JP5872391B2 - Electronic component testing equipment - Google Patents

Description

The present invention relates to a semiconductor integrated circuit electronic components such as elements (hereinafter, simply DUT (Device Under Test) and referred.) Relates to that electronic device test apparatus used for testing.

  In the manufacturing process of the DUT, the performance and function of the DUT are tested using an electronic component testing apparatus. In this electronic component testing apparatus, the DUT is pressed against the socket of the test head, and the DUT terminal and the conductive member of the socket are in electrical contact with each other by an electronic component testing apparatus main body (hereinafter also referred to as a tester). The DUT is tested by inputting / outputting test signals to / from the DUT.

  As the conductive member of such a socket, an anisotropic conductive sheet (for example, refer to Patent Document 1 (paragraph [0005] and FIG. 5)) made of an elastic member having conductivity only in the thickness direction is used. A technique for connecting a DUT and a tester while absorbing a pressing force by a terminal of the DUT is known.

JP-A-11-17076

  However, the pressing load that can be absorbed by such an anisotropic conductive sheet is limited to a certain range. For this reason, if a load exceeding the range is applied to the anisotropic conductive sheet during the test, there is a problem that the anisotropic conductive sheet is damaged and the life of the socket is shortened.

An object of the present invention is to provide is to provide a Ru electronic can prolong the life of the socket device test apparatus.

[1] electronic device test apparatus according to the present invention, a tray for holding the device under test, wherein the test apparatus body having a socket contact under test electronic components electrically, the object held in the tray An electronic component testing apparatus comprising an electronic component conveying device that presses the test electronic component against the socket , wherein the socket has an anisotropic conductive rubber sheet, and the anisotropic conductive rubber sheet is in a flat plate shape A main body part, and a convex part protruding from the main body part and formed integrally with the main body part, and the tray is capable of inserting an input / output terminal of the electronic device under test. A first through hole provided in a bottom surface of the tray so as to correspond to the input / output terminal, and a shape into which the convex portion can be inserted, and the shape corresponding to the convex portion. The second provided on the bottom of the tray And the protruding portion is inserted into the second through hole and comes into contact with the main body of the electronic device under test, so that the pushing amount of the electronic device under test with respect to the socket is limited. Electronic component testing apparatus .

According to the present invention, by having the convex portion that limits the amount of DUT pushed into the socket, excessive pushing of the DUT into the socket caused by the load applied by the DUT can be suppressed, thus reducing damage to the socket. It is possible to extend the life of the socket.

FIG. 1 is a schematic cross-sectional view showing the overall configuration of an electronic component testing apparatus in an embodiment of the present invention. FIG. 2 is a perspective view showing a handler in the embodiment of the present invention. FIG. 3 is a conceptual plan view showing a method of handling the electronic device under test in the embodiment of the present invention. FIG. 4 is a perspective view showing the structure of the stocker in the embodiment of the present invention. FIG. 5 is a perspective view showing a customer tray in the embodiment of the present invention. FIG. 6 is a perspective view showing a test tray in the embodiment of the present invention. FIG. 7 is a cross-sectional view showing a measurement unit in the embodiment of the present invention. FIG. 8A is a cross-sectional view showing the socket before the test in the present invention, and FIG. 8B is a cross-sectional view showing the socket at the time of the test in the present invention. FIG. 9 is a perspective view showing an anisotropic conductive rubber sheet in the embodiment of the present invention. FIG. 10 is a plan view showing an electronic device under test in the embodiment of the present invention. FIG. 11A is a cross-sectional view showing a first modification of the socket of the present invention before the test, and FIG. 11B is a cross-sectional view showing a first modification of the socket of the present invention during the test. 12A is a cross-sectional view showing a second modification of the socket of the present invention before the test, and FIG. 12B is a cross-sectional view showing a second modification of the socket of the present invention during the test. FIG. 13A is a cross-sectional view showing a third modification of the socket of the present invention before the test, and FIG. 13B is a cross-sectional view showing a third modification of the socket of the present invention during the test. FIG. 14A is a cross-sectional view showing a fourth modification of the socket of the present invention before the test, and FIG. 14B is a cross-sectional view showing a fourth modification of the socket of the present invention during the test.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

  FIG. 1 is a schematic cross-sectional view showing an overall configuration of an electronic component testing apparatus 1 according to the present embodiment, FIG. 2 is a perspective view of a handler 2 according to an embodiment of the present invention, and FIG. 3 is a tray showing a handling method of the DUT 8 FIG. 4 is a perspective view showing the structure of stockers 201 and 202, FIG. 5 is a perspective view showing a customer tray, FIG. 6 is a partially exploded perspective view showing a test tray, and FIG. 7 is Z in the measurement unit of FIG. It is sectional drawing which shows the axial drive device 70, the match plate 60, a test tray, and the socket 7A.

  FIG. 3 is a view for understanding the method of routing the DUT 8 in the electronic component testing apparatus 1 of the present embodiment, and is a portion that actually shows the members arranged in the vertical direction in plan view. There is also. Therefore, the mechanical (three-dimensional) structure will be described with reference to FIG.

  The electronic component testing apparatus 1 according to the present embodiment tests (inspects) whether or not the DUT 8 operates properly in a state where high temperature or low temperature stress is applied to the DUT 8, and classifies the DUT 8 according to the test result. As shown in FIG. 1, the apparatus mainly includes a handler 2, a test head 3, and a tester body 4. The operation test in the state where the temperature stress is applied by the electronic component testing apparatus 1 is performed in the handler 2 from a tray (hereinafter, also referred to as a customer tray KST, see FIG. 5) on which a large number of DUTs 8 to be tested are mounted. This is performed by replacing the DUT 8 on the test tray TST (see FIG. 6).

  For this reason, as shown in FIGS. 2 and 3, the handler 2 according to the present embodiment stores the DUT 8 to be tested from now on, and classifies and stores the tested DUTs 8. A loader unit 300 for feeding the DUT 8 to be sent to the chamber unit 100, a chamber unit 100 including the test head 3, and an unloader unit 400 for classifying and extracting DUTs 8 that have been tested in the chamber unit 100. Yes.

  A high fix (HIFIX: High Fidelity Tester Access Fixture) 5 that relays the electrical connection between the DUT 8 and the test head 3 is mounted on the top of the test head 3 in the present embodiment. Further, on the upper part of the HiFix 5, a socket board 6 and a socket 7 A fixed to the socket board 6 are provided.

  As shown in FIG. 1, the socket 7A is connected to the tester body 4 through the cable 4a, and the DUT 8 that is in electrical contact with the socket 7A is connected to the tester body 4 through the cable 4a. Test DUT8 with Note that a space portion 2b is provided in a part of the handler 2, and the test head 3 is replaceably disposed in the space portion 2b. During the test, a Z-axis drive device 70 (described later) provided in the handler 2 presses the DUT 8 via a pusher 30 (described later), so that the DUT 8 is placed on the test head 3 through the through hole 2a of the handler 2. It can be brought into contact with the socket 7A. When the type of DUT 8 is changed, the test head 3 is replaced with a test head 3 having a socket 7A suitable for the shape and the number of pins of the DUT 8 of the type.

  The handler 2 will be described in detail below.

<Storage unit 200>
The storage unit 200 is provided with a pre-test stocker 201 for storing the DUT 8 before the test, and a tested stocker 202 for storing the DUTs 8 classified according to the test results.

  As shown in FIG. 4, the pre-test stocker 201 and the tested stocker 202 include a frame-shaped tray support frame 203 and an elevator 204 that can enter the lower part of the tray support frame 203 and move up and down. It comprises. A plurality of customer trays KST are stacked and supported on the tray support frame 203, and only the stacked customer trays KST are moved up and down by the elevator 204.

  The pre-test stocker 201 holds and holds the customer trays KST in which the DUTs 8 to be tested are stored, while the tested stocker 202 stores the customer DUTs 8 appropriately classified. The tray KST is stacked and held.

  Since the pre-test stocker 201 and the tested stocker 202 have the same structure, the numbers of the pre-test stocker 201 and the tested stocker 202 can be appropriately set as necessary.

  In the example shown in FIGS. 2 and 3, two stockers STK-B are provided in the pre-test stocker 201, two empty stockers STK-E to be sent to the unloader unit 400 are provided next thereto, and the tested stocker 202 is provided. , STK-8 are provided so that they can be sorted and stored in up to eight categories according to the test results. That is, in addition to good products and defective products, the non-defective products are classified into high-speed, medium-speed, low-speed, or defective products that require retesting.

<Loader unit 300>
The above-described customer tray KST is carried from the lower side of the apparatus substrate 105 to the window 306 of the loader unit 300 by the tray transfer arm 205 provided between the storage unit 200 and the apparatus substrate 105. In the loader unit 300, the DUT 8 loaded on the customer tray KST is once transferred to a precursor 305 by the XY transport device 304, where the mutual positions of the DUTs 8 are corrected. The DUT 8 that has been transferred to the test tray TST is loaded again onto the test tray TST stopped at the loader unit 300 using the XY transport device 304 again.

  As shown in FIG. 2, the XY transport device 304 that reloads the DUT 8 from the customer tray KST to the test tray TST includes two rails 301 installed on the upper portion of the device substrate 105, and the two rails 301. , A movable arm 302 capable of reciprocating between the test tray TST and the customer tray KST (this direction is defined as a Y direction), supported by the movable arm 302, and moved in the X direction along the movable arm 302 A movable head 303 is provided.

  A suction head (not shown) is mounted downward on the movable head 303 of the XY transport device 304, and the suction head moves while sucking air to suck the DUT 8 from the customer tray KST. Then, the DUT 8 is transferred to the test tray TST. For example, about eight such suction heads are attached to the movable head 303, and eight DUTs 8 can be transferred to the test tray TST at a time.

  FIG. 6 is an exploded perspective view showing the structure of the test tray TST used in the present embodiment. In this test tray TST, a plurality of crosspieces 13 are provided on the rectangular frame 12 in parallel and equidistantly, and a plurality of mounting pieces 14 are equidistantly provided on both sides of the crosspiece 13 and on the side 12a of the frame 12 facing the crosspiece 13. Is formed to protrude. An insert storage portion 15 is configured by the space between these bars 13, between the bars 13 and the side 12 a, and the two attachment pieces 14.

  Each insert storage portion 15 stores one insert 16, and this insert 16 is attached to two attachment pieces 14 in a floating state using fasteners 17. For this purpose, attachment holes 21 to the attachment pieces 14 are formed at both ends of the insert 16. For example, about 16 × 4 inserts 16 are attached to one test tray TST. Thus, the insert 16 is incorporated in the test tray TST and constitutes a part of the test tray TST. In this embodiment, the insert 16 and the test tray TST are detachable, but the insert 16 may be integrally formed as a part of the test tray TST.

  Each insert 16 has the same shape and the same size, and the DUT 8 is accommodated in each insert 16. The storage portion 19 of the insert 16 is determined according to the shape of the DUT 8 to be stored.

  In general customer tray KST, since the recess for holding DUT 8 is formed to be relatively larger than the shape of DUT 8, the position of DUT 8 in the state of being stored in customer tray KST is Has large variations. Therefore, if the DUT 8 is sucked by the suction head in this state and directly transported to the test tray TST, it becomes difficult to accurately drop it into the storage recess formed in the test tray TST. For this reason, in the handler 2 of the present embodiment, a DUT 8 position correcting means called a “preciser 305” is provided between the installation position of the customer tray KST and the test tray TST. Since this precise 305 has a relatively deep recess and the periphery of this recess is surrounded by an inclined surface, when the DUT 8 sucked by the suction head is dropped into this recess, the DUT 8 is moved by the inclined surface. Will be corrected. As a result, the mutual positions of the eight DUTs 8 are accurately determined, and the DUTs 8 whose positions have been corrected are again sucked by the suction head and transferred to the test tray TST, so that the storage recesses formed in the test tray TST have high accuracy. DUT8 can be transshipped well.

<Chamber part 100>
The test tray TST described above is loaded into the chamber unit 100 after the DUT 8 is loaded by the loader unit 300, and each DUT 8 is tested in a state of being mounted on the test tray TST.

  The chamber unit 100 includes a constant temperature bath (soak chamber) 101 that applies a desired high or low temperature thermal stress to the DUT 8 loaded on the test tray TST, and the DUT 8 in a state where the thermal stress is applied in the constant temperature bath 101. Is made up of a measurement unit (test chamber) 102 that contacts the test head 3 and a heat removal tank (unsoak chamber) 103 that removes applied thermal stress from the DUT 8 tested by the measurement unit 102. The heat removal tank 103 is preferably thermally disconnected from the thermostat 101 and the measurement unit 102. In practice, a predetermined thermal stress is applied to the region between the thermostat 101 and the measurement unit 102, and the heat removal tank 103 is removed. 103 is thermally disconnected from these, but these are referred to as a chamber portion 100 for convenience.

  As shown conceptually in FIG. 3, the thermostatic chamber 101 is provided with a vertical conveyance device, and a plurality of test trays TST are supported while being supported by the vertical conveyance device until the measurement unit 102 becomes empty. . Mainly, a high or low temperature heat stress is applied to the DUT 8 during this standby.

  In the measurement unit 102, the test head 3 is arranged in the center. As shown in FIG. 7, a Z-axis drive device 70 that moves up and down is provided inside the measurement unit 102. A pusher 30 held in the match plate 60 is provided below the Z-axis drive device 70 so as to face the lower surface of the Z-axis drive device 70, and as the Z-axis drive device 70 moves up and down. The pusher 30 also moves up and down.

  During the test, the test tray TST is carried along the X-axis direction in FIG. 7 so that the DUT 8 accommodated in the insert 16 of the test tray TST and the pusher 30 correspond to each other. Then, the upper surface of each DUT 8 stored in the test tray TST is in a state of facing the pusher 30.

  In this state, when a pressing force is applied by the Z-axis drive device 70 moving downward in FIG. 7, the DUT 8 is pressed downward via the pusher 30. By this pressing force, the input / output terminal 9 of the DUT 8 and the test head 3 are in electrical contact, and the test of the DUT 8 is performed.

  After completion of the test, the test tray TST is removed from heat in the heat removal tank 103, the temperature of the tested DUT 8 is returned to room temperature, and then carried out to the unloader unit 400.

<Unloader unit 400>
The unloader unit 400 is also provided with XY transport devices 404 and 404 having the same structure as the XY transport device 304 provided in the loader unit 300. The XY transport devices 404 and 404 allow the unloader unit 400 to The tested DUT 8 is transferred from the test tray TST carried out to the customer tray KST.

  As shown in FIG. 2, the device substrate 105 of the unloader unit 400 has a pair of windows 406 and 406 disposed so that the customer tray KST carried into the unloader unit 400 faces the upper surface of the device substrate 105. It is opened versus.

  In addition, an elevating table (not shown) for elevating and lowering the customer tray KST is provided below each window portion 406. Here, the customer tray KST that has been fully loaded with the tested DUTs 8 is loaded. The full tray is transferred to the tray transfer arm 205.

  Next, the socket 7A attached to the upper part of the test head 3 will be described in detail.

  8A and 8B are cross-sectional views showing the operation of the DUT 8 during the test in this embodiment, and FIG. 9 is a perspective view showing the anisotropic conductive rubber sheet 20 of the socket 7A in this embodiment. 10 is a plan view showing the DUT 8 in the present embodiment, and FIGS. 11A to 14B are sectional views showing first to fourth modifications of the socket, the insert, and the wiring board in the present embodiment.

  As shown in FIGS. 8A and 8B, the socket 7A in this embodiment includes an anisotropic conductive rubber sheet 20 that contacts the input / output terminal 9 of the DUT 8 and the anisotropic conductive rubber sheet 20. A socket guide 50 to be fixed.

  As shown in FIG. 9, the anisotropic conductive rubber sheet 20 includes a flat plate-like main body portion 21 and a convex portion 22 that protrudes upward in the drawing at the approximate center of the main body portion 21. ing. The main body portion 21 includes an insulating portion 24 and a conduction portion 23 provided in a part of the insulating portion 24.

  The main body 21 forms a rubber material in which conductive particles are densely packed in a flat plate shape, while applying a magnetic field in the thickness direction to a portion where the conductive portion 23 is to be formed in the flat plate, Made by assembling sex particles. At this time, the part where the conductive particles gather in the main body part 21 forms the conductive part 23, and the other part in the main body part 21 forms the insulating part 24.

  As shown in FIG. 9, the conductive portion 23 is provided around the convex portion 22 so as to correspond to the input / output terminal 9 (see FIG. 10) of the DUT 8, and is located below the socket 7A. It is placed in contact with the upper pad 41 (see FIG. 8A or FIG. 8B). In the present embodiment, a case where the DUT 8 having a total of 52 input / output terminals 9 is used is shown as an example.

  As said electroconductive particle, iron, copper, zinc, chromium, nickel, silver, aluminum, or these alloys etc. can be mentioned, for example. Examples of the rubber material include silicone rubber, urethane rubber, and natural rubber.

  Moreover, the main body 21 may have a structure in which, for example, a metal thin wire whose surface is gold-plated is held in a rubber material such as silicone rubber, urethane rubber, or natural rubber. At this time, the thin metal wire in the main body portion 21 forms the conducting portion 23, and the other portion in the main body portion 21 forms the insulating portion 24.

  In addition, in this embodiment, although the conduction | electrical_connection part 23 and the insulation part 24 are integrally formed, you may form them separately. For example, the conductive portion 23 may be formed by providing a through-hole in a plate-like member having an insulating property, and attaching an elastic body having conductivity to the through-hole.

  As shown in FIG. 9, the convex portion 22 is a substantially rectangular parallelepiped portion projecting upward in the figure at the approximate center of the main body portion 21, and is made of a rubber material such as silicone rubber, urethane rubber, or natural rubber. It is formed.

  In this embodiment, although the convex part 22 is integrally formed with the main-body part 21, you may form these each separately. For example, the convex portion 22 may be formed by fixing the substantially rectangular rubber material to the upper surface of the main body portion 21 with an adhesive or the like.

  The convex portion 22 is provided at a position corresponding to a portion of the main body portion 21 where the input / output terminal 9 of the DUT 8 is not formed (broken line portion in FIG. 10). In the present embodiment, the convex portion 22 has a height distance similar to that of the input / output terminal 9 of the DUT 8 (see FIG. 8B). It adjusts suitably according to conditions, such as a kind and number of parts 23.

  In the present embodiment, the convex portion 22 has a substantially rectangular parallelepiped shape, but is not particularly limited thereto. For example, the shape of the convex portion 22 may be a columnar shape, a polygonal column shape, a frustum shape, or the like according to the arrangement of the input / output terminals 9 provided in the DUT 8.

  The socket guide 50 in the present embodiment is arranged so as to surround the periphery of the anisotropic conductive rubber sheet 20, and engages with an upper end portion of the anisotropic conductive rubber sheet 20, thereby causing the anisotropic conductive rubber sheet 20. (See FIG. 8A or FIG. 8B).

  The socket board 6 in this embodiment includes the socket 7A described above and the wiring board 40 on which the socket 7A is implemented. The socket board 6 is positioned so that the conductive portion 23 of the anisotropic conductive rubber sheet 20 in the socket 7A and the pad 41 on the wiring board 40 face each other, and then the socket 7A is wired via the socket guide 50. It is fixed on the substrate 40 using, for example, screws.

  In the present embodiment, as shown in FIG. 8A, a first through hole 25 is provided at a position corresponding to the input / output terminal 9 of the DUT 8 in the insert 16 of the test tray TST described above. Further, a second through hole 26 is provided at a position corresponding to the convex portion 22 of the anisotropic conductive rubber sheet 20 in the insert 16. The first through hole 25 has a shape into which the input / output terminal 9 of the DUT 8 can be inserted. Further, the second through hole 26 has a shape into which the convex portion 22 of the anisotropic conductive rubber sheet 20 can be inserted.

  For this reason, when the DUT 8 is accommodated in the insert 16 before the test of the DUT 8, the input / output terminal 9 of the DUT 8 is inserted from above the first through hole 25 (see FIG. 8A). Thereafter, when the pusher 30 presses the DUT 8 during the test, the convex portion 22 is inserted from below the second through hole 26, and then the upper surface of the convex portion 22 is in contact with the lower surface of the DUT 8 (FIG. 8). (See (B)).

  The shapes of the socket and the insert are not particularly limited to the above. In the socket 7B illustrated in FIG. 11A, the second through hole 26 is not provided on the lower surface of the insert 16 as in the socket 7A, and the upper surface of the convex portion 22B is formed on the lower surface of the insert 16 during the test. Contact (see FIG. 11B).

  Further, like the socket 7C shown in FIG. 12 (A), by providing the convex portion 161 on the lower surface of the insert 16, the convex portion 161 contacts the upper surface of the anisotropic conductive rubber sheet 20 during the test. (See FIG. 12B). In addition, you may comprise this convex part 161 and the convex parts 162 and 42 mentioned later with rubber materials, such as silicone rubber, urethane rubber, and natural rubber.

  Further, like the socket 7D shown in FIG. 13A, by providing a convex portion 162 on the lower surface of the insert 16, and providing a through hole 27 into which the convex portion 162 can be inserted in the anisotropic conductive rubber sheet 20. The convex part 162 inserted into the through hole 27 may be in contact with the upper surface of the wiring board 40 (see FIG. 13B).

  Further, as in the socket 7E shown in FIG. 14 (A), the wiring substrate 40 is provided with a convex portion 42, and the through hole 28 into which the convex portion 42 can be inserted is provided in the anisotropic conductive rubber sheet 20, The convex part 42 inserted in the through-hole 28 may be a structure which contacts the lower surface of the insert 16 (refer FIG. 14 (B)).

  Next, the operation of this embodiment will be described.

  In the test process in the chamber section 100, the DUT 8 is mounted on the test tray TST while being accommodated in the insert 16 shown in FIG.

  When the test tray TST stops at a desired position above the test head 3, the pusher 30 is lowered by starting the operation of the Z-axis drive device 70 (see FIG. 7), and the pusher 30 presses the upper surface of the DUT 8. Thus, the DUT 8 and the insert 16 are lowered (see FIG. 8A). Thereby, the input / output terminal 9 of DUT8 contacts the conduction | electrical_connection part 23 of the anisotropically conductive rubber sheet 20 (refer FIG. 8 (B)). Thereafter, when the pusher 30 further presses the DUT 8, the input / output terminal 9 of the DUT 8 is pushed into the conduction portion 23, and the conduction particles 23 are brought into conduction when the conductive particles in the conduction portion 23 come into contact with each other. The output terminal 9 is electrically connected to the pad 41 on the wiring board 40.

  The pressing force of the pusher 30 needs to be set to an optimum condition according to the type of the DUT 8 or the like. At this time, if an excessive pressing force is applied to the conductive portion 23 of the anisotropic conductive rubber sheet 7A by mistakenly in the condition setting, the conductive portion 23 is damaged by the excessive pressing force, and the pressing force is thereafter applied. Even if the power is set to an appropriate strength, normal conduction may not be achieved. That is, if an excessive pressing force is accidentally applied to the conductive portion 23, there is a problem that the life of the socket 7A is extremely shortened due to this.

  In the present embodiment, when the pusher 30 presses the DUT 8, the upper surface of the convex portion 22 of the anisotropic conductive rubber sheet 20 is in contact with the lower surface of the DUT 8 (see FIG. 8B). For this reason, even when the pusher 30 erroneously applies a pressing force exceeding the appropriate value to the DUT 8, the excess pressing force is offset by the repulsive force due to the elasticity of the convex portion 22, and thus the input / output terminal 9 of the DUT 8. Is pushed into the conduction part 23 beyond the proper pushing amount. Thereby, it can suppress that the conduction | electrical_connection part 23 is damaged with the pressing force exceeding the appropriate value by the pusher 30, and can attain the lifetime improvement of the socket 7A.

  At the same time, the contamination of the inside of the test apparatus due to the damaged conductive portion 23 can be reduced, so that the number of cleaning cycles of the test apparatus can be reduced or shortened.

  In the present embodiment, the convex portion 22 of the anisotropic conductive rubber sheet 20 is formed of the same rubber material as that of the main body portion 21. For this reason, the impact which the conduction | electrical_connection part 23 of DUT8 and the anisotropic conductive rubber sheet 20 receives by the press by the pusher 30 can be relieved.

  Furthermore, in this embodiment, the convex part 22 of the anisotropic conductive rubber sheet 20 is formed integrally with the main body part 21. For this reason, the convex part 22 can be formed on the main body part 21 of the anisotropic conductive rubber sheet 20 with high accuracy.

  The test tray TST in the present embodiment corresponds to an example of the tray of the present invention, the bottom surface of the insert 16 in the present embodiment corresponds to an example of the bottom surface of the tray of the present invention, and the convex portions 22, 22 </ b> B, 161 in the present embodiment. , 162 and 42 correspond to an example of the limiting means for limiting the pushing amount of the electronic device under test in the present invention, and the test head 3 in the present embodiment corresponds to an example of the test apparatus main body of the present invention. The handler 2 corresponds to an example of the electronic component transport device of the present invention.

  The embodiment described above is described for facilitating the understanding of the present invention, and is not described for limiting the present invention. Therefore, each element disclosed in the above embodiment is intended to include all design changes and equivalents belonging to the technical scope of the present invention.

DESCRIPTION OF SYMBOLS 1 ... Electronic component test apparatus 2 ... Handler 3 ... Test head 7A-7E ... Socket 20 ... Anisotropic conductive rubber sheet 22 ... Convex part 16 ... Insert 40 ...・ Wiring board 4 ... Tester body 8 ... DUT
9 ... Input / output terminals

Claims (1)

A tray for holding an electronic component under test;
A test apparatus body having a socket in electrical contact with the electronic component under test ;
An electronic component test apparatus comprising: an electronic component transport device that presses the electronic device under test held on the tray against the socket ,
The socket has an anisotropic conductive rubber sheet,
The anisotropic conductive rubber sheet is
A plate-shaped body,
A protrusion that protrudes from the main body and is formed integrally with the main body, and
The tray
A first through hole provided in a bottom surface of the tray so as to correspond to the input / output terminal;
And having a shape into which the convex portion can be inserted, and a second through hole provided on the bottom surface of the tray so as to correspond to the convex portion,
The electronic component testing apparatus in which the pushing amount of the electronic device under test with respect to the socket is limited by the convex portion being inserted into the second through hole and contacting the main body portion of the electronic device under test .

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