CN1114777C - Pailure protection discharge valve for pressure vessel - Google Patents
Pailure protection discharge valve for pressure vessel Download PDFInfo
- Publication number
- CN1114777C CN1114777C CN 99119688 CN99119688A CN1114777C CN 1114777 C CN1114777 C CN 1114777C CN 99119688 CN99119688 CN 99119688 CN 99119688 A CN99119688 A CN 99119688A CN 1114777 C CN1114777 C CN 1114777C
- Authority
- CN
- China
- Prior art keywords
- valve
- valve member
- fluid
- bellows
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Images
Abstract
The present invention relates to a failure protection exhaust valve used on a pressure container, which uses a pressure response valve part for providing an effective failure safety system. The present invention is used for preventing the dangerous exhaust of fluid from a pressure gas bottle or a gas jar. A diaphragm controls the motion of a valve piece so as to prevent gas from exhausting from the gas jar until a predetermined pressure condition occurs on the downstream of a one-way valve. The present invention is particularly favorable to the delivery of arsine gas and can provide multichannel safety protection for accidental exhaust.
Description
The present invention relates to a kind of outlet valve that is used for as the reservoir vessel of pressurized container or inflation steel cylinder, this pressurized container or inflation steel cylinder are provided with the protective gear that multiple tracks prevents the material accidental release in the container.
The enforcement of many industrial processes and production all needs to use hypertoxic fluid.The production of semi-conducting material is exactly a kind of example of this enforcement, and wherein hypertoxic safe storage hydrogeneous or halogen-containing gas is absolutely necessary with holding.Such gas comprises silane, germane, ammoniacal liquor, hydrogen phosphide, arsine (arsenic hydride), antimonous hydride, hydrogen sulfide, hydrogen selenide, hydrotelluric acid and other halogen compounds.Owing to consider hypertoxicity and Security, these gases must store and be contained in the equipment of industrial product carefully.Semi-conductor industry depends on the gaseous state arsenic hydride (AsH as the source of arsenic (As) and phosphorus (P) especially in ion immigration technology
3) and hydrogen phosphide (PH
3).It is the AsH of 10.4MPa (1500psig) that ion moves into the common working pressure height of technique system
3And PH
3Lean mixtures.Because the hypertoxicity of these gases and higher vapor tension will be so for semi-conductor industry, will improve the concern to Security in use, transportation and the storage process of these gases.
Holding as a very concrete example of arsine illustrated semi-conductor industry is how to use a kind of hypertoxic gas, and it is in the pressurized container of 1825KPa (250psig) that arsine is stored in a pressure usually.The arsine gas cylinder is handled and is had various dangerous situations in production environment.In one 140 gram gas cylinder the leakage of arsine can pollute one have height be 3 meters smallpox utmost points and area be 3,500 square metres building whole volumetric spaces and reach the level of fatal immediately (IDLH).If leakage rate is bigger, this may only take place in one or two minute, and this will mean will have a few hours to be in the concentration that extremely causes death in the near zone of source of leaks.
It is the gas cylinder of 500cc that a kind of container of arsine typically uses the capacity that an a kind of end has a valve.The liquid arsine that is supercharged to 1825KPa (250psig) is filled into gas cylinder 20% (arsines of 140 grams) of its capacity.In case inflation finishes, just with valve closing and safe cap is installed in the outlet of valve.Low weight (about 2.5 kilograms) of this gas cylinder and this valve are compared with the weight of gas cylinder and are wanted more solid, therefore make the cylinder valve end down from distance concrete floor top 3 meters or 6 meters fall can not destructive valve or the integrity of gas cylinder.The intensity of the gas cylinder of these small capacities has been eliminated and has been used the necessity that appears at the Protective valve on the big capacity gas cylinder usually.
An end user who obtains this container will remove safe cap in draughty zone, and with common vertical mode this container will be installed on the final operative installations and with valve open.Then this container then comes the arsine of dispatch liquid state or gaseous state according to the position of valve end.If the valve end is downward, with dispatch arsine liquid.If the valve end upwards, with dispatch arsine gas.The position of pipe valve is not how, the arsine that always is in gas phase state that final operative installations uses, and this gaseous state or to discharge from gas cylinder be exactly gas is a gas with liquid transition in final operative installations perhaps.
The saturation pressure of liquid arsine is 1825KPa (250psig) under room temperature (22 ℃).This means that any leakage or the interior leakage part of final operative installations self in the container that is connected with the joint that installs will make arsine be discharged in the atmosphere with the pressure of 1825KPa.Therefore, those keep the joint of absolute sealing all parts and the supply container of these devices must to be coupled together to 1825KPa or higher pressure.If end user elder generation Open valve also then removes safety and emits lid, then the arsines of 140 grams will all ejections in one or two short second, and are specifically all the more so under the downward situation of valve end.If someone makes it complete opening with enough big moment rotation valve handle, so that tightly blocking, valve handle make other people think that valve closes by mistake, in this case, aforementioned incident just may take place.The safety cap removed or thinking that mistakenly valve is under the situation of closing gas cylinder to be disconnected the release rapidly that all may cause arsine.
Owing to exist because the casual release of these fluids can cause a kind of extremely serious potential injury and cause death, prior art discloses some and has been used to prevent that the calamitous system that discharges from appearring in hypertoxic fluid.System at present usually commonly used is that the agent of mixing with arsine or other severe toxicity remains on the sorbent.US-A-4 for example, 744,221 have explained a kind of storage and subsequent delivery of arsine, and it is by temperature is contacted with zeolite facies so that arsine is adsorbed on the zeolite that is used to store carries out at-30 ℃ to+30 ℃ arsine.Can make arsine rise to 175 ℃ zeolite from temperature by heating separates.US-A-4,744,221 described methods make the conveying of arsine have the defective of a needs heating.A problem of heating is that reservoir vessel has a sizable thermal capacity usually.The thermal capacity of reservoir vessel can cause a lag time in conveying operations.And heating may be decomposed arsine and be produced the hydrogen with potential explosion risk.The pyrolysis of arsine also may cause in the unnecessary increase aspect the gas pressure processing system.
US-A-5,704,965, US-A-5,704,967, US-A-5,707,424 and US-A-5,518,528 also disclose a kind of be used for hydrogeneous and storage halogen-containing gas and dispatch system, and this system at room temperature works by utilizing pressure to reduce hypertoxic fluid separated from the zeolitic material that these gases is had higher storage (absorption) ability.More get a load of patent US-A-5,518,528, this patent has used a dispatch assembly that a pressure that is lower than the internal pressure of reservoir vessel is provided.Pressure after this reduction makes the gas in the absorption separate from solid-state tangible adsorbent medium.For the most of arsine on the sorbent is reclaimed, just must use low-down pressure.When (gas cylinder is complete) when being full of, dispatch pressure is possible be 79.8kPa (600 torr).When (gas cylinder is) when partly being full of, will be reduced to 9.3kPa (70 torr).The mass flowrate controller estimates to reduce the working pressure of 20kPa (150 torr) mostly.Under 25kPa (150 torr) pressure, the arsine that is adsorbed on 60% on the sorbent is still stayed on the sorbent.Therefore be necessary equipment improved with installation and be used for utilizing the required mass flowrate controller of arsine that is higher than 40% adsorbent type gas cylinder with low-down pressure.
US-A-4,936,877 have explained by means of the conveying that is expanded to the arsine in the transhipment gas.In this system, the flow rate control film of arsine through being arranged in mixing chamber leaves accumulation vessel, and this mixing chamber makes transhipment gas contact with arsine.
The direction mechanism that the fluid that block of valve device provides many restrictions to come from transhipment gas storage device flows.US-A-4,723,867 and US-A-4,738,693 disclose film and the use of diaphragm element in the valve piece particularly, and this valve piece contains several multi-way valve and prevents discharging at the fluid of the conveying of the additive that is used for semi-conductor industry.
The common technology of the design of valve discloses a kind of use that is used to control the seal bellows element of a valve member.US-A-4,157,072 disclose a kind of draining valve that is used for the bunker fuel fuel tank.This patent has been explained and how a seal bellows is installed to provide a response to higher hydraulic pressure, and this response stops fuel oil to be discharged from the steamer of sinking.
A main purpose of the present invention is to reduce the accident ejection of hypertoxic fluid or gas or discharge the possibility that takes place.
Another object of the present invention is to eliminate the necessity that holds, stores and carry that adopts sorbent to control hypertoxic fluid.
A further object of the invention provides a kind of valve that is used for gas tank or gas cylinder, and this gas tank or gas cylinder are only just discharged the material that it was installed in being under the supply status.
Device of the present invention provides a regulator, and this regulator can automatically limit any hypertoxic release of fluid from reservoir vessel outlet output.This regulator in the reservoir vessel outlet port or the outlet downstream used a conditional response valve member to prevent the discharge of fluid, unless have suitable discharge condition in the outside of container or apply a suitable discharge condition to pressure regulator.The discharge condition is a predetermined condition, extremely can not occur during the storage of this predetermined condition valve in common storage and processing procedure and the processing and under normal atmospheric conditions.Such condition may comprise the heating of regulator or give regulator or loading current, voltage, magnetic field or unusual mechanical force around it.Reasonablely be, this regulator contains a pressure sensor, and the pressure condition up to preliminary election occurring perhaps is more preferably, and this sensor will prevent all the time that fluid from discharging before there is a vacuum condition in the downstream of regulator.As a kind of further protective gear; can make the discharge condition satisfy the special control that is subjected to final operative installations; thereby up to container being installed in rightly the inner face of final operative installations or linking to each other with final operative installations, just the discharge condition can appear on every side or safely.Adopt this mode, the present invention can provide a kind of and be used for hypertoxic fluid from fail safe system that reservoir vessel is exported.
For (playing effective protection) effect, self will be equipped with regulator the valve of container or container.This regulator can be positioned at the upstream or the downstream of container valve.The container valve upstream position provides main protection to this regulator and fail safe operation thereof.
The most effective use of the present invention is the additional protection means that an internal flow limit is installed in reservoir vessel.This flow restriction will be restricted to a lower mass flowrate to the discharge capacity of the gaseous fluid that comes from container reliably.The desirable flow rate that this mass flowrate is generally equal to or must adopts greater than container to the maximum of final operative installations supply gas, but this mass flowrate is enough to strictly limit anything unexpected ground discharge capacity.Any existing flow-rate limiting device can both play the effect of flow restrictor.Suitable flow restriction can comprise, individually or in the mode of combination, piles up pipe, thin-film component or tiny hole sizer or screen material arranged.A trickle capillary tube can provide a kind of flow restriction preferably, and herein, the variation on length and diameter will be allowed the maximum fluid discharge capacity is proofreaied and correct.Useful flow restriction can be positioned at any position of the upstream of container mouth or vessel valve outlet.Flow restriction preferably is positioned at the gas tank or the gas cylinder inside of supply gas.
Because the mass velocity discharge capacity of fluid will greatly surpass the mass velocity discharge capacity through the corresponding gas of the opening after the identical throttling, the discharge capacity that comes from the fluid of container can form a special danger.Therefore, the position of the import of flow restriction will help the discharge of control flow rate.A particularly advantageous scheme is in case the mode that the fluid stopping body is discharged is from container arranged the flow restrictor import.Charge into volume for 20% of typical arsine cylinder body, the mid point that the flow restrictor import is arranged in gas cylinder just can prevent the fluid discharge under the condition downward or upward in the gas cylinder upper end.And, import is installed in the radial center of gas cylinder, can prevent all that for any horizontal or vertical position of the gas cylinder of part inflation fluid from discharging.
Therefore, in a preferred embodiment, the present invention is the device of the discharge of a compressed fluid that is used to control the outlet that comes from pressurized container.This device comprises that a hole body that is used for linking with a pressurized container is to limit a fluid discharge pipe road that comes from container.Be installed in the hole body or the pressure regulator of the front of hole body contains a valve member, this valve member be used for stop up fluid flow through the fluid discharge pipe road sealing station and allow between the enable possition that fluid longshore current body discharge conduit flows and move.A barrier film limits internal volume, this volume separates with the pressure condition of hole body upstream and matches with valve member, this valve member is controlled the motion of valve member in the following manner, even valve member rests on the sealing station till the barrier film inboard moves to the enable possition with respect to the pressure official post valve member between the barrier film outside.
In the embodiment of the device of another qualification, the present invention is the assembly of a gas cylinder and a valve, and this assembly is used for holding compressed fluid and the control compressed fluid is discharged from gas cylinder.Gas cylinder and valve assembly comprise a bottle and a bottleneck.This valve assembly comprises that one is used for sealing the hole body that assembles with bottleneck.The import of fluid is limited by this hole body and communicates with the gas cylinder mouth.The outlet of fluid is limited by this hole body and is positioned at outside the gas cylinder.The discharge conduit of fluid is limited by valve body between fluid inlet and fluid output.Manned stop valve control fluid flows along the fluid discharge pipe road.A self-acting valve contains a valve member that is biased into a sealing station, and the sealing position stops fluid to flow along the fluid discharge pipe road.The bellows of a sealing is positioned at the downstream part in fluid discharge pipe road, its part is fixedly connected with respect to hole body, and another part can link to each other with valve member with turning round, and when elongation pushed valve member to enable possition from sealing station so that the relative pressure official post between the bellows inside and outside gets bellows.
In a main embodiment, the present invention is a method and control system, is used for the discharge of fluid non-controlling from fluid container is discharged and prevented to fluid from fluid container.This method comprises: fluid container is filled compressed fluid; A discharge conduit is set, is used for flowing to the flowing of controlled discharge fluid of the delivery port that is positioned at outside of containers from the outlet that communicates with the inside of fluid container; Block fluid by a control valve and flow through discharge conduit, this control valve responds to heat, mechanical force or the pressure condition outside the ordinary atmospheric conditions scope; Heat, mechanical force or the pressure condition that applies a necessity to control valve opened discharge conduit when needed selectively and discharged compressed fluid making it.
For example, control valve can respond to the electrical pulse as controlled conditions.Arrive valve up to electric current the mobile generation of flowing out valve is just arranged.The impulsive current starting only makes periodic gas pulses enter system.Enough volumes that this systematic conduit has a sufficient supply that is used for gas satisfy the demand and supply between the pulse.If duration of work leaks in pipeline, pulse then limits any possible discharge capacity.
Fig. 1 is the sectional view of gas cylinder and head valve assembly.
Fig. 2 is the enlarged view of gas cylinder and head valve assembly.
Fig. 3 is the another kind of scheme of the inside of gas cylinder.
Fig. 4 is the sectional view of Fig. 3 along section line 3-3.
Referring to accompanying drawing 1, the present invention sees typical feeding apparatus of picture from the outside, and it comprises that a capacity that has gas cylinder head valve 12 on the top is a 500cc gas cylinder 10, and has an outlet 16.Inside or gas cylinder contain a capillary tube 13, and this capillary tube has an import 14, and this import 14 is fed to valve inlet 11 with arsine gas.The liquid arsine reservoir 15 that is positioned at the bottom of gas cylinder 10 will be at arsine gas once leaving the vapor tension that gas cylinder replenishes arsine gas and keeps gas cylinder till exhaustion.The regulator 17 that is positioned at valve 12 contains a bellows component 28, and this bellows component can automatically be controlled arsine gas and discharge from gas cylinder.Handle 18 makes it possible to the manually main valve element 19 of control.
Fig. 2 has at length expressed the internal structure of regulator 17 and head valve 12.Along the pipeline of arsine gas discharge head valve 12, gas at first enters valve inlet 11 by the capillary flow area of conduit 13.The housing of head valve 12 contains regulator 17.The gas that enters at first contacts with the valve member of poppet 20 shapes.Spring 21 is biased on the valve seat 22 poppet valve 20 so that form a kind of closed state on gas flow duct.A resilient pad or other seal element can be withstood to keep the reliable sealing through valve seat 22 in the top of poppet valve 20.Spring 21 is pressed against poppet valve 20 valve seat 22 up to the regulator diaphragm element elongation with bellows 23 shapes and till promoting a contact plate 24 usually.Contact plate 24 acts on the control pin 25, and 25 of control pins push away valve seat 22 with poppet 20.Arsine gas then flows through round the pin-and-hole passage 26 of control pin 25 and enters the bellows chamber 27 that accommodates bellows component 28.
Bellows component 28 comprises: a bellows guiding element 29, and these guiding element 29 sealings form an internal press chamber 30 with the sidewall 31 that supports bellows 23 inboards; An outside guide pin bushing 32 that surrounds the outside of bellows 23; And bottom guide plate 33.Contact with the sealing of bellows guiding element 29 and contact with the sealing of contact plate 24 at the upper end of bellows 23, usually the pressure isolation in ripple and chamber 27 and the gas flow duct is come at the lower end of bellows 23.Thereby internal chamber 30 just is sealed the pressure decline that makes bellows chamber 27 in usually and can causes gas bellows inner chamber 30 in to make bellows expansion and promote contact plate 24 and push downwards to control and sell 25 under atmospheric pressure.Bellows guiding element 29 keeps in touch its outer ledge and guide pin bushing 32.32 pairs of guide plates 33 of guide pin bushing position.Bellows guiding element 29, guide pin bushing 32 and guide plate 33 get up bellows 23 close and protects together.The center hole that control pin 25 passes in the guide plate 33 is connected to keep itself and contact plate 24.
The arsine air-flow that passes bellows chamber 27 is through valve inlet 34 and through sealing surfaces 35.Threaded sleeve 36 forms a sealing reliably in case the fluid stopping body leaks through valve rod 38 thus with the multiple layer metal diaphragm clip on valve body 50.Handle 18 is operated together in conjunction with screw thread valve rod 38, forces the rubbing cushion 52 of piston 51 through being positioned on the barrier film 48 that main valve piston 37 is moved down to overcome the resistivity of spring 53.Moving downward of valve piston 37 will be pressed in by the teflon seal 54 of nut 55 carryings on the valve body 50 to form the sealing to surface 35.Retreat valve rod 38 and leave barrier film 48 and make spring 53 force valve piston 37 to move upward, separate sealing surfaces 35 thus and allow that gas stream crosses aperture 34.In case through sealing surfaces, arsine gas then flows to outlet 41 and flows to valve export 16 from chamber 40.
When needed, use the flow duct be restricted can be just in case further strengthen Security under the situation that regulator 17 can not detected gas flows.Outside the limiter of mentioning in front, the capillary dimensions flow region of many forms has the flexibility and the reliability of picture flow limiter.No matter the hole by one or more minor diameters is still provided by the parts that tightly stack, and such suitable limiter will be better be restricted to the conveying of gaseous fluid a low-down flow rate and makes fluid flow with higher flow by the capillary phenomenon effect.
For example, the single hole capillary tube can be restricted to the normal pressure arsine arsine of 3 standard cubic centimeters (sccm).Explain in more detail with flow limiter referring to Fig. 1 that again capillary tube 13 provides unique outlet of gas cylinder 10 to this form.The winding form of capillary tube 13 makes import 14 be positioned at the radial and axial center of gas cylinder 10.Internal diameter capillaceous can not surpass 0.02mm (0.001inch) usually, and this diameter can make the flow rate that arsine flows through pipeline be restricted to 60 milligrams/minute the saturation pressure of the arsine of 1825kPa (250psig).Usually final operative installations only needs 3-10 milligram/minute (1-3sccm).Under 60 milligrams of/minute flow rates, will spend 40 hours and just can make vessel empty.For having height is that 3 meters ceiling board area is that the degree that reached fatal immediately (IDLH) of arsine in 1 hour will be spent in 10 meters * 10 meters room.The warning that should withdraw for alerts people in one hour and provide time enough for the quick-reaction pool that takes necessary action.The more important thing is that unexpected unlatching in arsine gas system or pipeline connection failure cause dangerous degree more much smaller than the hazard level that is caused in the pressure operated system in the vacuum movement system.
Length capillaceous and diameter can be regulated so that a desirable flow rate by the maximum of limiter to be provided.Under the situation that arsine gas is carried with above-mentioned flow rate, the diameter that capillary tube is generally 15 centimeter length and hole is 12 microns.If diameter capillaceous is reduced to 9 microns and keep its length constant, supply the flow of equivalent with four parallel capillary tubies of needs.The capillary tube of this size can be by various glass material manufacturings.Suitable volume can overcome any frangible degree of glass.
Can construct various suitable capillary tubies.Shown in Figure 3 is a container, and it has used and has a kind ofly constituted improved form capillaceous by glass rod, and so that a kind of straight line capillary device 13 to be provided, its import is positioned at the radial and axial mid point of gas cylinder 10.Clearly show as more removing by the cross sectional view among Fig. 4, metal tube 42 a protectiveness ground that is made of stainless steel usually is surrounded glass tube 46.The internal diameter of glass tube 46 accommodates one and is centered around the hexagonal structure that a center glass rod 44 six roots of sensation glass rod 43 on every side constitutes.And wherein all glass rods have almost equal diameter.Slit 45 between the inner side surface of glass rod 43 and glass tube 46 provide be used for measurement flow through capillary structure 13 ' the area of passage of capillary dimensions of gas.On glass rod 43 and 44, just provide the pipe of a rigidity and the assembly of rod with the glass tube hot charging.Therefore, even inner glass rod has broken, these fragments are wrapped up securely the capillary flow that will keep through glass tube 46 internal diameters by glass tube 46.Metal tube 42 is can be to rigidity and serviceability around glass rod 43 and 44 time helpful and a stiffening device is provided at hot charging.Because non-essential metal tube 42 reinforcing elements, the breaking of the glass tube around glass rod or the glass rod can not change basically through capillary pipe structure 13 ' the function of restricted flow duct.
Because capillary tube is unique outlet, the arsine that is used for filling gas cylinder then must enter through capillary tube.The filling of gas cylinder need be pumped into liquid arsine in the gas cylinder usually.The density of liquid arsine is bigger 500 times than gaseous state arsine approximately.Therefore for most of liquid systems of filling the gaseous state pumpback, fill the emptying time much shorter of institute's time spent than gas cylinder.
In use the filling time must shorten, and one is exclusively used in the bigger aperture that gas cylinder is filled, and can reduce at needs or is used for the time that the gas cylinder to the filling/conveying that is used for other gas/gas or liquid/gas system recharges in case of necessity.In such structure, gas cylinder or valve can contain an independently import, and capillary tube or other flow restriction are walked around in this import.Several possibilities such as pressure, electric or magnetic or mechanical device that can be subjected to be enumerated to that flow that enter bypass aperture are controlled.
Also might utilize alternative restriction to come gas cylinder is filled.Adopt a kind of like this structure, the filter core that can play the limiting element effect moves back and forth between two different positions, and one of them position is used for replenishing container, and another position is used for pumpback gas from container.For this limiter, it can adopt a kind of form of Sealing, wherein Sealing is suitable for leaving to form a fluid flowing passage that originates in the container that flows that limits the valve body of flowing through from sealing surfaces, and be suitable for shifting to sealing surfaces setting up a fluid flowing passage from the container to the valve export, this passage fluid is flowed through fluid that limiter and restriction come from container flows.Adopt this mode, single aperture can be used to make fluid automatically to flow to and flow container with different flow rates.By the area of passage that makes the aperture have the most of container narrow neck of bigger process, use a single aperture of passing container just to simplify the filling of container gas.One movably limiter element can also have valve seal, the sealing part moves so that any discharge of gas is all blocked, unless limiter contacts with sealing surface fully with limiting element.
Claims (8)
1. one kind is used to control the device that compressed fluid is discharged from the outlet of pressurized container, and this device comprises:
A hole body (50) that is used for linking with a pressurized container (10) is to limit a fluid discharge pipe road (26,34,41);
A valve member (20) is installed in the hole body or the upstream of hole body, and be suitable for stop up fluid flow through the fluid discharge pipe road sealing station and allow between the enable possition that fluid longshore current body discharge conduit flows and move;
A barrier film (25) that is used for limiting internal volume (30), this volume separates with the pressure condition of hole body upstream and links to each other with valve member and fetches the motion of controlling valve member in the following manner, promptly allows valve member rest on the sealing station till the barrier film inboard moves to the enable possition with respect to the pressure official post valve member between the barrier film outside.
2. device according to claim 1 is characterized in that: described hole body is installed to a manually operated valve (12) on the valve member.
3. device according to claim 1 is characterized in that: one has the part that the conduit (13) that limits flow line has constituted the fluid discharge pipe road.
4. device according to claim 1 is characterized in that: barrier film (25) contains a bellows.
5. device according to claim 4, it is characterized in that: a housing (32) defines a bellows chamber that holds bellows, this bellows chamber communicates with a part of fluid discharge pipe road that is positioned at the valve member downstream, and when the UNICOM with discharge conduit produced vacuum state in the bellows chamber, sylphon seal had enough internal pressures to shift valve member onto enable possition.
6. device according to claim 5 is characterized in that: valve member (20) comprises a poppet valve, and the expansion of bellows makes pin (25) shift poppet valve onto enable possition.
7. device according to claim 5, it is characterized in that: airtight bellows one end fixedly mounts with respect to hole body, the other end operationally links to each other with valve member valve member being moved to an enable possition when the pressure official post bellows expansion between bellows inside and outside, and this enable possition allows that fluid flows along the fluid discharge route.
8. device according to claim 7 is characterized in that: the vacuum state that this bellows is suitable in the response ripple pipe moves to the enable possition with valve member.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 99119688 CN1114777C (en) | 1999-08-10 | 1999-08-10 | Pailure protection discharge valve for pressure vessel |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 99119688 CN1114777C (en) | 1999-08-10 | 1999-08-10 | Pailure protection discharge valve for pressure vessel |
Related Child Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN03138413.7A Division CN100476273C (en) | 1998-04-17 | 1999-08-10 | Failure protection exhaust valve used on pressure container |
| CN2006101517468A Division CN101245894B (en) | 1999-08-10 | 1999-08-10 | Failure protection discharge valve for pressure vessel |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1283762A CN1283762A (en) | 2001-02-14 |
| CN1114777C true CN1114777C (en) | 2003-07-16 |
Family
ID=5281038
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 99119688 Expired - Lifetime CN1114777C (en) | 1999-08-10 | 1999-08-10 | Pailure protection discharge valve for pressure vessel |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN1114777C (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100476273C (en) * | 1998-04-17 | 2009-04-08 | 普拉塞尔技术有限公司 | Failure protection exhaust valve used on pressure container |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101520063B (en) * | 2009-03-30 | 2011-08-17 | 北京航空航天大学 | Constant-pressure water evaporator suitable for aerospace craft |
| FR2974402B1 (en) * | 2011-04-22 | 2013-05-03 | Air Liquide | PRESSURIZED FLUID VALVE, TANK AND FILLING METHOD THEREOF |
| TWI585016B (en) * | 2015-07-15 | 2017-06-01 | Rui-De Wang | Closed container |
| TWM601306U (en) * | 2019-03-29 | 2020-09-11 | 兆捷科技國際股份有限公司 | Anti-leakage fluid carrier system and pressure regulating fluid distributor structure with pressure sensor and pressure regulating fluid distributor structure thereof |
-
1999
- 1999-08-10 CN CN 99119688 patent/CN1114777C/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100476273C (en) * | 1998-04-17 | 2009-04-08 | 普拉塞尔技术有限公司 | Failure protection exhaust valve used on pressure container |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1283762A (en) | 2001-02-14 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN100476273C (en) | Failure protection exhaust valve used on pressure container | |
| US5937895A (en) | Fail-safe delivery valve for pressurized tanks | |
| EP0591840B1 (en) | Apparatus for supplying high purity fluid | |
| TWI410574B (en) | Fail-safe vacuum actuated valve for high pressure delivery systems | |
| US6343476B1 (en) | Gas storage and dispensing system comprising regulator interiorly disposed in fluid containment vessel and adjustable in situ therein | |
| US4738693A (en) | Valve block and container for semiconductor source reagent dispensing and/or purification | |
| JP5881648B2 (en) | Method and gas cabinet assembly for reducing sweep gas flow | |
| US20180180225A1 (en) | Anti-spike pressure management of pressure-regulated fluid storage and delivery vessels | |
| US7905247B2 (en) | Vacuum actuated valve for high capacity storage and delivery systems | |
| US4723967A (en) | Valve block and container for semiconductor source reagent dispensing and/or purification | |
| EP1808216B1 (en) | Method for dispensing a fluid | |
| EP1000291A1 (en) | Fluid storage and dispensing system | |
| CN1190618C (en) | Conveying method and device for subatmospheric gas | |
| US20080302421A1 (en) | Permeable gas assembly for gas delivery | |
| CN1114777C (en) | Pailure protection discharge valve for pressure vessel | |
| US20100228399A1 (en) | Pressure regulator assembly and system for the controlled storage and dispensing of a fluid | |
| CN101245894B (en) | Failure protection discharge valve for pressure vessel | |
| EP1838894A2 (en) | Pentaborane(9) storage and delivery | |
| WO2021262480A1 (en) | An apparatus for dispensing and supplying gas to a storage vessel | |
| KR100697160B1 (en) | Fail-safe delivery valve for pressurized tanks | |
| EP1887276B1 (en) | Fail-safe delivery valve for pressurized tanks | |
| JP2001050496A (en) | Fail-safe delivery valve for pressure tank | |
| CN114341544A (en) | Method and apparatus for dispensing gas from a storage container |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| ASS | Succession or assignment of patent right |
Owner name: PLACER TECHNOLOGY CO., LTD. Free format text: FORMER OWNER: PRAXAIR TECHNOLOGY, INC. Effective date: 20031225 |
|
| C41 | Transfer of patent application or patent right or utility model | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20031225 Address after: Connecticut, USA Patentee after: Praxair Technology Inc. Address before: Illinois, USA Patentee before: UOP LLC |
|
| CX01 | Expiry of patent term |
Granted publication date: 20030716 |
|
| CX01 | Expiry of patent term |