KR20150115136A - 기판 이송로봇 구동장치 및 이를 이용한 기판 이송방법 - Google Patents

기판 이송로봇 구동장치 및 이를 이용한 기판 이송방법 Download PDF

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Publication number
KR20150115136A
KR20150115136A KR1020140039613A KR20140039613A KR20150115136A KR 20150115136 A KR20150115136 A KR 20150115136A KR 1020140039613 A KR1020140039613 A KR 1020140039613A KR 20140039613 A KR20140039613 A KR 20140039613A KR 20150115136 A KR20150115136 A KR 20150115136A
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KR
South Korea
Prior art keywords
driving
unit
driving unit
substrate
angle
Prior art date
Application number
KR1020140039613A
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English (en)
Korean (ko)
Inventor
김필준
윤대규
송영훈
김의진
Original Assignee
현대중공업 주식회사
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Application filed by 현대중공업 주식회사 filed Critical 현대중공업 주식회사
Priority to KR1020140039613A priority Critical patent/KR20150115136A/ko
Priority to CN201510149253.XA priority patent/CN104973420B/zh
Priority to TW104110754A priority patent/TWI562946B/zh
Priority to JP2015076202A priority patent/JP2015196242A/ja
Publication of KR20150115136A publication Critical patent/KR20150115136A/ko

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67742—Mechanical parts of transfer devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67715—Changing the direction of the conveying path

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Robotics (AREA)
  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
KR1020140039613A 2014-04-02 2014-04-02 기판 이송로봇 구동장치 및 이를 이용한 기판 이송방법 KR20150115136A (ko)

Priority Applications (4)

Application Number Priority Date Filing Date Title
KR1020140039613A KR20150115136A (ko) 2014-04-02 2014-04-02 기판 이송로봇 구동장치 및 이를 이용한 기판 이송방법
CN201510149253.XA CN104973420B (zh) 2014-04-02 2015-03-31 基板搬运机器人驱动装置以及利用该装置的基板搬运方法
TW104110754A TWI562946B (en) 2014-04-02 2015-04-01 Driving device for transferring substrate robot and method for transfreeing substrate
JP2015076202A JP2015196242A (ja) 2014-04-02 2015-04-02 基板移送ロボット駆動装置及びこれを用いた基板移送方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020140039613A KR20150115136A (ko) 2014-04-02 2014-04-02 기판 이송로봇 구동장치 및 이를 이용한 기판 이송방법

Publications (1)

Publication Number Publication Date
KR20150115136A true KR20150115136A (ko) 2015-10-14

Family

ID=54270480

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020140039613A KR20150115136A (ko) 2014-04-02 2014-04-02 기판 이송로봇 구동장치 및 이를 이용한 기판 이송방법

Country Status (4)

Country Link
JP (1) JP2015196242A (zh)
KR (1) KR20150115136A (zh)
CN (1) CN104973420B (zh)
TW (1) TWI562946B (zh)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109202940A (zh) * 2017-06-29 2019-01-15 日本电产三协株式会社 工业用机器人的手及工业用机器人
CN109205285A (zh) * 2017-06-29 2019-01-15 日本电产三协株式会社 工业用机器人的手及工业用机器人
CN113571445A (zh) * 2016-07-08 2021-10-29 科迪华公司 引导传输路径校正

Families Citing this family (3)

* Cited by examiner, † Cited by third party
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CN105108387A (zh) * 2015-08-31 2015-12-02 苏州斯尔特微电子有限公司 一种电子焊接机上的翻转臂
JP7092469B2 (ja) * 2017-06-29 2022-06-28 日本電産サンキョー株式会社 産業用ロボットのハンドおよび産業用ロボット
CN114147702A (zh) * 2021-11-04 2022-03-08 合肥欣奕华智能机器有限公司 一种机器人及手指端的位置调整方法

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JP2505394B2 (ja) * 1992-09-17 1996-06-05 川崎重工業株式会社 産業用ロボットの加速度変化を利用した制御方法
JPH07244513A (ja) * 1994-03-03 1995-09-19 Ricoh Co Ltd ロボット制御装置
JP2000183128A (ja) * 1998-12-17 2000-06-30 Komatsu Ltd ワーク搬送装置の制御装置
TW473418B (en) * 1998-12-10 2002-01-21 Komatsu Mfg Co Ltd Work carrier device and attitude holding method of work carrier device controller for work carrying apparatus
JP4137711B2 (ja) * 2003-06-16 2008-08-20 東京エレクトロン株式会社 基板処理装置及び基板搬送手段の位置合わせ方法
JP3883544B2 (ja) * 2004-02-27 2007-02-21 株式会社東芝 ロボット制御装置およびロボットの制御方法
JP5120258B2 (ja) * 2006-09-12 2013-01-16 株式会社安川電機 ワーク搬送装置
JP4519824B2 (ja) * 2006-10-16 2010-08-04 日本電産サンキョー株式会社 ダブルアーム型ロボット
JP5146641B2 (ja) * 2007-06-06 2013-02-20 株式会社安川電機 基板搬送ロボットおよび基板搬送ロボットの制御方法
JP5178432B2 (ja) * 2008-09-26 2013-04-10 日本電産サンキョー株式会社 産業用ロボット
JP5370128B2 (ja) * 2009-12-18 2013-12-18 株式会社デンソーウェーブ ロボットの故障検出装置
JP2013018617A (ja) * 2011-07-12 2013-01-31 Murata Machinery Ltd 搬送車
US9508581B2 (en) * 2011-12-15 2016-11-29 Tazmo Co., Ltd. Wafer transport robot
KR20130084920A (ko) * 2012-01-18 2013-07-26 세메스 주식회사 기판 이송 장치
JP6352016B2 (ja) * 2014-03-27 2018-07-04 日本電産サンキョー株式会社 産業用ロボット

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113658884A (zh) * 2016-07-08 2021-11-16 科迪华公司 传送路径校正技术和相关系统、方法和装置
CN113571445A (zh) * 2016-07-08 2021-10-29 科迪华公司 引导传输路径校正
CN113571447A (zh) * 2016-07-08 2021-10-29 科迪华公司 传送路径校正技术和相关系统、方法和装置
CN113571446A (zh) * 2016-07-08 2021-10-29 科迪华公司 传送路径校正技术和相关系统、方法和装置
CN113658883A (zh) * 2016-07-08 2021-11-16 科迪华公司 传送路径校正技术和相关系统、方法和装置
CN113571445B (zh) * 2016-07-08 2023-08-01 科迪华公司 引导传输路径校正
CN113571446B (zh) * 2016-07-08 2023-08-08 科迪华公司 传送路径校正技术和相关系统、方法和装置
CN113658884B (zh) * 2016-07-08 2023-08-08 科迪华公司 传送路径校正技术和相关系统、方法和装置
CN113658883B (zh) * 2016-07-08 2023-08-08 科迪华公司 传送路径校正技术和相关系统、方法和装置
CN113571447B (zh) * 2016-07-08 2023-08-08 科迪华公司 传送路径校正技术和相关系统、方法和装置
CN109205285A (zh) * 2017-06-29 2019-01-15 日本电产三协株式会社 工业用机器人的手及工业用机器人
CN109205285B (zh) * 2017-06-29 2021-04-27 日本电产三协株式会社 工业用机器人的手及工业用机器人
CN109202940A (zh) * 2017-06-29 2019-01-15 日本电产三协株式会社 工业用机器人的手及工业用机器人

Also Published As

Publication number Publication date
JP2015196242A (ja) 2015-11-09
TWI562946B (en) 2016-12-21
CN104973420B (zh) 2017-09-08
TW201538409A (zh) 2015-10-16
CN104973420A (zh) 2015-10-14

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