KR20120042990A - 부상 반송 장치 - Google Patents

부상 반송 장치 Download PDF

Info

Publication number
KR20120042990A
KR20120042990A KR1020127004006A KR20127004006A KR20120042990A KR 20120042990 A KR20120042990 A KR 20120042990A KR 1020127004006 A KR1020127004006 A KR 1020127004006A KR 20127004006 A KR20127004006 A KR 20127004006A KR 20120042990 A KR20120042990 A KR 20120042990A
Authority
KR
South Korea
Prior art keywords
floating
fluid
control
conveying
height
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
KR1020127004006A
Other languages
English (en)
Korean (ko)
Inventor
겐스케 히라타
후미오 하세가와
가이 다나카
Original Assignee
가부시키가이샤 아이에이치아이
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 가부시키가이샤 아이에이치아이 filed Critical 가부시키가이샤 아이에이치아이
Publication of KR20120042990A publication Critical patent/KR20120042990A/ko
Ceased legal-status Critical Current

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/02—Controlled or contamination-free environments or clean space conditions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/04—Arrangements of vacuum systems or suction cups
    • B65G2249/045—Details of suction cups suction cups

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • Control Of Vehicles With Linear Motors And Vehicles That Are Magnetically Levitated (AREA)
KR1020127004006A 2007-06-29 2008-05-09 부상 반송 장치 Ceased KR20120042990A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007173446A JP2009012877A (ja) 2007-06-29 2007-06-29 浮上搬送装置
JPJP-P-2007-173446 2007-06-29

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
KR1020107000545A Division KR101135000B1 (ko) 2007-06-29 2008-05-09 부상 반송 장치

Publications (1)

Publication Number Publication Date
KR20120042990A true KR20120042990A (ko) 2012-05-03

Family

ID=40225915

Family Applications (2)

Application Number Title Priority Date Filing Date
KR1020127004006A Ceased KR20120042990A (ko) 2007-06-29 2008-05-09 부상 반송 장치
KR1020107000545A Expired - Fee Related KR101135000B1 (ko) 2007-06-29 2008-05-09 부상 반송 장치

Family Applications After (1)

Application Number Title Priority Date Filing Date
KR1020107000545A Expired - Fee Related KR101135000B1 (ko) 2007-06-29 2008-05-09 부상 반송 장치

Country Status (5)

Country Link
JP (1) JP2009012877A (enrdf_load_stackoverflow)
KR (2) KR20120042990A (enrdf_load_stackoverflow)
CN (1) CN101715421A (enrdf_load_stackoverflow)
TW (2) TW200914350A (enrdf_load_stackoverflow)
WO (1) WO2009004858A1 (enrdf_load_stackoverflow)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5372824B2 (ja) * 2010-03-30 2013-12-18 大日本スクリーン製造株式会社 基板処理装置および基板処理方法
JP5495065B2 (ja) * 2010-12-06 2014-05-21 株式会社ダイフク 板状体搬送装置
JP5582021B2 (ja) * 2010-12-22 2014-09-03 村田機械株式会社 物品搬送装置
CN102923480A (zh) * 2011-08-12 2013-02-13 大银微系统股份有限公司 气浮平台的管路整合构造
CN102616567B (zh) * 2012-03-23 2014-02-05 深圳市华星光电技术有限公司 玻璃基板的取出装置
CN106938785B (zh) * 2017-02-28 2022-07-19 江苏科技大学 一种具有形变检测功能的玻璃基板气浮装置及检测方法
CN114476681A (zh) * 2022-03-09 2022-05-13 河北泰晶新材料科技有限公司 一种物料输送系统、物料输送方法及存储介质

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62112339A (ja) * 1985-11-12 1987-05-23 Nippon Telegr & Teleph Corp <Ntt> 半導体基板のロツト編成装置
JP4187366B2 (ja) * 1999-09-28 2008-11-26 株式会社トーショー 散薬供給装置
JPWO2004088742A1 (ja) * 2003-03-28 2006-07-06 平田機工株式会社 基板搬送システム
TW200502070A (en) * 2003-07-04 2005-01-16 Rorze Corp Carrying apparatus and carrying control method for sheet-like objects
JP2005075496A (ja) * 2003-08-28 2005-03-24 Murata Mach Ltd 浮上搬送装置
JP4613800B2 (ja) * 2004-12-01 2011-01-19 株式会社Ihi 浮上装置および搬送装置
CN100507778C (zh) * 2005-01-19 2009-07-01 三菱电机株式会社 定位装置及定位方法
JP4570545B2 (ja) * 2005-09-22 2010-10-27 東京エレクトロン株式会社 基板処理装置及び基板処理方法
TWI301119B (en) * 2005-10-26 2008-09-21 Ind Tech Res Inst Substrate transportation apparatus
TW200800773A (en) * 2005-11-14 2008-01-01 Ishikawajima Harima Heavy Ind Floating device and carrying device

Also Published As

Publication number Publication date
WO2009004858A1 (ja) 2009-01-08
TWI375650B (enrdf_load_stackoverflow) 2012-11-01
TW200914350A (en) 2009-04-01
TW201242877A (en) 2012-11-01
KR101135000B1 (ko) 2012-04-09
TWI399331B (zh) 2013-06-21
JP2009012877A (ja) 2009-01-22
KR20100018611A (ko) 2010-02-17
CN101715421A (zh) 2010-05-26

Similar Documents

Publication Publication Date Title
KR101135000B1 (ko) 부상 반송 장치
KR101152708B1 (ko) 반송 장치
KR101077796B1 (ko) 부상 반송 장치
KR101773494B1 (ko) 반송 장치
KR101238216B1 (ko) 방향 전환 장치 및 방향 전환 장치를 포함하는 부상 반송 시스템
TW201024192A (en) Gas-ejecting bearings for transport of glass sheets
KR101141122B1 (ko) 부상 반송 장치 및 부상 반송 장치를 포함하는 처리 시스템
JP4349101B2 (ja) 基板搬送装置
KR20100018613A (ko) 부상 장치 및 부상 반송 장치
KR20100054857A (ko) 부상 장치 및 부상 반송 장치
JP2008098198A (ja) 基板搬送装置
KR101144878B1 (ko) 부상 장치 및 부상 반송 장치
KR101049872B1 (ko) 부상 반송 장치
JPWO2006115157A1 (ja) カセット搬送システム
KR101610215B1 (ko) 반송 장치
KR20120005263U (ko) 부상 장치 및 부상 반송 장치
KR101214888B1 (ko) 부상 반송 장치
JP5549311B2 (ja) 浮上搬送装置及び方向転換装置
JP5604940B2 (ja) 浮上搬送装置
JP5515923B2 (ja) 浮上搬送装置
KR20210121538A (ko) 부상 스테이지, 및 이를 포함하는 기판 처리 장치

Legal Events

Date Code Title Description
A107 Divisional application of patent
A201 Request for examination
PA0104 Divisional application for international application

Comment text: Divisional Application for International Patent

Patent event code: PA01041R01D

Patent event date: 20120215

PA0201 Request for examination
PG1501 Laying open of application
E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

Comment text: Notification of reason for refusal

Patent event date: 20120507

Patent event code: PE09021S01D

AMND Amendment
E601 Decision to refuse application
PE0601 Decision on rejection of patent

Patent event date: 20120914

Comment text: Decision to Refuse Application

Patent event code: PE06012S01D

Patent event date: 20120507

Comment text: Notification of reason for refusal

Patent event code: PE06011S01I

J201 Request for trial against refusal decision
PJ0201 Trial against decision of rejection

Patent event date: 20121017

Comment text: Request for Trial against Decision on Refusal

Patent event code: PJ02012R01D

Patent event date: 20120914

Comment text: Decision to Refuse Application

Patent event code: PJ02011S01I

Appeal kind category: Appeal against decision to decline refusal

Decision date: 20130325

Appeal identifier: 2012101008781

Request date: 20121017

AMND Amendment
PB0901 Examination by re-examination before a trial

Comment text: Amendment to Specification, etc.

Patent event date: 20121109

Patent event code: PB09011R02I

Comment text: Request for Trial against Decision on Refusal

Patent event date: 20121017

Patent event code: PB09011R01I

Comment text: Amendment to Specification, etc.

Patent event date: 20120704

Patent event code: PB09011R02I

B601 Maintenance of original decision after re-examination before a trial
PB0601 Maintenance of original decision after re-examination before a trial
J301 Trial decision

Free format text: TRIAL DECISION FOR APPEAL AGAINST DECISION TO DECLINE REFUSAL REQUESTED 20121017

Effective date: 20130325

PJ1301 Trial decision

Patent event code: PJ13011S01D

Patent event date: 20130326

Comment text: Trial Decision on Objection to Decision on Refusal

Appeal kind category: Appeal against decision to decline refusal

Request date: 20121017

Decision date: 20130325

Appeal identifier: 2012101008781