KR20150115840A - 압전 재료, 압전 소자 및 전자 기기 - Google Patents

압전 재료, 압전 소자 및 전자 기기 Download PDF

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Publication number
KR20150115840A
KR20150115840A KR1020157023453A KR20157023453A KR20150115840A KR 20150115840 A KR20150115840 A KR 20150115840A KR 1020157023453 A KR1020157023453 A KR 1020157023453A KR 20157023453 A KR20157023453 A KR 20157023453A KR 20150115840 A KR20150115840 A KR 20150115840A
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South Korea
Prior art keywords
piezoelectric
piezoelectric element
electrode
piezoelectric material
present
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Abandoned
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KR1020157023453A
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English (en)
Korean (ko)
Inventor
미키 우에다
다카유키 와타나베
슌스케 무라카미
?스케 무라카미
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캐논 가부시끼가이샤
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Publication of KR20150115840A publication Critical patent/KR20150115840A/ko
Abandoned legal-status Critical Current

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    • H01L41/1873—
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
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    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
    • C04B35/495—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on vanadium, niobium, tantalum, molybdenum or tungsten oxides or solid solutions thereof with other oxides, e.g. vanadates, niobates, tantalates, molybdates or tungstates
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    • C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/626—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
    • C04B35/62605—Treating the starting powders individually or as mixtures
    • C04B35/62685—Treating the starting powders individually or as mixtures characterised by the order of addition of constituents or additives
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/0006—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 with means to keep optical surfaces clean, e.g. by preventing or removing dirt, stains, contamination, condensation
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • G02B7/04—Mountings, adjusting means, or light-tight connections, for optical elements for lenses with mechanism for focusing or varying magnification
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    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/001—Driving devices, e.g. vibrators
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/106—Langevin motors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/16—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors using travelling waves, i.e. Rayleigh surface waves
    • H02N2/163—Motors with ring stator
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
    • H04N23/50—Constructional details
    • H04N23/55—Optical parts specially adapted for electronic image sensors; Mounting thereof
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
    • H04N23/80—Camera processing pipelines; Components thereof
    • H04N23/81—Camera processing pipelines; Components thereof for suppressing or minimising disturbance in the image signal generation
    • H04N23/811—Camera processing pipelines; Components thereof for suppressing or minimising disturbance in the image signal generation by dust removal, e.g. from surfaces of the image sensor or processing of the image signal output by the electronic image sensor
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/09—Forming piezoelectric or electrostrictive materials
    • H10N30/093—Forming inorganic materials
    • H10N30/097—Forming inorganic materials by sintering
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2047—Membrane type
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/85—Piezoelectric or electrostrictive active materials
    • H10N30/853—Ceramic compositions
    • H10N30/8542—Alkali metal based oxides, e.g. lithium, sodium or potassium niobates
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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Organic Chemistry (AREA)
  • Structural Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Signal Processing (AREA)
  • Multimedia (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Engineering (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Compositions Of Oxide Ceramics (AREA)
  • Semiconductor Memories (AREA)
KR1020157023453A 2013-01-29 2014-01-24 압전 재료, 압전 소자 및 전자 기기 Abandoned KR20150115840A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JPJP-P-2013-014614 2013-01-29
JP2013014614 2013-01-29
PCT/JP2014/052185 WO2014119702A1 (en) 2013-01-29 2014-01-24 Piezoelectric material, piezoelectric element, and electronic equipment

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20210135782A (ko) * 2020-05-06 2021-11-16 엘지이노텍 주식회사 초음파 리니어 모터

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2953177B1 (en) * 2014-05-30 2017-01-25 Canon Kabushiki Kaisha Piezoelectric material, piezoelectric element, and electronic device
CN104606736B (zh) * 2015-02-15 2018-01-19 天津市第五中心医院 一种用于输液器与输液架连接固定的可移动装置
JP6558002B2 (ja) * 2015-03-16 2019-08-14 セイコーエプソン株式会社 圧電駆動装置の製造方法、圧電駆動装置、ロボット、およびポンプ
JP6558003B2 (ja) * 2015-03-16 2019-08-14 セイコーエプソン株式会社 圧電素子の製造方法
JP2016174024A (ja) * 2015-03-16 2016-09-29 セイコーエプソン株式会社 超音波モーター用圧電素子およびその製造方法、超音波モーター、ロボット、ならびにポンプ
WO2016147539A1 (ja) * 2015-03-16 2016-09-22 セイコーエプソン株式会社 圧電素子の製造方法、圧電素子、圧電駆動装置、ロボット、およびポンプ
US10103314B2 (en) * 2015-04-03 2018-10-16 Canon Kabushiki Kaisha Piezoelectric material, method of producing piezoelectric material, piezoelectric element, and electronic apparatus
WO2016157855A1 (en) * 2015-04-03 2016-10-06 Canon Kabushiki Kaisha Piezoelectric material, piezoelectric element, and electronic apparatus
JP2018032725A (ja) * 2016-08-24 2018-03-01 株式会社村田製作所 圧電セラミックの駆動方法、及び圧電セラミック
JP7013151B2 (ja) * 2017-07-13 2022-01-31 キヤノン株式会社 積層圧電素子、振動子、振動波モータ、光学機器および電子機器
CN107500762A (zh) * 2017-09-15 2017-12-22 西安交通大学 一种低滞回高温度稳定应变铁电陶瓷材料及其制备方法
JP2019216203A (ja) * 2018-06-14 2019-12-19 太陽誘電株式会社 圧電素子，振動波形センサー，及び振動波形センサーモジュール
JP7542941B2 (ja) * 2018-12-21 2024-09-02 キヤノン株式会社 圧電素子の製造方法、電子機器の製造方法、圧電素子、および電子機器
CN116724687A (zh) * 2020-12-11 2023-09-08 赛若朴有限公司 包含内电场的压电单晶及其制造方法及使用其的压电和介电应用部件
JP7320091B2 (ja) * 2021-02-10 2023-08-02 住友化学株式会社 圧電薄膜付き積層基板、圧電薄膜付き積層基板の製造方法、圧電薄膜素子、スパッタリングターゲット材、およびスパッタリングターゲット材の製造方法
USD1088094S1 (en) * 2024-06-27 2025-08-12 Shenzhen Xindaxing Digital Audio and Video Camera

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3390071A (en) * 1964-10-26 1968-06-25 Reynolds Metals Co Cathode construction for aluminum reduction cell
JP2001316182A (ja) * 2000-04-28 2001-11-13 Kyocera Corp 圧電磁器および圧電共振子
JP4417536B2 (ja) * 2000-07-31 2010-02-17 京セラ株式会社 圧電磁器および圧電素子
JP4926389B2 (ja) * 2004-06-17 2012-05-09 株式会社豊田中央研究所 結晶配向セラミックス、及びその製造方法
JP2006124251A (ja) * 2004-10-29 2006-05-18 Denso Corp 結晶配向セラミックスの製造方法
WO2006100807A1 (ja) 2005-03-24 2006-09-28 Murata Manufacturing Co., Ltd 圧電素子、及び圧電素子の製造方法
WO2006117990A1 (ja) * 2005-04-28 2006-11-09 Murata Manufacturing Co., Ltd. 圧電体磁器組成物、及び該圧電体磁器組成物の製造方法、並びに圧電セラミック電子部品
US7521845B2 (en) * 2005-08-23 2009-04-21 Canon Kabushiki Kaisha Piezoelectric substance, piezoelectric element, liquid discharge head using piezoelectric element, and liquid discharge apparatus
JP2008156172A (ja) 2006-12-25 2008-07-10 National Institute Of Advanced Industrial & Technology 無鉛圧電磁器組成物
JP5448320B2 (ja) * 2007-10-04 2014-03-19 キヤノン株式会社 圧電アクチュエータ及びそれを用いた液体吐出ヘッド
JP2009227535A (ja) 2008-03-25 2009-10-08 Panasonic Corp 圧電性磁器組成物
JP5386848B2 (ja) * 2008-03-31 2014-01-15 Ｔｄｋ株式会社 圧電磁器
JP2010222193A (ja) * 2009-03-24 2010-10-07 Denso Corp 結晶配向セラミックスの製造方法
JP5675137B2 (ja) * 2010-03-23 2015-02-25 キヤノン株式会社 振動装置に用いられる圧電素子、振動装置、及び振動装置を有する塵埃除去装置
JP6021351B2 (ja) * 2011-02-28 2016-11-09 キヤノン株式会社 圧電材料、圧電素子、液体吐出ヘッド、超音波モータ、塵埃除去装置およびデバイス
EP2730020B1 (en) * 2011-07-05 2017-11-01 Canon Kabushiki Kaisha Piezoelectric element, multilayered piezoelectric element, liquid discharge head, liquid discharge apparatus, ultrasonic motor, optical apparatus, and electronic apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20210135782A (ko) * 2020-05-06 2021-11-16 엘지이노텍 주식회사 초음파 리니어 모터

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