KR20100122884A - 게이트 밸브 - Google Patents

게이트 밸브 Download PDF

Info

Publication number
KR20100122884A
KR20100122884A KR1020100094984A KR20100094984A KR20100122884A KR 20100122884 A KR20100122884 A KR 20100122884A KR 1020100094984 A KR1020100094984 A KR 1020100094984A KR 20100094984 A KR20100094984 A KR 20100094984A KR 20100122884 A KR20100122884 A KR 20100122884A
Authority
KR
South Korea
Prior art keywords
valve body
substrate carrying
substrate
valve
board
Prior art date
Application number
KR1020100094984A
Other languages
English (en)
Korean (ko)
Inventor
츠토무 와카모리
Original Assignee
도쿄엘렉트론가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 도쿄엘렉트론가부시키가이샤 filed Critical 도쿄엘렉트론가부시키가이샤
Publication of KR20100122884A publication Critical patent/KR20100122884A/ko

Links

Images

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67126—Apparatus for sealing, encapsulating, glassing, decapsulating or the like
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
    • F16K3/18—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
    • F16K3/184—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members by means of cams
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Sliding Valves (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Details Of Valves (AREA)
  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
  • Drying Of Semiconductors (AREA)
  • Mechanically-Actuated Valves (AREA)
KR1020100094984A 2007-10-10 2010-09-30 게이트 밸브 KR20100122884A (ko)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JPJP-P-2007-263992 2007-10-10
JP2007263992 2007-10-10
JPJP-P-2008-229367 2008-09-08
JP2008229367A JP2009109006A (ja) 2007-10-10 2008-09-08 ゲートバルブ及びそれを用いた基板処理装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
KR1020080099280A Division KR101020364B1 (ko) 2007-10-10 2008-10-09 게이트 밸브 및 그것을 이용한 기판 처리 장치

Publications (1)

Publication Number Publication Date
KR20100122884A true KR20100122884A (ko) 2010-11-23

Family

ID=40571386

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020100094984A KR20100122884A (ko) 2007-10-10 2010-09-30 게이트 밸브

Country Status (4)

Country Link
JP (2) JP2009109006A (ja)
KR (1) KR20100122884A (ja)
CN (1) CN101408249B (ja)
TW (1) TWI439622B (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101534783B1 (ko) * 2013-08-20 2015-07-08 서울대학교산학협력단 양액필름 재배상
KR20170003851U (ko) * 2016-05-02 2017-11-10 청 킹 엔터프라이즈 컴퍼니 리미티드 래치기구 및 이를 구비한 웨이퍼 카세트

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011054928A (ja) * 2009-08-04 2011-03-17 Tokyo Electron Ltd ゲートバルブ及びそれを用いた基板処理システム
JP5389684B2 (ja) * 2010-01-29 2014-01-15 東京エレクトロン株式会社 ゲートバルブ及びそれを用いた基板処理装置
KR101125828B1 (ko) 2010-08-02 2012-04-02 주식회사 밀레니엄투자 기판처리시스템의 게이트장치
CN102168763B (zh) * 2011-05-18 2012-11-14 汨罗市金成管道阀门工程有限公司 凸顶式单闸阀
KR101293590B1 (ko) * 2011-12-16 2013-08-13 주식회사 뉴파워 프라즈마 양방향 게이트 밸브 및 이를 구비한 기판 처리 시스템
KR101363527B1 (ko) * 2012-05-31 2014-02-14 (주)에스더블유피 진공 게이트 밸브
KR101501362B1 (ko) * 2012-08-09 2015-03-10 가부시키가이샤 스크린 홀딩스 기판처리장치 및 기판처리방법
CN103451616B (zh) * 2013-09-16 2016-07-27 南方科技大学 一种真空镀膜系统及其真空闸门装置
JP6209043B2 (ja) * 2013-09-30 2017-10-04 東京エレクトロン株式会社 ゲートバルブおよび基板処理装置
DE102013226586A1 (de) * 2013-12-19 2015-07-09 Robert Bosch Gmbh Ventil mit einem Verbindungselement
JP6902409B2 (ja) * 2017-06-23 2021-07-14 東京エレクトロン株式会社 プラズマ処理装置
CN107858666A (zh) * 2017-12-13 2018-03-30 北京创昱科技有限公司 一种真空镀膜用集成腔室
KR101920414B1 (ko) * 2018-07-12 2018-11-20 한국진공주식회사 진공챔버의 게이트 밸브
EP4283277A1 (en) * 2022-05-24 2023-11-29 Leica Mikrosysteme GmbH Sample holder, loading device, and method for inserting a sample into a sample holder

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6040940Y2 (ja) * 1980-11-06 1985-12-11 日本電子株式会社 スル−スバルブ
US4779649A (en) * 1987-01-30 1988-10-25 Huntington Mechanical Laboratories, Inc. Gate valve with camming wedge, pressure equalizer, and replaceable bleeder valve
JP2002206650A (ja) * 2001-01-10 2002-07-26 Anelva Corp ゲートバルブ

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101534783B1 (ko) * 2013-08-20 2015-07-08 서울대학교산학협력단 양액필름 재배상
KR20170003851U (ko) * 2016-05-02 2017-11-10 청 킹 엔터프라이즈 컴퍼니 리미티드 래치기구 및 이를 구비한 웨이퍼 카세트

Also Published As

Publication number Publication date
JP2014016035A (ja) 2014-01-30
JP2009109006A (ja) 2009-05-21
CN101408249A (zh) 2009-04-15
TWI439622B (zh) 2014-06-01
JP5724091B2 (ja) 2015-05-27
CN101408249B (zh) 2011-01-05
TW200928160A (en) 2009-07-01

Similar Documents

Publication Publication Date Title
KR20100122884A (ko) 게이트 밸브
US8419337B2 (en) Gate valve and substrate processing system using same
JP4921741B2 (ja) ミニエンバイロメントポッドと装置との間の真空インタフェース
KR101020364B1 (ko) 게이트 밸브 및 그것을 이용한 기판 처리 장치
KR100832926B1 (ko) 승강 기구 및 반송 장치
JP2013011289A (ja) ゲートバルブ及びそれを用いた基板処理システム
JP4023543B2 (ja) 基板搬送装置および基板搬送方法ならびに真空処理装置
KR101972730B1 (ko) 진공 처리 장치
TWI421969B (zh) A substrate alignment device and a substrate storage unit
WO2001006560A1 (fr) Dispositif d'ouverture/fermeture pour un couvercle d'ouverture/fermeture de boite de stockage d'objet non traite et systeme de traitement d'objet non traite
US6799394B2 (en) Apparatus for sealing a vacuum chamber
KR101069544B1 (ko) 역압 대응 게이트 밸브
KR20130139019A (ko) 진공 차단 장치
JP2002206650A (ja) ゲートバルブ
KR101257561B1 (ko) 게이트 밸브 및 이것을 이용한 기판 처리 장치
JP2005076845A (ja) ゲートバルブ
KR100949819B1 (ko) 타블릿 성형 다이 어셈블리
KR20090088731A (ko) 리프트 핀 높이 조정장치 및 이를 가지는 평판표시소자제조장비
KR102146911B1 (ko) 대면적 게이트 밸브
JP4611711B2 (ja) プレス装置システム
TW201430252A (zh) 閘閥及基板處理系統
JPH11311073A (ja) ドア式気密閉塞装置

Legal Events

Date Code Title Description
A107 Divisional application of patent
WITN Withdrawal due to no request for examination