KR20130042442A - 레이저 가공 장치 - Google Patents

레이저 가공 장치 Download PDF

Info

Publication number
KR20130042442A
KR20130042442A KR1020120106477A KR20120106477A KR20130042442A KR 20130042442 A KR20130042442 A KR 20130042442A KR 1020120106477 A KR1020120106477 A KR 1020120106477A KR 20120106477 A KR20120106477 A KR 20120106477A KR 20130042442 A KR20130042442 A KR 20130042442A
Authority
KR
South Korea
Prior art keywords
laser beam
wedge prism
workpiece
laser
wedge
Prior art date
Application number
KR1020120106477A
Other languages
English (en)
Korean (ko)
Inventor
사토시 코쿠세이
켄신 이토
켄지 후쿠하라
코지 야마모토
Original Assignee
미쓰보시 다이야몬도 고교 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 미쓰보시 다이야몬도 고교 가부시키가이샤 filed Critical 미쓰보시 다이야몬도 고교 가부시키가이샤
Publication of KR20130042442A publication Critical patent/KR20130042442A/ko

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
    • B23K26/046—Automatically focusing the laser beam
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0648—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0652—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising prisms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/083—Devices involving movement of the workpiece in at least one axial direction
    • B23K26/0853—Devices involving movement of the workpiece in at least in two axial directions, e.g. in a plane
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K37/00—Auxiliary devices or processes, not specially adapted to a procedure covered by only one of the preceding main groups
    • B23K37/04—Auxiliary devices or processes, not specially adapted to a procedure covered by only one of the preceding main groups for holding or positioning work
    • B23K37/0408—Auxiliary devices or processes, not specially adapted to a procedure covered by only one of the preceding main groups for holding or positioning work for planar work
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2101/00—Articles made by soldering, welding or cutting
    • B23K2101/18—Sheet panels
KR1020120106477A 2011-10-18 2012-09-25 레이저 가공 장치 KR20130042442A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2011228928A JP5922906B2 (ja) 2011-10-18 2011-10-18 レーザビームによるガラス基板加工装置
JPJP-P-2011-228928 2011-10-18

Publications (1)

Publication Number Publication Date
KR20130042442A true KR20130042442A (ko) 2013-04-26

Family

ID=48099558

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020120106477A KR20130042442A (ko) 2011-10-18 2012-09-25 레이저 가공 장치

Country Status (4)

Country Link
JP (1) JP5922906B2 (ja)
KR (1) KR20130042442A (ja)
CN (1) CN103056512B (ja)
TW (1) TWI519370B (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2021010667A1 (ko) * 2019-07-17 2021-01-21 주식회사 레이저모션테크 레이저 드릴링 장치

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20140263212A1 (en) * 2013-03-15 2014-09-18 Electro Scientific Industries, Inc. Coordination of beam angle and workpiece movement for taper control
TWI532558B (zh) * 2013-04-29 2016-05-11 財團法人工業技術研究院 光束追跡裝置
JP2014231071A (ja) * 2013-05-29 2014-12-11 三星ダイヤモンド工業株式会社 レーザ光による基板切断装置
JP5627760B1 (ja) 2013-12-18 2014-11-19 三菱重工業株式会社 レーザ加工装置及びレーザ加工方法
CN106017330B (zh) * 2016-05-05 2018-09-14 上海交通大学 一种基于旋转双光楔折射技术的激光扫描机构
CN105938246B (zh) * 2016-05-05 2018-07-13 上海交通大学 一种基于悬臂梁结构的可调式双光楔激光扫描执行机构
DE102016220844A1 (de) 2016-10-24 2018-04-26 Trumpf Werkzeugmaschinen Gmbh + Co. Kg Verfahren zur Vorhersage der Kippneigung eines freigeschnittenen Werkstückteils und Bearbeitungsmaschine zur trennenden Bearbeitung eines plattenförmigen Werkstücks
CN106646859B (zh) * 2016-12-01 2019-03-26 上海航天控制技术研究所 单电机驱动的双光楔光学扫描执行机构
CN106425122A (zh) * 2016-12-05 2017-02-22 清华大学 一种激光旋切加工的装置及方法
CN107138862B (zh) * 2017-06-20 2023-10-20 深圳市韵腾激光科技有限公司 一种激光旋转切割装置及方法
CN107186338A (zh) * 2017-07-04 2017-09-22 华工法利莱切焊系统工程有限公司 激光切割头及三维激光切割装置
JPWO2019065533A1 (ja) * 2017-09-27 2020-11-05 三星ダイヤモンド工業株式会社 ガラス基板の切断装置、切断方法、プログラム、及び記憶媒体
CN109365414A (zh) * 2018-11-29 2019-02-22 华核（天津）新技术开发有限公司 直线轨迹型同步异向双楔形棱镜式激光清洗头及清洗方法
JP2020104167A (ja) * 2018-12-28 2020-07-09 三星ダイヤモンド工業株式会社 レーザー加工装置およびビームローテータユニット
CN111618425B (zh) * 2020-05-12 2021-03-19 济南森峰科技有限公司 一种具有棱台状转镜的激光装置
CN112171084B (zh) * 2020-09-28 2022-09-02 常熟市宏达商业设施有限公司 一种清洁型激光切割机
CN113231739B (zh) * 2021-07-13 2021-09-28 岗春激光科技（江苏）有限公司 一种镜头组件及激光焊接头
CN115922112B (zh) * 2022-12-09 2023-11-17 苏州思萃声光微纳技术研究所有限公司 用于气膜孔加工的四光楔和振镜一体化加工方法
CN115872609B (zh) * 2022-12-23 2023-06-20 中山市光大光学仪器有限公司 一种防破边的异形棱镜精雕装置

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4822974A (en) * 1988-02-18 1989-04-18 United Technologies Corporation Laser hold drilling system with lens and two wedge prisms including axial displacement of at least one prism
CN100505335C (zh) * 2007-01-08 2009-06-24 李毅 太阳能电池激光标刻设备
JP2009050869A (ja) * 2007-08-24 2009-03-12 Laser Net Kk レーザ加工方法及びレーザ加工装置
CN101168217A (zh) * 2007-11-30 2008-04-30 上海市激光技术研究所 激光列阵微孔成型装置与方法
KR100982550B1 (ko) * 2008-07-18 2010-09-15 한국기계연구원 세차 운동을 하는 레이저 빔의 경로를 보정하기 위한 보정모듈을 갖는 레이저 가공 장치 및 이를 이용한 레이저 가공방법
JP5416492B2 (ja) * 2009-06-30 2014-02-12 三星ダイヤモンド工業株式会社 レーザ光によるガラス基板加工装置
CN101670486A (zh) * 2009-09-23 2010-03-17 上海市激光技术研究所 旋转双光楔激光微孔加工装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2021010667A1 (ko) * 2019-07-17 2021-01-21 주식회사 레이저모션테크 레이저 드릴링 장치

Also Published As

Publication number Publication date
CN103056512A (zh) 2013-04-24
JP5922906B2 (ja) 2016-05-24
TWI519370B (zh) 2016-02-01
TW201317071A (zh) 2013-05-01
JP2013086129A (ja) 2013-05-13
CN103056512B (zh) 2016-10-05

Similar Documents

Publication Publication Date Title
KR20130042442A (ko) 레이저 가공 장치
US8448471B2 (en) Glass substrate processing device using laser beam
KR101362738B1 (ko) 레이저광에 의한 워크 가공 장치
JP4459530B2 (ja) レーザ加工装置
JP4721844B2 (ja) 複合加工機
KR100864863B1 (ko) 멀티 레이저 시스템
JP2007229758A (ja) レーザ加工装置
US10583524B2 (en) Laser processing head comprising a lens interchange system
JP2013146780A (ja) 脆性材料基板のレーザ加工方法
JP6021493B2 (ja) レーザ加工システム及びレーザ加工方法
JP5667347B2 (ja) レーザ光によるガラス基板加工装置
JP6030747B2 (ja) レーザビームによるガラス基板加工装置
JP6625926B2 (ja) ウエーハの加工方法
KR20130099832A (ko) 레이저 가공 장치
CN108436287B (zh) 激光加工装置
KR101174480B1 (ko) 도광판 가공장치
JP2009160610A (ja) レーザリペア装置
JP2000263268A (ja) レーザ加工装置及びその装置を用いて加工する方法
JP2013226591A (ja) レーザビームによる基板加工装置
KR101263439B1 (ko) 도광판 가공장치 및 그 장치를 이용한 도광판 가공방법
KR101164780B1 (ko) 도광판 가공장치
JPH06679A (ja) レーザ加工装置
JPH06304772A (ja) レーザ溶接方法
JP6451339B2 (ja) レーザ加工装置
JPH0985470A (ja) レーザマーキング装置

Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
E90F Notification of reason for final refusal
E601 Decision to refuse application
J201 Request for trial against refusal decision
J201 Request for trial against refusal decision
J501 Disposition of invalidation of trial
J301 Trial decision

Free format text: TRIAL DECISION FOR APPEAL AGAINST DECISION TO DECLINE REFUSAL REQUESTED 20141125

Effective date: 20151029