KR20120055573A - 광학 소자용 홀딩 장치 - Google Patents

광학 소자용 홀딩 장치 Download PDF

Info

Publication number
KR20120055573A
KR20120055573A KR1020127005285A KR20127005285A KR20120055573A KR 20120055573 A KR20120055573 A KR 20120055573A KR 1020127005285 A KR1020127005285 A KR 1020127005285A KR 20127005285 A KR20127005285 A KR 20127005285A KR 20120055573 A KR20120055573 A KR 20120055573A
Authority
KR
South Korea
Prior art keywords
axis
optical element
joint
holding device
optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
KR1020127005285A
Other languages
English (en)
Korean (ko)
Inventor
울리히 베버
아르민 쇠파흐
후베르트 홀더러
Original Assignee
칼 짜이스 에스엠티 게엠베하
칼 짜이스 레이저 옵틱스 게엠베하
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 칼 짜이스 에스엠티 게엠베하, 칼 짜이스 레이저 옵틱스 게엠베하 filed Critical 칼 짜이스 에스엠티 게엠베하
Publication of KR20120055573A publication Critical patent/KR20120055573A/ko
Withdrawn legal-status Critical Current

Links

Images

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/003—Alignment of optical elements
    • G02B7/004—Manual alignment, e.g. micromanipulators
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • G02B7/022—Mountings, adjusting means, or light-tight connections, for optical elements for lenses lens and mount having complementary engagement means, e.g. screw/thread
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • G02B7/023—Mountings, adjusting means, or light-tight connections, for optical elements for lenses permitting adjustment
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • G02B7/027—Mountings, adjusting means, or light-tight connections, for optical elements for lenses the lens being in the form of a sphere or ball
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
    • G03F7/70825—Mounting of individual elements, e.g. mounts, holders or supports

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
  • Mounting And Adjusting Of Optical Elements (AREA)
  • Lens Barrels (AREA)
KR1020127005285A 2009-07-31 2010-07-23 광학 소자용 홀딩 장치 Withdrawn KR20120055573A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102009037135A DE102009037135B4 (de) 2009-07-31 2009-07-31 Haltevorrichtung für ein optisches Element
DE102009037135.4 2009-07-31

Publications (1)

Publication Number Publication Date
KR20120055573A true KR20120055573A (ko) 2012-05-31

Family

ID=42671720

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020127005285A Withdrawn KR20120055573A (ko) 2009-07-31 2010-07-23 광학 소자용 홀딩 장치

Country Status (6)

Country Link
US (1) US8508868B2 (enExample)
JP (1) JP5592951B2 (enExample)
KR (1) KR20120055573A (enExample)
CN (1) CN102549469B (enExample)
DE (1) DE102009037135B4 (enExample)
WO (1) WO2011012264A1 (enExample)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102011012388B3 (de) * 2011-02-25 2012-05-31 Imm Photonics Gmbh Justiervorrichtung
US8279544B1 (en) 2011-03-18 2012-10-02 Premier Systems USA, Inc Selectively attachable and removable lenses for communication devices
WO2014043266A1 (en) 2012-09-12 2014-03-20 Premier Systems Usa, Inc. Removable optical devices for mobile electronic devices
USD697958S1 (en) 2012-10-30 2014-01-21 Premier Systems Usa, Inc. Lens component
US9294660B2 (en) 2013-03-13 2016-03-22 Olloclip, Llc Removable lenses for mobile electronic devices
US9661200B2 (en) 2013-08-07 2017-05-23 Olloclip, Llc Auxiliary optical components for mobile devices
WO2015048143A1 (en) 2013-09-26 2015-04-02 Olloclip, Llc Selectively attachable and removable optical systems for mobile devices
USD726796S1 (en) 2013-11-21 2015-04-14 Olloclip, Llc Optical component
USD727385S1 (en) 2013-11-21 2015-04-21 Olloclip, Llc Optical component
USD727868S1 (en) 2013-11-21 2015-04-28 Olloclip, Llc Optical component
USD754228S1 (en) 2014-02-19 2016-04-19 olioclip, LLC Optical component
US10088738B2 (en) 2014-04-11 2018-10-02 Portero Holdings, Llc Auxiliary optical devices
USD761896S1 (en) 2014-04-11 2016-07-19 Olloclip, Llc Optical component
WO2015195879A1 (en) 2014-06-19 2015-12-23 Olloclip, Llc Auxiliary optical components for mobile devices
USD763340S1 (en) 2014-10-02 2016-08-09 Olloclip, Llc Optical component
DE102017112517B3 (de) 2017-06-07 2018-12-06 Physik Instrumente (Pi) Gmbh & Co. Kg Stellvorrichtung
US11448854B2 (en) 2019-02-21 2022-09-20 Alcon, Inc. Angle adjustment system
CN114063238A (zh) * 2020-07-31 2022-02-18 奥普托图尼股份公司 光学装置、制造光学装置的方法和操作光学装置的方法
DE102020134653B3 (de) 2020-12-22 2022-05-12 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung eingetragener Verein Justierbarer Optikhalter für ein optisches Element

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5220460A (en) * 1991-09-24 1993-06-15 Eastman Kodak Company Adjustable mount for cylindrical lens with torque applied directly to lens
US5210648A (en) * 1991-09-24 1993-05-11 Eastman Kodak Company Adjustable mount for cylindrical lens with independent rotational feature
JP3894509B2 (ja) * 1995-08-07 2007-03-22 キヤノン株式会社 光学装置、露光装置およびデバイス製造方法
US5694257A (en) * 1996-05-06 1997-12-02 New Focus, Inc. Rotary beamsplitter prism mount
JPH11160595A (ja) * 1997-11-27 1999-06-18 Minolta Co Ltd 光学素子のホルダー
DE19827603A1 (de) * 1998-06-20 1999-12-23 Zeiss Carl Fa Optisches System, insbesondere Projektions-Belichtungsanlage der Mikrolithographie
US6768599B2 (en) * 1998-12-25 2004-07-27 Olympus Corporation Lens barrel
US6320707B1 (en) * 2000-01-18 2001-11-20 The Boeing Company Miniature piezoelectric translators for optical applications
JP4945845B2 (ja) * 2000-03-31 2012-06-06 株式会社ニコン 光学素子保持装置、鏡筒及び露光装置並びにマイクロデバイスの製造方法。
DE20012046U1 (de) 2000-07-12 2000-09-14 Fa. Carl Zeiss, 89518 Heidenheim Vorrichtung zum Justieren einer Fläche eines Justierteiles
DE10053899A1 (de) * 2000-10-31 2002-05-08 Zeiss Carl Vorrichtung zur Lagerung eines optischen Elementes
DE10212547A1 (de) * 2002-03-21 2003-10-02 Zeiss Carl Smt Ag Vorrichtung zur Manipulation der Winkellage eines Gegenstands gegenüber einer festen Struktur
DE20220139U1 (de) * 2002-12-30 2003-03-27 Rogotzki, André, 09117 Chemnitz Justiervorrichtung für eine optische Komponente
JP3805323B2 (ja) * 2003-05-21 2006-08-02 キヤノン株式会社 露光装置、収差低減方法及び光学部材調整機構
JP4532545B2 (ja) * 2004-06-29 2010-08-25 カール・ツァイス・エスエムティー・アーゲー 光学素子のための位置決めユニット及び調節デバイス
KR20070090246A (ko) 2004-12-22 2007-09-05 칼 짜이스 레이저 옵틱스 게엠베하 선형 빔을 형성하기 위한 광 조명 시스템
WO2006119970A2 (en) * 2005-05-09 2006-11-16 Carl Zeiss Smt Ag Assembly for adjusting an optical element
EP1899756A2 (de) 2005-07-01 2008-03-19 Carl Zeiss SMT AG Anordnung zur lagerung eines optischen bauelements
KR101374973B1 (ko) * 2007-02-28 2014-03-17 코닝 인코포레이티드 신호점에 대하여 회전가능한 광학 탑재 장치
DE102008040218A1 (de) * 2007-07-11 2009-01-15 Carl Zeiss Smt Ag Drehbares optisches Element
JP5712519B2 (ja) 2010-07-23 2015-05-07 株式会社リコー 撮像装置および撮像方法

Also Published As

Publication number Publication date
CN102549469A (zh) 2012-07-04
US20120154935A1 (en) 2012-06-21
DE102009037135B4 (de) 2013-07-04
JP5592951B2 (ja) 2014-09-17
WO2011012264A1 (en) 2011-02-03
US8508868B2 (en) 2013-08-13
JP2013501250A (ja) 2013-01-10
DE102009037135A1 (de) 2011-02-03
CN102549469B (zh) 2014-08-06

Similar Documents

Publication Publication Date Title
KR20120055573A (ko) 광학 소자용 홀딩 장치
US9664873B2 (en) Positioning unit and apparatus for adjustment of an optical element
JP5710613B2 (ja) 光学要素のための保持装置
US7242537B2 (en) Holding and positioning apparatus for an optical element
US9557560B2 (en) Mirror unit and exposure apparatus
JP6843864B2 (ja) コンポーネントを位置合わせするデバイス
US6967792B2 (en) Apparatus for positioning an optical element in a structure
WO2006018888A1 (ja) 反射鏡支持機構
JP4994598B2 (ja) 駆動装置
JP2004354519A (ja) 撮像装置および撮像装置の焦点調整装置
JP2009505411A (ja) 液浸リソグラフィー用オブジェクティブ
KR20050016557A (ko) 구조내의 광학소자 위치 설정 장치
JP2006162971A (ja) 光走査装置、及び画像形成装置

Legal Events

Date Code Title Description
PA0105 International application

Patent event date: 20120228

Patent event code: PA01051R01D

Comment text: International Patent Application

PG1501 Laying open of application
A201 Request for examination
PA0201 Request for examination

Patent event code: PA02012R01D

Patent event date: 20150722

Comment text: Request for Examination of Application

PC1202 Submission of document of withdrawal before decision of registration

Comment text: [Withdrawal of Procedure relating to Patent, etc.] Withdrawal (Abandonment)

Patent event code: PC12021R01D

Patent event date: 20160121

WITB Written withdrawal of application