KR20140092335A - 과불화물의 분해 처리 방법 및 처리 장치 - Google Patents
과불화물의 분해 처리 방법 및 처리 장치 Download PDFInfo
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- KR20140092335A KR20140092335A KR1020147012890A KR20147012890A KR20140092335A KR 20140092335 A KR20140092335 A KR 20140092335A KR 1020147012890 A KR1020147012890 A KR 1020147012890A KR 20147012890 A KR20147012890 A KR 20147012890A KR 20140092335 A KR20140092335 A KR 20140092335A
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- gas
- calcium salt
- salt
- decomposition
- water
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
- B01D53/75—Multi-step processes
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/46—Removing components of defined structure
- B01D53/68—Halogens or halogen compounds
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/14—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by absorption
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
- B01D53/86—Catalytic processes
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2251/00—Reactants
- B01D2251/40—Alkaline earth metal or magnesium compounds
- B01D2251/404—Alkaline earth metal or magnesium compounds of calcium
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2255/00—Catalysts
- B01D2255/20—Metals or compounds thereof
- B01D2255/206—Rare earth metals
- B01D2255/2065—Cerium
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2255/00—Catalysts
- B01D2255/20—Metals or compounds thereof
- B01D2255/207—Transition metals
- B01D2255/20707—Titanium
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2255/00—Catalysts
- B01D2255/20—Metals or compounds thereof
- B01D2255/207—Transition metals
- B01D2255/20746—Cobalt
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2255/00—Catalysts
- B01D2255/20—Metals or compounds thereof
- B01D2255/207—Transition metals
- B01D2255/20753—Nickel
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2255/00—Catalysts
- B01D2255/20—Metals or compounds thereof
- B01D2255/207—Transition metals
- B01D2255/20784—Chromium
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2255/00—Catalysts
- B01D2255/20—Metals or compounds thereof
- B01D2255/207—Transition metals
- B01D2255/20792—Zinc
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2255/00—Catalysts
- B01D2255/20—Metals or compounds thereof
- B01D2255/209—Other metals
- B01D2255/2094—Tin
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2257/00—Components to be removed
- B01D2257/20—Halogens or halogen compounds
- B01D2257/206—Organic halogen compounds
- B01D2257/2066—Fluorine
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2258/00—Sources of waste gases
- B01D2258/02—Other waste gases
- B01D2258/0216—Other waste gases from CVD treatment or semi-conductor manufacturing
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/46—Removing components of defined structure
- B01D53/68—Halogens or halogen compounds
- B01D53/70—Organic halogen compounds
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
- B01D53/86—Catalytic processes
- B01D53/8659—Removing halogens or halogen compounds
- B01D53/8662—Organic halogen compounds
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02C—CAPTURE, STORAGE, SEQUESTRATION OR DISPOSAL OF GREENHOUSE GASES [GHG]
- Y02C20/00—Capture or disposal of greenhouse gases
- Y02C20/30—Capture or disposal of greenhouse gases of perfluorocarbons [PFC], hydrofluorocarbons [HFC] or sulfur hexafluoride [SF6]
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- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Environmental & Geological Engineering (AREA)
- Analytical Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Health & Medical Sciences (AREA)
- Biomedical Technology (AREA)
- Treating Waste Gases (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011229777 | 2011-10-19 | ||
JPJP-P-2011-229777 | 2011-10-19 | ||
PCT/JP2012/076600 WO2013058211A1 (ja) | 2011-10-19 | 2012-10-15 | 過弗化物の分解処理方法および処理装置 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020167035134A Division KR101699217B1 (ko) | 2011-10-19 | 2012-10-15 | 과불화물의 분해 처리 방법 및 처리 장치 |
Publications (1)
Publication Number | Publication Date |
---|---|
KR20140092335A true KR20140092335A (ko) | 2014-07-23 |
Family
ID=48140858
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020167035134A KR101699217B1 (ko) | 2011-10-19 | 2012-10-15 | 과불화물의 분해 처리 방법 및 처리 장치 |
KR1020147012890A KR20140092335A (ko) | 2011-10-19 | 2012-10-15 | 과불화물의 분해 처리 방법 및 처리 장치 |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020167035134A KR101699217B1 (ko) | 2011-10-19 | 2012-10-15 | 과불화물의 분해 처리 방법 및 처리 장치 |
Country Status (5)
Country | Link |
---|---|
JP (1) | JP6071892B2 (zh) |
KR (2) | KR101699217B1 (zh) |
CN (1) | CN103889553B (zh) |
TW (1) | TWI533922B (zh) |
WO (1) | WO2013058211A1 (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101659441B1 (ko) * | 2016-01-20 | 2016-09-26 | 한국에너지기술연구원 | 다단 촉매 반응 장치 및 이를 이용한 촉매반응 공정 |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6407604B2 (ja) * | 2014-07-25 | 2018-10-17 | 岩谷産業株式会社 | 蛍石の製造方法 |
JP6380654B2 (ja) | 2015-04-03 | 2018-08-29 | 株式会社島津製作所 | モジュラー型分析システム |
KR102135068B1 (ko) * | 2019-09-03 | 2020-07-17 | (주)다산이엔지 | 폐가스 선별분리 처리장치 및 그 제어방법 |
CN116963817A (zh) * | 2021-03-02 | 2023-10-27 | 株式会社力森诺科 | 氟化氢气体去除装置和氟化氢气体的去除方法 |
JP7309983B1 (ja) | 2022-08-08 | 2023-07-18 | 株式会社タクマ | 二酸化炭素回収装置、及び二酸化炭素回収方法 |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3217034B2 (ja) | 1997-11-14 | 2001-10-09 | 株式会社日立製作所 | 過弗化物の処理方法及びその処理装置 |
KR200175311Y1 (ko) * | 1999-10-19 | 2000-03-15 | 주식회사대산정공 | 고하중용 비계 |
EP1297884A3 (en) * | 2001-09-28 | 2003-04-16 | Japan Pionics Co., Ltd. | Treating agent and method for decomposition of fluorocarbons |
JP4214717B2 (ja) | 2002-05-31 | 2009-01-28 | 株式会社日立製作所 | 過弗化物処理装置 |
JP2006312121A (ja) | 2005-05-06 | 2006-11-16 | Hitachi Ltd | 過フッ化物処理方法および過フッ化物処理装置 |
JP4966521B2 (ja) * | 2005-07-22 | 2012-07-04 | 昭和電工株式会社 | 過弗化物含有排ガスの処理方法及び処理装置 |
KR100654922B1 (ko) * | 2006-01-26 | 2006-12-06 | 주식회사 코캣 | 반도체 제조공정으로부터 발생하는 배가스 처리장치 및방법 |
KR100766749B1 (ko) | 2006-08-16 | 2007-10-12 | 주식회사 에코프로 | 과불화화합물 가스를 포함하는 대용량 배기가스 처리방법및 그 처리장치 |
US20080119351A1 (en) * | 2006-11-22 | 2008-05-22 | Po-Chu Liu | Decomposing catalyst for perfluorinated compound, carbon hydrofluoride, perchloro-carbon and carbon hydrochloride gas compounds and method of producing it |
JP2010162464A (ja) * | 2009-01-14 | 2010-07-29 | Ebara Corp | ガス処理装置、およびガス処理装置の処理剤交換方法 |
JP5047202B2 (ja) * | 2009-02-04 | 2012-10-10 | 大旺新洋株式会社 | 酸性ガスの中和処理方法 |
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2012
- 2012-10-15 KR KR1020167035134A patent/KR101699217B1/ko active IP Right Grant
- 2012-10-15 CN CN201280050982.4A patent/CN103889553B/zh active Active
- 2012-10-15 WO PCT/JP2012/076600 patent/WO2013058211A1/ja active Application Filing
- 2012-10-15 KR KR1020147012890A patent/KR20140092335A/ko active Search and Examination
- 2012-10-15 JP JP2013539634A patent/JP6071892B2/ja active Active
- 2012-10-18 TW TW101138433A patent/TWI533922B/zh active
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101659441B1 (ko) * | 2016-01-20 | 2016-09-26 | 한국에너지기술연구원 | 다단 촉매 반응 장치 및 이를 이용한 촉매반응 공정 |
WO2017126932A1 (ko) * | 2016-01-20 | 2017-07-27 | 한국에너지기술연구원 | 촉매 반응기 및 흡수 반응기를 구비한 반응기 모듈이 2단 이상인 다단 촉매 반응 장치 및 이를 이용한 촉매반응 공정 |
Also Published As
Publication number | Publication date |
---|---|
JPWO2013058211A1 (ja) | 2015-04-02 |
KR20160149313A (ko) | 2016-12-27 |
TWI533922B (zh) | 2016-05-21 |
CN103889553A (zh) | 2014-06-25 |
CN103889553B (zh) | 2017-05-03 |
TW201332633A (zh) | 2013-08-16 |
JP6071892B2 (ja) | 2017-02-01 |
WO2013058211A1 (ja) | 2013-04-25 |
KR101699217B1 (ko) | 2017-01-23 |
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