CN102549469B - 光学元件的保持布置 - Google Patents

光学元件的保持布置 Download PDF

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Publication number
CN102549469B
CN102549469B CN201080044076.4A CN201080044076A CN102549469B CN 102549469 B CN102549469 B CN 102549469B CN 201080044076 A CN201080044076 A CN 201080044076A CN 102549469 B CN102549469 B CN 102549469B
Authority
CN
China
Prior art keywords
axis
optical element
holding arrangement
optical
arrangement according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201080044076.4A
Other languages
English (en)
Chinese (zh)
Other versions
CN102549469A (zh
Inventor
乌尔里克.韦伯
阿明.舍帕克
赫伯特.霍尔德尔
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Carl Zeiss SMT GmbH
Carl Zeiss Laser Optics GmbH
Original Assignee
Carl Zeiss SMT GmbH
Carl Zeiss Laser Optics GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Carl Zeiss SMT GmbH, Carl Zeiss Laser Optics GmbH filed Critical Carl Zeiss SMT GmbH
Publication of CN102549469A publication Critical patent/CN102549469A/zh
Application granted granted Critical
Publication of CN102549469B publication Critical patent/CN102549469B/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/003—Alignment of optical elements
    • G02B7/004—Manual alignment, e.g. micromanipulators
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • G02B7/022—Mountings, adjusting means, or light-tight connections, for optical elements for lenses lens and mount having complementary engagement means, e.g. screw/thread
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • G02B7/023—Mountings, adjusting means, or light-tight connections, for optical elements for lenses permitting adjustment
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • G02B7/027—Mountings, adjusting means, or light-tight connections, for optical elements for lenses the lens being in the form of a sphere or ball
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
    • G03F7/70825—Mounting of individual elements, e.g. mounts, holders or supports

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
  • Mounting And Adjusting Of Optical Elements (AREA)
  • Lens Barrels (AREA)
CN201080044076.4A 2009-07-31 2010-07-23 光学元件的保持布置 Expired - Fee Related CN102549469B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102009037135A DE102009037135B4 (de) 2009-07-31 2009-07-31 Haltevorrichtung für ein optisches Element
DE102009037135.4 2009-07-31
PCT/EP2010/004515 WO2011012264A1 (en) 2009-07-31 2010-07-23 Holding arrangement for an optical element

Publications (2)

Publication Number Publication Date
CN102549469A CN102549469A (zh) 2012-07-04
CN102549469B true CN102549469B (zh) 2014-08-06

Family

ID=42671720

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201080044076.4A Expired - Fee Related CN102549469B (zh) 2009-07-31 2010-07-23 光学元件的保持布置

Country Status (6)

Country Link
US (1) US8508868B2 (enExample)
JP (1) JP5592951B2 (enExample)
KR (1) KR20120055573A (enExample)
CN (1) CN102549469B (enExample)
DE (1) DE102009037135B4 (enExample)
WO (1) WO2011012264A1 (enExample)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102011012388B3 (de) * 2011-02-25 2012-05-31 Imm Photonics Gmbh Justiervorrichtung
US8279544B1 (en) 2011-03-18 2012-10-02 Premier Systems USA, Inc Selectively attachable and removable lenses for communication devices
WO2014043266A1 (en) 2012-09-12 2014-03-20 Premier Systems Usa, Inc. Removable optical devices for mobile electronic devices
USD697958S1 (en) 2012-10-30 2014-01-21 Premier Systems Usa, Inc. Lens component
US9294660B2 (en) 2013-03-13 2016-03-22 Olloclip, Llc Removable lenses for mobile electronic devices
US9661200B2 (en) 2013-08-07 2017-05-23 Olloclip, Llc Auxiliary optical components for mobile devices
WO2015048143A1 (en) 2013-09-26 2015-04-02 Olloclip, Llc Selectively attachable and removable optical systems for mobile devices
USD726796S1 (en) 2013-11-21 2015-04-14 Olloclip, Llc Optical component
USD727385S1 (en) 2013-11-21 2015-04-21 Olloclip, Llc Optical component
USD727868S1 (en) 2013-11-21 2015-04-28 Olloclip, Llc Optical component
USD754228S1 (en) 2014-02-19 2016-04-19 olioclip, LLC Optical component
US10088738B2 (en) 2014-04-11 2018-10-02 Portero Holdings, Llc Auxiliary optical devices
USD761896S1 (en) 2014-04-11 2016-07-19 Olloclip, Llc Optical component
WO2015195879A1 (en) 2014-06-19 2015-12-23 Olloclip, Llc Auxiliary optical components for mobile devices
USD763340S1 (en) 2014-10-02 2016-08-09 Olloclip, Llc Optical component
DE102017112517B3 (de) 2017-06-07 2018-12-06 Physik Instrumente (Pi) Gmbh & Co. Kg Stellvorrichtung
US11448854B2 (en) 2019-02-21 2022-09-20 Alcon, Inc. Angle adjustment system
CN114063238A (zh) * 2020-07-31 2022-02-18 奥普托图尼股份公司 光学装置、制造光学装置的方法和操作光学装置的方法
DE102020134653B3 (de) 2020-12-22 2022-05-12 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung eingetragener Verein Justierbarer Optikhalter für ein optisches Element

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5210648A (en) * 1991-09-24 1993-05-11 Eastman Kodak Company Adjustable mount for cylindrical lens with independent rotational feature
US5694257A (en) * 1996-05-06 1997-12-02 New Focus, Inc. Rotary beamsplitter prism mount
US6115166A (en) * 1997-11-27 2000-09-05 Minolta Co., Ltd. Optical element holder
US6320707B1 (en) * 2000-01-18 2001-11-20 The Boeing Company Miniature piezoelectric translators for optical applications
US6388823B1 (en) * 1998-06-20 2002-05-14 Carl-Zeiss-Stiftung Trading As Carl Zeiss Optical system, especially a projection light facility for microlithography
DE20220139U1 (de) * 2002-12-30 2003-03-27 Rogotzki, André, 09117 Chemnitz Justiervorrichtung für eine optische Komponente
DE102008040218A1 (de) * 2007-07-11 2009-01-15 Carl Zeiss Smt Ag Drehbares optisches Element

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5220460A (en) * 1991-09-24 1993-06-15 Eastman Kodak Company Adjustable mount for cylindrical lens with torque applied directly to lens
JP3894509B2 (ja) * 1995-08-07 2007-03-22 キヤノン株式会社 光学装置、露光装置およびデバイス製造方法
US6768599B2 (en) * 1998-12-25 2004-07-27 Olympus Corporation Lens barrel
JP4945845B2 (ja) * 2000-03-31 2012-06-06 株式会社ニコン 光学素子保持装置、鏡筒及び露光装置並びにマイクロデバイスの製造方法。
DE20012046U1 (de) 2000-07-12 2000-09-14 Fa. Carl Zeiss, 89518 Heidenheim Vorrichtung zum Justieren einer Fläche eines Justierteiles
DE10053899A1 (de) * 2000-10-31 2002-05-08 Zeiss Carl Vorrichtung zur Lagerung eines optischen Elementes
DE10212547A1 (de) * 2002-03-21 2003-10-02 Zeiss Carl Smt Ag Vorrichtung zur Manipulation der Winkellage eines Gegenstands gegenüber einer festen Struktur
JP3805323B2 (ja) * 2003-05-21 2006-08-02 キヤノン株式会社 露光装置、収差低減方法及び光学部材調整機構
JP4532545B2 (ja) * 2004-06-29 2010-08-25 カール・ツァイス・エスエムティー・アーゲー 光学素子のための位置決めユニット及び調節デバイス
KR20070090246A (ko) 2004-12-22 2007-09-05 칼 짜이스 레이저 옵틱스 게엠베하 선형 빔을 형성하기 위한 광 조명 시스템
WO2006119970A2 (en) * 2005-05-09 2006-11-16 Carl Zeiss Smt Ag Assembly for adjusting an optical element
EP1899756A2 (de) 2005-07-01 2008-03-19 Carl Zeiss SMT AG Anordnung zur lagerung eines optischen bauelements
KR101374973B1 (ko) * 2007-02-28 2014-03-17 코닝 인코포레이티드 신호점에 대하여 회전가능한 광학 탑재 장치
JP5712519B2 (ja) 2010-07-23 2015-05-07 株式会社リコー 撮像装置および撮像方法

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5210648A (en) * 1991-09-24 1993-05-11 Eastman Kodak Company Adjustable mount for cylindrical lens with independent rotational feature
US5694257A (en) * 1996-05-06 1997-12-02 New Focus, Inc. Rotary beamsplitter prism mount
US6115166A (en) * 1997-11-27 2000-09-05 Minolta Co., Ltd. Optical element holder
US6388823B1 (en) * 1998-06-20 2002-05-14 Carl-Zeiss-Stiftung Trading As Carl Zeiss Optical system, especially a projection light facility for microlithography
US6320707B1 (en) * 2000-01-18 2001-11-20 The Boeing Company Miniature piezoelectric translators for optical applications
DE20220139U1 (de) * 2002-12-30 2003-03-27 Rogotzki, André, 09117 Chemnitz Justiervorrichtung für eine optische Komponente
DE102008040218A1 (de) * 2007-07-11 2009-01-15 Carl Zeiss Smt Ag Drehbares optisches Element

Also Published As

Publication number Publication date
KR20120055573A (ko) 2012-05-31
CN102549469A (zh) 2012-07-04
US20120154935A1 (en) 2012-06-21
DE102009037135B4 (de) 2013-07-04
JP5592951B2 (ja) 2014-09-17
WO2011012264A1 (en) 2011-02-03
US8508868B2 (en) 2013-08-13
JP2013501250A (ja) 2013-01-10
DE102009037135A1 (de) 2011-02-03

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Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20140806

Termination date: 20160723