KR20160002911A - 유리 기판의 세정방법 - Google Patents

유리 기판의 세정방법 Download PDF

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Publication number
KR20160002911A
KR20160002911A KR1020157032495A KR20157032495A KR20160002911A KR 20160002911 A KR20160002911 A KR 20160002911A KR 1020157032495 A KR1020157032495 A KR 1020157032495A KR 20157032495 A KR20157032495 A KR 20157032495A KR 20160002911 A KR20160002911 A KR 20160002911A
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KR
South Korea
Prior art keywords
glass substrate
solution
liquid effluent
exposing
acidic solution
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
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KR1020157032495A
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English (en)
Korean (ko)
Inventor
다윈 젠 에닉스
요시히로 나카무라
시바 벤카타칼람
원더 제니나 왈크잭
리밍 왕
Original Assignee
코닝 인코포레이티드
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Publication of KR20160002911A publication Critical patent/KR20160002911A/ko
Ceased legal-status Critical Current

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    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C23/00—Other surface treatment of glass not in the form of fibres or filaments
    • C03C23/0075—Cleaning of glass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B11/00—Cleaning flexible or delicate articles by methods or apparatus specially adapted thereto
    • B08B11/04—Cleaning flexible or delicate articles by methods or apparatus specially adapted thereto specially adapted for plate glass, e.g. prior to manufacture of windshields
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04—Cleaning involving contact with liquid
    • B08B3/08—Cleaning involving contact with liquid the liquid having chemical or dissolving effect
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04—Cleaning involving contact with liquid
    • B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
    • B08B3/12—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration by sonic or ultrasonic vibrations
    • H01L21/02046—
    • H01L21/02052—
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P70/00—Cleaning of wafers, substrates or parts of devices

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Surface Treatment Of Glass (AREA)
  • Liquid Crystal (AREA)
  • Cleaning By Liquid Or Steam (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
KR1020157032495A 2013-04-30 2014-04-29 유리 기판의 세정방법 Ceased KR20160002911A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201361817532P 2013-04-30 2013-04-30
US61/817,532 2013-04-30
PCT/US2014/035771 WO2014179251A1 (en) 2013-04-30 2014-04-29 Method of cleaning glass substrates

Publications (1)

Publication Number Publication Date
KR20160002911A true KR20160002911A (ko) 2016-01-08

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ID=51788199

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020157032495A Ceased KR20160002911A (ko) 2013-04-30 2014-04-29 유리 기판의 세정방법

Country Status (6)

Country Link
US (1) US9561982B2 (https=)
JP (1) JP6236145B2 (https=)
KR (1) KR20160002911A (https=)
CN (1) CN105340057B (https=)
TW (1) TWI603790B (https=)
WO (1) WO2014179251A1 (https=)

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US9561982B2 (en) 2017-02-07
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CN105340057A (zh) 2016-02-17
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