KR20080099218A - 이중-유동 밸브 및 내부 처리 용기 유리 시스템 - Google Patents
이중-유동 밸브 및 내부 처리 용기 유리 시스템 Download PDFInfo
- Publication number
- KR20080099218A KR20080099218A KR1020080100034A KR20080100034A KR20080099218A KR 20080099218 A KR20080099218 A KR 20080099218A KR 1020080100034 A KR1020080100034 A KR 1020080100034A KR 20080100034 A KR20080100034 A KR 20080100034A KR 20080099218 A KR20080099218 A KR 20080099218A
- Authority
- KR
- South Korea
- Prior art keywords
- valve
- port
- fluid
- fluid flow
- outlet
- Prior art date
Links
- 238000012545 processing Methods 0.000 title abstract description 66
- 238000002955 isolation Methods 0.000 title abstract 2
- 239000012530 fluid Substances 0.000 claims abstract description 227
- 238000000034 method Methods 0.000 claims description 12
- 230000009977 dual effect Effects 0.000 abstract 1
- 239000007789 gas Substances 0.000 description 61
- 238000003860 storage Methods 0.000 description 42
- 239000000463 material Substances 0.000 description 37
- 238000011282 treatment Methods 0.000 description 30
- 239000000047 product Substances 0.000 description 25
- 238000006243 chemical reaction Methods 0.000 description 21
- 239000000126 substance Substances 0.000 description 18
- RBFQJDQYXXHULB-UHFFFAOYSA-N arsane Chemical compound [AsH3] RBFQJDQYXXHULB-UHFFFAOYSA-N 0.000 description 14
- 238000011049 filling Methods 0.000 description 10
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 8
- 239000003463 adsorbent Substances 0.000 description 8
- 238000004519 manufacturing process Methods 0.000 description 7
- 238000007789 sealing Methods 0.000 description 7
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 6
- CPELXLSAUQHCOX-UHFFFAOYSA-N Hydrogen bromide Chemical compound Br CPELXLSAUQHCOX-UHFFFAOYSA-N 0.000 description 6
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 4
- 239000002250 absorbent Substances 0.000 description 4
- 230000002745 absorbent Effects 0.000 description 4
- 229910021529 ammonia Inorganic materials 0.000 description 4
- 239000000460 chlorine Substances 0.000 description 4
- 229910052801 chlorine Inorganic materials 0.000 description 4
- 238000000746 purification Methods 0.000 description 4
- 238000012546 transfer Methods 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 3
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 3
- 230000000274 adsorptive effect Effects 0.000 description 3
- 239000003054 catalyst Substances 0.000 description 3
- MROCJMGDEKINLD-UHFFFAOYSA-N dichlorosilane Chemical compound Cl[SiH2]Cl MROCJMGDEKINLD-UHFFFAOYSA-N 0.000 description 3
- PZPGRFITIJYNEJ-UHFFFAOYSA-N disilane Chemical compound [SiH3][SiH3] PZPGRFITIJYNEJ-UHFFFAOYSA-N 0.000 description 3
- 238000003487 electrochemical reaction Methods 0.000 description 3
- 238000001914 filtration Methods 0.000 description 3
- 229910052734 helium Inorganic materials 0.000 description 3
- 239000001307 helium Substances 0.000 description 3
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 3
- 239000001257 hydrogen Substances 0.000 description 3
- 229910052739 hydrogen Inorganic materials 0.000 description 3
- 150000002431 hydrogen Chemical class 0.000 description 3
- 229910000042 hydrogen bromide Inorganic materials 0.000 description 3
- 229910000041 hydrogen chloride Inorganic materials 0.000 description 3
- IXCSERBJSXMMFS-UHFFFAOYSA-N hydrogen chloride Substances Cl.Cl IXCSERBJSXMMFS-UHFFFAOYSA-N 0.000 description 3
- 229910000040 hydrogen fluoride Inorganic materials 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- 239000012264 purified product Substances 0.000 description 3
- FAQYAMRNWDIXMY-UHFFFAOYSA-N trichloroborane Chemical compound ClB(Cl)Cl FAQYAMRNWDIXMY-UHFFFAOYSA-N 0.000 description 3
- PQDJYEQOELDLCP-UHFFFAOYSA-N trimethylsilane Chemical compound C[SiH](C)C PQDJYEQOELDLCP-UHFFFAOYSA-N 0.000 description 3
- NXHILIPIEUBEPD-UHFFFAOYSA-H tungsten hexafluoride Chemical compound F[W](F)(F)(F)(F)F NXHILIPIEUBEPD-UHFFFAOYSA-H 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- ATUOYWHBWRKTHZ-UHFFFAOYSA-N Propane Chemical compound CCC ATUOYWHBWRKTHZ-UHFFFAOYSA-N 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 238000012824 chemical production Methods 0.000 description 2
- 239000007795 chemical reaction product Substances 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
- 238000010926 purge Methods 0.000 description 2
- 239000011555 saturated liquid Substances 0.000 description 2
- BQCIDUSAKPWEOX-UHFFFAOYSA-N 1,1-Difluoroethene Chemical compound FC(F)=C BQCIDUSAKPWEOX-UHFFFAOYSA-N 0.000 description 1
- 229910000975 Carbon steel Inorganic materials 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910000881 Cu alloy Inorganic materials 0.000 description 1
- 229910000570 Cupronickel Inorganic materials 0.000 description 1
- 229920006370 Kynar Polymers 0.000 description 1
- 229910000990 Ni alloy Inorganic materials 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 229910000963 austenitic stainless steel Inorganic materials 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 239000001273 butane Substances 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005868 electrolysis reaction Methods 0.000 description 1
- 239000003792 electrolyte Substances 0.000 description 1
- 238000005247 gettering Methods 0.000 description 1
- 229910000856 hastalloy Inorganic materials 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 229910052743 krypton Inorganic materials 0.000 description 1
- DNNSSWSSYDEUBZ-UHFFFAOYSA-N krypton atom Chemical compound [Kr] DNNSSWSSYDEUBZ-UHFFFAOYSA-N 0.000 description 1
- 239000007791 liquid phase Substances 0.000 description 1
- 229910001092 metal group alloy Inorganic materials 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- IJDNQMDRQITEOD-UHFFFAOYSA-N n-butane Chemical compound CCCC IJDNQMDRQITEOD-UHFFFAOYSA-N 0.000 description 1
- OFBQJSOFQDEBGM-UHFFFAOYSA-N n-pentane Natural products CCCCC OFBQJSOFQDEBGM-UHFFFAOYSA-N 0.000 description 1
- 229910052754 neon Inorganic materials 0.000 description 1
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910052756 noble gas Inorganic materials 0.000 description 1
- 150000002835 noble gases Chemical class 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 230000005693 optoelectronics Effects 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000012071 phase Substances 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 229920002981 polyvinylidene fluoride Polymers 0.000 description 1
- 239000001294 propane Substances 0.000 description 1
- 229910052704 radon Inorganic materials 0.000 description 1
- SYUHGPGVQRZVTB-UHFFFAOYSA-N radon atom Chemical compound [Rn] SYUHGPGVQRZVTB-UHFFFAOYSA-N 0.000 description 1
- 239000000376 reactant Substances 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 238000005201 scrubbing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 238000010977 unit operation Methods 0.000 description 1
- 239000012808 vapor phase Substances 0.000 description 1
- 210000001835 viscera Anatomy 0.000 description 1
- 230000009278 visceral effect Effects 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C13/00—Rolls, drums, discs, or the like; Bearings or mountings therefor
- F16C13/02—Bearings
- F16C13/04—Bearings with only partial enclosure of the member to be borne; Bearings with local support at two or more points
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
- F16K1/30—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces specially adapted for pressure containers
- F16K1/304—Shut-off valves with additional means
- F16K1/305—Shut-off valves with additional means with valve member and actuator on the same side of the seat
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/7722—Line condition change responsive valves
- Y10T137/7781—With separate connected fluid reactor surface
- Y10T137/7793—With opening bias [e.g., pressure regulator]
- Y10T137/7809—Reactor surface separated by apertured partition
- Y10T137/7812—Valve stem passes through the aperture
- Y10T137/7814—Reactor is an inverted cup having liquid seal
- Y10T137/7816—Valve head in inlet chamber
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/7722—Line condition change responsive valves
- Y10T137/7781—With separate connected fluid reactor surface
- Y10T137/7793—With opening bias [e.g., pressure regulator]
- Y10T137/7809—Reactor surface separated by apertured partition
- Y10T137/7812—Valve stem passes through the aperture
- Y10T137/7818—Valve head in inlet chamber
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/8593—Systems
- Y10T137/87571—Multiple inlet with single outlet
- Y10T137/87652—With means to promote mixing or combining of plural fluids
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/8593—Systems
- Y10T137/87571—Multiple inlet with single outlet
- Y10T137/87676—With flow control
- Y10T137/87684—Valve in each inlet
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Filling Or Discharging Of Gas Storage Vessels (AREA)
- Valve Housings (AREA)
- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
- Electrolytic Production Of Non-Metals, Compounds, Apparatuses Therefor (AREA)
- Multiple-Way Valves (AREA)
Abstract
Description
Claims (4)
- 외부 포트와, 적어도 제1 포트, 제2 포트 및 제3 포트가 마련된 입력 단부를 구비하는 밸브체와; 상기 밸브체 내부에 배치되며 제1 포트와 제2 포트 사이의 유체 유동을 제어하도록 되어 있는 제1 밸브; 그리고 상기 밸브체 내부에 배치되며 제3 포트와 외부 포트 사이의 유체 유동을 제어하도록 되어 있는 제2 밸브를 포함하는 유체 유동 밸브 조립체.
- (a) 적어도 3개의 포트가 마련된 입력 단부와 외부 포트를 구비하는 밸브체와;(b) 상기 밸브체 내에 배치되고, 제1 밸브 입구, 제1 밸브 출구 및 제1 시일을 구비하는 제1 밸브로서, 제1 밸브의 개방시에는 제1 밸브 입구로부터 제1 밸브 출구로의 유체 유동을 허용하고 제1 밸브의 폐쇄시에는 제1 밸브 입구로부터 제1 밸브 출구로의 유체 유동을 막도록 되어 있는 것인 제1 밸브와;(c) 상기 밸브체 내에 배치되고, 제2 밸브 입구, 제2 밸브 출구 및 제2 시일을 구비하는 제2 밸브로서, 제2 밸브의 개방시에는 제2 밸브 입구로부터 제2 밸브 출구로의 유체 유동을 허용하고 제2 밸브의 폐쇄시에는 제2 밸브 입구로부터 제2 밸브 출구로의 유체 유동을 막도록 되어 있는 것인 제2 밸브와;(d) 상기 제1 밸브 입구와 상기 밸브체의 입력 단부에 있는 제1 포트를 연결시키는 제1 유체 유동 통로, 및 상기 제1 밸브 출구와 상기 밸브체의 입력 단부에 있는 제2 포트를 연결시키는 제2 유체 유동 통로; 그리고(e) 상기 제2 밸브 입구와 상기 밸브체의 입력 단부에 있는 제3 포트를 연결시키는 제3 유체 유동 통로, 및 상기 제2 밸브 출구와 상기 밸브체의 외부 포트를 연결시키는 제4 유체 유동 통로를 포함하는 유체 유동 밸브 조립체.
- 제2항에 있어서, 상기 밸브체의 입력 단부에 있는 제4 포트와; 상기 밸브체에 있는 추가 외부 포트와; 상기 밸브체 내에 배치되며, 제3 밸브 입구, 제3 밸브 출구 및 제3 시일을 구비하는 제3 밸브로서, 제3 밸브의 개방시에는 제3 밸브 입구로부터 제3 밸브 출구로의 유체 유동을 허용하고 제3 밸브의 폐쇄시에는 제3 밸브 입구로부터 제3 밸브 출구로의 유체 유동을 막도록 되어 있는 것인 제3 밸브와; 상기 제3 밸브 출구와 상기 밸브체의 입력 단부에 있는 제4 포트를 연결시키는 제5 유체 유동 통로; 그리고 상기 제3 밸브 입구와 상기 밸브체의 추가 외부 포트를 연결시키는 제6 유체 유동 통로를 더 포함하는 유체 유동 밸브 조립체.
- 제2항에 있어서, 제1 밸브 시일과 제2 밸브 시일 중 어느 하나 또는 양자 모두는, 가요성 다이어프램을 포함하고, 이 가요성 다이어프램은 제1 및 제2 밸브 입구 중 어느 하나 또는 양자 모두와 제1 및 제2 밸브 출구 중 어느 하나 또는 양자 모두에 대해 밀봉식으로 강제되어 제1 및 제2 밸브 입구 중 어느 하나 또는 양자 모두와 제1 및 제2 밸브 출구 중 어느 하나 또는 양자 모두 사이의 유체 유동을 막 도록 되어 있는 것인 유체 유동 밸브 조립체.
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US67229005P | 2005-04-18 | 2005-04-18 | |
US60/672,290 | 2005-04-18 | ||
US11/399,322 US7811532B2 (en) | 2005-04-18 | 2006-04-07 | Dual-flow valve and internal processing vessel isolation system |
US11/399,322 | 2006-04-07 |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020060035035A Division KR100874937B1 (ko) | 2005-04-18 | 2006-04-18 | 이중-유동 밸브 및 내부 처리 용기 유리 시스템 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020090111553A Division KR20100005695A (ko) | 2005-04-18 | 2009-11-18 | 이중-유동 밸브 및 내부 처리 용기 유리 시스템 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20080099218A true KR20080099218A (ko) | 2008-11-12 |
KR100940551B1 KR100940551B1 (ko) | 2010-02-10 |
Family
ID=36686101
Family Applications (3)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020060035035A KR100874937B1 (ko) | 2005-04-18 | 2006-04-18 | 이중-유동 밸브 및 내부 처리 용기 유리 시스템 |
KR1020080100034A KR100940551B1 (ko) | 2005-04-18 | 2008-10-13 | 이중-유동 밸브 및 내부 처리 용기 유리 시스템 |
KR1020090111553A KR20100005695A (ko) | 2005-04-18 | 2009-11-18 | 이중-유동 밸브 및 내부 처리 용기 유리 시스템 |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020060035035A KR100874937B1 (ko) | 2005-04-18 | 2006-04-18 | 이중-유동 밸브 및 내부 처리 용기 유리 시스템 |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020090111553A KR20100005695A (ko) | 2005-04-18 | 2009-11-18 | 이중-유동 밸브 및 내부 처리 용기 유리 시스템 |
Country Status (6)
Country | Link |
---|---|
US (1) | US7811532B2 (ko) |
EP (1) | EP1715225B1 (ko) |
JP (1) | JP4680822B2 (ko) |
KR (3) | KR100874937B1 (ko) |
CN (1) | CN1858470B (ko) |
TW (1) | TWI302974B (ko) |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7964138B2 (en) * | 2005-11-29 | 2011-06-21 | University Of Florida Research Foundation, Inc. | On-demand portable chlorine dioxide generator |
CN100436927C (zh) * | 2007-04-11 | 2008-11-26 | 镇江瑞昊工程塑料有限公司 | 组合阀式源瓶 |
EP2326859B1 (en) * | 2008-08-18 | 2012-10-03 | Sigma-Aldrich Co. | Valve assemblies |
WO2010124174A2 (en) * | 2009-04-24 | 2010-10-28 | Applied Materials, Inc. | Ampoule with integrated hybrid valve |
EP3922751A1 (en) | 2009-11-02 | 2021-12-15 | Sigma-Aldrich Co. LLC | Solid precursor delivery assemblies and related methods |
JP6310172B2 (ja) * | 2011-01-07 | 2018-04-11 | 日本テクノ株式会社 | 酸素水素共存ガス体を用いた燃料及びその使用方法 |
CN102261558B (zh) * | 2011-05-28 | 2013-01-30 | 青岛瑞丰气体有限公司 | 一种低温气体供气装置 |
GB201309046D0 (en) * | 2013-05-20 | 2013-07-03 | Linde Ag | A pressurised fluid container |
US9873557B2 (en) * | 2013-08-12 | 2018-01-23 | Tek Global S.R.L. | Disposable canister for sealant for inflatable article repair and inflation kit, and production thereof |
CN105526496B (zh) * | 2014-09-29 | 2019-08-23 | 大唐国际化工技术研究院有限公司 | 工业分析样品容器及具有这种容器的采样设备 |
WO2021262480A1 (en) * | 2020-06-22 | 2021-12-30 | Numat Technologies, Inc. | An apparatus for dispensing and supplying gas to a storage vessel |
CN114542971A (zh) * | 2020-11-26 | 2022-05-27 | 未势能源科技有限公司 | 高压瓶阀和气瓶 |
Family Cites Families (26)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4286624A (en) * | 1980-02-25 | 1981-09-01 | Eivind Clausen | Fluid handling systems & multi-positionable valving arrangements for the use therein |
JPS5854277A (ja) | 1981-09-25 | 1983-03-31 | Yamatake Honeywell Co Ltd | 均圧弁 |
CA1240584A (en) * | 1986-01-28 | 1988-08-16 | Edward R. Coleman | Valve manifold |
US4723967A (en) * | 1987-04-27 | 1988-02-09 | Advanced Technology Materials, Inc. | Valve block and container for semiconductor source reagent dispensing and/or purification |
US4738693A (en) * | 1987-04-27 | 1988-04-19 | Advanced Technology Materials, Inc. | Valve block and container for semiconductor source reagent dispensing and/or purification |
GB9220975D0 (en) * | 1992-10-06 | 1992-11-18 | Air Prod & Chem | Apparatus for supplying high purity gas |
FR2724241B1 (fr) * | 1994-09-02 | 1996-10-25 | Air Liquide | Ensemble de commande et de distribution de gaz et dispositif de stockage de gaz equipe d'un tel ensemble |
JPH08176873A (ja) | 1994-12-21 | 1996-07-09 | Imura Japan Kk | 電気化学的高圧水素発生装置、アクチュエータ及びエネルギー取得装置 |
US5980599A (en) * | 1998-03-27 | 1999-11-09 | Uop Llc | In-tank purifier with bypass for filling |
SE9801398D0 (sv) * | 1998-04-21 | 1998-04-21 | Astra Pharma Prod | Method and apparatus for filling containers? |
US6343476B1 (en) * | 1998-04-28 | 2002-02-05 | Advanced Technology Materials, Inc. | Gas storage and dispensing system comprising regulator interiorly disposed in fluid containment vessel and adjustable in situ therein |
US6257000B1 (en) * | 2000-03-22 | 2001-07-10 | Luping Wang | Fluid storage and dispensing system featuring interiorly disposed and exteriorly adjustable regulator for high flow dispensing of gas |
JP2001317655A (ja) * | 2000-05-08 | 2001-11-16 | Smc Corp | シリンダー操作形複合弁 |
FR2810260B1 (fr) * | 2000-06-20 | 2002-08-30 | Air Liquide | Dispositif de stockage et de melange de deux gaz |
US6360546B1 (en) | 2000-08-10 | 2002-03-26 | Advanced Technology Materials, Inc. | Fluid storage and dispensing system featuring externally adjustable regulator assembly for high flow dispensing |
US6494343B2 (en) * | 2001-02-15 | 2002-12-17 | Advanced Technology Materials, Inc. | Fluid storage and dispensing system featuring ex-situ strain gauge pressure monitoring assembly |
FR2824539B1 (fr) * | 2001-05-09 | 2003-12-19 | Oreal | Dispositif pour le conditionnement separe de deux produits, et leur distribution sous pression, de maniere separee ou en melange |
US6932945B2 (en) | 2001-06-19 | 2005-08-23 | Air Products And Chemicals, Inc. | Adsorbent based gas delivery system with integrated purifier |
US6592653B2 (en) | 2001-11-12 | 2003-07-15 | Advanced Technology Materials, Inc. | Fluid storage and delivery system utilizing low heels carbon sorbent medium |
JP2003166700A (ja) | 2001-11-30 | 2003-06-13 | Nippon Sanso Corp | 減圧機能付き容器弁 |
FR2833861B1 (fr) * | 2001-12-20 | 2004-02-06 | Air Liquide | Dispositif de stockage et de melange de deux gaz |
ITMI20020636A1 (it) * | 2002-03-27 | 2003-09-29 | P L V Spa | Valvola di desgasazione unidirezionale per contenitori di prodotti pulverulenti quali caffe' e simili |
GB0211410D0 (en) * | 2002-05-17 | 2002-06-26 | Air Prod & Chem | Intra-cylinder tubular pressure regulator |
US6959724B2 (en) * | 2002-07-01 | 2005-11-01 | Praxair Technology, Inc. | Multiple regulator vacuum delivery valve assembly |
US20040000339A1 (en) | 2002-07-01 | 2004-01-01 | Heiderman Douglas Charles | Multiple dispensing check valve delivery system |
US6911065B2 (en) * | 2002-12-26 | 2005-06-28 | Matheson Tri-Gas, Inc. | Method and system for supplying high purity fluid |
-
2006
- 2006-04-07 US US11/399,322 patent/US7811532B2/en active Active
- 2006-04-14 TW TW95113410A patent/TWI302974B/zh active
- 2006-04-17 JP JP2006113521A patent/JP4680822B2/ja active Active
- 2006-04-18 EP EP06008011.6A patent/EP1715225B1/en active Active
- 2006-04-18 KR KR1020060035035A patent/KR100874937B1/ko active IP Right Grant
- 2006-04-18 CN CN2006100840086A patent/CN1858470B/zh active Active
-
2008
- 2008-10-13 KR KR1020080100034A patent/KR100940551B1/ko active IP Right Grant
-
2009
- 2009-11-18 KR KR1020090111553A patent/KR20100005695A/ko not_active Application Discontinuation
Also Published As
Publication number | Publication date |
---|---|
CN1858470B (zh) | 2011-10-05 |
TWI302974B (en) | 2008-11-11 |
KR100874937B1 (ko) | 2008-12-19 |
CN1858470A (zh) | 2006-11-08 |
KR100940551B1 (ko) | 2010-02-10 |
JP2007054821A (ja) | 2007-03-08 |
JP4680822B2 (ja) | 2011-05-11 |
KR20060109850A (ko) | 2006-10-23 |
US7811532B2 (en) | 2010-10-12 |
EP1715225B1 (en) | 2017-11-22 |
US20060231159A1 (en) | 2006-10-19 |
EP1715225A3 (en) | 2009-12-16 |
KR20100005695A (ko) | 2010-01-15 |
TW200641289A (en) | 2006-12-01 |
EP1715225A2 (en) | 2006-10-25 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
KR100940551B1 (ko) | 이중-유동 밸브 및 내부 처리 용기 유리 시스템 | |
US6343627B1 (en) | Feed device for large amount of semiconductor process gas | |
KR100416424B1 (ko) | 유체 저장 및 분배 시스템 | |
KR101130006B1 (ko) | 고순도 유체를 공급하기 위한 방법 및 시스템 | |
KR100699293B1 (ko) | 반응성 기체의 빌트인 정제 장치 | |
KR100879152B1 (ko) | 유체 저장 용기 내에 위치하고 그 안에서 조정될 수 있는조절기를 포함하는 가스 저장 및 분배 시스템 | |
JP2007054821A5 (ko) | ||
KR20030044778A (ko) | 감압 기능 부착 용기 밸브 | |
JPH08193287A (ja) | 水素・酸素ガス発生装置 | |
JP2013257041A (ja) | 直方体の流体貯蔵・計量分配容器 | |
EP2157353B1 (en) | Storage container for liquid chlorosilane and closing lid therefor | |
EP2337985B1 (en) | Bundle trailer for gas delivery | |
JP5037021B2 (ja) | フッ素ガスの供給方法およびその装置 | |
CN101103135A (zh) | 戊硼烷(9)的储存和递送 | |
JP2000257797A (ja) | 減圧機能付き容器弁 | |
JP2000306839A (ja) | 半導体プロセスガスの供給システム | |
US5269834A (en) | Process for removal of inert gases from liquid chlorine and system therefor | |
EP3381538A1 (en) | Dip-conduit purification apparatus and method of purifying a gas | |
KR20240068696A (ko) | 저장 및 전달 용기 및 관련 방법 | |
JP2007054736A (ja) | 排ガス処理装置、薬剤筒及び排ガス処理装置のメンテナンス方法 | |
KR20040006540A (ko) | 오존농축공급장치 | |
AIXTRON | III-Vs review 1991 gas scrubber suppliers directory |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A107 | Divisional application of patent | ||
A201 | Request for examination | ||
E902 | Notification of reason for refusal | ||
AMND | Amendment | ||
E601 | Decision to refuse application | ||
J201 | Request for trial against refusal decision | ||
A107 | Divisional application of patent | ||
AMND | Amendment | ||
B701 | Decision to grant | ||
GRNT | Written decision to grant | ||
FPAY | Annual fee payment |
Payment date: 20121227 Year of fee payment: 4 |
|
FPAY | Annual fee payment |
Payment date: 20131227 Year of fee payment: 5 |
|
FPAY | Annual fee payment |
Payment date: 20141230 Year of fee payment: 6 |
|
FPAY | Annual fee payment |
Payment date: 20151230 Year of fee payment: 7 |
|
FPAY | Annual fee payment |
Payment date: 20161229 Year of fee payment: 8 |
|
FPAY | Annual fee payment |
Payment date: 20180103 Year of fee payment: 9 |
|
FPAY | Annual fee payment |
Payment date: 20190103 Year of fee payment: 10 |
|
FPAY | Annual fee payment |
Payment date: 20200103 Year of fee payment: 11 |