KR20140113583A - 저탄소 iii-족 질화물 결정 - Google Patents

저탄소 iii-족 질화물 결정 Download PDF

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Publication number
KR20140113583A
KR20140113583A KR1020140030895A KR20140030895A KR20140113583A KR 20140113583 A KR20140113583 A KR 20140113583A KR 1020140030895 A KR1020140030895 A KR 1020140030895A KR 20140030895 A KR20140030895 A KR 20140030895A KR 20140113583 A KR20140113583 A KR 20140113583A
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KR
South Korea
Prior art keywords
iii
nitride crystal
nitride
aln
hvpe
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KR1020140030895A
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English (en)
Korean (ko)
Inventor
제이슨 슈미트
펭 루
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니트라이드 솔루션즈 인크.
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Publication of KR20140113583A publication Critical patent/KR20140113583A/ko
Withdrawn legal-status Critical Current

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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00—Constructional details of devices covered by this subclass
    • H10F77/10—Semiconductor bodies
    • H10F77/12—Active materials
    • H10F77/124—Active materials comprising only Group III-V materials, e.g. GaAs
    • H10F77/1246—III-V nitrides, e.g. GaN
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
    • C30B25/02—Epitaxial-layer growth
    • C30B25/12—Substrate holders or susceptors
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/4401—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber
    • C23C16/4404—Coatings or surface treatment on the inside of the reaction chamber or on parts thereof
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
    • C30B25/02—Epitaxial-layer growth
    • C30B25/08—Reaction chambers; Selection of materials therefor
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/10—Inorganic compounds or compositions
    • C30B29/40—AIIIBV compounds wherein A is B, Al, Ga, In or Tl and B is N, P, As, Sb or Bi
    • C30B29/403—AIII-nitrides
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/80—Constructional details
    • H10H20/81—Bodies
    • H10H20/822—Materials of the light-emitting regions
    • H10H20/824—Materials of the light-emitting regions comprising only Group III-V materials, e.g. GaP
    • H10H20/825—Materials of the light-emitting regions comprising only Group III-V materials, e.g. GaP containing nitrogen, e.g. GaN
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
KR1020140030895A 2013-03-15 2014-03-17 저탄소 iii-족 질화물 결정 Withdrawn KR20140113583A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US13/844,182 2013-03-15
US13/844,182 US20140264388A1 (en) 2013-03-15 2013-03-15 Low carbon group-iii nitride crystals

Publications (1)

Publication Number Publication Date
KR20140113583A true KR20140113583A (ko) 2014-09-24

Family

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Family Applications (1)

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KR1020140030895A Withdrawn KR20140113583A (ko) 2013-03-15 2014-03-17 저탄소 iii-족 질화물 결정

Country Status (6)

Country Link
US (1) US20140264388A1 (enExample)
EP (1) EP2784191A1 (enExample)
JP (1) JP2014181178A (enExample)
KR (1) KR20140113583A (enExample)
CN (1) CN104047054A (enExample)
TW (1) TW201443302A (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106191998A (zh) * 2016-07-25 2016-12-07 中国科学院上海硅酸盐研究所 一种基于气相生长原理制备多孔氮化铝的方法
US20220025519A1 (en) * 2018-10-26 2022-01-27 Lpe S.P.A. Deposition reactor with inductors and electromagnetic shields
DE102018129492B4 (de) 2018-11-22 2022-04-28 Ebner Industrieofenbau Gmbh Vorrichtung und Verfahren zum Züchten von Kristallen
JP2021034675A (ja) * 2019-08-29 2021-03-01 漢民科技股▲分▼有限公司 気相成膜装置
CN112820634B (zh) * 2021-01-14 2024-01-16 镓特半导体科技（上海）有限公司 半导体结构、自支撑氮化镓层及其制备方法
US12142468B2 (en) * 2021-08-30 2024-11-12 Applied Materials, Inc. Stress treatments for cover wafers
WO2024150428A1 (ja) * 2023-01-13 2024-07-18 日本碍子株式会社 ＡｌＮ単結晶基板およびデバイス

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001345268A (ja) * 2000-05-31 2001-12-14 Matsushita Electric Ind Co Ltd 半導体製造装置及び半導体の製造方法
US7501023B2 (en) * 2001-07-06 2009-03-10 Technologies And Devices, International, Inc. Method and apparatus for fabricating crack-free Group III nitride semiconductor materials
JP2006044982A (ja) * 2004-08-04 2006-02-16 Sumitomo Electric Ind Ltd 窒化物半導体単結晶基板とその合成方法
DE102004050806A1 (de) * 2004-10-16 2006-11-16 Azzurro Semiconductors Ag Verfahren zur Herstellung von (AI,Ga)N Einkristallen
US9034103B2 (en) * 2006-03-30 2015-05-19 Crystal Is, Inc. Aluminum nitride bulk crystals having high transparency to ultraviolet light and methods of forming them
WO2010001804A1 (ja) * 2008-07-01 2010-01-07 住友電気工業株式会社 ＡｌxＧａ(1-x)Ｎ単結晶の製造方法、ＡｌxＧａ(1-x)Ｎ単結晶および光学部品
JP5418210B2 (ja) * 2009-01-16 2014-02-19 住友電気工業株式会社 窒化物半導体結晶の製造方法、ＡｌＮ結晶および窒化物半導体結晶の製造装置
JP5418236B2 (ja) * 2009-01-23 2014-02-19 住友電気工業株式会社 窒化物半導体結晶の製造装置、窒化物半導体結晶の製造方法および窒化アルミニウム結晶
US8791450B2 (en) * 2011-09-22 2014-07-29 Sensor Electronic Technology, Inc. Deep ultraviolet light emitting diode
EP2796596B1 (en) * 2011-12-22 2021-01-27 National University Corporation Tokyo University of Agriculture and Technology A single-crystalline aluminum nitride substrate and a manufacturing method thereof
JP6042545B2 (ja) * 2012-08-23 2016-12-14 国立大学法人東京農工大学 高透明性窒化アルミニウム単結晶層、及びこれからなる素子

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Publication number Publication date
EP2784191A1 (en) 2014-10-01
JP2014181178A (ja) 2014-09-29
CN104047054A (zh) 2014-09-17
US20140264388A1 (en) 2014-09-18
TW201443302A (zh) 2014-11-16

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PA0109 Patent application

Patent event code: PA01091R01D

Comment text: Patent Application

Patent event date: 20140317

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WITN Application deemed withdrawn, e.g. because no request for examination was filed or no examination fee was paid