KR20100042743A - Contactor installation and the moving way to test semiconductor device - Google Patents

Abstract

PURPOSE: A contactor apparatus and an operating method thereof for testing a semiconductor device are provided to prevent breakdown of test site component with a configuration most similar environment using a manual test jig. CONSTITUTION: A contactor(110) is located on the top of a semiconductor test process, and can move with an up and down drive motor. The contactor adjust(120) is attached to the bottom of the contactor. It can move with top and bottom drive motor with contactor to the top and bottom. A contactor module(130) is capable of attaching or detaching at the contactor adjustor. The device is contacted to be testable. A test site(140) connects the device.

Description

Contactor device for testing semiconductor device and its operation method {Contactor installation and the moving way to test semiconductor device}

The present invention relates to a contactor apparatus for testing a semiconductor device and a method of operating the same, and more particularly, to a device test contactor apparatus and a driving method thereof for performing a test of a device in a vertical handler.

In general, semiconductor devices undergo a predetermined assembly process and finally test.

By performing the process, good and bad parts are sorted out.

The test apparatus for performing the test process performs a predetermined test by contacting the test head while automatically transferring the semiconductor device, and performs the function of classifying and loading the semiconductor devices according to the test results.

Conventional semiconductor device test apparatus is a structure in which a device called a contactor assembled into a rigid body by bolts pressurizes the device by a motor to perform a test by forcibly pressing the device to test the contactor vibration and shaking. There is a problem that a test error may occur as an external variable in the device in progress, and the life and reliability of the DUT board and the socket part, which are attached to the test site, may be damaged by a long pressing force.

As such, when the device for testing is mounted on the test apparatus, the test apparatus may be damaged due to excessive force, and the test operation may not be performed smoothly due to misalignment.

SUMMARY OF THE INVENTION The present invention has been made in view of the above problems, and an object thereof is to provide a contactor device for testing a semiconductor device, and to secure a test stability by attaching and detaching a contactor socket part having a device at a test site. It aims to provide a device test device that can guarantee the damage and lifetime reliability of the automation and test site components by configuring the most similar environment using the manual test jig used for production.

In addition, it is an object of the present invention to provide a contactor apparatus and a method of operating the same for testing a semiconductor device to reduce productivity and productivity by automating the test process as described above.

In order to achieve the above technical problem, the present invention is a contactor device of a semiconductor device test socket which is capable of testing a semiconductor device, the contactor which is located at the top in the semiconductor test process and movable by a vertical drive motor; Attached to the lower end of the contactor having an air cylinder inside the upper and lower drive by the up and down with the contactor to move with the contactor, and the detachable from the contactor adjuster to be detachable from the contactor adjuster The contactor module is configured to connect to the device so that the device can be connected to the test site, and the tester module is configured to include a test site in which a test module for testing the device by fixing the device.

In addition, a method of operating a contactor of a semiconductor device test socket, which enables a test of a semiconductor device, includes: a transfer step of transferring a device to a test module at a test site by means of a transfer device, and seating the device; A movement step of moving the contactor in one direction to the place where the test site is located by coupling the contactor adjusting unit coupled to the contactor module; An entrance step of connecting the device to the test module while the contactor and the contact adjuster move downward by the up-down driving motor so that the contactor module enters the coupling groove of the test module of the test site ; A separation step of separating the contactor adjustment unit and the contactor module by retracting the pushing pin while the air tube contracts when the air cylinder of the contactor adjustment unit sucks air; A standby step in which the contact adjuster is separated and waits while the contactor and the contact adjuster are moved upward by a vertical driving motor; A test step of disconnecting from the contact adjuster and being coupled to a test module so that the contactor module remaining at the test site connects the device and tests whether the device is defective; A re-entry step in which, when the test is completed at the test site, the contactor and the contact adjuster located at the top are lowered by the up-and-down driving motor to reenter the upper catching jaw side of the contactor module; When the air cylinder of the contactor adjusting unit ejects and expands the air tube, the air tube contracts and the pushing pin moves forward so that the lower locking jaw of the locking member is released from the coupling groove of the test site, and the upper locking jaw of the locking member is connected to the contactor. A recombination step of reinserting the contactor module into the engaging groove of the adjuster and reconnecting the contactor adjuster; A contactor adjusting unit coupled to the contactor module, which is moved upward and downward by a vertical driving motor, and the contactor moves in one direction to move away from the test site; remind In the test module of the test site, the transfer device collects and sorts the devices according to the test discrimination and loads them on the tray.

As described above, the contactor apparatus for testing the device may sequentially test the device while the contactor and the contact adjuster are repeatedly moved by the vertical drive motor to test the device. Structure.

According to the present invention as described above, by using a manual test jig (Manaul Test Jig) used by the operator as a contactor device for testing a semiconductor device in a configuration similar to the automation and test site damage and lifetime reliability It is effective to secure.

And, when the manual test jig (Manual Test Jig) is mounted on the test site due to excessive force to prevent damage such as bending of the test site, and between the contactor and the contact adjuster for horizontal compensation of the misaligned portion It is effective to secure the safety of contact by inserting a spring.

And, as the probability of occurrence of such damage is lowered, the defective rate is lowered, and there is an advantage of increasing productivity.

In addition, it is a very useful invention because the device can be present in the correct position in the test, thereby minimizing the damage of the device due to contact malfunction during the test.

The present invention for achieving the above object is a contactor which is located at the top in the semiconductor test process and movable by the vertical drive motor,

A contact adjuster attached to the bottom of the contactor and having an air cylinder therein, the contact adjusting unit being capable of moving up and down with the contactor by a vertical drive motor;

A contactor module which is detachable from the contactor adjuster and moves in a lower direction together with the contactor adjuster to allow the device to be testable;

The contactor module is achieved by providing a contactor device for testing a semiconductor device, characterized in that the test site is installed in the test site is installed to test the device by connecting and fixing the device.

The transfer step of transporting and seating the device to the test module of the test site by the contactor operation method of the semiconductor device test socket to enable the test of the semiconductor device, and

The contactor is coupled to the contactor module and the contactor adjuster coupled to the movement step of moving the contactor in one direction to the location of the test site,

An entrance step in which the contactor and the contactor adjusting unit move downward by the up-down driving motor so that the contactor module enters the coupling groove of the test module of the test site while the device is connected to the test jig of the test module;

A separation step of separating the contactor adjustment unit and the contactor module by retracting the pushing pin while the air tube contracts when the air cylinder of the contactor adjustment unit sucks air;

A standby step in which the contact adjuster is separated and waits while the contactor and the contact adjuster are moved upward by a vertical driving motor;

A test step of disconnecting from the contact adjuster and being coupled to a test module so that the contactor module remaining at the test site connects the device and tests whether the device is defective;

A re-entry step in which, when the test is completed at the test site, the contactor and the contact adjuster located at the top are lowered by the up-and-down driving motor to reenter the upper catching jaw side of the contactor module;

When the air cylinder of the contactor adjusting unit ejects and expands the air, the air tube contracts and the pushing pin moves forward, and the lower locking jaw of the locking member is released from the coupling groove of the test site, and the upper locking jaw of the locking member is connected to the contactor. A recombination step of reinserting the contactor module into the engaging groove of the adjuster and reconnecting the contactor adjuster;

A contactor adjusting unit coupled to the contactor module, which is moved upward and downward by a vertical driving motor, and the contactor moves in one direction to move away from the test site;

remind It is achieved by providing a contactor operation method for testing a semiconductor device, characterized in that the device is configured to collect and load the device in the test module at the test site, the device is sorted according to the test determination, and loaded into a tray. .

Hereinafter, with reference to the accompanying drawings, preferred embodiments of the present invention will be described in more detail.

Prior to this, terms or words used in the present specification and claims should not be construed as being limited to the common or dictionary meanings, and the inventors should properly explain the concept of terms in order to best explain their own invention. Based on the principle that can be defined, it should be interpreted as meaning and concept corresponding to the technical idea of the present invention.

Therefore, the embodiments described in the specification and the drawings shown in the drawings are only one of the most preferred embodiments of the present invention, and do not represent all of the technical idea of the present invention, they can be replaced at the time of the present application It should be understood that there may be various equivalents and variations.

1 is a perspective view illustrating a contactor device for testing a semiconductor device according to the present invention, and FIG. 2 is an isolated one side cross-sectional view of the contactor device for testing a semiconductor device according to the present invention.

As shown, the configuration of the vertical handler to which the contactor module 130 having the test jig 134 is applied to the semiconductor device test apparatus according to the present invention will be described. 20) filled A tray loading device (not shown) in which trays are stacked and automatically aligned is installed, and a loading unit (not shown) in which trays arranged in the loading device are temporarily loaded is installed at the rear of the tray loading device. .

In addition, the device 20 is gripped by the transfer apparatus 10 in the loading unit to separately supply the devices 20, which are transported and discharged to the test site 140, to the test site 140 located below.

In addition, a sorting device (not shown in the drawing) collects the tested device 20 at the test site 140 back to the transfer device 120 and sorts it as good or bad or re-inspected according to a test result. And an unloading unit (not shown) in which empty trays in which the devices 20 classified and sent by the sorting apparatus are placed are waiting.

In the semiconductor test process in which the device 20 is tested at the test site 140, the contactors 110 disposed on the test site 140 and provided in plural numbers sequentially move in one direction.

At this time, the contactor 110 is composed of a plurality of contactor adjustment unit 120 is located in a plurality of contactors 110 in each of the entire device testing machine to sequentially test the device 20 in large quantities It is.

In addition, the contactor 110 and the contactor adjusting unit 120 are attached to and moved by the contactor 110. The contactor adjusting unit 120 and the contactor 110 are connected to each other by a vertical driving motor (not shown). Makes it possible to move up and down.

Here, a spring 106 is provided between the contactor 110 and the contactor adjusting unit 120 to maintain a horizontal level while moving up and down, and at the same time to buffer the stability.

In addition, the contactor adjusting unit 120 has a locking groove 124 formed as a groove space symmetrical to both sides of the lower end.

In addition, an air cylinder 122 is mounted in the lower vertical direction inside the contactor adjusting unit 120, and an air tube 126 that expands and contracts by ejecting and inhaling air by the air cylinder 122 is provided. It is provided.

In addition, the contactor module 130 attached to the contactor adjusting unit 120 moves downward along with the contactor adjusting unit 120 to press the device 20 toward the test site 140 and at the same time the test site. The test site 140 installed with the test module 142 for testing the device 20 is connected to the device 140 to connect the device 20.

 At this time, the test jig 134 located at the bottom of the contactor module 130 is for accurately mounting the device 20 on the test site 140 by simultaneously connecting and pressing the device 20.

Here, while the test jig 134 of the contactor module 130 puts the spring protrusion 139 between the contact surfaces for pressing the device 20, the test jig 134 stops even when the device 20 is pressed for a long time. Prevents sticking.

In addition, on both sides of the contactor module 130, 'ㅏ', 'ㅓ' shaped symmetry in which locking and unwinding are simultaneously performed up and down by rotating a predetermined radius about an axis so as to be detachable from the test site 140. The engaging member 136 is mounted to form a.

In addition, the pushing member 136 moves forward and backward by the expansion and contraction of the air tube 126 so that the locking member 136 rotates to a predetermined radius to push the locking member 136 to open and return to the original position. It consists of.

In addition, Figure 3 is a diagram showing a step-by-step combination for testing the device of the contactor device for testing a semiconductor device according to the invention, Figure 4 is a device test of the contactor device for testing a semiconductor device according to the invention It is a figure which shows the separation to make step by step.

5 is a block diagram showing a method of operating a contactor device for testing a semiconductor device according to the present invention.

Referring to the operation method of the contactor device for testing the semiconductor device 20 as shown in Figure 2, first, the transfer device 10 to the test module 142 of the test site 140, the device 20 It is transported and seated and retracted (S10). {See FIG. 3 (a)}

In addition, the contactor 110 is coupled to the contactor module 130 and the contactor adjuster 120 is coupled to the place where the test site 140 is located, the contactor 110 moves downward (S20). {See Figure 3 (b)}

When the contactor 110 moves to the test site 140 and stops at a vertical position, the contact adjuster 120 coupled with the contactor 110 and the contactor socket part 130 by a vertical driving motor is provided. It will move downward.

At this time, the locking member 136 of the contactor module 130 coupled with the contactor adjuster 120 is symmetrical to both sides and has a slope at a predetermined angle with the test module 142 of the test site 140. Entering into the side coupling groove 144 (S30). {See Fig. 3 (c)}

That is, the air cylinder 122 of the contact adjuster 120 is operated to maintain the state in which the pushing pin 138 is advanced while the air tube 126 is inflated to push the blade 136-1 of the locking member 136. The upper locking jaw 135 of the locking member 136 is inserted into the locking groove 124 by being inserted into the contact groove adjusting unit 120 and the contactor module 130 by pushing the lock.

At this time, the contactor 110 and the contactor adjusting unit 120 are moved downward by the up-and-down driving motor so that the contactor module 130 having the test jig 134 is connected to the test module 142 of the test site 140. As the test jig 134 enters, the device 20 contacts the device 20 as if it pushes the test module 142 of the test site 140.

When the air cylinder 122 of the contactor adjusting unit 120 sucks air, the air tube 126 contracts and the contactor adjusting unit 120 and the contactor module 130 are separated from each other (S40). {See Figure 3 (d)}

In this case, when the contactor module 130 enters the test module 142 side of the test site 140 for pressing and simultaneously testing the device 20, the air cylinder 122 provided in the contactor adjusting unit 120 is provided. As the air tube 126 contracts, the pushing pin 138 is retracted so that the locking member 136 becomes a vertical position, and the lower locking jaw 137 of the locking member 136 is the test site 140. Inserted into the coupling groove 144 formed in the test module 142 of the coupling is made to the test site 140 is automatically caught in the upper end of the locking member 136 in the locking groove 124 of the contact adjuster 120 The jaw 135 is to be dropped.

In this case, the contactor module 130 moving together with the contactor adjusting unit 120 is connected to the lower end of the contactor module 130 to smoothly mount the device 20 to the test module 142 of the test site 140. The test jig 134 is formed to impart stability by bringing the device 20 into contact with each other by pressing.

As such, when the upper locking jaw 135 is completely detached from the locking groove 124 of the contact adjuster 120, the contactor 110 is moved upward by the up and down driving motor. Standby (S50). {See Fig. 3 (e)}

In addition, the contactor module 130 separated from the contactor adjusting unit 120 and coupled to the test module 142 and remaining at the test site 140 connects the device 20 and tests whether the device 20 is defective. S60 is made.

Then, when the test is completed at the test site 140, as shown in FIG. 3, the contactor 110 and the contact adjuster 120 located at the top are lowered to the bottom by the up and down driving motor (FIG. 4 (f). ) Reference} While re-entering (S70) to the upper engaging jaw 135 side of the contactor module 130 (see FIG. 4 (g)), the air tube 126 may be operated by operating the air cylinder 122 of the contactor adjusting unit 120. ) Expands so that the pushing blade 136-1 of the locking member 136 moves forward with the advance of the pushing pin 138 and the locking member 136 is inclined at a predetermined angle to the lower end of the locking member 136. The locking jaw 137 is separated from the coupling groove 144 of the test site 140, and the upper locking jaw 135 of the locking member 136 is inserted into the locking groove 124 of the contact adjuster 120. The contactor module 130 is coupled (S80) to the adjuster 120. {See FIG. 4 (h)}.

The contactor adjusting unit 120 coupled to the contactor module 130 is moved upward by a vertical drive motor, and the contactor 110 is displaced from the test site 140 in one direction (S90). See (i) of FIG. 4}

After that, the device 20 is collected by the transfer device 10 in the test module 142 of the test site 140, sorted according to the test determination, and collected and stacked on the tray (S100). (J) reference of 4}

As described above, in the contactor apparatus for testing the semiconductor device 20 of the present invention, the contactor 110 moves to the test site 140 repeatedly and sequentially to test the device 20. .

 By continuously performing the operation of the contactor 110, the contactor adjusting unit 120, and the contactor module 130 as described above, the device 20 is continuously supplied to the test site 140.

Meanwhile, the test site 140 that receives the device 20 from the transfer device 10 and the contactor 110 performs a test on the device 20 to check whether the device 20 is good or bad. The test result is transmitted to a controller (not shown).

Then, the tested device 20 is transferred to the sorting position of each tray of the sorting tray part (not shown) of the device sorting part (not shown) by the transfer device 10 according to the test result. .

Then, when the device 20 is filled in the tray of each tray of each sorting tray portion, the tray 20 is moved and loaded into the tray loading portions positioned in front of the tray.

As described above, although the present invention has been described by way of limited embodiments and drawings, the present invention is not limited thereto, and the technical idea of the present invention and the following by those skilled in the art to which the present invention pertains. Of course, various modifications and variations are possible within the scope of equivalents of the claims to be described.

1 is a perspective view showing a contactor device for testing a semiconductor device according to the present invention.

2 is an isolated one side cross-sectional view of a contactor device for testing a semiconductor device in accordance with the present invention.

3 shows step by step combinations for device testing of a contactor device for testing a semiconductor device according to the invention;

4 is a step-by-step view of the separation for device testing of a contactor device for testing a semiconductor device in accordance with the present invention.

5 is a block diagram illustrating a method of operating a contactor device for testing a semiconductor device in accordance with the present invention.

* Description of the symbols for the main parts of the drawings *

10: Conveyer 20: Device

106: spring 110: contactor

120: contactor adjustment unit 122: air cylinder

124: locking groove 126: air tube

130: contactor module 134: test jig

135: upper locking jaw 136: locking member

136-1: Pushing wing 137: Lower locking jaw

138: Pushing pin 139: Spring protrusion

140: test site 142: test module

144: coupling groove

Claims (7)

In the contactor apparatus of the semiconductor device test socket, which enables the test of the semiconductor device, A contactor 110 positioned at an upper end of the semiconductor test process and movable by a vertical driving motor; A contact adjuster 120 attached to a lower end of the contactor 110 and having an air cylinder 122 therein and vertically movable together with the contactor 110 by a vertical drive motor; The contactor module 130 which is detachable from the contactor adjuster 120 and moves in the lower direction together with the contactor adjuster 120 to connect the device 20 to be testable; The contactor module 130 is a contactor for testing a semiconductor device, characterized in that consisting of a test site 140 is installed, the test module 142 for testing the device 20 by connecting and fixing the device 20 Device. The method of claim 1, wherein the contactor adjusting unit 120 and the engaging groove 124 to form a groove space symmetrical on both sides of the lower end, The air cylinder 122 is mounted in the lower vertical direction inside the contactor adjusting unit 120, and the air tube 126 is provided with an air tube 126 that expands and contracts by inflow and intake by the air cylinder 122. A contactor device for testing a semiconductor device comprising a. The test jig 134 of claim 1, wherein the test jig 134 is positioned at the lower end of the contactor module 130 to press the device 20 so as to be connected to the test. Both sides of the contactor module 130 are rotated at a predetermined radius about an axis to be detachably attached to the test site 140 to achieve symmetry in the form of 'ㅏ', 'ㅓ', which is simultaneously held and released at the same time. Mounted locking member 136, The locking member 136 is composed of a pushing pin 138 to move forward and backward by the expansion and contraction of the air tube 126 to rotate to a predetermined radius to open the locking member 136 and to return to its original position. A contactor device for testing a semiconductor device comprising a. According to claim 1, wherein the contactor 110 and the contact adjuster 120 is a spring 106 to maintain the horizontal when the vertical movement is repeated by the vertical drive motor and at the same time buffer for stability for the contactor 110 ) And a contactor device for testing a semiconductor device, characterized in that provided between the contactor adjuster (120). The method according to claim 3, wherein the test jig 134 of the contactor module 130 places a spring protrusion 139 between the contact surfaces for pressing the device 20 so that the test jig 134 presses the device 20 for a long time. A contactor device for testing a semiconductor device, comprising preventing from sticking. In the method of operating a contactor of a semiconductor device test socket which enables a test of a semiconductor device, A transfer step (S10) of transferring the device 20 to the test module 142 of the test site 140 by the transfer device 10 to be seated, and retreating; The contactor 110 is coupled to the contactor adjusting unit 120 coupled with the contactor module 130 to move to the place where the test site 140 is located, the contactor 110 moves downward (S20) and ; The contactor 110 and the contactor adjusting unit 120 are moved downward by the up and down driving motor so that the contactor module 130 enters the coupling groove 144 of the test module 142 of the test site 140. An entry step S30 in which the device 20 is connected to the test jig 134 of the test module 130; When the air cylinder 122 of the contactor adjusting unit 120 sucks air, the air tube 126 contracts and the pushing pin 138 retreats so that the contactor adjusting unit 120 and the contactor module 130 are separated. Separating step (S40); A standby step (S50) in which the contactor adjusting unit 120 is separated and the contactor 110 and the contactor adjusting unit 120 wait in a state of moving upward by a vertical driving motor; The contactor module 130, which is separated from the contactor adjusting unit 120 and coupled to the test module 142, remaining at the test site 140, connects the device 20 and the device 20 is tested for defects. A test step (S60) to be lost; When the test is completed at the test site 140, the contactor 110 and the contactor adjusting unit 120 located at the top are lowered by the up-and-down driving motor to reenter the upper latching jaw 135 side of the contactor module 130. Re-entry step (S70) and; When the air cylinder 122 of the contact adjuster 120 ejects and expands the air, the air tube 126 contracts and the pushing pin 138 moves forward to test the lower locking jaw 137 of the locking member 136. Departed from the coupling groove 144 of the site 140, the upper locking jaw 135 of the locking member 136 is inserted into the locking groove 124 of the contact adjuster 120 to the contact adjuster 120 A recombination step (S80) in which the contactor module 130 is recombined;  The contactor adjusting unit 120 to which the contactor module 130 is coupled is moved upwardly with the contactor 110 by a vertical driving motor, and the contactor 110 is moved upwards so that the test site 140 is moved. A departure step (S90) to be out of; A collection, stacking step (S100); the device 20 in the test module 142 of the test site 140 is collected by the transfer apparatus 10 and sorted according to the test determination and stacked in a tray. To operate a contactor for testing semiconductor devices. The contactor apparatus for testing the device 20 is configured to sequentially move the contactor 110 and the contactor adjuster 120 by vertically moving motors to test the device 20. A method of operating a contactor for testing a semiconductor device, comprising the step of testing the device (20).

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