WO2021262480A1

WO2021262480A1 - An apparatus for dispensing and supplying gas to a storage vessel

Info

Publication number: WO2021262480A1
Application number: PCT/US2021/037402
Authority: WO
Inventors: Glenn McPherson TOM
Original assignee: Numat Technologies, Inc.
Priority date: 2020-06-22
Filing date: 2021-06-15
Publication date: 2021-12-30

Abstract

A gas storage and dispensing vessel includes an interior volume for holding a pressurized gas. A single outlet port is attached to the vessel and is adapted to dispense gas from the vessel at a selected pressure and also to supply gas at a feed pressure to the vessel. A gas pressure regulator located in the interior volume of the vessel is joined to a manifold. The manifold is in gas flow communication with the outlet port. An arrangement of one-way valves are selectably operable to dispense gas at the selected pressure from the manifold to the outlet port and to supply gas at the feed pressure from the outlet port to the manifold to be discharged into the interior volume of the vessel.

Description

AN APPARATUS FOR DISPENSING AND SUPPLYING GAS TO A STORAGE

VESSEL

CROSS-REFERENCE TO RELATED APPLICATIONS [0001] This application claims priority from U.S. Provisional Application No.

63/042,325, filed June 22, 2020, incorporated herein in its entirety.

TECHNICAL FIELD

[0002] The field relates to a pressurized gas storage dispensing systems for a gas storage vessel useful in applications such as manufacturing semiconductor materials and devices.

BACKGROUND

[0003] In a wide variety of industrial processes and applications, there is a need for a reliable source of process gas(es). Such process and application areas include semiconductor manufacturing, ion implantation, manufacture of flat panel displays, medical intervention and therapy, water treatment, emergency breathing equipment, welding operations, space-based delivery of liquids and gases, etc. It is important in the industry to provide a safe and effective way to handle toxic, flammable, corrosive gases at sub-atmospheric conditions. In particular, these gases include dopant gases. Generally, dopant gases are stored in compressed gas cylinders at pressures equal to the gas vapor pressure at a given or at a specific pressure depending upon the properties of the specific gas. The gases serve as a source of dopant material for the manufacturing of semiconductor devices. These dopant gases are used in a tool called an ion implanter. Ion implanters are located within the fabrication area of a semiconductor production facility where several hundreds or even thousands of personnel are engaged in the semiconductor manufacturing process. These tools are operated at very high voltages, typically up to several thousand kilovolts.

[0004] Due to these high voltages, the dopant source gases must be located at or within the tool itself. Most other semiconductor tools locate source gases outside of the personnel or main production area. One distinct characteristic of the ion implant tools is that they operate at sub-atmospheric pressure. Utilization of the vacuum present at the tool to deliver product from the cylinder creates a safer package in that product cannot be removed from the cylinder package until a vacuum is applied. This vacuum delivery concept prevents accidental exposure to the pressurized gas. The present invention relates to a gas storage and dispensing system having one or more gas pressure regulators internally contained in a vessel holding pressurized gas.

[0005] In such arrangement, the regulator (or multiple regulator assembly) is disposed between a confined pressurized gas volume and a gas dispensing assembly. The gas dispensing assembly can be variously configured, e.g., including a gas flow control element such as a gas flow shut off valve, mass flow controller, or the like. [0006] By positioning of the regulator inside the gas storage and dispensing vessel, the regulator is protected by the vessel from impact, environmental exposure and damage. Additionally, the regulator acts as a safety containment element for the high-pressure gas, in that the regulator is set at a significantly lower pressure set point so that gas dispensed from the vessel is at pressure well below that of the bulk volume of pressurized gas in the vessel. In such systems, exposing the normal gas outlet to atmospheric pressure puts the outlet of the regulator in an OFF state and gas in the cylinder will not flow out into the environment unlike a normal high-pressure system and is the basis of the safety advantages of such a system.

[0007] In such systems the pressure inside the cylinder can be high (at the pressure rating of the cylinder (for example 1800 psig). The regulator's output (one stage or a pair for two stage), steps the delivery pressure to sub-atmospheric values (i.e. 500 Torr). Since the step-down process is purely mechanical, the composition of the internal gas mixture remains constant at the outlet. However, because high pressure gas closes the regulator, it is not possible to refill through the delivery port in such systems.

SUMMARY

[0008] This disclosure provides an apparatus for dispensing and supplying gas to a storage vessel comprising a gas storage vessel enclosing an interior volume for holding pressurized gas. In a first embodiment, the gas stoaage vessel includes a single outlet port for dispensing the pressurized gas stored in the vessel and for supplying the vessel with pressurized gas. A gas pressure regulator located in the interior volume receives the gas from the interior volume of the vessel and is adapted to maintain a predetermined pressure of gas that is applied to a manifold that is in gas flow communication between the gas pressure regulator and the outlet port. A oneway valve has an inlet that connected to the manifold that receives the gas at the predetermined pressure therein. An outlet of the one-way valve includes a by-pass port that is open to the interior volume of the vessel. The gas pressure from the interior volume enters the by-pass port and provides a sealing pressure to the one-way valve, blocking the flow of gas from the interior volume to the manifold. An actuator is selectively actuatable to allow gas at the predetermined pressure to flow from the gas pressure regulator into the manifold and to be dispensed from the outlet port. The actuator is further selectively actuatable to flow supply gas at a feed pressure from the outlet port to the manifold and to the inlet of the one-way valve. The feed pressure of the supply gas providing a cracking pressure that opens the one-way valve allowing the supply gas to flow from the outlet port and manifold through the one-way valve to be discharged from the by-pass port into the interior volume of the vessel.

[0009] In a second embodiment, a gas storage and dispensing vessel comprises a vessel enclosing an interior volume for holding pressurized gas. The gas storage vessel includes a single outlet port for dispensing the pressurized gas from the vessel and for supplying the vessel with pressurized gas. A gas pressure regulator located in the interior volume of the vessel is adapted to provide a regulated pressure from the interior volume of the vessel to a manifold in gas flow communication with the supply port. A first one-way valve has an inlet connected to the pressure regulator that receives the regulated pressure therein and an outlet connected to the manifold. A second one-way valve has an inlet connected to the manifold, and an outlet connected to a by-pass port open to the interior of the vessel. The pressurized gas from the interior of vessel enters the by-pass port and provides a sealing pressure to the second one-way valve blocking the flow of gas from the interior volume to the manifold. An actuator is selectively actuatable to apply a dispensing pressure to the manifold and to the outlet of the first one-way valve. The dispensing pressure providing a cracking pressure that opens the first one-way valve to flow gas at a selected pressure into the manifold from the first one-way valve, thereby dispensing the gas from the outlet port.Theactuatorisfurtherselectivelyactuatabletoflowsupplygasatafeedpressurefromtheoutletporttothemanifoldandtotheinletofthesecondone-wayvalve.Thefeedpressureofthesupplygasprovidingacrackingpressurethatopensthesecondone-wayvalveallowingthesupplygastoflowthroughthesecondone¬wayvalveandbedischargedfromtheby-passportintotheinteriorvolumeofthevessel.

BRIEF DESCRIPTION OF THE DRAWINGS

[0010] For a more complete understanding of this disclosure, reference is now made to the following description, taken in conjunction with the accompanying drawings, in which:

[0011] FIG. 1 is a schematic cross-sectional elevational view of an apparatus for dispensing and supplying gas to a storage vessel in accordance to a first embodiment of this disclosure;

[0012] FIG. 2 is a schematic cross-sectional elevational view of an apparatus for dispensing and supplying gas to a storage vessel in accordance to the first embodiment of this disclosure using a multiple regulator assembly; and [0013] FIG. 3 is a schematic cross-sectional elevational view of an apparatus for dispensing and supplying gas to a storage vessel in accordance to a second embodiment of this disclosure.

DETAILED DESCRIPTION

[0014] FIGS. 1 through 3, discussed below, and the various embodiments used to describe the principles of the present invention in this patent document are by way of illustration only and should not be construed in any way to limit the scope of the invention. Those skilled in the art will understand that the principles of the invention may be implemented in any type of suitably arranged device or system.

[0015] The present invention relates to an apparatus for dispensing and supplying gas to a storage vessel having one or more gas pressure regulators internally contained in a vessel holding pressurized gas. In such arrangement, the regulator (or multiple regulator assembly) is disposed between a confined pressurized gas volume and a gas dispensing assembly. The gas dispensing assembly can be variously configured, e.g., including a gas flow control element such as a gas flow shut off valve, mass flow controller, or the like.

[0016] The gas pressure regulator devices useful m the broad practice of the invention can be of any suitable type. For example, such as the SWAGELOK HF series of set pressure regulators, having a set point pressure in a range of from vacuum levels to pressures on the order of 2550 psig. The use of high-precision regulators permits gas to be reliably dispensed from the vessel containing the interior regulator, at the desired set point pressure level.

[0017] By positioning of the regulator inside the gas storage and dispensing vessel, the regulator is protected by tire vessel from impact, environmental exposure and damage. Additionally, the regulator acts as a safety containment element for the high-pressure gas, m that the regulator is set at a significantly lower pressure set point so that gas dispensed from the vessel is at pressure well below that of the hulk volume of pressurized gas in the vessel. The gas pressure regulator in general is advantageously of a poppet valve type, comprising a poppet element that is biased to a seat structure to prevent flow at a pressure above the set point value. Such regulator uses a gas-actuated pressure-sensing, assembly that accommodates changes in outlet pressure by responsive expansi on/contraction of the pressure-sensing assembly and translation of the poppet, to maintain the set point pressure. The gas pressure regulator thus is set to an appropriate level, e.g., 500 Torr. to provide flow of gas from the gas storage and dispensing vessel at such set point pressure level, when die dispensing assembly associated with the gas vessel is opened to flow, by opening a flow control valve of the dispensing assembly or in other appropriate manner.

[0018] In the gas dispensing apparatus just described, exposing the normal gas outlet to atmospheric pressure puts the outlet of the regulator in an OFF state and gas in the cylinder will not flow out into the environment unlike a normal high-pressure system. However, because high pressure gas closes the regulator, it is not possible to refill through the dispensing port in such a configuration. The result is the introduction of a second filling port that is connect to the high-pressure interior of the cylinder. The presence of this port is a potential failure mode. If the cylinder valve is sheared off the cylinder there is direct path to vent the contents of the cylinder to atmosphere. Additionally, if the fill port valve is opened, the contents of the cylinder can be released directly to the surrounding environment.

[0019] The dispensing assembly associated with the vessel defines a flow circuit, which may for example comprise an extended length ( 'run ') of conduit, or a manifold to which the gas vessel is coupled for the dispensing operation. The flow circuit may include suitable instrumentation and control means, to monitor the gas dispensing operation, to effect switchover between multiple gas vessels coupled to the How' circuit (e.g., in a multi-vessel manifold arrangement), and/or to provide for cyclic or intermittent operation to accommodate a downstream gas-consuming facility being supplied with gas from the vessel. The gas contained in the gas storage and dispensing vessel of the in vention may comprise any suitable gas, such as for example a hydride gas for semiconductor manufacturing operations. Examples of hydride gases of such type include arsine, phosphine, stibine, silane, chlorosilane, and diborane. Other gases useful in semiconductor manufacturing operations may be employed, including acid gases such as hydrogen fluoride, boron trichloride, boron trifluoride, hydrogen chloride, halogenated silanes (e.g., SiFh) and disilanes (e.g., Si₂F₆), etc., having utility in semiconductor manufacturing operations as halide etchants, cleaning agents, source reagents, etc. Other reagents include gaseous organometallic reagents used as precursors for metal organic chemical vapor deposition (MOCVD).

[0020] Referring now to the drawings, FIG. 1 is a schematic cross-sectional elevation view of one gas storage and dispensing apparatus 100 according to an illustrative embodiment of the invention. The apparatus 100 includes a fluid storage and dispensing vessel 102 of generally cylindrical form, with a cylindrical sidewall 104 closed at its lower end by floor member 106. At the upper end of the vessel is a neck 108 including a cylindrical collar 110 defining and circumscribing a top opening (port) of the vessel. The bore of neck 108 is preferably at least 1.5 inches in diameter. The vessel wall, floor member and neck thereby enclose an interior volume 128, as shown.

[0021] At the neck of the vessel, a threaded plug 112 of the valve head assembly 114 is threadably engaged with the interior threaded opening of the collar 110. The valve head assembly 114 includes a central fluid flow passage 120 joined in fluid flow communication with a central working volume cavity in the valve head assembly. The central working volume cavity in turn is joined to outlet port 124, which may be exteriorly threaded or otherwise constructed for attachment of a connector and associated piping, conduit, etc. thereto. A high efficiency particle filter 123 in the central working cavity in the valve head assembly 114 serves to filter the gas flowing out of outlet port 124 and also serve to prevent contamination of the regulators and the central working cavity with particulates or other contaminating species that otherwise may be present in tire fluid flowed through the regulators and valves in the operation of the apparatus. [0022] Disposed in the central working volume cavity is a valve element 122 that is joined to a hand wheel 126 in the embodiment shown hut may alternatively be joined to an automatic valve actuator or oilier controller or actuating means. The central fluid flow passage 120 in the valve head assembly 114 is joined at its lower end to a connector flow tube 130. An extension tube 135 is joined in fluid flow communication to the flow tube 130 at atop end 137 and to a first manifold 140 at a bottom end 138. The first manifold 140 is joined in fluid flow communication to a second manifold 145 through an extension tube 148. The first and second manifolds 140, 145 are each arranged as open plenum boxes allowing for gasses to flow in and out of the openings attached to the manifolds 140 & 150. It will be well understood that the manifolds 140, 145 can also be arranged to have internal passages connecting the attached openings to allow for gas flow between the various elements of the apparatus. Additionally, conduits or tubes having connections fittings that join the conduits in gas tight assembly can be used to substitute for the manifolds and their internal plenums illustrated herein and the invention is not limited to the manifold structures illustrated.

[0023] A one-way valve or cheek valve 160 has an inlet 162 joined to tire first manifold 140 and an outlet 163 joined at its lower end to a by-pass poll 168. The bypass port 168 is open to and m gas flow' communication with the interior volume 128 of tire vessel 102. The by-pass port 168 is arranged to convey the gas pressure in the interior volume 128 to the outlet 163 of the one-way valve 160. The one-way valve 160 further includes m an interior housing 161, a diaphragm/stopper 165 arranged to close against inlet 162 and a spring 166 that provides a biasing pressure to diaphragm 165.

[0024] The by-pass port 168 is joined to a tubular filter 169 that in turn is joined, e.g. butt welded, to the top surface of the second manifold 145 for structural rigidity. The assembly of the by-pass port 168 and tubular filter 169 does not enter into the plenum of manifold 145 and is merely attached to the surface of the manifold. The filter unit may be formed of stainless steel, with filter w-all being formed of a sintered stainless steel such as 3I6L stainless steel. Tire filter unit has a wall porosity that permits removal of all particles greater than a predetermined diameter, e.g.. greater than 0.003 micrometers at 30 standard liters per minute flow rate of gas from the system.

[0025] A gas pressure regulator 170 includes an outlet tube 171 joined in gas flow communication to the second manifold 145. The gas pressure regulator 170 is secured to the outlet tube 171, for example by providing internal threading in the lower end portion of tube 171, with which the regulator 170 is threadably engageabie. The gas pressure regulator 170 is set to maintain a selected pressure of the gas discharged from the vessel and forms a pressure sensing assembly that precisely controls outlet gas pressure.

[0026] The gas pressure regulator is of a type including a diaphragm element 179 coupled to a poppet-retaining wafer 174. The wafer 174 in turn is connected to the stem 173 of a poppet or valve element 176. A loading element 177, typically a spring, but can also be a weight or pressure from some external source exerts a loading force on diaphragm 179. The interior of the pressure regulator 170 receives the gas from the interior volume 128 through a filter 175 and inlet tube 172 to the interior of the regulator. Ports within the regulator allow s the gas to flow through the regulator to the outlet port 171. The gas entering the regulator is also applied to the diaphragm 179 on a side opposite the loading force of the spring 177. An increase in the gas pressure in the regulator 170 causes the diaphragm 179 to overcome the loading force of spring 177 and to contract. The contraction of the diaphragm 179 is applied to wafer 174 and to the stem 173 which closes poppet valve 176 reducing the gas flow through the regulator 170.

[0027] A decrease in the gas pressure and the gas flowing through the gas pressure regulator causes the loading force applied by the spring 177 to increase thereby overcoming the gas acting on the diaphragm 179, causing the diaphragm to expand. The expansion of the diaphragm 179 also causes wafer 174 to expand moving the stem 176 to open the poppet val ve 176 increasing the flow of gas into the regulator. The contraction or expansion serves to translate the poppet element 176 to provide the precise pressure control The pressure sensing assembly has a set point that is pre-established or set for the given application of the gas storage and dispensing system. The gas pressure regulator 170 may have a set point in a range of from vacuum level to pressures on the order of up to 2550 psig. The use of high- precision regulators permits gas to be reliably dispensed from the vessel containing the interior regulator, at the desired set point pressure level [0028] A lower end of the gas pressure regulator 170 is joined at a tubular inlet fitting 172 which in turn is joined, e.g,, by butt welding, to a filter unit 175. The filter unit 175 may be formed of stainless steel, with the diffuser wall being formed of a sintered stainless steel such as 316L stainless steel. The filter unit has a wall porosity that permits removal of all particles grea ter than a predetermined diameter, e.g., greater than 0.003 micrometers at 30 standard liters per minute flow rate of gas from the system. The extension tube 135, manifolds 140, 145 one-way valve 160, extension tube 148, gas pressure regulator 170 and filter 175 are assembled in a senes relationship and adapted to be installed as an assembly into the interior volume 128 of vessel 102 through neck 108.

[0029] The storage vessel 102 is used to dispense a gas stored under high pressure contained in the interior volume 128 of the vessel 102. The gas pressure regulator 170 is set to a selected set point to provide flow of dispensed gas at a selected pressure when the valve 122 in the valve head assembly 114 is opened. Gas from the interior volume 128 of vessel 102 flows through filter unit 175, tubular inlet fitting 172, to regulator 170. Gas pressure regulator 170 converts the high pressure of the interior volume 128 to a selected pressure that is lower than the pressure of the interior volume 128. For example, the gas pressure regulator may regulate and provide a low selected pressure of 500 Torr from a 1000 psig pressure of the interior volume 128. The selected pressure exits the pressure regulator 170 through outlet 171 and is conveyed to the interior plenum of second manifold 145. The selected pressure is also applied to the interior pieman of first manifold 140 via extension tube 148. Since the selected pressure in manifold 140 is less than the gas pressure of the interior volume 128, diaphragm/stopper 160 is closed and sealed against inlet 162 blocking reverse flow of the gas from the interior volume 128 through the one-way valve 160 to the first manifold 140.

[0030] The one-way valve 160 is arranged to close and prevent reverse flow through the one-way valve 160 when the gas pressure at the outlet 163 is greater than at the inlet 162, providing a reseal pressure. The high pressure of the interior volume 128 is applied through the by-pass port 168 to outlet 163 providing the reseal pressure that moves the diaphragm/stopper against inlet 162 and closing off gas flow communication between the interior volume 128 of the vessel 102 and the first manifold 140. As long as the pressure at the inlet 162 remains lower than the pressure at the outlet 163 the diaphragm/stopper 165 remains sealed.

[0031] However, when a pressure is applied to the inlet port 162 that reaches a point greater than the force exerted by the combination of biasing spring 166 and the pressure at outlet 163 the diaphragm/stopper is unseated. The pressure differential between a higher pressure at the inlet 162 and a lower pressure at the outlet 163 and the bias applied by spring 166 provides the cracking pressure that unseats the diaphragm/stopper from the inlet 162 and allows gas to flow in a forward direction past diaphragm/stopper 165 from the inlet port 162 into housing 161 and out of bypass port 168.

[0032] A spring biased one-way valve using a diaphragm/stopper is described in this disclosure for ease of understanding the concept of this disclosure. It will be well understood that other forms of one-way valves or check valves that allow gas or fluids to flow in only one direction can be sued to substitute for the valve illustrated in this disclosure, such as for example, the 6L-CW4S series diaphragm or poppet check valve from SWAGELOK. This check valve has a nominal cracking pressure of, for example, 2 psig pressure differential between the inlet and outlet pressures . The valve may close with less than, for example, of 2 psig of back or sealing pressure. [0033] The gas at the selected pressure provided by the pressure regulator 170 travels to flow tube 130 via extension tube 135, to central fluid flow passage 120 in the valve head assembly 114, central working volume cavity, filter 123 and outlet port 124. The valve head assembly is joined through outlet port 124 to a dispensing line for dispensing the gas from storage vessel 102. The outlet port 124 may also be connected to other piping, conduits, flow controllers, monitoring means, etc. as may be desirable or required in a given end use application of the invention.

[0034] The apparatus of the present invention uses a single port to both dispense and fill the storage vessel 102 with gas under pressure. When the gas under pressure in the interior volume 128 of vessel 102 is depleted. The vessel 102 can be supplied with gas by attaching a source of gas under a feed pressure, for example 1000 psig, to outlet port 124 and valve element 122 opened by hand wheel 126. Alternatively, the valve element may be joined to an automatic valve actuator or other controller or actuatingmeansthatopensthevalveelement122.Thesupplygasisthendeliveredunderthefeedpressureintoflowpassage120,flowtube130andextensiontube135intomanifold 140andintomanifold145throughconduit148,Thepressureregulator170closeswhenthefeedpressureisintroducedintomanifold145stoppingtheflow'ofgasfromtheinteriorvolume128aslongasthegasatfeedpressureissupplied. [0035] Thesupplygasisalsoappliedtotheinletofone-wayvalve160fromthefirstmanifold 140.Sincethegasintheinteriorvolume128isdepleted,thefeedpressureappliedattheinlet162isatagreaterpressurethanthepressureattheoutlet163. Thegassuppliedatthefeedpressureprovidesthecrackingpressureforunseatingthediaphragm/stopperandtherebycausingaforwardflowofgaspastdiaphragm/stopper165fromtheinlet162intohousing161andoutoftheby-passport168intotheinteriorvolume128. Thevessel102canbechargedinthismanneruntilthepressureintheinteriorvolume128equalsthefeedpressure. Closingthevalveelementandremovingthesupplygasfromoutletport124,willautomaticallyclosetheone-wayvalve160andthepressureregulator170willagaincontrolthedispensingofthegasfromtheinteriorvolumethroughoutletport124. [0036] FIG.2isaschematiccross-sectionalelevationalviewofanapparatusfordispensingandsupplyinggastoastoragevesseldescribedinFIG.1,however,usingamultipleregulatorassembly.Theregulatorassembly290includesafirstgaspressureregulator270connectedtoanoutlettube271joinedingasflowcommunicationtothesecondmanifold145.Thefirstgaspressureregulator270issecuredtotheoutlettube271,asforexamplebyprovidinginternalthreadinginthelowerendportionoftube271,withwhichtheregulator270isihreadahlyengageable. [0037] Alternatively,thefirstregulator270maybejoinedtothelowerendofthetube272bybeingbondedthereto,e.g.,bywelding,brazing,soldering,melt-bonding,orbysuitablemechanicaljoiningmeansand/ormethods,etc. Anupperendofoutlettube271isjoinedinanysuitablemannertothemanifold145bybeingbondedthereto,orbysuitablemechanicaljoiningmeansand/ormethods,etc. [0038] Thefirstregulator270isarrangedinseriesrelationshipwithasecondregulator280,asshown.Forsuchpurpose,thefirstandsecondregulators270,280maybeihreadahlyengageablewithoneanother,bycomplementarythreadingcomprisingthreadingontheSowerextensionportionofthefirstregulator270,and threading that is mateably engageable therewith on the tipper extension portion of the second regulator 280.

[0039] Alternatively, the first and second regulators may be joined to one another in any suitable manner, as for example by coupling or fitting means, by adhesive bonding, welding, brazing, soldering, etc., or the first and second regulators may be integrally constructed as components of a dual regulator assembly.

[0040] Both pressure regulators 270, 280 are identical in construction and are of a type including a diaphragm element 279 coupled to a poppet-retaining wafer 274. The wafer 274 in turn is connected to the stem 273 of a poppet or valve element 276. A loading element 277, typically a spring, but can also be a weight or pressure from some external source, exerts a loading force on diaphragm 279. The interior of the pressure regulator 270 receives the gas from the interior volume 128 through filter a 27.5 and inlet lube 272 to the interior of the regulator. Ports within the regulator allow the gas to flow through the regulator to the outlet port 271. The gas entering the regulator is also applied to the diaphragm 179 on a side opposite the loading force of the spring 277. An increase in the gas pressure in the regulator 270 causes the diaphragm 279 to overcome the loading force of spring 277 and to contract. The contraction of the diaphragm 279 is applied to wafer 274 and to stem 273 which closes poppet valve 276 reducing the gas flow through regulator 270.

[0041] A decrease in the gas pressure and the gas flowing through the gas pressure regulator causes the loading force applied by the spring 277 to increase thereby overcoming the gas acting on the diaphragm 279, causing the diaphragm to expand. The expansion of the diaphragm 279 causes wafer 274 to expand moving the stem 276 to open the poppet valve 276 increasing the flow of gas into the regulator. The contraction or expansion serves to translate the poppet valve 276 to provide the precise pressure control. The pressure sensing assembly has a set point that is pre- established or set for the given application of the gas storage and dispensing system. The gas pressure regulator 270 may ha ve a set point in a range of from vacuum level to pressures on the order of up to 2550 psig. The use of high-precision regulators permits gas to be reliably dispensed from the vessel containing the interior regulator, at the desired set point pressure level.

[0042] At its lower end, the pressure regulator 280 is joined to a tubular inlet fitting 272 which in turn is joined, e.g., by butt welding, to the filter unit 275. The filter unit 275 may be formed of stainless steel, with the diffuser wall being formed of a sintered stainless steel such as 316L stainless steel. The filter unit has a wall porosity that permits removal of all particles greater than a predetermined diameter, e.g., greater than 0.003 micrometers at 30 standard liters per minute flow rate of gas from the system. The filter unit 275 serves to prevent contamination of the regulators 270, 280 with particulates or other contaminating species that otherwise may he present in the fluid flowed through the regulators and valves in the operation of the apparatus. The first and second gas pressure regulators 270, 280, inlet tube 271 and particulate filter 275 are all coaxially aligned with one another to form the regulator assembly 290. The extension tube 135, manifolds 140, 145 one-way valve 160, extension tube 148, regulator assembly 290 are assembled m a series relationship and adapted to be installed as an assembly in the interior volume 128 of vessel 102 through neck 108.

[0043] The respective set points of the first gas regulator 270 and the second gas regulator 280 in the embodiment of FIG. 2 may be selected or preset at any suitable value to accommodate a specific desired end use application. For example, the second or “upstream” regulator 280 may have a set point that is in a range from about 20 psig to about 2500 psig. The first or “downstream” regulator 270 may have a set point that is above the pressure set point of the upstream regulator 280, e.g., m a range of from about 500 Torr up to 2500 psig.

[0044] In one illustrative embodiment, the upstream gas pressure regulator 280 has a set point pressure value that is m the range of 20 psig to about 1000 psig, while the downstream gas pressure regulator 270 has a set point pressure value in the range of from about 500 Torr to about 20 psig, wherein the upstream pressure set point is above the set point of the downstream regulator. Although the set points of the regulators in a serial regulator assembly 290 may be established in any suitable ratio in relation to one another, in a two-regulator assembly such as shown in FIG. 2, the upstream regulator 280 in preferred practice advantageously has a pressure set point that is at least twice the set point value (measured m die same pressure units of measurement) of the downstream regulator 270.

[0045] The gas pressure regulator devices useful in practice of the invention can be of any suitable type. For example, such as the SWAGELGK HFS3B series of set pressure regulators, or other similar gas pressure regulators. The first regulator 270 having a set point pressure in the range of from vacuum levels to a pressure on the order of 20 psig, and the second regulator 280 having a set point pressure in the range of from 20 psig to a pressure on the order of 1000 psig,

[0046] The storage vessel is used to dispense a gas at a selected pressure from tire interior volume 128 of the vessel 102, The gas pressure regulators 270, 280 are set to a selected set point to provide a flow of dispensed gas at the selected pressure when a source of dispensing pressure is connected to outlet 124 and the valve 122 m the valve head assembly 114 is opened. Gas from the interior volume 128 of vessel 102 flows through filter unit 275, fitting 272, to second pressure regulator 280, Second pressure regulator 280 converts the pressure of the interior volume 128 to an intermediate pressure for conversion by the first pressure regulator 270, For example, the upstream or second regulator 280 converts the gas at the interior volume 128, for example at 1000 psig, to an intermediated pressure of 20 psig. The gas at 20 pstg intermediate pressure exits the upstream regulator and is applied to the downstream regulator 270. The downstream regulator 270 converts the intermediate pressure from 20 psig to a selected pressure, for example a near vacuum pressure of 500 Torr.

[0047] The gas at the selected pressure exits the pressure regulator 270 through outlet tube 271 and is conveyed to the interior plenum of second manifold 145. The selected pressure is also applied to the interior plenum of first manifold 140 via extension tube 148. The pressure in the manifold 140, e.g., 500 Torr, is also applied to the inlet port 162 of the one-way valve 160, while the pressure of the interior volume 128. e.g,, 1000 psig, is applied via the by-pass port 168 to the outlet port 163 of the one-way valve 160 The diaphragm/stopper 165 closes inlet 162 when the gas pressure at outlet 163 is greater than at inlet 162, commonly referred to as the reseal pressure. The greater pressure at outlet 163 provides the reseal pressure that moves the diaphragm/stopper against inlet 162 closing off gas flow between the interior volume 128 and the first manifold 140. As long as the pressure at the inlet 162 remains lower than the pressure at the outlet 163 the diaphragm/stopper 165 remains sealed.

[0048] A spring biased one-way valve using diaphragm/stopper is described in this disclosure for ease of understanding the concept of this disclosure. It will be well understood that other forms of one-way valves or check valves that allow gas fluids to flow in only one direction can be sued to substitute for the valve illustrated in this disclosure, such as for example, the 6L-CW4S series diaphragm or poppet check valve from SWAGELOK. This check valve has a nominal cracking pressure of, for example, 2 psig pressure differential between the inlet and outlet pressures . The valve may close with less than, for example, of 2 psig of back or sealing pressure. [0049] The gas at the selected pressure provided by the pressure regulator 270 travels to flow tube 130 via extension tube 135, to central fluid flow passage 120 in the valve head assembly 114, central working volume cavity and outlet port 124. The valve head assembly is joined through outlet port 124 to a dispensing line for dispensing the gas from storage vessel 102. The outlet port 124 may also be connected to other piping, conduits, flow controllers, monitoring means, etc. as may be desirable or required in a given end use application of the invention.

[0050] The apparatus of the present invention uses a single port to both dispense and supply the storage vessel 102 with gas under pressure. When the gas under pressure in the interior volume 128 of vessel 102 is depleted, the vessel 102 can be charged with supply gas by attaching a source of supply gas under a feed pressure, e.g., 1000 psig, to outlet port 124 and the valve element 122 opened by hand wheel 126. Alternatively, the valve element may be joined to an automatic valve actuator or other controller or actuating means that opens the valve element 122, The gas is then suppled under the feed pressure into flow passage 120, flow tube 130 and extension tube 135 into manifold 140 and manifold 145 through conduit 148. The downstream regulator 270 closes when the feed pressure is introduced into manifold 145 stopping the flow of gas between the interior volume 128, the upstream regulator 280 and downstream regulator 270 as long as the feed pressure is applied.

10051] The gas under feed pressure is also applied to the inlet of one-way valve 160 The supply gas enters inlet 162 from manifold 140. The pressure at inlet 162 is at a greater pressure than the pressure at outlet 163 provided by the depleted gas in the interior volume 128. The supply gas provides the cracking pressure for unseating the diaphragm/stopper 165 and causing a forward flow of gas past diaphragm/stopper 165 from the inlet port 162 into housing 161 and out of the by-pass port 168 into the interior volume 128. The vessel 102 can be charged in this manner until the pressure in the interior volume 128 equals the feed pressure. Closing the valve element and removing the supply gas from outlet port 124, will automatically close the one-way valve 160 and the pressure regulators 270, 280 will again control the dispensing of the gas from the interior volume through outlet port 124.

[0052] Turning now to FIG. 3 a second embodiment of the gas storage find dispensing apparatus 100 is illustrated. In this embodiment, the apparatus 100 includes a fluid storage and dispensing vessel 102 of generally cylindrical form, with a cylindrical sidewall 104 closed at its lower end by floor member 106. At the upper end of the vessel is a neck 108 including a cylindrical collar 110 defining and circumscribing a top opening (port) of the vessel. The bore of neck 108 is preferably at least 1.5 inches in diameter. The vessel wail, floor member and neck thereby enclose an interior volume 128, as shown.

[0053] At the neck of the vessel, a threaded plug 112 of the valve head assembly 114 is threadably engaged with the intenor threaded opening of the collar 110. The valve head assembly 114 includes a central fluid flow passage 120 joined in fluid flow communication with a central working volume cavity in the valve head assembly. The central working volume cavity in turn is joined to outlet port 124, which may be exteriorly threaded or otherwise constructed for attachment of a connector and associated piping, conduit, etc. thereto.

[0054] Disposed in the central working volume cavity is a valve element 122 that is joined to a hand wheel 126 in the embodiment shown but may alternatively be joined to an automatic valve actuator or other controller or actuating means.

[0055] The central fluid flow passage 120 in the valve head assembly 114 is joined at its lower end to a connector tube 130, An extension tube 135 is joined in gas flow communication to the flow tube 130 at a top end 137 and to a first manifold 140 at a bottom end 138. The first and second manifolds 140, 145 are each arranged as open plenum boxes allowing for gasses to flow in and out of the openings attached to the manifolds 140, 145. It will be well understood that the manifolds 140, 145 can also be arranged to have internal passages connecting the attached openings to allow for gas flow' between the various elements of the apparatus. Additionally, conduits or tubes having connections fittings that join the conduits in gas tight assembly can be used to substitute for the manifolds and their internal plenums illustrated herein and the invention is not limited to the manifold structures illustrated.

[0056] A first one-way valve or check valve 160 has an inlet 162 joined in gas flow communication to the first manifold 140 and an outlet 163 joined at its lower end in gas flow communication to a by-pass port 168. The by-pass port 168 is open to and in gas flow communication with the interior volume 128 of the vessel 102. The bypass port 168 is arranged to convey the gas pressure in the interior volume 128 to outlet 163 of the one-way valve 160. The one-way valve 160 further includes an interior housing 161, a diaphragm/stopper 165 arranged to close against inlet 162 and a spring 166 that provides a biasing pressure to diaphragm 165. The by-pass port 168 is joined to a tubular filter 169 that in turn is joined, e.g. butt welded, to the top surface of the second manifold 145 for structural rigidity. The assembly of the by-pass port 168 and tubular filter 169 does not enter into the plenum of manifold 145 and is merely attached to the surface of the manifold. The filter 169 may be formed of stamiess steel, with filter wall being formed of a sintered stainless steel such as 316L stainless steel. The filter unit has a wall porosity that permits removal of all particles greater than a predetermined diameter, e.g.. greater than 0.003 micrometers at 30 standard liters per minute flow rate of gas from the system.

[0057] A second one-way valve or check valve 360 has an inlet 362 joined in gas flow communication to the second manifold 145 and an outlet 363 joined in gas flow communication to manifold 140. The second one-way valve 360 further includes an interior housing 361, a diaphragm/stopper 365 arranged to close against inlet 362 and a spring 366 that provides a biasing pressure to diaphragm 365.

[0058] A regulator assembly 290 includes a first gas pressure regulator 270 having an outlet tube 271 joined in gas flow communication to the second manifold 145. The first gas pressure regulator 270 is secured to the outlet tube 271, as for example by providing internal threading in the lower end portion of tube 271, with which the regulator 270 is threadabiy engageable.

[0059] Alternatively, the first regulator 270 may be joined to the lower end of the tube 272 by being bonded thereto, e.g., by welding, brazing, soldering, melt-bonding, or by suitable mechanical joining means and/or methods, etc. An upper end of tube 271 is joined in any suitable manner to the manifold 145 by being bonded thereto, or by other suitable mechanical joining means and/or methods, etc.

[0060] The first gas regulator 270 is arranged in senes relationship with a second gas regulator 280, as shown. For such purpose, the first and second regulators 270,

280 may be thread ably engageable with one another, by complementary threading comprising threading on the lower extension portion of the first regulator 270, and threading that is mateably engageable therewith on the upper extension portion of the second regulator 280.

[0061] Alternatively, the first and second regulators 270, 280 may be joined to one another in any suitable manner, as for example by coupling or fitting means, by adhesive bonding, welding, brazing, soldering, etc., or the first and second regulators may be integrally constructed as components of a dual regulator assembly. The gas pressure regulators 270, 280 operate to provide a pressure sensing assembly that precisely controls outlet gas pressure. Both regulators of regulator assembly 290 operate in a similar manner as explained in the embodiment of FIG. 2 wherein, the contraction or expansion of diaphragm 279 serves to translate the poppet element 276 to provide precise pressure control. The pressure sensing assembly has a set point that is pre-established or set for the gi ven application of the gas storage and dispensing system.

[0062] At its lower end, the pressure regulator 280 is joined to a tubular fitting 272 which in turn is joined, e.g., by butt welding, to a filter unit 275. The filter unit 275 may be formed of stainless steel, with the diffuser wall being formed of a sintered stainless steel such as 316L stainless steel. The filter unit has a wall porosity that permits removal of all particles greater than a predetermined diameter, e.g., greater than 0.003 micrometers at 30 standard liters per minute flow rate of gas from the system. The filter unit 275 serves to prevent contamination of the regulators 270, 280 with particulates or other contaminating species that otherwise may be present in the fluid flowed through tire regulators and valves in die operation of the apparatus. 'The gas regulators 270, 280 and filter 275 forms a serial regulator assembly 290 for dispensing gas from the interior volume 128 to the second manifold 128. The extension tube 135, manifolds 140, 145 first and second one-way valves 360. 160, regulator assembly 290 are assembled in a series relationship and adapted to be installed as an assembly Into the interior volume 128 of vessel 102 through neck 108.

[0063] The respective set points of the first gas regulator 270 and the second gas regulator 280 in the embodiment of FIG. 3 may be selected or preset at any suitable value to accommodate a specific desired end use application. For example, the second or “upstream” regulator 280 may have a set point that is in a range from about 20 psig to about 2500 psig. The first or “downstream” regulator 270 may have a set point that is above the pressure set point of the upstream regulator 280, e g., in a range of from about 5 psig up to 2500 psig.

[0064] In one illustrative embodiment, the upstream gas pressure regulator 280 has a set point pressure value that is in the range of from about 20 psig to about 1500 psig, while the downstream gas pressure regulator 270 has a set point pressure value in the range of from about 5 psig to about 20 psig, wherein the upstream pressure set point is above the set point of the downstream regulator. Although the set points of the regulators in a serial regulator assembly 290 may be established in any suitable ratio in relation to one another, in a two-regulator assembly such as shown in FIG, 3, the upstream regulator 280 in preferred practice advantageously has a pressure set point that is at least twice the set point value (measured in the same pressure units of measurement) of the downstream regulator 270. First and second gas pressure regulators 270, 280 and particulate filter 275 are coaxially aligned with one another to form regulator assembly 290.

[0065] The gas pressure regulator devices useful in the broad practice of the invention can be of any suitable type. For example, such as the SWAGELOK HFS3B senes of set pressure regulators, or other similar gas pressure regulators. The first regulator 270 having a set point pressure in the range of from 5 psig to 20 psig, and the second regulator 280 having a set point pressure in the range of from 20 psig to 1000 psig,

[0066] Gas pressure regulators 270, 280 provide a regulated flow' of gas to the second one-way valve 360. The second one-way valve 360 allows gas at a selected pressure to flcnv to manifold 140 and be dispensed from the vessel when a source of dispensing pressure at a sub-atmospheric or low-pressure value is connected to outlet 124 and the valve 122 In the valve head assembly 114 is opened. Gas from the interior volume 128 of vessel 102 flows through filter unit 275, fitting 272, to second pressure regulator 280. Second pressure regulator 280 converts pressure of the interior volume 128 of the storage vessel to an intermediate pressure for conversion by the first pressure regulator 270. For example, the upstream or second regulator 280 coverts the gas of the interior volume 128. for example at 1000 psig, to an intermediate pressure, for example of 20 psig. The intermediate pressure exits the upstream regulator 280 and is applied to the downstream regulator 270, The downstream regulator converts the intermediate pressure to a regulated pressure of, for example. 5 psig.

[0067] The gas at the regulated pressure exits the pressure regulator 270 through tube 271 and is applied to the interior plenum of second manifold 14.5 and to the inlet port 362 of the second one-way valve 360, In order to flow gas from the manifold 145 into manifold 140 a gas pressure less than the cracking pressure of the second one-way valve 360 must be applied to its outlet port 363. For example, if the way- valve 360 has a cracking pressure of 10 psig, applying a dispensing pressure at sub- atmospheric pressure or at a pressure less than the cracking pressure of the second one-way valve 360, will allow the positive 5 psig pressure at inlet 362 to unseat diaphragm/stopper 365 from inlet 362 causing a forward flow' of gas at a selected low pressure, for example 500 Torr, from the manifold 145 into housing 361 and into manifold 140. As will be well understood by those skilled in the art, the selected pressure flowing through the second one-way valve is determined by a dispensing pressure at a sub-atmospheric or low pressure applied to the outlet 363, the cracking pressure of the second one-way valve 360 as weli as the positive pressure applied by the pressure regulator assembly 290 applied to the inlet 362. These pressures can be adjusted and or balanced to provide the gas from the interior volume to flow at a selected pressure and be dispensed from the vessel as may be desirable or required in a given end use application of the invention.

[0068] The gas at the selected pressure of 500 Torr. m the manifold 140 is also applied to the inlet port 162 of the first one-way valve 160. The high pressure of the interior volume 128, e.g., 1000 psig, is applied via the by-pass port 168 to the first one-way valve 160 outlet port 163. The diaphragm/stopper 165 closes inlet 162 when the gas pressure at outlet 163 is greater than at inlet 162, commonly referred to as the reseal pressure. The greater pressure at outlet 163 provides the reseal pressure that moves the diaphragm/stopper against inlet 162 closing off gas flow communication between the interior volume 128 and the first manifold 140. As long as the pressure at inlet 162 remains lower than the pressure at the outlet 163 the diaphragm/stopper 165 remains sealed.

[0069] A spring biased one-way valve using a diaphragm/stopper is described in this disclosure for ease of understanding the concept of this disclosure. It will be well understood that other forms of one-way valves or check valves that allow gas fluids to flow in only one direction can be sued to substitute for the valve illustrated in this disclosure, such as for example, the 6L-CW4S series diaphragm or poppet check valve from SWAGELOK. This check valve may have a cracking pressure of, for example 2-10 psig pressure differential between the inlet and outlet pressure and a sealing pressure of, for example 2-10 psig.

[0070] The gas at the selected pressure of 500 Torr flowing through the second one-way valve 360 travels to flow tube 130 via extension tube 135, to central fluid flow passage 120 in the valve head assembly 114, central working volume cavity and is dispensed from outlet port 124. The valve head assembly is joined through outlet port 124 to a dispensing line for dispensing the gas from storage vessel 102. The outlet port 124 may also be connected to other piping, conduits, flow controllers, monitoring means, etc., as may be desirable or required in a given end use application of the invention.

[0071] The apparatus of the present invention uses a single port to both dispense gas from, and supply gas to, storage vessel 102. When the gas under pressure in the interior volume 128 of vessel 102 is depleted, the vessel 102 can be charged with supply gas by attaching a source of supply gas under a feed pressure, for example a feed pressure of 1000 psig, to outlet port 124, and the valve element 122 opened by hand wheel 126. Alternatively, the valve element may be joined to an automatic valve actuator or other controller or actuating means that opens the valve element 122. The gas is then suppled under the feed pressure into flow passage 120, flow tube 130 and into manifold 140. The gas at high pressure enters outlet 363 of the second one-way valve 360 and inlet 162 of the first one-way valve 160.

[0072] The gas at feed pressure enters housing 361 providing a reseal pressure to the second one-way valve 360 moving diaphragm/stopper 365 to close inlet 362. The reseal pressure being the differential pressure between the feed pressure at outlet 363 and the lower pressure at inlet 362, provided by the regulator assembly 290. The second one-way valve 360 closes off gas flow communication between the first manifold 140 and the second manifold 145. As long as the pressure at the outlet 363 remains greater than the pressure at the inlet 362 the diaphragm/stopper 365 remains sealed against inlet 362 preventing the gas at feed pressure to reach manifold 145 and the regulator assembly 290.

10073] The supply gas under feed pressure is also applied to the inlet 162 of the first one-way valve 160 from manifold 140. The pressure at inlet 162 is at a greater pressure than the pressure at outlet 163 provided by the depleted gas in the interior volume 128. The feed pressure provides the cracking pressure for unseating the diaphragm/stopper 165 causing a forward flow of gas past diaphragm/stopper 165 from the inlet port 162 into housing 161 and out of the by-pass port 168 into the interior volume 128. The feed gas flowing through the first one-way valve and out the by-pass port 168 recharges the storage vessel 102. The vessel 102 can be charged in this manner until the pressure in the interior volume 128 equals the feed pressure. Shutting the valve by turning handle 126 and disconnecting the supply gas will automatically close the first one-way valve 160. The connection of a dispensing pressure to outlet 124 will provide the cracking pressure to the second one-way valve 360 causing forward flow of gas through valve 360 and allowing the dispensing of gas at the selected pressure from the interior volume 128 to outlet port 124 through the apparatus.

[0074] The description in the present application should not be read as implying that any particular element, step, or function is an essential or critical element that must be included in the claim scope. The scope of patented subject matter is defined only by the allowed claims. Moreover, none of the claims invokes 35 U.S.C. § 112(f) with respect to any of the appended claims or claim elements unless the exact words “means for” or “step for” are explicitly used in the particular claim, followed by a participle phrase identifying a function. Use of terms such as (but not limited to) “mechanism,” “module,” “device,” “unit,” “component,” “element,” “member,” “apparatus,” “machine,” “vessel,” or “system,” within a claim is understood and intended to refer to structures known to those skilled in the relevant art, as further modified or enhanced by the features of the claims themselves, and is not intended to invoke 35 U.S.C. § 112(f).

[0075] While this disclosure has described certain embodiments and generally associated methods, alterations and permutations of these embodiments and methods will be apparent to those skilled in the art. Accordingly, the above description of example embodiments does not define or constrain this disclosure. Other changes, substitutions, and alterations are also possible without departing from the spirit and scope of this disclosure, as defined by the following claims.

Claims

WHAT IS CLAIMED IS:

1. A gas storage and dispensing vessel, comprising: a vessel enclosing an interior volume for holding pressurized gas; a single outlet port for dispensing the pressurized gas from the vessel and for supplying the vessel with pressurized gas; a pressure regulator in the interior volume of the vessel, arranged to maintain a predetermined pressure of gas discharged from the vessel; a manifold in gas flow communication between the gas pressure regulator and the supply port; a one-way valve having an inlet connected to the manifold, and an outlet connected to a by-pass port open to the interior of the vessel, wherein the pressurized gas enters the by-pass port and provides a sealing pressure to the one-way valve; an actuator being selectively actuatable to flow gas at the predetermined pressure developed applied to the manifold by the gas pressure regulator and dispensing the gas from the outlet port; and the actuator further selectively actuatable to flow supply gas at a feed pressure from the outlet port to the manifold and to the inlet of the one-way valve, the supply gas providing a cracking pressure that opens the one-way valve allowing the supply gas to flow through the one-way valve and be discharged from the by-pass port into the interior volume of the vessel.

2. The gas storage and dispensing vessel according to claim 1, wherein the gas storage vessel further includes a port; a valve head mounted in the vessel port; and a gas dispensing assembly in gas flow communication with the valve head the gas dispensing assembly including a flow control valve actuatable by the actuator.

3. The gas storage and dispensing vessel according to claim 1, wherein the gas pressure regulator is a first gas pressure regulator, and further comprising a second gas pressure regulator joined in series relationship with the first gas pressure regulator.

4. The gas storage and dispensing vessel according to claim 3, wherein the second gas pressure regulator has a set point pressure that is above the set point pressure of the first gas pressure regulator at least twice the set point pressure of the first gas pressure regulator.

5. The gas storage and dispensing vessel according to claim 3, further comprising a first particulate filter in the valve head supply port; and the second gas pressure regulator is joined at its inlet end to a second particulate filter, wherein the second particulate filter, the first gas pressure regulator and the second gas pressure regulator are coaxially aligned with respect to one another.

6. The gas storage and dispensing vessel according to claim 2, wherein the manifold is a first manifold and further comprising a second manifold, the first manifold is connected to the second manifold by a first conduit.

7. The gas storage and dispensing vessel according to claim 6, wherein the valve head at its lower portion inside the vessel is joined to an extension tube that downwardly extends from the valve head into the interior volume of the vessel, and at its lower end joined to the first manifold; the second manifold connected in gas flow communication with the gas pressure regulator, wherein the predetermined gas pressure from the gas pressure regulator flows to the second manifold through the first conduit to the first manifold and the extension tube to the valve head.

8. The gas storage and dispensing vessel according to claim 7 wherein the one-way valve by-pass port includes a filter element that is fixedly attached to the second manifold.

9. The gas storage and dispensing vessel according to claim 7, wherein the extension tube is coaxially aligned with a discharge passage in the valve head, and the discharge passage is coupled in gas flow communication with the gas dispensing assembly.

10. A gas storage and dispensing vessel, comprising: a vessel enclosing an interior volume for holding pressurized gas; a single outlet port for dispensing the pressurized gas from the vessel and for supplying the vessel with pressurized gas; a pressure regulator in the interior volume of the vessel, arranged to provide a regulated pressure from the interior volume of the vessel; a manifold in gas flow communication with the supply port; a first one-way valve having an inlet connected to the pressure regulator arranged to receive the regulated pressure and an outlet connected to the manifold; a second one-way valve having an inlet connected to the manifold, and an outlet connected to a by-pass port open to the interior of the vessel, wherein the pressurized gas enters the by-pass port and provides a sealing pressure to the second one-way valve; an actuator being selectively actuatable to apply a dispensing pressure to the manifold and to the outlet of the first one-way valve, the dispensing pressure providing a cracking pressure that opens the first one-way valve to flow gas at a selected pressure into the manifold from the first one-way valve, dispensing the gas from the outlet port; and the actuator further selectively actuatable to flow supply gas at a feed pressure from the outlet port to the manifold and to the inlet of the second one-way the supply gas providing a cracking pressure to open the second one-way valve allowing the supply gas to flow through the second one-way valve and be discharged from the by-pass port into the interior volume of the vessel.

11. The gas storage and dispensing vessel according to claim 10, wherein the gas storage vessel further includes a port; a valve head mounted in the vessel port; and a gas dispensing assembly in gas flow communication with the valve head the gas dispensing assembly including a flow control valve actuatable by the actuator.

12. The gas storage and dispensing vessel according to claim 10, wherein the gas pressure regulator is a first gas pressure regulator, and further comprising a second gas pressure regulator joined in series relationship with the first gas pressure regulator.

13. The gas storage and dispensing vessel according to claim 12, wherein the second gas pressure regulator has a set point pressure that is above the set point pressure of the first gas pressure regulator that is at least twice the set point pressure of the first gas pressure regulator.

14. The gas storage and dispensing vessel according to claim 12, further comprising a first particulate filter in the valve head supply port; and the second gas pressure regulator is joined at its inlet end to a second particulate filter, wherein the second particulate filter, the first gas pressure regulator and the second gas pressure regulator are coaxially aligned with respect to one another.

15. The gas storage and dispensing vessel according to claim 2, wherein the manifold is a first manifold and further comprising a second manifold, the first manifold connected to the second manifold by the first one-way valve.

16. The gas storage and dispensing vessel according to claim 15, wherein the valve head at its lower portion inside the vessel is joined to an extension tube that downwardly extends from the valve head into the interior volume of the vessel, and at its lower end joined to the first manifold; the second manifold connected in gas flow communication with the gas pressure regulator, wherein the regulated pressure from the gas pressure regulator flows to the second manifold.

17. The gas storage and dispensing vessel according to claim 16, wherein the first one-way valve inlet is connected to in gas flow communication to the second manifold and its outlet connected in gas flow communication to the first manifold; the second one-way valve having its inlet connected to in gas flow communication to the first manifold and its outlet connected to the by-pass port, wherein when the dispensing pressure is applied to the first manifold the second one-way valve is arranged to close isolating the first manifold from the gas in the interior of the vessel and when the feed pressure is applied the first one-way valve the first one-way valve is arranged to close isolating the second manifold from the supply gas.

18. The gas storage and dispensing vessel according to claim 16, wherein the extension tube is coaxially aligned with a discharge passage in the valve head, and the discharge passage is coupled in gas flow communication with the gas dispensing assembly.

19. A process for dispensing gas from a storage vessel, comprising: storing gas at a first pressure in an interior volume of the vessel the vessel having a single port for dispensing the pressurized gas from the vessel and for supplying the vessel with pressurized gas; connecting a manifold in gas flow communication with the supply port; providing a regulated pressure from a pressure regulator located in the interior volume of the vessel, the gas pressure regulator arranged to provide gas at a second pressure; receiving at an inlet of a first one-way valve the second pressure from the pressure regulator, an outlet of the first one-way valve in gas flow communication with the manifold; connecting a dispensing line to the outlet port and to a source of dispensing pressure; opening a flow control valve to communicate a flow passage between the outlet port and the manifold; and applying the dispensing pressure to the manifold and the outlet of the first oneway valve to provide a cracking pressure that opens the first one-way valve to flow gas at a selected pressure from the first one-way valve to the manifold, dispensing the gas at the selected pressure from the outlet port.

20. The process of claim 19, wherein the dispensing line is disconnected from the outlet port and the flow control valve is closed; connecting a supply line and a source of supply gas at feed pressure to the outlet port; opening the flow control valve to communicate a passage between the outlet port and the manifold; connecting an inlet of a second one-way valve to the manifold and an outlet to the first pressure in the interior volume of the vessel; and passing the supply gas at the feed pressure from the supply line to the first manifold and to the inlet of the second one-way valve providing a cracking pressure to the second one-way valve opening the one-way valve and passing the gas from the supply line to the interior volume of the vessel.