KR20160099440A - 기판 분리 및 비도핑 채널을 갖는 집적 회로 구조물 - Google Patents
기판 분리 및 비도핑 채널을 갖는 집적 회로 구조물 Download PDFInfo
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- KR20160099440A KR20160099440A KR1020150056380A KR20150056380A KR20160099440A KR 20160099440 A KR20160099440 A KR 20160099440A KR 1020150056380 A KR1020150056380 A KR 1020150056380A KR 20150056380 A KR20150056380 A KR 20150056380A KR 20160099440 A KR20160099440 A KR 20160099440A
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- substrate
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- integrated circuit
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/10—Bump connectors ; Manufacturing methods related thereto
- H01L24/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L24/14—Structure, shape, material or disposition of the bump connectors prior to the connecting process of a plurality of bump connectors
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
- H01L25/03—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes
- H01L25/04—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
- H01L25/065—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L27/00
- H01L25/0655—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L27/00 the devices being arranged next to each other
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
- H01L23/49838—Geometry or layout
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
- H01L23/538—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames the interconnection structure between a plurality of semiconductor chips being formed on, or in, insulating substrates
- H01L23/5386—Geometry or layout of the interconnection structure
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
- H01L25/03—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes
- H01L25/04—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
- H01L25/065—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L27/00
- H01L25/0652—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L27/00 the devices being arranged next and on each other, i.e. mixed assemblies
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L2224/13—Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
- H01L2224/13001—Core members of the bump connector
- H01L2224/1301—Shape
- H01L2224/13012—Shape in top view
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L2224/13—Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
- H01L2224/13001—Core members of the bump connector
- H01L2224/1301—Shape
- H01L2224/13012—Shape in top view
- H01L2224/13013—Shape in top view being rectangular or square
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L2224/13—Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
- H01L2224/13001—Core members of the bump connector
- H01L2224/1301—Shape
- H01L2224/13012—Shape in top view
- H01L2224/13014—Shape in top view being circular or elliptic
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L2224/14—Structure, shape, material or disposition of the bump connectors prior to the connecting process of a plurality of bump connectors
- H01L2224/141—Disposition
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
- H01L2224/161—Disposition
- H01L2224/16151—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/16221—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/16225—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/81—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector
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- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Geometry (AREA)
- Wire Bonding (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201514621266A | 2015-02-12 | 2015-02-12 | |
US14/621,266 | 2015-02-12 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020170146587A Division KR101960613B1 (ko) | 2015-02-12 | 2017-11-06 | 기판 분리 및 비도핑 채널을 갖는 집적 회로 구조물 |
Publications (1)
Publication Number | Publication Date |
---|---|
KR20160099440A true KR20160099440A (ko) | 2016-08-22 |
Family
ID=56854925
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020150056380A KR20160099440A (ko) | 2015-02-12 | 2015-04-22 | 기판 분리 및 비도핑 채널을 갖는 집적 회로 구조물 |
KR1020170146587A KR101960613B1 (ko) | 2015-02-12 | 2017-11-06 | 기판 분리 및 비도핑 채널을 갖는 집적 회로 구조물 |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
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KR1020170146587A KR101960613B1 (ko) | 2015-02-12 | 2017-11-06 | 기판 분리 및 비도핑 채널을 갖는 집적 회로 구조물 |
Country Status (3)
Country | Link |
---|---|
KR (2) | KR20160099440A (zh) |
CN (1) | CN105895603B (zh) |
TW (1) | TWI574365B (zh) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
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JP6858642B2 (ja) * | 2017-05-25 | 2021-04-14 | 三菱電機株式会社 | パワーモジュール |
US10165667B1 (en) * | 2018-03-14 | 2018-12-25 | Microsoft Technologies Licensing, LLC | Computing system with superconducting and non-superconducting components located on a common substrate |
DE102019117917B4 (de) | 2018-09-27 | 2023-07-06 | Taiwan Semiconductor Manufacturing Co., Ltd. | Bondingstrukturen in halbleiter-packages und verfahren zu ihrer herstellung |
US11393771B2 (en) | 2018-09-27 | 2022-07-19 | Taiwan Semiconductor Manufacturing Company, Ltd. | Bonding structures in semiconductor packaged device and method of forming same |
US10963609B2 (en) * | 2019-08-08 | 2021-03-30 | Taiwan Semiconductor Manufacturing Co., Ltd. | Method for analyzing electromigration (EM) in integrated circuit |
US11784160B2 (en) | 2020-09-23 | 2023-10-10 | International Business Machines Corporation | Asymmetric die bonding |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
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JP3569386B2 (ja) * | 1996-05-27 | 2004-09-22 | 株式会社ルネサステクノロジ | 半導体集積回路装置の製造方法およびそれにより得られるモジュール基板ならびに電子機器 |
KR100541649B1 (ko) * | 2003-09-03 | 2006-01-11 | 삼성전자주식회사 | 테이프 배선 기판과 그를 이용한 반도체 칩 패키지 |
TWI267181B (en) * | 2005-03-18 | 2006-11-21 | Silicon Integrated Sys Corp | Structure and assembly method of IC packaging |
US20120098120A1 (en) * | 2010-10-21 | 2012-04-26 | Taiwan Semiconductor Manufacturing Company, Ltd. | Centripetal layout for low stress chip package |
US8552518B2 (en) * | 2011-06-09 | 2013-10-08 | Optiz, Inc. | 3D integrated microelectronic assembly with stress reducing interconnects |
US8916969B2 (en) * | 2011-07-29 | 2014-12-23 | Taiwan Semiconductor Manufacturing Company, Ltd. | Semiconductor devices, packaging methods and structures |
US8598691B2 (en) * | 2011-09-09 | 2013-12-03 | Taiwan Semiconductor Manufacturing Company, Ltd. | Semiconductor devices and methods of manufacturing and packaging thereof |
JP6099116B2 (ja) * | 2011-12-12 | 2017-03-22 | 三星電子株式会社Samsung Electronics Co.,Ltd. | バンプ付きicチップの回路基板上への実装装置及び実装方法 |
US9768137B2 (en) * | 2012-04-30 | 2017-09-19 | Taiwan Semiconductor Manufacturing Company, Ltd. | Stud bump structure for semiconductor package assemblies |
US20140001471A1 (en) * | 2012-06-29 | 2014-01-02 | Universal Global Scientific Industrial Co., Ltd. | Conformal shielding module |
US9559071B2 (en) * | 2013-06-26 | 2017-01-31 | Taiwan Semiconductor Manufacturing Company, Ltd. | Mechanisms for forming hybrid bonding structures with elongated bumps |
-
2015
- 2015-04-22 KR KR1020150056380A patent/KR20160099440A/ko active Application Filing
- 2015-10-16 CN CN201510673795.7A patent/CN105895603B/zh active Active
- 2015-11-10 TW TW104136962A patent/TWI574365B/zh active
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2017
- 2017-11-06 KR KR1020170146587A patent/KR101960613B1/ko active IP Right Grant
Also Published As
Publication number | Publication date |
---|---|
KR20170128182A (ko) | 2017-11-22 |
TWI574365B (zh) | 2017-03-11 |
KR101960613B1 (ko) | 2019-03-20 |
TW201630142A (zh) | 2016-08-16 |
CN105895603A (zh) | 2016-08-24 |
CN105895603B (zh) | 2018-09-28 |
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