor
81: Controller
S1: 1st scribe line
S2: 2nd scribe line
W: fused substrate
W1: first substrate
W2: second substrate

Claims (3)

An apparatus for dividing an integrated substrate formed by bonding a first substrate on which a first scribing line is formed and a second substrate on which a second scribing line is formed,
A pair of first housing members disposed on the first substrate side and disposed on both sides of the second scribe line in the substrate transfer direction at the time of division of the second substrate, A first division unit having a first brake member disposed to be movable relative to the first scribe line and disposed so as to correspond to the first scribe line at the time of division of the first substrate,
A pair of second housing members disposed on the second substrate side and disposed on both sides of the first scribe line in the substrate transfer direction at the time of division of the first substrate, And a second breaking member disposed so as to be movable relative to the second scribe line and disposed to correspond to the second scribe line at the time of division of the second substrate. The method according to claim 1,
Wherein the first division unit includes a first movement mechanism for moving the pair of first housing members and the first brake member together in the approaching and leaving direction with respect to the first board, Between the operating position where the tip of the first brake member is projected from the tip end of the pair of first housing members and the non-operative position from the tip of the pair of first housing members, Further comprising a second moving mechanism for moving the second moving mechanism,
Wherein the second division unit includes a third movement mechanism for moving the pair of second accommodation members and the second brake member together in the approaching and leaving directions with respect to the second substrate, Between the operating position where the tip of the second brake member projects from the tip end of the pair of second housing members and the non-operative position from the tip end of the pair of second housing members, And a fourth moving mechanism for moving the substrate in the first direction. 3. The method according to claim 1 or 2,
The first brake member of the first division unit loads a load onto the first scribe line of the first substrate in a state in which the pair of second accommodation members of the second division unit support the second substrate By dividing the first scribe line,
The second brake member of the second division unit applies a load to the second scribe line of the second substrate in a state in which the pair of first housing members of the first division unit support the first substrate The first scribing line and the second scribing line.

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