TWI519370B - 雷射加工裝置 - Google Patents
雷射加工裝置 Download PDFInfo
- Publication number
- TWI519370B TWI519370B TW101133434A TW101133434A TWI519370B TW I519370 B TWI519370 B TW I519370B TW 101133434 A TW101133434 A TW 101133434A TW 101133434 A TW101133434 A TW 101133434A TW I519370 B TWI519370 B TW I519370B
- Authority
- TW
- Taiwan
- Prior art keywords
- laser beam
- workpiece
- dovetail
- wedge
- laser
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
- B23K26/046—Automatically focusing the laser beam
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0648—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0652—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising prisms
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/083—Devices involving movement of the workpiece in at least one axial direction
- B23K26/0853—Devices involving movement of the workpiece in at least in two axial directions, e.g. in a plane
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K37/00—Auxiliary devices or processes, not specially adapted to a procedure covered by only one of the preceding main groups
- B23K37/04—Auxiliary devices or processes, not specially adapted to a procedure covered by only one of the preceding main groups for holding or positioning work
- B23K37/0408—Auxiliary devices or processes, not specially adapted to a procedure covered by only one of the preceding main groups for holding or positioning work for planar work
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2101/00—Articles made by soldering, welding or cutting
- B23K2101/18—Sheet panels
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011228928A JP5922906B2 (ja) | 2011-10-18 | 2011-10-18 | レーザビームによるガラス基板加工装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
TW201317071A TW201317071A (zh) | 2013-05-01 |
TWI519370B true TWI519370B (zh) | 2016-02-01 |
Family
ID=48099558
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW101133434A TWI519370B (zh) | 2011-10-18 | 2012-09-13 | 雷射加工裝置 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP5922906B2 (ja) |
KR (1) | KR20130042442A (ja) |
CN (1) | CN103056512B (ja) |
TW (1) | TWI519370B (ja) |
Families Citing this family (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20140263212A1 (en) * | 2013-03-15 | 2014-09-18 | Electro Scientific Industries, Inc. | Coordination of beam angle and workpiece movement for taper control |
TWI532558B (zh) * | 2013-04-29 | 2016-05-11 | 財團法人工業技術研究院 | 光束追跡裝置 |
JP2014231071A (ja) * | 2013-05-29 | 2014-12-11 | 三星ダイヤモンド工業株式会社 | レーザ光による基板切断装置 |
JP5627760B1 (ja) | 2013-12-18 | 2014-11-19 | 三菱重工業株式会社 | レーザ加工装置及びレーザ加工方法 |
CN106017330B (zh) * | 2016-05-05 | 2018-09-14 | 上海交通大学 | 一种基于旋转双光楔折射技术的激光扫描机构 |
CN105938246B (zh) * | 2016-05-05 | 2018-07-13 | 上海交通大学 | 一种基于悬臂梁结构的可调式双光楔激光扫描执行机构 |
DE102016220844A1 (de) | 2016-10-24 | 2018-04-26 | Trumpf Werkzeugmaschinen Gmbh + Co. Kg | Verfahren zur Vorhersage der Kippneigung eines freigeschnittenen Werkstückteils und Bearbeitungsmaschine zur trennenden Bearbeitung eines plattenförmigen Werkstücks |
CN106646859B (zh) * | 2016-12-01 | 2019-03-26 | 上海航天控制技术研究所 | 单电机驱动的双光楔光学扫描执行机构 |
CN106425122A (zh) * | 2016-12-05 | 2017-02-22 | 清华大学 | 一种激光旋切加工的装置及方法 |
CN107138862B (zh) * | 2017-06-20 | 2023-10-20 | 深圳市韵腾激光科技有限公司 | 一种激光旋转切割装置及方法 |
CN107186338A (zh) * | 2017-07-04 | 2017-09-22 | 华工法利莱切焊系统工程有限公司 | 激光切割头及三维激光切割装置 |
JPWO2019065533A1 (ja) * | 2017-09-27 | 2020-11-05 | 三星ダイヤモンド工業株式会社 | ガラス基板の切断装置、切断方法、プログラム、及び記憶媒体 |
CN109365414A (zh) * | 2018-11-29 | 2019-02-22 | 华核(天津)新技术开发有限公司 | 直线轨迹型同步异向双楔形棱镜式激光清洗头及清洗方法 |
JP2020104167A (ja) * | 2018-12-28 | 2020-07-09 | 三星ダイヤモンド工業株式会社 | レーザー加工装置およびビームローテータユニット |
KR20210009720A (ko) * | 2019-07-17 | 2021-01-27 | 주식회사 레이저모션테크 | 레이저 드릴링 장치 |
CN111618425B (zh) * | 2020-05-12 | 2021-03-19 | 济南森峰科技有限公司 | 一种具有棱台状转镜的激光装置 |
CN112171084B (zh) * | 2020-09-28 | 2022-09-02 | 常熟市宏达商业设施有限公司 | 一种清洁型激光切割机 |
CN113231739B (zh) * | 2021-07-13 | 2021-09-28 | 岗春激光科技(江苏)有限公司 | 一种镜头组件及激光焊接头 |
CN115922112B (zh) * | 2022-12-09 | 2023-11-17 | 苏州思萃声光微纳技术研究所有限公司 | 用于气膜孔加工的四光楔和振镜一体化加工方法 |
CN115872609B (zh) * | 2022-12-23 | 2023-06-20 | 中山市光大光学仪器有限公司 | 一种防破边的异形棱镜精雕装置 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4822974A (en) * | 1988-02-18 | 1989-04-18 | United Technologies Corporation | Laser hold drilling system with lens and two wedge prisms including axial displacement of at least one prism |
CN100505335C (zh) * | 2007-01-08 | 2009-06-24 | 李毅 | 太阳能电池激光标刻设备 |
JP2009050869A (ja) * | 2007-08-24 | 2009-03-12 | Laser Net Kk | レーザ加工方法及びレーザ加工装置 |
CN101168217A (zh) * | 2007-11-30 | 2008-04-30 | 上海市激光技术研究所 | 激光列阵微孔成型装置与方法 |
KR100982550B1 (ko) * | 2008-07-18 | 2010-09-15 | 한국기계연구원 | 세차 운동을 하는 레이저 빔의 경로를 보정하기 위한 보정모듈을 갖는 레이저 가공 장치 및 이를 이용한 레이저 가공방법 |
JP5416492B2 (ja) * | 2009-06-30 | 2014-02-12 | 三星ダイヤモンド工業株式会社 | レーザ光によるガラス基板加工装置 |
CN101670486A (zh) * | 2009-09-23 | 2010-03-17 | 上海市激光技术研究所 | 旋转双光楔激光微孔加工装置 |
-
2011
- 2011-10-18 JP JP2011228928A patent/JP5922906B2/ja not_active Expired - Fee Related
-
2012
- 2012-09-13 TW TW101133434A patent/TWI519370B/zh not_active IP Right Cessation
- 2012-09-25 KR KR1020120106477A patent/KR20130042442A/ko not_active Application Discontinuation
- 2012-10-17 CN CN201210393913.5A patent/CN103056512B/zh not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
CN103056512A (zh) | 2013-04-24 |
JP5922906B2 (ja) | 2016-05-24 |
KR20130042442A (ko) | 2013-04-26 |
TW201317071A (zh) | 2013-05-01 |
JP2013086129A (ja) | 2013-05-13 |
CN103056512B (zh) | 2016-10-05 |
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Legal Events
Date | Code | Title | Description |
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MM4A | Annulment or lapse of patent due to non-payment of fees |