KR20130133673A - 정전 척 및 정전 척의 제조 방법 - Google Patents

정전 척 및 정전 척의 제조 방법 Download PDF

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Publication number
KR20130133673A
KR20130133673A KR1020130058836A KR20130058836A KR20130133673A KR 20130133673 A KR20130133673 A KR 20130133673A KR 1020130058836 A KR1020130058836 A KR 1020130058836A KR 20130058836 A KR20130058836 A KR 20130058836A KR 20130133673 A KR20130133673 A KR 20130133673A
Authority
KR
South Korea
Prior art keywords
electrostatic chuck
resin
substrate
heating element
base plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
KR1020130058836A
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English (en)
Korean (ko)
Inventor
아키히로 구리바야시
Original Assignee
신꼬오덴기 고교 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 신꼬오덴기 고교 가부시키가이샤 filed Critical 신꼬오덴기 고교 가부시키가이샤
Publication of KR20130133673A publication Critical patent/KR20130133673A/ko
Ceased legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N13/00—Clutches or holding devices using electrostatic attraction, e.g. using Johnson-Rahbek effect
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
    • H10P72/72—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using electrostatic chucks
    • H10P72/722—Details of electrostatic chucks
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0431—Apparatus for thermal treatment
    • H10P72/0434—Apparatus for thermal treatment mainly by convection
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
KR1020130058836A 2012-05-29 2013-05-24 정전 척 및 정전 척의 제조 방법 Ceased KR20130133673A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2012-122201 2012-05-29
JP2012122201A JP5823915B2 (ja) 2012-05-29 2012-05-29 静電チャックの製造方法

Publications (1)

Publication Number Publication Date
KR20130133673A true KR20130133673A (ko) 2013-12-09

Family

ID=49669973

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020130058836A Ceased KR20130133673A (ko) 2012-05-29 2013-05-24 정전 척 및 정전 척의 제조 방법

Country Status (4)

Country Link
US (1) US9019684B2 (https=)
JP (1) JP5823915B2 (https=)
KR (1) KR20130133673A (https=)
TW (1) TWI594359B (https=)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20190143369A (ko) * 2018-06-20 2019-12-30 신꼬오덴기 고교 가부시키가이샤 정전 척 및 기판 고정 장치
KR102864484B1 (ko) * 2025-01-21 2025-09-25 주식회사 엘케이엔지니어링 정전척의 온도 보정방법

Families Citing this family (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9101038B2 (en) 2013-12-20 2015-08-04 Lam Research Corporation Electrostatic chuck including declamping electrode and method of declamping
US10002782B2 (en) 2014-10-17 2018-06-19 Lam Research Corporation ESC assembly including an electrically conductive gasket for uniform RF power delivery therethrough
JP6172301B2 (ja) 2014-11-20 2017-08-02 住友大阪セメント株式会社 静電チャック装置
CN107113921B (zh) * 2015-08-20 2020-09-11 日本碍子株式会社 静电卡盘加热器
KR101950897B1 (ko) 2015-09-25 2019-02-21 스미토모 오사카 세멘토 가부시키가이샤 정전 척 장치
US10690414B2 (en) 2015-12-11 2020-06-23 Lam Research Corporation Multi-plane heater for semiconductor substrate support
JP6580999B2 (ja) * 2016-01-13 2019-09-25 日本特殊陶業株式会社 保持装置
US10582570B2 (en) * 2016-01-22 2020-03-03 Applied Materials, Inc. Sensor system for multi-zone electrostatic chuck
JP6633931B2 (ja) * 2016-02-10 2020-01-22 日本特殊陶業株式会社 保持装置および保持装置の製造方法
US10340171B2 (en) 2016-05-18 2019-07-02 Lam Research Corporation Permanent secondary erosion containment for electrostatic chuck bonds
US11069553B2 (en) * 2016-07-07 2021-07-20 Lam Research Corporation Electrostatic chuck with features for preventing electrical arcing and light-up and improving process uniformity
US10410900B2 (en) 2016-08-05 2019-09-10 Applied Materials, Inc. Precision screen printing with sub-micron uniformity of metallization materials on green sheet ceramic
US10910195B2 (en) 2017-01-05 2021-02-02 Lam Research Corporation Substrate support with improved process uniformity
JP7050455B2 (ja) * 2017-03-15 2022-04-08 日本特殊陶業株式会社 静電チャックの製造方法
JP7012454B2 (ja) * 2017-04-27 2022-01-28 株式会社岡本工作機械製作所 静電吸着チャックの製造方法並びに半導体装置の製造方法
JP7233160B2 (ja) * 2017-09-26 2023-03-06 日本特殊陶業株式会社 保持装置および保持装置の製造方法
WO2019133457A1 (en) * 2017-12-28 2019-07-04 Rudolph Technologies, Inc. Conformal stage
KR102463946B1 (ko) 2018-05-28 2022-11-04 니뽄 도쿠슈 도교 가부시키가이샤 유지 장치, 및, 유지 장치의 제조 방법
WO2019230031A1 (ja) 2018-05-28 2019-12-05 日本特殊陶業株式会社 保持装置の製造方法、および、保持装置
JP7278072B2 (ja) * 2018-12-27 2023-05-19 日本特殊陶業株式会社 静電チャックおよび静電チャックの製造方法
US11551951B2 (en) 2020-05-05 2023-01-10 Applied Materials, Inc. Methods and systems for temperature control for a substrate
KR102787867B1 (ko) * 2020-07-03 2025-04-01 삼성디스플레이 주식회사 표시 장치의 제조 장치 및 표시 장치의 제조 방법
JP7601606B2 (ja) * 2020-10-28 2024-12-17 日本特殊陶業株式会社 保持装置
JP7701149B2 (ja) * 2020-12-24 2025-07-01 新光電気工業株式会社 静電チャックの製造方法
JP2022175500A (ja) 2021-05-13 2022-11-25 新光電気工業株式会社 静電チャック及び静電チャックの製造方法
JP2023180522A (ja) 2022-06-09 2023-12-21 新光電気工業株式会社 基板固定装置及び基板固定装置の製造方法
CN116759346B (zh) * 2023-08-16 2023-10-24 无锡尚积半导体科技有限公司 快速控温载片台、去胶刻蚀设备及去胶工艺
CN121890318A (zh) * 2023-09-21 2026-04-17 日本碍子株式会社 晶片载放台及晶片载放台的制造方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7436645B2 (en) * 2004-10-07 2008-10-14 Applied Materials, Inc. Method and apparatus for controlling temperature of a substrate
US7723648B2 (en) * 2006-09-25 2010-05-25 Tokyo Electron Limited Temperature controlled substrate holder with non-uniform insulation layer for a substrate processing system
JP2009152475A (ja) 2007-12-21 2009-07-09 Shinko Electric Ind Co Ltd 基板温調固定装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20190143369A (ko) * 2018-06-20 2019-12-30 신꼬오덴기 고교 가부시키가이샤 정전 척 및 기판 고정 장치
KR102864484B1 (ko) * 2025-01-21 2025-09-25 주식회사 엘케이엔지니어링 정전척의 온도 보정방법

Also Published As

Publication number Publication date
JP2013247342A (ja) 2013-12-09
JP5823915B2 (ja) 2015-11-25
TWI594359B (zh) 2017-08-01
TW201401429A (zh) 2014-01-01
US9019684B2 (en) 2015-04-28
US20130321974A1 (en) 2013-12-05

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