JP5362355B2 - マイクロカラムを用いた微細パターンおよび形状検査装置 - Google Patents
マイクロカラムを用いた微細パターンおよび形状検査装置 Download PDFInfo
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- JP5362355B2 JP5362355B2 JP2008523810A JP2008523810A JP5362355B2 JP 5362355 B2 JP5362355 B2 JP 5362355B2 JP 2008523810 A JP2008523810 A JP 2008523810A JP 2008523810 A JP2008523810 A JP 2008523810A JP 5362355 B2 JP5362355 B2 JP 5362355B2
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- Prior art keywords
- microcolumn
- sample
- inspection
- electron beam
- inspection unit
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- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
- G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
- G09G3/006—Electronic inspection or testing of displays and display drivers, e.g. of LED or LCD displays
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1306—Details
- G02F1/1309—Repairing; Testing
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/136254—Checking; Testing
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2203/00—Function characteristic
- G02F2203/69—Arrangements or methods for testing or calibrating a device
-
- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
- G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
- G09G3/20—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters
- G09G3/34—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source
- G09G3/36—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source using liquid crystals
- G09G3/3611—Control of matrices with row and column drivers
- G09G3/3648—Control of matrices with row and column drivers using an active matrix
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/26—Electron or ion microscopes
- H01J2237/28—Scanning microscopes
- H01J2237/2813—Scanning microscopes characterised by the application
- H01J2237/2817—Pattern inspection
Landscapes
- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- General Physics & Mathematics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Optics & Photonics (AREA)
- Analytical Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Theoretical Computer Science (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Gas-Filled Discharge Tubes (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
- Liquid Crystal (AREA)
- Manufacture Of Electron Tubes, Discharge Lamp Vessels, Lead-In Wires, And The Like (AREA)
Description
10…駆動部 11…X方向軸 12…連結部 15…固定軸 15a、15b…軸
16、17…移動軸 20…支持部材 21…支持部材の軸 22…Y方向軸
30…試料
Claims (1)
- マイクロカラムを用いた検査装置において、
複数のマイクロカラムと;
試料との移動方向に直角に設けられ、チャンバーに収容される、前記複数のマイクロカラムのうちの少なくとも一つのマイクロカラムに結合する軸、および前記マイクロカラムからの電子ビームが試料に照射されることを検出して試料の回路異常有無を検討することが可能な電子検出手段を備え、試料の高速検査を行う少なくとも一つの1次検査部と;
前記1次検査部の後ろで試料の検査結果により異常部分を精密に検査することが可能なように、X−Y方向に移動され、チャンバー内に収容される、前記複数のマイクロカラムのうちの少なくとも一つのマイクロカラムに結合され、X-Y方向に移動される移動軸、および前記マイクロカラムからの電子ビームが試料に照射されることを検出して試料の異常有無を検討することが可能な電子検出手段を含んで異常部分を精密に検査することが可能な少なくとも一つの2次検査部と;を含み、
前記2次検査部が複数の駆動装置を備え、X駆動軸とY駆動軸に沿って独立して前記マイクロカラムが駆動するように設定され、
前記1次検査部および2次検査部は、10 −7 Torr以下の範囲の低真空度の真空チャンバーに設けられ、そして前記マイクロカラムを収容する前記1次検査部および2次検査部のチャンバーは、10−8〜10−11Torrの超高真空度の範囲内で作動することを特徴とするマイクロカラムを用いた検査装置。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR20050070084 | 2005-07-30 | ||
KR10-2005-0070084 | 2005-07-30 | ||
PCT/KR2006/003010 WO2007015615A1 (en) | 2005-07-30 | 2006-07-31 | Inspection equipment for fine pattern and morphology using microcolumn |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2009503495A JP2009503495A (ja) | 2009-01-29 |
JP5362355B2 true JP5362355B2 (ja) | 2013-12-11 |
Family
ID=37708879
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2008523810A Expired - Fee Related JP5362355B2 (ja) | 2005-07-30 | 2006-07-31 | マイクロカラムを用いた微細パターンおよび形状検査装置 |
Country Status (6)
Country | Link |
---|---|
US (1) | US7935926B2 (ja) |
EP (1) | EP1910891B1 (ja) |
JP (1) | JP5362355B2 (ja) |
KR (2) | KR20080043768A (ja) |
CN (1) | CN101233444B (ja) |
WO (1) | WO2007015615A1 (ja) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8399828B2 (en) * | 2009-12-31 | 2013-03-19 | Virgin Instruments Corporation | Merged ion beam tandem TOF-TOF mass spectrometer |
WO2016032549A1 (en) * | 2014-08-31 | 2016-03-03 | Keysight Technologies, Inc. | Imaging apparatus having a plurality of movable beam columns, and method of inspecting a plurality of regions of a substrate intended to be substantially identical |
JP6604704B2 (ja) * | 2014-12-22 | 2019-11-13 | アプライド マテリアルズ インコーポレイテッド | 基板の検査装置、基板の検査方法、大面積基板検査装置、及びその操作方法 |
CN104965325B (zh) * | 2015-08-03 | 2018-10-30 | 合肥鑫晟光电科技有限公司 | 一种阵列基板、其修复方法、显示面板及显示装置 |
US9741532B1 (en) * | 2016-06-17 | 2017-08-22 | International Business Machines Corporation | Multi-beam electron microscope for electron channeling contrast imaging of semiconductor material |
KR101882473B1 (ko) * | 2016-12-08 | 2018-07-25 | 한국생산기술연구원 | 로봇을 이용한 가공상태 검사장치 및 이에 의한 검사방법 |
CN109449092B (zh) * | 2018-10-16 | 2021-09-14 | 惠科股份有限公司 | 一种阵列基板的测试设备和测试方法 |
Family Cites Families (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3392262A (en) * | 1964-08-06 | 1968-07-09 | United Aircraft Corp | Electron beam pantograph control |
JPS5637626A (en) * | 1979-09-05 | 1981-04-11 | Chiyou Lsi Gijutsu Kenkyu Kumiai | Inspection device for pattern |
US4390789A (en) * | 1981-05-21 | 1983-06-28 | Control Data Corporation | Electron beam array lithography system employing multiple parallel array optics channels and method of operation |
US4764818A (en) * | 1986-02-03 | 1988-08-16 | Electron Beam Memories | Electron beam memory system with improved high rate digital beam pulsing system |
JP2754096B2 (ja) * | 1991-03-05 | 1998-05-20 | 日本電子テクニクス株式会社 | 電子線による試料表面の状態測定装置 |
EP0518633B1 (en) * | 1991-06-10 | 1997-11-12 | Fujitsu Limited | Pattern inspection apparatus and electron beam apparatus |
US5384463A (en) * | 1991-06-10 | 1995-01-24 | Fujisu Limited | Pattern inspection apparatus and electron beam apparatus |
JPH05159735A (ja) * | 1991-12-03 | 1993-06-25 | Pioneer Electron Corp | 電子ビーム投射装置 |
JP2851213B2 (ja) * | 1992-09-28 | 1999-01-27 | 株式会社東芝 | 走査電子顕微鏡 |
KR19990017650A (ko) | 1997-08-25 | 1999-03-15 | 윤종용 | 박막 트랜지스터 어레이 테스터 |
US6023060A (en) * | 1998-03-03 | 2000-02-08 | Etec Systems, Inc. | T-shaped electron-beam microcolumn as a general purpose scanning electron microscope |
JP4090567B2 (ja) * | 1998-05-11 | 2008-05-28 | 株式会社日立製作所 | ウエハ検査加工装置およびウエハ検査加工方法 |
US6740889B1 (en) * | 1998-09-28 | 2004-05-25 | Applied Materials, Inc. | Charged particle beam microscope with minicolumn |
US6369385B1 (en) * | 1999-05-05 | 2002-04-09 | Applied Materials, Inc. | Integrated microcolumn and scanning probe microscope arrays |
JP2001056306A (ja) * | 1999-08-19 | 2001-02-27 | Jeol Ltd | 試料表面検査装置 |
JP3874996B2 (ja) * | 2000-05-30 | 2007-01-31 | ファブソリューション株式会社 | デバイス検査方法および装置 |
JP2003217499A (ja) * | 2002-01-17 | 2003-07-31 | Sony Corp | 検査・測定装置 |
US20040086166A1 (en) * | 2002-11-01 | 2004-05-06 | Photon Dynamics, Inc. | Method and apparatus for flat patterned media inspection |
US7750295B2 (en) * | 2002-12-30 | 2010-07-06 | Cebt Co., Ltd. | Extractor for an microcolumn, an alignment method for an extractor aperture to an electron emitter, and a measuring method and an alignment method using thereof |
JP2005332888A (ja) * | 2004-05-18 | 2005-12-02 | Ebara Corp | 形状修復装置および形状修復方法 |
-
2006
- 2006-07-31 JP JP2008523810A patent/JP5362355B2/ja not_active Expired - Fee Related
- 2006-07-31 WO PCT/KR2006/003010 patent/WO2007015615A1/en active Application Filing
- 2006-07-31 KR KR1020087002543A patent/KR20080043768A/ko not_active Application Discontinuation
- 2006-07-31 US US11/997,316 patent/US7935926B2/en not_active Expired - Fee Related
- 2006-07-31 CN CN2006800280063A patent/CN101233444B/zh not_active Expired - Fee Related
- 2006-07-31 EP EP06783468.9A patent/EP1910891B1/en not_active Not-in-force
- 2006-07-31 KR KR1020097018426A patent/KR101011242B1/ko active IP Right Grant
Also Published As
Publication number | Publication date |
---|---|
EP1910891A4 (en) | 2009-06-10 |
US20080272298A1 (en) | 2008-11-06 |
KR20090119763A (ko) | 2009-11-19 |
EP1910891B1 (en) | 2014-07-16 |
CN101233444A (zh) | 2008-07-30 |
EP1910891A1 (en) | 2008-04-16 |
WO2007015615A1 (en) | 2007-02-08 |
US7935926B2 (en) | 2011-05-03 |
KR20080043768A (ko) | 2008-05-19 |
JP2009503495A (ja) | 2009-01-29 |
CN101233444B (zh) | 2010-12-08 |
KR101011242B1 (ko) | 2011-01-26 |
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