KR20140121888A - 코팅 공정을 위한 물질의 분무화 방법 - Google Patents
코팅 공정을 위한 물질의 분무화 방법 Download PDFInfo
- Publication number
- KR20140121888A KR20140121888A KR1020147026438A KR20147026438A KR20140121888A KR 20140121888 A KR20140121888 A KR 20140121888A KR 1020147026438 A KR1020147026438 A KR 1020147026438A KR 20147026438 A KR20147026438 A KR 20147026438A KR 20140121888 A KR20140121888 A KR 20140121888A
- Authority
- KR
- South Korea
- Prior art keywords
- supply conduit
- liquid
- outlet
- gas
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
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Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/54—Apparatus specially adapted for continuous coating
- C23C16/545—Apparatus specially adapted for continuous coating for coating elongated substrates
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B13/00—Machines or plants for applying liquids or other fluent materials to surfaces of objects or other work by spraying, not covered by groups B05B1/00 - B05B11/00
- B05B13/02—Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work
- B05B13/04—Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work the spray heads being moved during spraying operation
- B05B13/0463—Installation or apparatus for applying liquid or other fluent material to moving work of indefinite length
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B17/00—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups
- B05B17/04—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods
- B05B17/06—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations
- B05B17/0607—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations generated by electrical means, e.g. piezoelectric transducers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B7/00—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas
- B05B7/02—Spray pistols; Apparatus for discharge
- B05B7/04—Spray pistols; Apparatus for discharge with arrangements for mixing liquids or other fluent materials before discharge
- B05B7/0416—Spray pistols; Apparatus for discharge with arrangements for mixing liquids or other fluent materials before discharge with arrangements for mixing one gas and one liquid
- B05B7/0441—Spray pistols; Apparatus for discharge with arrangements for mixing liquids or other fluent materials before discharge with arrangements for mixing one gas and one liquid with one inner conduit of liquid surrounded by an external conduit of gas upstream the mixing chamber
- B05B7/045—Spray pistols; Apparatus for discharge with arrangements for mixing liquids or other fluent materials before discharge with arrangements for mixing one gas and one liquid with one inner conduit of liquid surrounded by an external conduit of gas upstream the mixing chamber the gas and liquid flows being parallel just upstream the mixing chamber
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/448—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials
- C23C16/4486—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials by producing an aerosol and subsequent evaporation of the droplets or particles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D1/00—Processes for applying liquids or other fluent materials
- B05D1/02—Processes for applying liquids or other fluent materials performed by spraying
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D7/00—Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials
- B05D7/02—Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials to macromolecular substances, e.g. rubber
Landscapes
- Chemical & Material Sciences (AREA)
- Mechanical Engineering (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- General Chemical & Material Sciences (AREA)
- Metallurgy (AREA)
- Dispersion Chemistry (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Electroluminescent Light Sources (AREA)
- Chemical Vapour Deposition (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Nozzles (AREA)
- Special Spraying Apparatus (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US75491405P | 2005-12-29 | 2005-12-29 | |
| US60/754,914 | 2005-12-29 | ||
| PCT/US2006/049432 WO2008030262A1 (en) | 2005-12-29 | 2006-12-28 | Method for atomizing material for coating processes |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020137025743A Division KR101481933B1 (ko) | 2005-12-29 | 2006-12-28 | 코팅 공정을 위한 물질의 분무화 방법 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| KR20140121888A true KR20140121888A (ko) | 2014-10-16 |
Family
ID=39157542
Family Applications (3)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020147026438A Ceased KR20140121888A (ko) | 2005-12-29 | 2006-12-28 | 코팅 공정을 위한 물질의 분무화 방법 |
| KR1020087015654A Ceased KR20080080154A (ko) | 2005-12-29 | 2006-12-28 | 코팅 공정을 위한 물질의 분무화 방법 |
| KR1020137025743A Expired - Fee Related KR101481933B1 (ko) | 2005-12-29 | 2006-12-28 | 코팅 공정을 위한 물질의 분무화 방법 |
Family Applications After (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020087015654A Ceased KR20080080154A (ko) | 2005-12-29 | 2006-12-28 | 코팅 공정을 위한 물질의 분무화 방법 |
| KR1020137025743A Expired - Fee Related KR101481933B1 (ko) | 2005-12-29 | 2006-12-28 | 코팅 공정을 위한 물질의 분무화 방법 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US8658248B2 (https=) |
| EP (1) | EP1969618B1 (https=) |
| JP (2) | JP5778376B2 (https=) |
| KR (3) | KR20140121888A (https=) |
| CN (1) | CN101351868B (https=) |
| BR (1) | BRPI0620597A2 (https=) |
| WO (1) | WO2008030262A1 (https=) |
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| CN101573471A (zh) * | 2006-12-29 | 2009-11-04 | 3M创新有限公司 | 固化含有金属烷氧化物的膜的方法 |
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| CN104327758A (zh) | 2007-12-28 | 2015-02-04 | 3M创新有限公司 | 柔性封装膜系统 |
| WO2009122728A1 (ja) * | 2008-03-31 | 2009-10-08 | 超音波醸造所有限会社 | バイオマスアルコールの製造方法 |
| JP5624033B2 (ja) | 2008-06-30 | 2014-11-12 | スリーエム イノベイティブプロパティズカンパニー | 無機又は無機/有機ハイブリッドバリアフィルムの製造方法 |
| CN101630702B (zh) * | 2009-07-30 | 2012-02-01 | 东莞南玻太阳能玻璃有限公司 | 一种太阳能电池组件镀膜盖板玻璃的制造方法 |
| US20120196053A1 (en) * | 2011-01-28 | 2012-08-02 | Coull Richard | Methods for creating an electrically conductive transparent structure |
| JP5529340B2 (ja) * | 2011-03-15 | 2014-06-25 | 東芝三菱電機産業システム株式会社 | 成膜装置 |
| KR102040758B1 (ko) | 2011-08-05 | 2019-11-05 | 쓰리엠 이노베이티브 프로퍼티즈 캄파니 | 증기 처리 시스템 및 방법 |
| JP2013214500A (ja) * | 2012-03-09 | 2013-10-17 | Nitto Denko Corp | 蒸着データ処理装置、有機elデバイスの製造装置及び製造方法 |
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| WO2017003791A1 (en) | 2015-06-30 | 2017-01-05 | 3M Innovative Properties Company | Discontinuous coatings and methods of forming the same |
| CN108431104B (zh) | 2015-12-18 | 2021-04-13 | 3M创新有限公司 | 可延伸的阻挡膜、采用其的制品及其制造方法 |
| CN108431103B (zh) | 2015-12-18 | 2021-05-25 | 3M创新有限公司 | 可延伸的阻挡膜、采用其的制品及其制造方法 |
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| KR100360308B1 (ko) | 2000-07-03 | 2002-11-18 | 한국화학연구원 | 아세틸렌기를 포함하는 유기화합물, 그 화합물을 이용한증착중합법, 그 방법에 의하여 제조된 증착중합 박막 및그 박막을 사용한 전기 발광소자 |
| US6468595B1 (en) | 2001-02-13 | 2002-10-22 | Sigma Technologies International, Inc. | Vaccum deposition of cationic polymer systems |
| TWI230102B (en) * | 2002-03-27 | 2005-04-01 | Matsushita Electric Industrial Co Ltd | Component mounting method, component mounting apparatus, and ultrasonic bonding head |
| JP2003298131A (ja) | 2002-04-01 | 2003-10-17 | Mitsubishi Electric Corp | 圧電薄膜素子およびその製造方法 |
| US6929864B2 (en) | 2002-08-17 | 2005-08-16 | 3M Innovative Properties Company | Extensible, visible light-transmissive and infrared-reflective film and methods of making and using the film |
| US6818291B2 (en) | 2002-08-17 | 2004-11-16 | 3M Innovative Properties Company | Durable transparent EMI shielding film |
| JP4309630B2 (ja) * | 2002-09-19 | 2009-08-05 | 東京エレクトロン株式会社 | 原料気化器及び成膜処理装置 |
| US7449146B2 (en) | 2002-09-30 | 2008-11-11 | 3M Innovative Properties Company | Colorimetric sensor |
| JP4056888B2 (ja) * | 2003-01-07 | 2008-03-05 | 株式会社島津製作所 | 気化器 |
| US7018713B2 (en) | 2003-04-02 | 2006-03-28 | 3M Innovative Properties Company | Flexible high-temperature ultrabarrier |
| US20040202708A1 (en) | 2003-04-14 | 2004-10-14 | 3M Innovative Properties Company | Transdermal drug delivery device with translucent inorganic barrier layer |
| US7052772B2 (en) | 2003-08-14 | 2006-05-30 | 3M Innovative Properties Company | Material for packaging electronic components |
| FR2859650B1 (fr) * | 2003-09-12 | 2006-02-24 | Gloster Sante Europ | Appareil de brumisation d'une composition liquide |
| JP4590881B2 (ja) | 2004-02-13 | 2010-12-01 | 株式会社ユーテック | Cvd用気化器、溶液気化式cvd装置 |
-
2006
- 2006-12-28 KR KR1020147026438A patent/KR20140121888A/ko not_active Ceased
- 2006-12-28 CN CN2006800495402A patent/CN101351868B/zh not_active Expired - Fee Related
- 2006-12-28 EP EP06851595.6A patent/EP1969618B1/en not_active Not-in-force
- 2006-12-28 KR KR1020087015654A patent/KR20080080154A/ko not_active Ceased
- 2006-12-28 JP JP2008548728A patent/JP5778376B2/ja not_active Expired - Fee Related
- 2006-12-28 US US12/159,021 patent/US8658248B2/en not_active Expired - Fee Related
- 2006-12-28 KR KR1020137025743A patent/KR101481933B1/ko not_active Expired - Fee Related
- 2006-12-28 BR BRPI0620597-6A patent/BRPI0620597A2/pt not_active IP Right Cessation
- 2006-12-28 WO PCT/US2006/049432 patent/WO2008030262A1/en not_active Ceased
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2014
- 2014-03-05 JP JP2014042504A patent/JP2014133948A/ja active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| WO2008030262A1 (en) | 2008-03-13 |
| JP5778376B2 (ja) | 2015-09-16 |
| JP2014133948A (ja) | 2014-07-24 |
| KR101481933B1 (ko) | 2015-01-14 |
| EP1969618B1 (en) | 2018-01-24 |
| US8658248B2 (en) | 2014-02-25 |
| US20080292810A1 (en) | 2008-11-27 |
| CN101351868B (zh) | 2013-03-13 |
| BRPI0620597A2 (pt) | 2011-11-16 |
| EP1969618A4 (en) | 2012-02-22 |
| KR20130130062A (ko) | 2013-11-29 |
| KR20080080154A (ko) | 2008-09-02 |
| EP1969618A1 (en) | 2008-09-17 |
| CN101351868A (zh) | 2009-01-21 |
| JP2009526127A (ja) | 2009-07-16 |
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