KR100798104B1 - Electronic component testing apparatus - Google Patents

Abstract

The electronic component test apparatus is equipped with a main body side board 600 which is electrically connected to the test head main body 500 and has a male connector 620, and an IC socket 700 in which the IC device IC is in electrical contact. And a socket board 700 having a female connector 740 detachable to the first connector 620, the main body side board 600 having the male connector 620 facing the socket board 700. An opening 613 having a connector board 610 for supporting the connector 620, the opening 613 including at least a first portion larger than the male connector 620 and through which the connector 620 can pass, is provided in the connector base 610. Formed.

Electronic Component Testing Equipment

Description

Electronic Component Testing Equipment {ELECTRONIC COMPONENT TESTING APPARATUS}

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electronic component test apparatus for testing various electronic components (hereinafter, also referred to as IC devices) such as semiconductor integrated circuit elements.

According to the handler constituting the electronic component test apparatus, a plurality of IC devices housed in a tray are transported into the handler, and each IC device is electrically contacted with the test head, thereby testing the electronic component test apparatus main body (hereinafter also referred to as a tester). Let this be done. Then, upon completion of the test, each IC device is taken out of the test head and transferred to a tray corresponding to the test result, whereby categorization of good or defective products is performed.

By the way, in the above-described electronic component test apparatus, a single handler can be used to test a variety of IC devices. However, in order to cope with the varieties of IC devices under test, the upper part of the test head is replaced with the one corresponding to the variety. It is necessary to do

30 is a schematic sectional view showing an upper configuration of a conventional test head, and FIGS. 31 and 32 are sectional views showing first and second processes of attaching a connector to a body side board of a conventional test head, respectively.

As an upper structure of such a test head 5, as shown in FIG. 30, the socket board 700 equipped with the IC socket 710 to which an IC device (shown with the code IC in the figure) is electrically contacted; And a male connector 620 composed of a main body side board 600 electrically connected to a test head main body (not shown) and attached to a connector guide 660 of the main body side board 600, and a socket board 700. It is known to electrically connect the main body side board 600 and the socket board 700 by inserting into the female connector 740 provided on the lower surface of the main body side board 600.

In more detail, the pin insertion hole (not shown) formed in the housing 623 of the male connector 620 has a coaxial structure connected to the end of the coaxial cable 624 by soldering or pressing. Pin 621 is inserted and latch held. Similarly, a screw coupling pin having a coaxial structure is inserted into the pin insertion hole formed in the housing of the female connector 740 to latch the holder, and each pin 621 of the male connector 620 is a screw of the female connector 740. The main body side board 600 and the socket board 700 are electrically connected by inserting in the engagement pin, respectively.

The socket board 700 is manufactured exclusively for the breed so as to correspond to the breed of the IC device. Therefore, when the varieties of IC devices are replaced, only the socket board 700 is replaced by the test head 5 corresponding to the varieties of IC devices, so that the varieties of IC devices can be easily replaced.

However, in the upper structure of the test head 5, the male connector 620 is attached to the main body side board 600 by the following method. That is, first, as shown in FIG. 31, in the state where the housing 623 of the connector 620 is rotated about 90 degrees, the corresponding connector guide (from the lower side of the spacing frame 650 and the connector guide 660 ( It is inserted into the opening formed in 660 and passed through. Next, as shown in FIG. 32, the connector 620 is pulled up upward by an extra distance L or so, and then the bolt 625 is attached to the connector guide 660 at both ends as shown in FIG. By fixing.

Such assembling work is extremely poor in assembling because the coaxial cable 624 passes through a narrow opening while rotating the connector 620 from which the plurality of coaxial cables 624 are derived by about 90 degrees. In addition, after passing, the cable 624 needs to perform a work of correcting the original straight state. Therefore, a process of several tens of hours may be required to attach all the connectors to the main body side board.

In addition, when inserting the male connector 620 into the female connector 740, an excessive force is applied from the cable 624 to the pin 621, and the central axis of the pin 621 of the male connector 620, If the central axis of the screw coupling pin of the female connector 740 is greatly inclined or deviated laterally, the coupling failure or the pin itself may be broken. Therefore, after passing the connector 620 through the narrow opening, it is necessary to press the cable 624 in a straight state.

In addition, in the assembly work described above, the following harmful effects may occur.

First, in the state shown in FIG. 31, since the cable 624 drawn out from the connector 620 is bent at least 90 degrees, the cable 624 is stressed, whereby the pin 621 is caused by the housing 623. Manufacturing inconveniences such as being pulled to the side and entering into the housing 623 may occur.

Second, in the state shown in FIG. 32, the excess of the longest distance L is generated, and a difference occurs in the length of the cable 624, which can affect the test performance.

On the other hand, as another use form, when the electronic component under test is a wafer under test, probe pins are applied instead of the IC socket 710, and instead of the socket board 700, a probe card having a probe pin in the center is applied. Like the socket board 700, the main body side board 600 is connected to the probe card via the connectors 620 and 740. However, in arrangement | positioning of the connector 620, 740, although many probe pins are arrange | positioned centrally, it may be used arrange | positioned radially.

An object of the present invention is to provide an electronic component testing apparatus excellent in assembly and quality.

(1) In order to achieve the above object, according to the present invention, a main body side board which is electrically connected to the test head main body and has a first connector, and a contact terminal to which the electronic component under test is in electrical contact are mounted. And an electronic board testing device having a connecting board having a second connector detachable from the first connector, wherein the main body side board has supporting means for supporting the first connector so as to face the connecting board. There is provided an electronic component testing apparatus in which an opening is formed in the support means that is larger than a connector and includes at least a first portion through which the first connector can pass (see claim 1).

In this invention, the main body side board which comprises the upper part of a test head is provided with the support means by which the opening part containing the 1st part which a 1st connector can pass is formed at least. As a result, time-consuming work such as rotating the first connector or pulling the cable upwards is unnecessary at the time of assembling the main body side board, thereby improving the assembly of the electronic component test apparatus.

In addition, since the assembly can be performed without bending the cable close to 90 degrees, the straight state of the cable can be easily maintained, and each pin is in an appropriate position, which causes problems such as the inclination and misalignment of the pin. Can be prevented. In addition, since the cable can be passed through the cable without bending the cable close to 90 degrees, fluctuations in the transmission impedance of the cable do not occur, and poor coupling of the pins and the housing does not occur. As a result, good test performance can be exhibited. Therefore, the electronic component test apparatus of excellent quality can be provided.

In addition, when the pin is damaged due to some reason during use, or it needs to be lowered to the housing side and needs to be replaced, assembling property is improved, and only the connector in question can be easily removed, so the maintenance and repair are very excellent. . Similarly, since the connector can be easily removed and the workability of disassembling is excellent even at the time of disposal of the electronic component testing apparatus, it has a structure that is environmentally friendly.

Although not specifically limited in the said invention, It is preferable that the said opening part further contains the 2nd part located in the lower side of the said 1st connector supported by the said support means (refer Claim 2). By passing the cable derived from the first connector supported by the support means into the second portion of the opening, the cable is not bent with the first connector supported by the support means, and no excessive stress is applied to the cable.

Although it does not specifically limit in the said invention, The said support means has a plurality of strut groups which consist of the struts which support both ends of one said 1st connector so that a plurality of said 1st connectors can be supported, and each said strut group is It is preferable that it is arrange | positioned so that it may protrude toward the said connection board side, and has the base part in which the said opening part was formed, and the said 1st part of the said opening part is formed between the said holding | maintenance groups in the said base part (refer Claim 3). The second portion of the opening is preferably formed between the pair of struts in the base portion (see claim 4).

Although not specifically limited in the said invention, the said main body side board further has a pushing means which pushes the cable which is led downward from the said 1st connector and passes through the said 2nd part of the said opening, The said pushing means is a said support means. It is preferred to be attachable from above (see claim 5). By attaching the pressing means from the upward direction, the assemblability of the electronic component test apparatus is further improved, and the maintenance and repairability and disassembly workability are also improved.

Although it does not specifically limit in the said invention, As a specific structure of a press means, the said press means has the contact member which contact | connects the said cable, and the base member which hold | maintains the said contact member, The said contact member is removable from the said base member. It is preferred (see claim 6). By forming the contact member of the pressing means detachably from the base member, the assemblability of the electronic component test apparatus is further improved, and also maintenance and repairability and disassembly workability are improved.

Although it does not specifically limit in the said invention, It has a fixing means which prevents the said contact member attached to the said base member of the said pressing means from falling from the said base member, The said fixing means is attachable to the said pressing means from an upward direction. Preferred (see claim 7). By providing such a fixing means, the detachable adhesion member can be prevented from falling from the base member.

Although it does not specifically limit in the said invention, It is preferable that the said main body side board further has the spacing frame which can be attached to the said support means from an upward direction (refer Claim 8). By forming the spacing frame so that it can be attached from an upward direction, the assembly property of an electronic component test apparatus further improves, and also the maintenance and repair property and disassembly workability improve.

Although not specifically limited in the said invention, The said main body side board is equipped with the guide means which guides the said connection board with respect to the said main body side board, when attaching the said connection board to the said main body side board, The said guide means is said spacing. It is preferable to be attachable to the frame from the upward direction (see claim 9). By forming the guide means so that it can be attached from the upward direction, the assemblability of the electronic component test apparatus is further improved, and the maintenance and repairability and disassembly workability are also improved.

According to the present invention for achieving the above object, there is provided a main body side board which is electrically connected to the test head main body and has a first connector, and a connection terminal to which the electronic component under test is electrically connected, and the first connector An electronic component testing apparatus having a connecting board having a second connector detachable from the apparatus, wherein the main body side board has a supporting group for supporting a plurality of the first connectors at both ends thereof, and at the same time, the first connector from which a cable is drawn. Means for inserting an opening including a first portion through which the cable is inserted and a second portion through which the cable is passed in the state supported by the support group by moving horizontally after inserting the first connector; Press the cable simultaneously while closing the opening after supporting the first connector by supporting means Means, a spacing frame for receiving the support means such that a portion of the first connector on which the support means is received and supported is exposed through an opening; and for positioning the first connector with respect to the opposing second connector. An electronic component testing apparatus is provided having a guide means having a guide pin (see claim 10).

Although it does not specifically limit in the said invention, It is preferable that the said spacing frame and the said guide means are formed integrally (refer Claim 11).

Although it does not specifically limit in the said invention, It is preferable that at least one of the said 1st connector or the said 2nd connector is provided so that a micro movement within a predetermined range can be carried out when the said 1st connector and the said 2nd connector are attached. 12).

Although not specifically limited in the said invention, the said main body side board is interposed between the enclosure which covers the whole of the said main body side board, exposing the upper part of the said 1st connector, and between the said 1st connector and the said test head main body, It is preferable that the circuit board further has a detachable connecting portion, and the connecting portion is exposed from the housing (see claim 13). According to the present invention, the main body side board electrically interposes a connection portion between which the electric circuit board is detachable between the first connector and the test head body, and exposes the connection portion from the enclosure. As a result, the user can easily exchange the electric circuit board such as adjusting the electric signal flowing from the test head to the first connector so as to correspond to the variety of the IC device under test.

Although it does not specifically limit in the said invention, It is preferable that the said main body side board further has a cover member which covers the said electric circuit board mounted in the said connection part, and the said cover member is detachable from the said enclosure (refer Claim 14). . Thereby, the said electric circuit board can be protected, making it easy to attach or detach an electric circuit board to a connection part.

Although not specifically limited in the said invention, It is preferable that the said cover member has a holding part which hold | maintains the said electric circuit board mounted in the said base board, and the said holding part is provided so that a micro movement within a predetermined range with respect to the said cover member is possible. (See claim 15). By providing such a holding part, excessive stress can be prevented from being applied to the electric circuit board connected to the connection part, and the damage to the electric circuit board and the connection part is prevented.

Although not particularly limited in the present invention, it is preferable that the connection board is a socket board on which an IC socket in electrical contact with an IC device under test is fixed, or a probe card equipped with a probe pin in electrical contact with a wafer under test ( See claim 21).

(2) Moreover, in order to achieve the said objective, according to this invention, the electronic component test apparatus provided with the contact board which is equipped with the contact terminal in which the electronic component under test electrically contacts, and was electrically connected to the test head main body. There is provided an electronic component testing apparatus further comprising a supporting means for supporting the connection board, the opening being formed in the supporting means, the opening being at least larger than the connection board and including at least a first portion through which the connection board can pass. (See claim 16).

According to the present invention, there is provided a supporting means having an opening including at least a first portion through which the connection board can pass in the electronic component test apparatus in which the connection board is directly connected to the test head. This eliminates the time-consuming work of rotating the connection board or pulling the cable upwards during assembly of the electronic component test apparatus, thus improving the assembly of the electronic component test apparatus.

In addition, since the assembly can be performed without bending the cable close to 90 degrees, the straight state of the cable can be easily maintained, and each pin is in an appropriate position, which causes problems such as the inclination and misalignment of the pin. Can be prevented. In addition, since the connection board can be passed without having to bend the cable close to 90 degrees, fluctuations in the transmission impedance of the cable and no coupling failure of the pins or the housing are generated, resulting in good test performance. . Therefore, the electronic component test apparatus of excellent quality can be provided. In addition, as the assembly properties are improved, the maintenance and repairability and the disassembly workability are also improved.

Although it does not specifically limit in the said invention, It is preferable that the said opening part further contains the 2nd part located in the lower side of the said connection board supported by the said support means (refer Claim 17). By passing the cable derived from the connection board supported by the supporting means through the second portion of the opening, the cable is not exposed while the connection board is supported by the supporting means, and no excessive stress is applied to the cable.

Although it does not specifically limit in the said invention, The said support means has a some support group which consists of a pair of support | pillars which support both ends of one said connection board so that a plurality of said connection boards can be supported, and each said supporter group has said said It is preferable that it is arrange | positioned so that it may protrude toward the connection board side, and has the base part in which the said opening part was formed, and the said 1st part of the said opening part is formed between the said holding | maintenance groups in the said base part (refer Claim 18). Moreover, it is preferable that the said 2nd part of the said opening part is formed between the said pair of struts in the said base part (refer Claim 19).

Although it does not specifically limit in the said invention, It is preferable that the said main body side board further has the spacing frame which can be attached to the said support means from an upward direction (refer Claim 20). By forming the spacing frame so that it can be attached from an upward direction, the assembly property of an electronic component test apparatus further improves, and also the maintenance and repair property and disassembly workability improve.

Although not specifically limited in the present invention, the connection board is preferably a socket board equipped with an IC socket in electrical contact with the IC device under test, or a probe card equipped with a probe pin in electrical contact with the wafer under test ( See claim 21).

1 is an overall perspective view showing an electronic component testing apparatus according to a first embodiment of the present invention.

2 is a cross-sectional view taken along the line II-II of FIG. 1.

3 is a flowchart of a tray showing a method of processing an IC device in the electronic component testing apparatus of FIG.

4 is a perspective view illustrating a superstructure of the test head of FIG. 2;

5 is an enlarged plan view of part V of FIG. 4;

6 is a cross-sectional view taken along line VI-VI of FIG. 5.

7 is a cross-sectional view taken along the line VII-VII of FIG. 5.

8 is a cross-sectional view taken along the line VII-VII of FIG. 5.

Fig. 9 is a perspective view showing the entirety of the connector base used for the main body side board of Fig. 4.

10 is an enlarged plan view of part X of FIG. 9;

FIG. 11 is a cross-sectional view taken along the line VI-XI of FIG. 10; FIG.

12 is a cross-sectional view taken along the line II-XIII of FIG. 10.

Fig. 13 is a perspective view showing the male connector used for the main body side board of Fig. 4.

Fig. 14 is a sectional view showing a first step of inserting a connector into the opening of the connector base.

Fig. 15 is a sectional view showing a second process of moving the connector inserted into the opening of the connector base in the horizontal direction.

Fig. 16 is a perspective view showing a connector base with a connector and a pressing member according to the first embodiment of the present invention.

Fig. 17 is an exploded perspective view showing a pressing member in the first embodiment of the present invention.

Fig. 18 is a sectional view showing a third step of attaching a base member of a pressing member to a connector base with a connector.

Fig. 19 is a sectional view showing a fourth step of inserting an adhesive member into the base member of the pressing member attached to the connector base.

Fig. 20 is a perspective view showing a connector base and a lid member with a pressing member according to the first embodiment of the present invention.

Fig. 21 is a perspective view showing a pressing member and a lid member in the first embodiment of the present invention.

Fig. 22 is a sectional view showing a fifth step of fixing the pressing member attached to the connector base by the lid member.

Fig. 23 is a perspective view showing a connector base and a spacing frame to which a pressing member and a lid member are attached, in the first embodiment of the present invention.

Fig. 24 is a perspective view showing a spacing frame and a connector guide attached to a connector base in the first embodiment of the present invention.

25 is a sectional view showing a sixth step of attaching a spacing frame to the connector base and a seventh step of attaching the connector guide to the spacing frame.

Fig. 26 is a perspective view showing an eighth step of covering the main body side board with the housing.

The exploded perspective view which shows the cover member in 1st Embodiment of this invention.

Fig. 28 is an exploded perspective view showing the upper structure of a test head in the second embodiment of the present invention.

Fig. 29 is a plan view showing a state where a socket board is inserted into a connector base in a second embodiment of the present invention.

30 is a schematic cross-sectional view showing a superstructure of a conventional test head.

Fig. 31 is a sectional view showing a first step of attaching a connector to a body side board of a conventional test head.

32 is a cross-sectional view showing a second step of attaching a connector to a body-side board of a conventional test head.

EMBODIMENT OF THE INVENTION Hereinafter, embodiment of this invention is described based on drawing.

1 is an overall perspective view showing an electronic component testing apparatus according to a first embodiment of the present invention, FIG. 2 is a sectional view taken along line II-II of FIG. 1, FIG. 3 is an IC device in the electronic component testing apparatus of FIG. This is a flowchart of a tray showing the processing method of the tray. First, with reference to these FIG. 1 and FIG. 2, the whole structure of the electronic component test apparatus of this embodiment is outlined. On the other hand, FIG. 3 is for understanding the IC device processing method in the electronic component test apparatus according to the present embodiment, and there is also a part showing a planar view of members arranged side by side in the vertical direction.

As shown in the drawing, the electronic component testing apparatus according to the present embodiment includes a handler 1 for processing an IC device under test, a test head 5 in which the IC device is in electrical contact, and the test head ( It consists of a tester 9 which sends a test signal to 5) and executes the test of the IC device.

The handler 1 includes an IC storage unit 200 for storing the chamber unit 100, an IC device for performing a test therefrom, and classifying and storing the IC device that has been tested, and an IC device before the test. The loader 300 which transfers from the IC storage 200 to the chamber 100 and the unloader 300 which is carried out while classifying the IC devices that have been tested by the test in the chamber 100 to the IC storage unit ( 400).

The handler 1 is a device that tests (inspects) whether the IC device operates properly in a state in which high or low temperature stress is applied to the IC device, and classifies the IC device according to the test result. The operation test in the state in which the temperature stress is applied is carried by transferring the IC device to a test tray TST carrying the inside of the handler 1 from a tray (hereinafter, referred to as a customer tray) in which a large number of IC devices to be tested are mounted. Is carried out.

As shown in FIG. 3, the test tray TST is transferred to the chamber unit 100 after the IC device is loaded in the loader unit 300, and then transferred to the chamber unit 100, and the chamber unit is mounted on the test tray TST. At 100, the test is performed by bringing each IC device into close contact with the test head 5 and making electrical contact (strictly bringing the input and output terminals of the IC device into close contact with the contact pins of the IC socket 710). . After the test is completed, the IC device is transported to the unloader unit 400 and then transferred to the customer tray according to the test result from the unloader unit 400.

The chamber part 100 is a thermostat 101 which imparts a target high or low temperature stress to an IC device loaded in the test tray TST, and in a state in which the thermal stress is applied in the thermostat 101. And a test chamber 102 for contacting the IC device with the test head 5 and a heat removal tank 103 for removing the thermal stress applied from the IC device tested in the test chamber 102.

The thermostat 101 is arranged to protrude upward from the test chamber 102. As conceptually shown in FIG. 3, a vertical conveying apparatus is provided inside the thermostatic chamber 101, and a plurality of test trays TST are vertical conveying apparatuses until the test chamber 102 is empty. Stand by while supporting. Mainly, high or low temperature thermal stress is applied to the IC device in this atmospheric state.

In the test chamber 102, a test head 5 is disposed at a central portion thereof, and a test tray TST is transported on the test head 5 so that an input / output terminal of the IC device is connected to the socket 710 of the test head 5. By electrically contacting the contact pins, testing of the IC device is performed. In addition, the test head 5 is explained later.

Like the thermostat 101, the heat removal tank 103 is arrange | positioned so that it may protrude upwards rather than the test chamber 102, and the vertical conveyance apparatus is provided as conceptually shown in FIG. In the heat removing tank 103, when the high temperature is applied to the thermostat 101, the IC device is cooled by blowing air to return to room temperature. When the low temperature is applied to the thermostat 101, the IC device is warmed or After heating to a temperature such that no condensation occurs by heating with a heater or the like, the de-heated IC device is taken out to the unloader unit 400.

The inlet side opening part for carrying in the test tray TST from the apparatus substrate 105 is formed in the upper part of the thermostat 101. In addition, an outlet side opening for carrying out the test tray TST to the device substrate 105 is formed in the upper part of the heat removal tank 103. The device substrate 105 is provided with a test tray conveyance device 108 for dispensing the test tray TST through these openings. This test tray conveyance apparatus 108 is comprised by the rotating roller etc., for example. By this test tray conveyance apparatus 108, the test tray TST carried out from the heat removal tank 103 is conveyed to the thermostat tank 101 through the unloader part 400 and the loader part 300. As shown in FIG.

The IC storage unit 200 includes a pre-test IC stocker 201 storing an IC device before a test, a tested IC stocker 202 storing IC devices classified according to a test result, and an IC stocker 201 before a test. ) And a tray transfer arm 205 that is movable over the entire range of the arrangement direction of the IC stocker 202 that has been tested.

The IC stocker 201 and the tested IC stocker 202 before the test are provided with a tray support frame 203 in the form of a box and an elevator 204 which can enter and descend from the lower portion of the tray support frame 203 and move upward. ) Is configured. A plurality of customer trays other than the drawings are stacked and supported by the tray support frame 203, and the stacked customer trays can be moved up and down by the elevator 204.

Then, before the test, the IC stocker 201 stacks and holds a customer tray in which the IC device to be tested is stored. On the other hand, in the IC stocker 202 which has been tested, a customer tray in which the IC devices which have been tested are properly classified is stacked and held.

The above-mentioned customer tray is conveyed to the loader part 300 by an elevating table (not shown) so that it may face upward through the window part 306 opened in the apparatus substrate 105. Then, the IC device loaded into the customer tray is transferred to the test tray TST stopped by the loader 300 and loaded.

As an IC moving device for moving an IC device from a customer tray to a test tray TST and loading it, as shown in FIG. 1, two rails 301 arranged on an upper portion of the substrate 105 and two rails 301. Is supported by the movable arm 302 which can reciprocate (make this direction Y direction) between the test tray TST and the customer tray, and this movable arm 302, Therefore, the XY moving device 304 having the movable head 303 which can move in the X direction is used.

The adsorption head is attached to the movable head 303 of the XY moving device 304 so that the adsorption head faces downward, and the adsorption head attracts IC devices from the customer tray, and transfers the IC devices to the test tray TST. It is possible to load. About eight such suction heads are mounted on the movable head 303, and eight IC devices can be transferred to the test tray TST at once and loaded.

On the other hand, in this embodiment, the presizer 305 is provided between the customer tray and the test tray TST. Although not shown in particular, this presizer 305 has a comparatively deep recessed part, and the peripheral edge of this recessed part is enclosed by the inclined surface. Therefore, before placing the IC devices transferred from the customer trays to the test trays TST and placed on the test trays TST, by dropping them into the presizer 305 once, the mutual positions of the eight IC devices are accurately corrected. The respective IC devices can be transferred to the test tray TST with good precision and loaded.

When all IC devices loaded into the customer tray are transferred to the test tray TST, the lifting table is lowered to guide the empty tray to the tray transfer arm 205.

The unloader unit 400 is also provided with an XY shifter 404 composed of a rail 401, a movable arm 402, and a movable head 403 having the same structure as the XY shifter 304 installed in the loader 300. By this XY moving device 404, the IC device which has been tested from the test tray TST carried to the unloader unit 400 is transferred to the customer tray and loaded. This customer tray is conveyed to the unloader part 400 by the elevation table so that it may face upward through the window part 406 opened in the apparatus board | substrate 105. As shown in FIG.

When the tested IC device is moved and stacked to fill the customer tray, the lifting table is lowered to guide the customer tray to the transfer arm 205.

Incidentally, in the present embodiment, only four window portions 406 are formed in the device substrate 105, but IC devices classified into categories having a low frequency of occurrence are temporarily provided in the buffer portion 405 provided in the device substrate 105. By storing them in the library, it can be classified into up to eight categories.

Next, the test head 50 will be described. 4 is a perspective view illustrating the upper structure of the test head of FIG. 2, FIG. 5 is an enlarged plan view of the V portion of FIG. 4, FIG. 6 is a sectional view taken along the line VI-VI of FIG. 5, and FIG. Sectional view along the line.

The test head 5 includes a test head body 500 electrically connected to the tester 9 through a cable 10 (see FIG. 2), and a body side board electrically connected to the test head body 500. 600 and a socket 700 on which the IC socket 710 is mounted, and the socket board 700 is detachably connected to the main body side board 600 through the connectors 620 and 740. It is.

As shown in FIG. 6, an upper surface of the socket board 700 includes an IC socket 710 having contact pins in which respective input / output terminals of an IC device (shown as a reference IC in the drawing) under test are in electrical contact with each other. A socket guide 720 positioned around the IC socket 710 to guide a pusher (not shown) for pressing the IC device is provided. Each IC socket 710 corresponds to a variety of IC devices under test, and a predetermined number of IC sockets 710 are provided on the upper surface of the socket board 700. On the other hand, not only the test head main body 500 but also the main body side board 600 is not limited to the varieties of IC devices, but can be commonly used for various kinds. Therefore, when exchanging the varieties of the IC device under test, only the socket board 700 is replaced by the test head 5, so that one test head 5 can easily cope with a variety of IC devices.

As shown in FIG. 6, a guide hole 730 into which the guide pin 662 formed in the connector guide 660 of the main body side board 600 is inserted, and the main body side board 600 are provided on the bottom surface of the socket board 700. The female connector 740 which can be connected to the male connector 620 provided at ()) is provided. When the socket board 700 is electrically connected to the main body side board 600 by the connector 620 and 740 at the time of the varieties of the IC device under test, the guide pin 662 is guided to the guide hole 730. The male connector 620 that is movable within a predetermined range is guided and positioned by the female connector 740 while moving slightly. As a result, the pins 621 of the male connector 740 and the pins of the female connector 740 are appropriately coupled because the pins of the plurality of pins 621 coincide with the pins of the corresponding female connector 740. . Therefore, the plurality of male connectors 620 (e.g., 48) can be stably connected to the female connector 740 even if there is thermal expansion accompanied by assembly deviation or temperature change.

As shown in FIGS. 5 to 7, the main body side board 600 includes a male connector 620 that is detachable from a female connector 740 provided on a lower surface of the socket board 700, and a socket of the male connector 620. The contact member 630 which presses the connector base 610 which supports in the attitude | position as opposed to the board 700, the cable 624 derived from the male connector 620, and the contact member of this press member 630 When attaching the cover member 640, the spacing frame 650, and the socket board 700 to the main body side board 600 to prevent the fall of the 632, the socket board 700 is attached to the main body side board 600. A connector guide 660 for guiding) is provided, and a housing 670 covering the main body side board 600 as a whole while exposing an upper portion of each male connector 620. 5 to 8, the housing is not shown, and the spacing frame 650 and the connector guide 660 are not shown in FIG. 5. In addition, illustration of the detailed internal structure of the male connector 620 is abbreviate | omitted in FIG.

In this embodiment, the connector base 610 corresponds to the supporting means in the present invention, the pressing member 630 corresponds to the pressing means in the present invention, and the lid member 640 corresponds to the fixing means in the present invention. The connector guide 660 corresponds to the guide means in the present invention. On the other hand, in this embodiment, as shown in FIG. 6, the main body side board 600 can also be attached or detached with respect to the test head main body 500 by a connector.

9 is a perspective view showing the entirety of the connector base used for the main body side board of FIG. 4, FIG. 10 is an enlarged plan view of the X portion of FIG. 9, FIG. 11 is a sectional view taken along the line II-XI of FIG. 10, and FIG. Fig. 13 is a sectional view showing the male connector used for the main body side board of Fig. 4, and Fig. 14 is a sectional view showing the first step of inserting the connector into the opening of the connector base. 15 is a cross-sectional view showing a second process of moving the connector inserted into the opening of the connector base in the horizontal direction.

As shown in FIGS. 9-12, the connector base 610 has a plurality of support groups 611 which consist of a pair of support posts 611a and 611b which support both ends of one male connector 620, The male connector 620 can be supported in a posture opposite to the socket board 700. The bolt fixing hole 611c is formed in the upper surface of each support | pillar 611a, 611b in order to fix the fixing part 626 of the both ends of the male connector 620 with the bolt 625. As shown in FIG. In addition, the connector base 610 has the base part 612 arrange | positioned so that each support group 611 may protrude toward the socket board 700 side. In this embodiment, as shown in FIG. 9, 48 sets of strut groups 611 are arrange | positioned on the base part 612 so that 48 connectors can be arrange | positioned.

The base portion 612 is formed with an opening 613 including a first portion 613a and a second portion 613b. The first portion 613a of the opening 613 is formed between the support groups 611 in the base portion 612. The length L ₁ (see FIG. 10) of the first portion 613a is larger than the length L ₂ (see FIG. 13 described later) of the male connector 620 (L ₁ > L ₂ ), provided that the first portion The width W ₁ (see FIG. 10) of the 613a is larger than the width W ₂ (see FIG. 13) of the male connector 620 (W ₁ > W ₂ ). As a result, the connector base 610 can be set without rotating the male connector 620.

The second portion 613b of the opening 613 is formed between the pair of struts 611a and 611b in the base portion 612, and is a male connector supported by the pair of struts 611a and 611b. 620 is located below.

On the other hand, in this embodiment, since the 1st part 613a of one opening part 613 is shared by the two support groups 611 located in the both sides at the time of insertion of the male connector 620, it is a support group. Although the 1st part 613a is formed only in one direction side of 611, and the 1st part 613a is not formed in the other direction side, the other support group 611 adjoins. The adjacent support groups 611 are integrally formed with the pillars 611a in one direction thereof, and the pillars 611b in the other direction are integrally formed with each other.

As shown in FIG. 13, the male connector 620 has bolt through holes 623a for attaching to the posts 611a and 611b of the connector base 610 by fixing bolts 626 at both ends. And a plurality of pins 621 protruding upward from the upper surface of the housing, as well as guide pins 622 protruding upward from the upper surface of the housing, and the bottom of the housing. There are a number of cables 624 which are directed downward from the plane.

The male connector 620 having such a configuration is attached to the connector base 610 described above as follows. That is, first, as shown in FIG. 14, the male connector 620 is inserted from the lower side into the first portion 613a of the opening 613 formed in the connector base 610.

At this time, since the first portion 613a is formed to be larger than the male connector 620, the cable 624 can be maintained in a straight state. Accordingly, the male connector 620 is opened at the opening 613 of the connector base 610 without performing a time-consuming operation such as rotating the male connector 620 or pulling the cable 624 upward. ) Can be easily passed. Thus, the assemblability of the main body side base 600 is greatly improved. Further, as a result of the shorter cable 624, the cable excretion space corresponding to the excess can be reduced, and a higher speed electric signal can be received between the test head main body 500 and the IC device. It becomes possible.

 In addition, since the connector 620 can be passed through the opening 613 of the connector base 610 without rotating the male connector 620, an unnecessary stress is applied to the cable or the length of the cable 624 is reduced. The difference is unlikely to occur.

In addition, even when the pin 621 is damaged or lowered to the housing 623 side due to some cause during use, the assembling property is improved, so that only the male connector 620 in question can be easily provided. Since it can be removed, it is also excellent in maintenance and repairability and disassembly workability at the time of disposal.

Since the lower surface of the housing 623 of the male connector 620 is pulled up higher than the support 611b of the connector base 610, as shown in FIG. 15, the male connector 620 is moved in the horizontal direction, The cable 624 derived from the male connector 620 supported by the connector base 610 is positioned in the second portion 613b of the opening 613. Then, the bolt 625 (refer FIG. 6) to each bolt through hole 623a of the male connector 620 and each bolt fixing hole 611c formed in the struts 611a and 611b of the connector base 610. Inserts the bolts 625 to fix the male connector 620 to the connector base 610 to be movable. Therefore, the bolt through hole of the male connector 620 is formed larger than the diameter of the bolt 625, and the male connector 620 attached to the connector base 610 includes the main body including the arrow A direction in FIG. It is possible to move minutely in the planar direction of the side board 600. For this reason, when attaching the socket board 700 to the main body side board 600, since many male connector 620 is inserted into the female connector 740, it is inserted, and it is excellent in workability. On the other hand, if necessary, the male connector 620 can be moved slightly along the side surface of the socket board 700 as well as in the plane direction of the main body side board 600.

As such, by placing the cable 624 derived from the male connector 620 in the second portion 613b of the opening 613, the cable 624 in the state where the male connector 620 is supported by the connector base 610. ) Can be prevented from bending, and excessive stress on the cable 624 can be prevented.

Fig. 16 is a perspective view showing a connector base and a pressing member with a connector in this embodiment, Fig. 17 is an exploded perspective view showing a pressing member in this embodiment, and Fig. 18 is a view of a pressing member on a connector base with a connector. Sectional drawing which showed the 3rd process of attaching a base member, FIG. 19 is sectional drawing which shows the 4th process of inserting a close contact member to the base member of the press member attached to the connector base.

The pressing member 630 is a member for blocking the opening of the first portion 613a, and as shown in FIGS. 16 and 17, the cable drawn from the male connector 620 supported by the connector base 610. The contact member 632 which abuts 624 and the base member 631 which supports this contact member 632 are included.

The close contact member 632 has a cylindrical portion 633 which abuts on the cable 624 of the male connector 620, and a shaft 634 constituting an axis of the cylindrical portion 633, as shown in FIG. 17. . The cylindrical part 633 is comprised from flexible materials, such as a sponge, so that deformation | transformation is possible at the time of contacting the cable 624, for example.

As shown in the drawing, the base member 631 is a member having a columnar shape in which a plurality of recesses 631a are formed on the side surfaces, and the pitch between the recesses 631a is defined by the openings formed in the connector base 610. It is substantially equal to the pitch between the second portions 613b of 613. Moreover, the groove part 631b is formed in the wall surface which opposes each recessed part 631a, respectively.

The length of the recessed part 631a in the longitudinal direction is longer than the length of the axial direction of the contact member 632, and the cylindrical part 633 of the contact member 632 can be inserted into each recessed part 631a. It is supposed to be. At this time, the shaft 634 drawn from both ends of the cylindrical part 633 pushes in the groove part 631b of the recessed part 631a, and the rotation is hold | maintained freely in the bottom face.

The pressing member 630 having such a configuration is attached to the connector base 610 on which the male connector 620 is mounted as follows. That is, first, as shown in FIG. 18, the base member 631 of the pressing member 630 is inserted upward into the first portion 613a of the opening 613 formed in the connector base 610, and the bolt The base member 631 is fixed to the connector base 610 by fastening or the like. At this time, the base member 631 is inserted such that each of the recesses 631a formed in the base member 631 faces the second portion 613a of the opening 613 formed in the connector base 610.

Next, as shown in FIG. 19, the contact member 632 is inserted from the upper side so as to be pushed into each recess 631a formed in the inserted base member 631, and as a result, the contact member 632. The cylindrical portion 633 is pressed against the cable 624 drawn from the male connector 620. As a result, the cable 624 can be prevented from applying excessive force to the pin 621 as a result of being guided linearly with respect to the pin 621, and prevents occurrence of poor coupling between the pin 621 and the housing. can do.

In this embodiment, the pressing member 630 can be attached from the upper direction, and the contact member 632 of the pressing member 630 can be detached from the base member 631, thereby assembling the main body side board 600. The property can be further improved, and also the maintenance and repairability and disassembly workability can be improved.

20 is a perspective view showing a connector base and a lid member with a pressing member according to the present embodiment, FIG. 21 is a perspective view showing a pressing member and a lid member according to the present embodiment, and FIG. 22 is a press attached to the connector base. It is sectional drawing which showed the 5th process of fixing a member by a lid member.

The lid member 640 is a member for fixing the shaft 634 of the attached contact member 632, and as shown in FIGS. 20 and 21, a plurality of recesses 641 are flat members formed on the side surface. . The size of each recess 631a is substantially the same as the recess 631a formed in the base member 631 of the pressing member 630. The pitches of the recesses 631a are substantially the same as the pitches of the recesses 631a formed in the base member 631.

 The cover member 640 having such a configuration is attached to the connector base 610 on which the male connector 620 and the pressing member 630 are mounted as follows. That is, as shown in FIG. 22, the upper surface of the pressing member 630 inserted into the connector base 610 is attached by bolting or the like from the upper side. At this time, the lid member 640 is attached to the pressing member 630 so that each recess 641 formed in the lid member 640 coincides with each recess 631a formed in the base member 631.

As a result, the upper portion of each of the grooves 631b formed in the base member 631 of the pressing member 630 is sealed, so that the detachable contact member 632 is displaced from the base member 631 of the pressing member 630. You can prevent it.

FIG. 23 is a perspective view showing the connector base and the spacing frame to which the pressing member and the cover member are attached in this embodiment, FIG. 24 is a perspective view showing the spacing frame and the connector guide attached to the connector base in this embodiment, FIG. It is sectional drawing which shows the 6th process of attaching a spacing frame to a connector base, and the 7th process of attaching a connector guide to this spacing frame.

In the present embodiment, the spacing frame 650 has a shape covering the upper surface of the connector base 620 to which the male connector 620 is attached, as shown in FIGS. 23 and 25, and the male connector 620 is formed. An insertable opening 651 is formed. The openings 651 are arranged in 48 rows and 4 columns so as to correspond to the arrangement of the male connector 620 supported by the connector base 610.

As shown in FIG. 24 and FIG. 25, the connector guide 660 is a flat member in which the opening 661 which the male connector 620 can insert is formed. Each opening 661 is also arranged in 48 rows and 4 columns so as to correspond to the arrangement of the male connector 620 supported by the connector base 610.

Moreover, as shown in FIG. 24, the guide pin 662 which protrudes upwards is formed in the upper surface of this connector guide 660. As shown in FIG. As described above, when the socket board 700 is attached to the main body side board 600, the guide pin 662 is inserted into the guide hole 730 provided in the lower surface of the socket board 700, so that The socket board 700 can be guided with respect to the main body side board 600 so as to be positioned.

The spacing frame 650 and the connector guide 660 having the above configuration are attached to the connector base 610 to which the male connector 620, the pressing member 630, and the cover member 640 are attached as follows. That is, first, as shown in FIGS. 23 and 25, the male connector 620 attached to the connector base 610 is inserted into each opening 651 formed in the spacing frame 650, and then the spacing frame ( 650 is attached to the connector base 620 from above, and fixed by bolting or the like.

Next, as shown in FIGS. 24 and 25, the connector guide is inserted into the spacing frame attached to the connector board 610 while inserting the male connector 620 into each opening 661 formed in the connector guide 660. 660 is attached from above and fixed by bolting or the like.

As described above, since the spacing frame 650 and the connector guide 660 can be attached from the upper direction, the assemblability of the main body side board 600 is further improved, and the maintenance and repairability and disassembly workability are also improved.

In this embodiment, as shown in FIG. 6, a part of the plurality of cables 624 which are drawn out of the male connector 620 and electrically connected to the test head main body 500 are connected to the picon board connection part 691. It is connected to the test head main body 500 via the following. In this picon board connection part 691, a picon board (Pcon board) 810 is detachable by a relay connector or the like.

The picon board 810 is an electrical circuit board which mainly connects an electrolytic capacitor having a desired capacity (for example, 10 kV to 2,000 kV) corresponding to a variety of IC devices between the power supply terminal of the IC device and the circuit earth. A picon board 810 corresponding to the variety or test condition is selected and connected to the picon board connecting portion 691.

Similarly, although not specifically illustrated, a part of the plurality of cables 624, which are derived from the male connector 620 and electrically connected to the test head body 500, are connected to the test head body 500 via the utility board connecting portion 692. ) The utility board 820 is detachable to the utility board connecting portion 692 by a relay connector or the like.

The utility board 820 is a general-purpose board capable of mounting a desired electric circuit on the user side, and a utility board 820 corresponding to the type and test condition of the IC device is selected and connected to the utility board connecting portion 692.

These board connection parts 691 and 692 are provided so that it may expose to the side part of the main body side board 600, as shown to FIG. 4 and FIG.

In addition, in this embodiment, the said picon board 810 and the utility board 820 correspond to the electric circuit board in this invention. In addition, in this embodiment, the picon board connection part 691 and the utility connection part 692 correspond to the connection part in this invention.

FIG. 26 is a perspective view showing an eighth step of covering the main body side board with the housing; FIG. 27 is an exploded perspective view showing the cover member in the present embodiment.

Enclosure 670 is a main body side board 600 including a connector base 610, male connector 620, pressing member 630, cover member 640, spacing frame 650 and connector guide 660 It is a member that can cover. As shown in Fig. 26, the enclosure 670 has a first opening 671 that exposes all the male connectors 620 to the outside, and is formed on the upper surface thereof, and the picon board 810 or the utility board 820 is provided. The second opening part 672 which exposes the board connection part 691 (692) which attaches and detaches to the outside is formed in the side surface.

Thus, by exposing the board connection parts 691 and 692 from the enclosure 670, the desired picon board 810 and the utility board 820 can be replaced easily at the user side.

4 and 27, the cover member 680 covering the picon board 810 connected to the board connecting portions 691 and 692 is snap-locked to the enclosure 670 according to the present embodiment. It is detachably installed by a ward or the like.

As shown in FIG. 27, the cover member 680 includes a cover body 681 covering the boards 810 and 820 connected to the board connection portions 691 and 692, and the boards 810 and 820. It has a holding part 682 for holding. A cutout 682a is formed on the side surface of each holding part 682, and boards 810 and 820 can be inserted into the cutout 682a. In addition, each holding part 682 is attached to the cover main body 681 in the direction of the arrow of the same figure so that a small movement is possible. This can prevent excessive stress from being applied to the picon board 810 or the utility board 820 connected to the board connecting portions 691 and 692, and the board connecting portions 691 and 692 and the boards 810. ) 820 can be prevented from being damaged.

Although the test head described above is a type that can easily correspond to the exchange of varieties of the IC device under test by interposing the main board side 600 between the socket board 700 and the test head main body 500, the socket board 700 May be provided with a connector board 610 in a type directly connected to the test head body 500.

FIG. 28 is an exploded perspective view showing the upper structure of the test head in the second embodiment of the present invention, and FIG. 29 is a plan view showing a state where a socket board is inserted into a connector base in a second embodiment of the present invention.

In the test head according to the second embodiment of the present invention, as shown in FIG. 28, the cable 624 is directly connected to the socket board 700 by soldering or the like, and the socket board 700 is connected to the cable 624. The type is directly connected to the test head body through

Also in this type of test head, as shown in FIG. 29, the connector board 610 in which the opening 613 is formed which supports the first portion 613a through which the socket board 700 can pass through is larger than the socket board 700. ). This eliminates the need for time-consuming work, such as rotating the socket board 700 or pulling the cable 624 upwards, during assembly of the upper part of the test head 5. 5) the assemblability is improved.

In addition, since the assembly can be performed without rotating the socket board 700, excessive stress is not applied to the cable 624, and manufacturing problems are less likely to occur. In addition, since the socket board 700 can be assembled without rotating, a difference in the length of the cable 624 is hardly generated, and good test performance can be exhibited. In addition, as the assemblability is improved, maintenance and repairability and disassembly workability are also improved.

The opening 613 formed in the connector board 610 further includes a second portion 613b positioned below the socket board 700 in a state of being supported by the struts 611a and 611b of the connector board 610. It is included. The cable 624 is bent while the socket board 700 is supported by the connector board 610 by passing the cable 624 drawn downward from the socket board 700 through the second portion 613b. No excessive stress is applied to the cable 624.

In addition, in this embodiment, after attaching the male connector 620 to the connector board 610, the spacing frame 650 can be attached from above. As a result, the assemblability of the test head 5 is further improved, and the maintenance and repairability and disassembly workability are also improved.

In addition, this embodiment described above was described in order to make understanding of this invention easy, and was not described in order to limit this invention. Therefore, each element disclosed in the said embodiment is intended to include all the design changes and equivalents which belong to the technical scope of this invention.

For example, in the above-described embodiment, the spacing frame 650 and the connector guide 660 are disassembled, but the spacing frame 650 and the connector guide 660 may be formed integrally.

In addition, although the male connector 620 is provided in the main body side board 600 and the female connector 740 is provided in the socket board 700 in the above-mentioned embodiment, you may reverse female / male relationship.

In addition, although the male connector 620 is made to be movable in the above-mentioned embodiment, the female connector 740 may be made to be movable, or both connectors 620 and 740 may be made to be made to be movable.

As another embodiment, the connector base 610, the connector 620, the pressing member 630, and the lid member as described above also in the main body side board connected by inserting the connector into the probe card used for testing the wafer under test. 640, the spacing frame 650, and the connector guide 660. At this time, as the arrangement of the male connector 620, in addition to the lattice arrangement shown in Fig. 16, a radial arrangement not specifically shown may be adopted.

Claims (25)

A main body side board having a first connector electrically connected to the test head main body via a cable; An electronic component testing apparatus comprising a connection board having a contact terminal for electrically contacting an electronic component under test and having a second connector detachable from the first connector, The main body side board has support means for supporting the first connector to face the connection board, A first portion larger than the first connector and through which the first connector passes; An opening is formed in the support means, the opening portion including a second portion located below the first connector supported by the support means and adjacent to the first part, And the cable is passed through the second portion while the first connector passing through the first portion is supported by the support means. delete The method of claim 1, The support means has a plurality of support groups composed of a pair of support posts supporting both ends of one first connector to support the plurality of first connectors, The support groups are arranged to protrude toward the connection board side and further have an opening in which the opening is formed, The said 1st part of the said opening part is formed between the said support groups in the said base part, The electronic component test apparatus characterized by the above-mentioned. The method of claim 3, And the second portion of the opening portion is formed between the pair of struts in the base portion. The method of claim 1, The body side board further has pressing means for pushing the cable which is led downward from the first connector and passes through the second portion of the opening, And said pressing means is attachable to said support means from above. The method of claim 5, The pressing means, An adhesive member in contact with the cable; A base member holding the contact member, The electronic component testing apparatus characterized in that the contact member is detachable from the base member. The method of claim 6, Further having fixing means for preventing the contact member attached to the base member of the pressing means from falling off the base member, And said fixing means is attachable to said pressing means from above. The method of claim 1, And said main body side board further has a spacing frame attachable from said upward direction to said support means. The method of claim 8, The main body side board includes guide means for guiding the connection board with respect to the main body side board when attaching the connection board to the main body side board, And said guide means is attachable to said spacing frame from above. The method of claim 9, And the spacing frame and the guide means are integrally formed. The method of claim 1, At least one of the first connector or the second connector is provided so as to be able to move minutely within a predetermined range when the first connector and the second connector are mounted. The method of claim 1, And the connection board is a socket board having an IC socket in electrical contact with an IC device under test, or a probe card having a probe pin in electrical contact with a wafer under test. A main body side board having a first connector electrically connected to the test head main body via a cable; An electronic component test apparatus comprising a connection board having a connection terminal to which an electronic component under test is electrically connected, and having a second connector detachable from the first connector. The body side board A support group for supporting the plurality of first connectors at both ends thereof, and at the same time the first connector from which the cable is drawn is inserted and the first portion through which the first connector and the first connector are inserted and moved horizontally to support the first connector; Support means formed with an opening including a second portion through which the cable passes in a state supported by the group; Pressing means for pressing the cable while simultaneously blocking the opening after supporting the first connector by the supporting means; A spacing frame for receiving the support means such that a portion of the first connector on which the support means is received is exposed through an opening; And a guide means having guide pins for positioning the first connector with respect to the opposing second connector. The method of claim 13, And the spacing frame and the guide means are integrally formed. The method of claim 13, At least one of the first connector or the second connector is provided so as to be able to move minutely within a predetermined range when the first connector and the second connector are mounted. The method of claim 13, And the connection board is a socket board having an IC socket in electrical contact with an IC device under test, or a probe card having a probe pin in electrical contact with a wafer under test. The method according to any one of claims 1 and 3 to 16, The body side board A housing covering the whole of the main body side board while exposing an upper portion of the first connector; It is further provided between the first connector and the test head body, the electrical circuit board further has a removable connection, And the connection portion is exposed from the housing. The method of claim 17, The main body side board further has a cover member covering the electric circuit board attached to the connecting portion, And the cover member is detachable from the housing. The method of claim 18, The cover member has a holding portion for holding the electrical circuit board mounted on the base board, The holding part is provided with an electronic component testing device, characterized in that the micro-movement is provided within a predetermined range with respect to the cover member. An electronic component test apparatus comprising a contact terminal for electrically contacting an electronic component under test and a connection board electrically connected to the test head body via a cable. It further comprises a supporting means for supporting the connection board, The support means includes an opening including a first portion larger than the connection board, the first portion through which the connection board can pass, and a second portion positioned below the connection board supported by the support means and adjacent to the first portion. Formed in And the cable passes through the second portion while the connection board having passed through the first portion is supported by the support means. delete The method of claim 20, The support means has a plurality of support groups comprising a pair of struts which support both ends of one of the connection boards so as to support the plurality of connection boards,  Each of the supporting groups is arranged to protrude toward the connecting board side and at the same time further has a base portion having the opening, And the first portion of the opening is formed between the support group in the base portion. The method of claim 22, And the second portion of the opening portion is formed between the pair of struts in the base portion. The method of claim 20, And said main body side board further has a spacing frame attachable from said upward direction to said support means. The method of claim 20, And the connection board is a socket board having an IC socket in electrical contact with an IC device under test, or a probe card having a probe pin in electrical contact with a wafer under test.

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