CN101282620A - 布线板和制造布线板的方法 - Google Patents
布线板和制造布线板的方法 Download PDFInfo
- Publication number
- CN101282620A CN101282620A CNA2008100906415A CN200810090641A CN101282620A CN 101282620 A CN101282620 A CN 101282620A CN A2008100906415 A CNA2008100906415 A CN A2008100906415A CN 200810090641 A CN200810090641 A CN 200810090641A CN 101282620 A CN101282620 A CN 101282620A
- Authority
- CN
- China
- Prior art keywords
- layer
- wiring
- seed layer
- resist pattern
- wiring layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 20
- 229920005989 resin Polymers 0.000 claims abstract description 55
- 239000011347 resin Substances 0.000 claims abstract description 55
- 229910018054 Ni-Cu Inorganic materials 0.000 claims abstract description 46
- 229910018481 Ni—Cu Inorganic materials 0.000 claims abstract description 46
- 229910045601 alloy Inorganic materials 0.000 claims abstract description 44
- 239000000956 alloy Substances 0.000 claims abstract description 44
- 238000005530 etching Methods 0.000 claims abstract description 13
- 229910052759 nickel Inorganic materials 0.000 claims abstract description 7
- 238000000034 method Methods 0.000 claims description 31
- 230000004888 barrier function Effects 0.000 claims description 15
- 239000002184 metal Substances 0.000 claims description 10
- 229910052751 metal Inorganic materials 0.000 claims description 10
- 238000007747 plating Methods 0.000 claims description 9
- 230000015572 biosynthetic process Effects 0.000 claims description 6
- 238000005275 alloying Methods 0.000 claims 2
- 229910052802 copper Inorganic materials 0.000 abstract description 3
- 238000000059 patterning Methods 0.000 abstract 2
- 239000010410 layer Substances 0.000 description 70
- 239000010949 copper Substances 0.000 description 46
- 239000012790 adhesive layer Substances 0.000 description 31
- 238000005868 electrolysis reaction Methods 0.000 description 24
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 20
- 239000011248 coating agent Substances 0.000 description 18
- 238000000576 coating method Methods 0.000 description 18
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 12
- 229910052786 argon Inorganic materials 0.000 description 10
- 238000005516 engineering process Methods 0.000 description 10
- 239000000853 adhesive Substances 0.000 description 9
- 230000001070 adhesive effect Effects 0.000 description 9
- 239000000203 mixture Substances 0.000 description 9
- 238000009413 insulation Methods 0.000 description 8
- 230000008569 process Effects 0.000 description 8
- 239000003822 epoxy resin Substances 0.000 description 6
- 229920000647 polyepoxide Polymers 0.000 description 6
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 5
- 238000009713 electroplating Methods 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 229920002120 photoresistant polymer Polymers 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 239000004642 Polyimide Substances 0.000 description 4
- 238000004140 cleaning Methods 0.000 description 4
- 238000011161 development Methods 0.000 description 4
- 229920001721 polyimide Polymers 0.000 description 4
- 238000002360 preparation method Methods 0.000 description 4
- 238000012360 testing method Methods 0.000 description 3
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011889 copper foil Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 238000007719 peel strength test Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910000029 sodium carbonate Inorganic materials 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 229910052720 vanadium Inorganic materials 0.000 description 1
Images
Landscapes
- Manufacturing Of Printed Wiring (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing Of Printed Circuit Boards (AREA)
- Parts Printed On Printed Circuit Boards (AREA)
- Manufacturing & Machinery (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007096527 | 2007-04-02 | ||
| JP2007-096527 | 2007-04-02 | ||
| JP2008-026597 | 2008-02-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN101282620A true CN101282620A (zh) | 2008-10-08 |
Family
ID=40014827
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNA2008100906415A Pending CN101282620A (zh) | 2007-04-02 | 2008-04-02 | 布线板和制造布线板的方法 |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP2008277749A (enExample) |
| KR (1) | KR20080090285A (enExample) |
| CN (1) | CN101282620A (enExample) |
| TW (1) | TW200841793A (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105744740A (zh) * | 2014-12-29 | 2016-07-06 | 三星电机株式会社 | 印刷电路板及其制造方法 |
| CN108987039A (zh) * | 2017-06-05 | 2018-12-11 | 三星电机株式会社 | 线圈组件及其制造方法 |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2010147059A1 (ja) * | 2009-06-18 | 2010-12-23 | Jx日鉱日石金属株式会社 | 電子回路及びその形成方法並びに電子回路形成用銅張積層板 |
| KR101194461B1 (ko) | 2011-09-22 | 2012-10-24 | 삼성전기주식회사 | 인쇄회로기판 및 그 제조방법 |
| JP2013084987A (ja) * | 2013-01-10 | 2013-05-09 | Denso Corp | 配線基板の製造方法 |
| KR20190031838A (ko) | 2017-09-18 | 2019-03-27 | 주식회사 아모그린텍 | 박막 회로 기판 및 이의 제조 방법 |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2879746B2 (ja) * | 1989-11-07 | 1999-04-05 | カシオ計算機株式会社 | 半導体パネル |
| JPH03155134A (ja) * | 1989-11-13 | 1991-07-03 | Seiko Epson Corp | 集積回路装置の配線電極 |
| JP2004243701A (ja) * | 2003-02-14 | 2004-09-02 | Toyo Kohan Co Ltd | 合金層積層体および合金層積層体を用いた部品 |
| JP2005129899A (ja) * | 2003-08-28 | 2005-05-19 | Kyocera Corp | 配線基板および半導体装置 |
| JP4817733B2 (ja) * | 2005-07-06 | 2011-11-16 | 富士通株式会社 | 金属表面処理液、積層体および積層体の製造方法 |
-
2008
- 2008-02-06 JP JP2008026597A patent/JP2008277749A/ja active Pending
- 2008-03-27 KR KR1020080028198A patent/KR20080090285A/ko not_active Withdrawn
- 2008-03-31 TW TW97111694A patent/TW200841793A/zh unknown
- 2008-04-02 CN CNA2008100906415A patent/CN101282620A/zh active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105744740A (zh) * | 2014-12-29 | 2016-07-06 | 三星电机株式会社 | 印刷电路板及其制造方法 |
| CN108987039A (zh) * | 2017-06-05 | 2018-12-11 | 三星电机株式会社 | 线圈组件及其制造方法 |
| CN108987039B (zh) * | 2017-06-05 | 2021-10-29 | 三星电机株式会社 | 线圈组件及其制造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| KR20080090285A (ko) | 2008-10-08 |
| JP2008277749A (ja) | 2008-11-13 |
| TW200841793A (en) | 2008-10-16 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Open date: 20081008 |