KR20090119763A - 마이크로칼럼을 이용한 미세 패턴 및 형상 검사장치 - Google Patents
마이크로칼럼을 이용한 미세 패턴 및 형상 검사장치 Download PDFInfo
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- KR20090119763A KR20090119763A KR1020097018426A KR20097018426A KR20090119763A KR 20090119763 A KR20090119763 A KR 20090119763A KR 1020097018426 A KR1020097018426 A KR 1020097018426A KR 20097018426 A KR20097018426 A KR 20097018426A KR 20090119763 A KR20090119763 A KR 20090119763A
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- inspection
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- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
- G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
- G09G3/006—Electronic inspection or testing of displays and display drivers, e.g. of LED or LCD displays
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1306—Details
- G02F1/1309—Repairing; Testing
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/136254—Checking; Testing
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2203/00—Function characteristic
- G02F2203/69—Arrangements or methods for testing or calibrating a device
-
- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
- G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
- G09G3/20—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters
- G09G3/34—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source
- G09G3/36—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source using liquid crystals
- G09G3/3611—Control of matrices with row and column drivers
- G09G3/3648—Control of matrices with row and column drivers using an active matrix
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/26—Electron or ion microscopes
- H01J2237/28—Scanning microscopes
- H01J2237/2813—Scanning microscopes characterised by the application
- H01J2237/2817—Pattern inspection
Abstract
Description
Claims (8)
- 복수개의 마이크로칼럼;시료와의 이동방향에 직각으로 상기 마이크로칼럼이 결합되는 축, 및 상기 마이크로칼럼에서 주사된 전자빔이 시료에 쪼여진 것을 디텍팅하여 시료의 이상여부를 검토할 수 있는 전자검출수단을 포함하여 시료의 고속 검사를 하는 하나 이상의 1차 검사부; 및상기 1차 검사부 뒤에서 시료의 검사된 결과에 따라 이상부분을 정밀하게 검사할 수 있도록 X-Y 이동되는 이동축, 및 상기 이동축에 결합되는 마이크로칼럼을 더 포함하여 이상부분을 정밀 검사할 수 있는 하나 이상의 2차 검사부;를 포함하는 마이크로칼럼을 이용한 검사장치.
- 제1항에 있어서, 상기 2차 검사부 결합되는 마이크로칼럼으로 정밀 검사 및 수리를 수행하거나 수리용 이동축을 더 포함하여 이상부분을 정밀 검사 및 수리가 가능한 것을 특징으로 마이크로칼럼을 이용한 검사장치.
- 제1항 또는 제2항에 있어서, 상기 마이크로칼럼이 X-Y-Z 축의 이동 또는 틸팅이 가능한 것을 특징으로 하는 마이크로칼럼을 이용한 검사장치.
- 제1항 또는 제2항에 있어서, 상기 마이크로칼럼이 멀티 마이크로칼럼, 단순 싱글 마이크로칼럼의 조합, 또는 멀티 마이크로칼럼 및 싱글 마이크로칼럼의 조합인 것을 하는 마이크로칼럼을 이용한 검사장치.
- 제1항 내지 제4항에 있어서, 상기 전자검출수단 각각이 복수개의 마이크로칼럼에 대응하여 사용되며, 상기 각각의 전자검출수단이 해당 복수개의 마이크로칼럼이 순차적으로 작동하여 전자를 디텍팅하는 것을 특징으로 하는 마이크로칼럼을 이용한 검사장치.
- 제1항 내지 제4항에 있어서, 상기 전자검출수단이 샘플 커런트 방식으로 디텍팅하는 것을 특징으로 하는 마이크로칼럼을 이용한 검사장치.
- 제1항 내지 제6항에 있어서, 상기 마이크로칼럼과 시료가 상대운동하거나 마이크로칼럼이 이동하며 검사 또는 수리하는 것을 특징으로 하는 마이크로칼럼을 이용한 검사장치.
- 제1항 내지 제7항에 있어서, 상기 마이크로칼럼이 전자방출원, 소스렌즈 및 디플렉터, 또는 전자방출원 및 디플렉터 겸용 소스렌즈로 구성되는 것을 특징으로 하는 마이크로칼럼을 이용한 검사장치.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR20050070084 | 2005-07-30 | ||
KR1020050070084 | 2005-07-30 |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020087002543A Division KR20080043768A (ko) | 2005-07-30 | 2006-07-31 | 마이크로칼럼을 이용한 미세 패턴 및 형상 검사장치 |
Publications (2)
Publication Number | Publication Date |
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KR20090119763A true KR20090119763A (ko) | 2009-11-19 |
KR101011242B1 KR101011242B1 (ko) | 2011-01-26 |
Family
ID=37708879
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
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KR1020087002543A KR20080043768A (ko) | 2005-07-30 | 2006-07-31 | 마이크로칼럼을 이용한 미세 패턴 및 형상 검사장치 |
KR1020097018426A KR101011242B1 (ko) | 2005-07-30 | 2006-07-31 | 마이크로칼럼을 이용한 미세 패턴 및 형상 검사장치 |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
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KR1020087002543A KR20080043768A (ko) | 2005-07-30 | 2006-07-31 | 마이크로칼럼을 이용한 미세 패턴 및 형상 검사장치 |
Country Status (6)
Country | Link |
---|---|
US (1) | US7935926B2 (ko) |
EP (1) | EP1910891B1 (ko) |
JP (1) | JP5362355B2 (ko) |
KR (2) | KR20080043768A (ko) |
CN (1) | CN101233444B (ko) |
WO (1) | WO2007015615A1 (ko) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8399828B2 (en) * | 2009-12-31 | 2013-03-19 | Virgin Instruments Corporation | Merged ion beam tandem TOF-TOF mass spectrometer |
KR102119930B1 (ko) * | 2014-08-31 | 2020-06-08 | 케이엘에이 코포레이션 | 복수의 이동가능한 빔 칼럼을 갖는 이미징 장치 및 실질적으로 일치하도록 의도된 기판의 복수의 영역을 검사하는 방법 |
JP6604704B2 (ja) * | 2014-12-22 | 2019-11-13 | アプライド マテリアルズ インコーポレイテッド | 基板の検査装置、基板の検査方法、大面積基板検査装置、及びその操作方法 |
CN104965325B (zh) * | 2015-08-03 | 2018-10-30 | 合肥鑫晟光电科技有限公司 | 一种阵列基板、其修复方法、显示面板及显示装置 |
US9741532B1 (en) * | 2016-06-17 | 2017-08-22 | International Business Machines Corporation | Multi-beam electron microscope for electron channeling contrast imaging of semiconductor material |
KR101882473B1 (ko) * | 2016-12-08 | 2018-07-25 | 한국생산기술연구원 | 로봇을 이용한 가공상태 검사장치 및 이에 의한 검사방법 |
CN109449092B (zh) * | 2018-10-16 | 2021-09-14 | 惠科股份有限公司 | 一种阵列基板的测试设备和测试方法 |
Family Cites Families (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3392262A (en) * | 1964-08-06 | 1968-07-09 | United Aircraft Corp | Electron beam pantograph control |
JPS5637626A (en) * | 1979-09-05 | 1981-04-11 | Chiyou Lsi Gijutsu Kenkyu Kumiai | Inspection device for pattern |
US4390789A (en) * | 1981-05-21 | 1983-06-28 | Control Data Corporation | Electron beam array lithography system employing multiple parallel array optics channels and method of operation |
US4764818A (en) * | 1986-02-03 | 1988-08-16 | Electron Beam Memories | Electron beam memory system with improved high rate digital beam pulsing system |
JP2754096B2 (ja) * | 1991-03-05 | 1998-05-20 | 日本電子テクニクス株式会社 | 電子線による試料表面の状態測定装置 |
US5384463A (en) * | 1991-06-10 | 1995-01-24 | Fujisu Limited | Pattern inspection apparatus and electron beam apparatus |
DE69223088T2 (de) * | 1991-06-10 | 1998-03-05 | Fujitsu Ltd | Apparat zur Musterüberprüfung und Elektronenstrahlgerät |
JPH05159735A (ja) * | 1991-12-03 | 1993-06-25 | Pioneer Electron Corp | 電子ビーム投射装置 |
JP2851213B2 (ja) * | 1992-09-28 | 1999-01-27 | 株式会社東芝 | 走査電子顕微鏡 |
KR19990017650A (ko) | 1997-08-25 | 1999-03-15 | 윤종용 | 박막 트랜지스터 어레이 테스터 |
US6023060A (en) * | 1998-03-03 | 2000-02-08 | Etec Systems, Inc. | T-shaped electron-beam microcolumn as a general purpose scanning electron microscope |
JP4090567B2 (ja) * | 1998-05-11 | 2008-05-28 | 株式会社日立製作所 | ウエハ検査加工装置およびウエハ検査加工方法 |
US6740889B1 (en) * | 1998-09-28 | 2004-05-25 | Applied Materials, Inc. | Charged particle beam microscope with minicolumn |
US6369385B1 (en) * | 1999-05-05 | 2002-04-09 | Applied Materials, Inc. | Integrated microcolumn and scanning probe microscope arrays |
JP2001056306A (ja) * | 1999-08-19 | 2001-02-27 | Jeol Ltd | 試料表面検査装置 |
JP3874996B2 (ja) * | 2000-05-30 | 2007-01-31 | ファブソリューション株式会社 | デバイス検査方法および装置 |
JP2003217499A (ja) * | 2002-01-17 | 2003-07-31 | Sony Corp | 検査・測定装置 |
US20040086166A1 (en) * | 2002-11-01 | 2004-05-06 | Photon Dynamics, Inc. | Method and apparatus for flat patterned media inspection |
WO2004059690A1 (en) * | 2002-12-30 | 2004-07-15 | Cebt Co., Ltd. | An extractor for an microcoloum, an alignment method for an extractor aperture to an electon emitter, and a measuring method and an alignment method using thereof |
JP2005332888A (ja) * | 2004-05-18 | 2005-12-02 | Ebara Corp | 形状修復装置および形状修復方法 |
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2006
- 2006-07-31 CN CN2006800280063A patent/CN101233444B/zh not_active Expired - Fee Related
- 2006-07-31 KR KR1020087002543A patent/KR20080043768A/ko not_active Application Discontinuation
- 2006-07-31 WO PCT/KR2006/003010 patent/WO2007015615A1/en active Application Filing
- 2006-07-31 EP EP06783468.9A patent/EP1910891B1/en not_active Not-in-force
- 2006-07-31 JP JP2008523810A patent/JP5362355B2/ja not_active Expired - Fee Related
- 2006-07-31 KR KR1020097018426A patent/KR101011242B1/ko active IP Right Grant
- 2006-07-31 US US11/997,316 patent/US7935926B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JP2009503495A (ja) | 2009-01-29 |
WO2007015615A1 (en) | 2007-02-08 |
CN101233444B (zh) | 2010-12-08 |
EP1910891A4 (en) | 2009-06-10 |
US20080272298A1 (en) | 2008-11-06 |
CN101233444A (zh) | 2008-07-30 |
EP1910891B1 (en) | 2014-07-16 |
KR101011242B1 (ko) | 2011-01-26 |
JP5362355B2 (ja) | 2013-12-11 |
KR20080043768A (ko) | 2008-05-19 |
US7935926B2 (en) | 2011-05-03 |
EP1910891A1 (en) | 2008-04-16 |
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