KR20080090285A - 배선 기판 및 그 제조 방법 - Google Patents
배선 기판 및 그 제조 방법 Download PDFInfo
- Publication number
- KR20080090285A KR20080090285A KR1020080028198A KR20080028198A KR20080090285A KR 20080090285 A KR20080090285 A KR 20080090285A KR 1020080028198 A KR1020080028198 A KR 1020080028198A KR 20080028198 A KR20080028198 A KR 20080028198A KR 20080090285 A KR20080090285 A KR 20080090285A
- Authority
- KR
- South Korea
- Prior art keywords
- layer
- nickel
- copper
- wiring
- seed layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 20
- 239000010949 copper Substances 0.000 claims abstract description 79
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims abstract description 77
- 229910052802 copper Inorganic materials 0.000 claims abstract description 77
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims abstract description 59
- 229920005989 resin Polymers 0.000 claims abstract description 55
- 239000011347 resin Substances 0.000 claims abstract description 55
- YOCUPQPZWBBYIX-UHFFFAOYSA-N copper nickel Chemical compound [Ni].[Cu] YOCUPQPZWBBYIX-UHFFFAOYSA-N 0.000 claims abstract description 46
- 229910000881 Cu alloy Inorganic materials 0.000 claims abstract description 45
- 238000005530 etching Methods 0.000 claims abstract description 37
- 229910052759 nickel Inorganic materials 0.000 claims abstract description 29
- 238000000059 patterning Methods 0.000 claims abstract description 7
- 238000007747 plating Methods 0.000 claims description 41
- 239000002184 metal Substances 0.000 claims description 12
- 229910052751 metal Inorganic materials 0.000 claims description 12
- 238000009713 electroplating Methods 0.000 claims description 2
- 238000000034 method Methods 0.000 abstract description 27
- 239000010410 layer Substances 0.000 description 222
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 20
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 10
- 229910052786 argon Inorganic materials 0.000 description 10
- 238000004544 sputter deposition Methods 0.000 description 9
- 239000000243 solution Substances 0.000 description 8
- 239000007789 gas Substances 0.000 description 7
- 230000015572 biosynthetic process Effects 0.000 description 6
- 239000011229 interlayer Substances 0.000 description 6
- 239000000203 mixture Substances 0.000 description 6
- 229920002120 photoresistant polymer Polymers 0.000 description 6
- 239000004593 Epoxy Substances 0.000 description 5
- 239000011248 coating agent Substances 0.000 description 5
- 238000000576 coating method Methods 0.000 description 5
- 239000004642 Polyimide Substances 0.000 description 4
- 238000009413 insulation Methods 0.000 description 4
- 229920001721 polyimide Polymers 0.000 description 4
- 239000000853 adhesive Substances 0.000 description 3
- 230000001070 adhesive effect Effects 0.000 description 3
- 229910045601 alloy Inorganic materials 0.000 description 3
- 239000000956 alloy Substances 0.000 description 3
- 239000007864 aqueous solution Substances 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 229910018054 Ni-Cu Inorganic materials 0.000 description 2
- 229910018481 Ni—Cu Inorganic materials 0.000 description 2
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 2
- 229910001873 dinitrogen Inorganic materials 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- QAOWNCQODCNURD-UHFFFAOYSA-L Sulfate Chemical compound [O-]S([O-])(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-L 0.000 description 1
- 239000012790 adhesive layer Substances 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 230000015271 coagulation Effects 0.000 description 1
- 238000005345 coagulation Methods 0.000 description 1
- 239000011889 copper foil Substances 0.000 description 1
- -1 copper nitride Chemical class 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 238000007719 peel strength test Methods 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 238000005546 reactive sputtering Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910000029 sodium carbonate Inorganic materials 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052720 vanadium Inorganic materials 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/09—Use of materials for the conductive, e.g. metallic pattern
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/02—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
- H05K3/06—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed chemically or electrolytically, e.g. by photo-etch process
- H05K3/061—Etching masks
- H05K3/064—Photoresists
Landscapes
- Manufacturing Of Printed Wiring (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Parts Printed On Printed Circuit Boards (AREA)
- Manufacturing Of Printed Circuit Boards (AREA)
- Manufacturing & Machinery (AREA)
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JPJP-P-2007-00096527 | 2007-04-02 | ||
| JP2007096527 | 2007-04-02 | ||
| JP2008026597A JP2008277749A (ja) | 2007-04-02 | 2008-02-06 | 配線基板およびその製造方法 |
| JPJP-P-2008-00026597 | 2008-02-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| KR20080090285A true KR20080090285A (ko) | 2008-10-08 |
Family
ID=40014827
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020080028198A Withdrawn KR20080090285A (ko) | 2007-04-02 | 2008-03-27 | 배선 기판 및 그 제조 방법 |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP2008277749A (enExample) |
| KR (1) | KR20080090285A (enExample) |
| CN (1) | CN101282620A (enExample) |
| TW (1) | TW200841793A (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2019054781A1 (ko) * | 2017-09-18 | 2019-03-21 | 주식회사 아모그린텍 | 박막 회로 기판 및 이의 제조 방법 |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2010147059A1 (ja) * | 2009-06-18 | 2010-12-23 | Jx日鉱日石金属株式会社 | 電子回路及びその形成方法並びに電子回路形成用銅張積層板 |
| KR101194461B1 (ko) | 2011-09-22 | 2012-10-24 | 삼성전기주식회사 | 인쇄회로기판 및 그 제조방법 |
| JP2013084987A (ja) * | 2013-01-10 | 2013-05-09 | Denso Corp | 配線基板の製造方法 |
| KR20160080526A (ko) * | 2014-12-29 | 2016-07-08 | 삼성전기주식회사 | 인쇄회로기판 및 그 제조방법 |
| KR20180133153A (ko) * | 2017-06-05 | 2018-12-13 | 삼성전기주식회사 | 코일 부품 및 그 제조방법 |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2879746B2 (ja) * | 1989-11-07 | 1999-04-05 | カシオ計算機株式会社 | 半導体パネル |
| JPH03155134A (ja) * | 1989-11-13 | 1991-07-03 | Seiko Epson Corp | 集積回路装置の配線電極 |
| JP2004243701A (ja) * | 2003-02-14 | 2004-09-02 | Toyo Kohan Co Ltd | 合金層積層体および合金層積層体を用いた部品 |
| JP2005129899A (ja) * | 2003-08-28 | 2005-05-19 | Kyocera Corp | 配線基板および半導体装置 |
| JP4817733B2 (ja) * | 2005-07-06 | 2011-11-16 | 富士通株式会社 | 金属表面処理液、積層体および積層体の製造方法 |
-
2008
- 2008-02-06 JP JP2008026597A patent/JP2008277749A/ja active Pending
- 2008-03-27 KR KR1020080028198A patent/KR20080090285A/ko not_active Withdrawn
- 2008-03-31 TW TW97111694A patent/TW200841793A/zh unknown
- 2008-04-02 CN CNA2008100906415A patent/CN101282620A/zh active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2019054781A1 (ko) * | 2017-09-18 | 2019-03-21 | 주식회사 아모그린텍 | 박막 회로 기판 및 이의 제조 방법 |
| CN111096086A (zh) * | 2017-09-18 | 2020-05-01 | 阿莫绿色技术有限公司 | 薄膜电路基板及其制造方法 |
| US11543748B2 (en) | 2017-09-18 | 2023-01-03 | Amogreentech Co., Ltd. | Thin film circuit substrate and manufacturing method thereof |
| CN111096086B (zh) * | 2017-09-18 | 2023-05-02 | 阿莫绿色技术有限公司 | 薄膜电路基板及其制造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| CN101282620A (zh) | 2008-10-08 |
| JP2008277749A (ja) | 2008-11-13 |
| TW200841793A (en) | 2008-10-16 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PA0109 | Patent application |
Patent event code: PA01091R01D Comment text: Patent Application Patent event date: 20080327 |
|
| PG1501 | Laying open of application | ||
| PC1203 | Withdrawal of no request for examination | ||
| WITN | Application deemed withdrawn, e.g. because no request for examination was filed or no examination fee was paid |