KR20070063903A - Test handler - Google Patents

Abstract

A test handler is provided to simplify a gripping block and to make a power source free from the environment where the gripping block is positioned, by installing the power source separately from the gripping block or making the power source independent of the movement of the gripping block. A test handler(40) is composed of a loading device loading a device loaded on a user tray, to a test tray(600); a soak chamber(400A) preheating/precooling the device loaded in the test tray; a test chamber(400B) testing the device loaded in the test tray supplied from the soak chamber; an unloading device unloading the device completely tested in the test chamber, to the user tray; and a tray transfer device(500) installed in at least a section of a test tray transfer path circulating through the loading device, the soak chamber, the test chamber, and the unloading device, to transfer the test tray. The tray transfer device comprises a gripping block(510) which is movable while gripping or releasing the test tray; a first power source installed independent of the movement of the gripping block, to supply power for gripping or releasing the gripping block; a first power transmitting unit(530) transmitting power supplied from the first power source to the gripping block; a second power source installed independent of the movement of the gripping block, to feed power for moving the gripping block; and a second power transmitting unit(550) transmitting power supplied from the second power source to the gripping block.

Description

Test handler {TEST HANDLER}

1 is a schematic diagram of a test handler according to the prior art.

2 and 3 are schematic structural views in plan view of the arrangement of the test handler of FIG.

Figure 4 is a schematic side view of the soak chamber and the internal structure of the test chamber in the test handler according to an embodiment of the present invention.

5 is an enlarged view illustrating an enlarged portion A of FIG. 4.

FIG. 6 is a schematic view taken along line IB of FIG. 4.

FIG. 7 is a perspective view schematically illustrating an essential part of the test handler of FIG. 4.

8A to 8F are operating state diagrams for explaining an operating state of the test handler of FIG.

* Explanation of symbols for main parts of drawings *

40: test handler 500: tray feeder

510: holding block 511: holding member

512: moving member 520: pneumatic cylinder

530: first power transmission device 531: rotating bar

534: forward and backward bar 540: motor

The present invention relates to a test handler for inspecting a produced semiconductor device, and more particularly, to a tray transport apparatus for transporting a test tray.

In general, a test handler tests a semiconductor device (hereinafter referred to as a device) manufactured through a predetermined manufacturing process, and classifies devices according to test results and loads them into a user tray. It is.

FIG. 1 is a schematic diagram according to the prior art for such a test handler, which will be described schematically with reference to FIG. 1.

As shown in FIG. 1, the conventional test handler includes a loading device 120, a vertical posture converting device 130, a soak chamber 200, a test chamber 100, a desock chamber 300, and a horizontal posture converting device. 230, the unloading device 260 is provided.

The loading device 110 loads (transfers and loads) a device loaded in a user tray having a reference numeral 110 into a test tray in a horizontal state.

The vertical posture converting apparatus 130 is positioned above the soak chamber 200 and converts the horizontal test tray into a vertical state before supplying the test tray to the soak chamber 200.

The soak chamber 200 sequentially receives the test tray converted into a vertical position by the posture converting apparatus 130 and converts the test tray sequentially, and has a temperature environment for preheating / precooling the device loaded in the test tray. It is formed. The test trays entered into the soak chamber 200 are sequentially arranged while translating in a direction close to the test chamber 100 while maintaining the vertical state. During this time, the devices contained in the test tray are sufficiently Preheated / Precooled.

The test chamber 100 is provided for testing a device loaded in the test trays 180 and 190 supplied from the soak chamber 200. To this end, the test chamber 100 has a temperature environment for testing the device.

The soak chamber 200 and the test chamber 100 are in communication with each other.

The desock chamber 300 (also called a recovery chamber) is provided to reduce the device at a high temperature or a cooled state to room temperature.

The horizontal posture converting apparatus 230 is positioned in the upward direction of the desock chamber 300 and converts the test tray in a vertical state transferred from the desock chamber 300 into a horizontal state.

The unloading device 260 classifies the tested devices by class and unloads (transfers and loads) the user trays 310 again.

In other words, the test handler sequentially moves the test tray loaded with the device from the user tray to the test tray and the process of unloading the device from the test tray to the user tray.

2 and 3 are schematic views of the test handler of FIG. 1 in plan view, in which FIG. 2 shows the conveying direction (a) of the test tray and the conveying direction (b) of the device in FIG. The tray transfer device 140 for transferring the test tray waiting in the test standby unit 100a in the test chamber 100 to the test unit 100b is schematically illustrated. As shown in FIG. 3, the test chamber 100 includes a test standby unit 100a, a test unit 100b, and an output standby unit 100c. The test standby unit 100a waits before the test tray moved from the soak chamber 200 is transferred to the test unit 100b, and the test unit 100b transfers the test tray from the test standby unit 100a to the test tray 100a. The loaded device is tested, and the output standby unit 100c waits before the test tray, which has been tested in the test unit 100b, is output to the desock chamber 300. In the test chamber 100 as described above, the test tray is firstly transferred from the test standby unit 100a to the test unit 100b, and secondly, the test tray 100b is transferred from the test unit 100b to the output standby unit 100c. At this time, the first conveyance process is made by the tray conveying device of 140, shown in Figure 3, the second conveying process is not shown in Figure 3, but the tray conveyance having the same structure as the tray conveying device of 140 It can be made by the device.

As described above, the test tray is circulated with the rotational direction as shown in the loop a of FIG. 2 by continuous transfer between the chambers and the chambers as well as in the test chambers. A tray feeder is required.

Korean Patent Publication No. 10-2004-0092786 (Invention: Test Tray Transfer Device for Semiconductor Device Test Handler) for a tray transfer device suitable for transporting a test tray in a test chamber among a plurality of tray transfer devices. Hereinafter referred to as 'quotation technology'.

Referring to the cited technology, a movable block linearly moved by a lead screw and a servomotor, and a holder device for releasably fixing one corner portion of the test tray to an upper side of the movable block, the holder device includes a rotating shaft and a And rotating means for rotating the rotating shaft. Here it can be seen that the rotation means is a power source such as a motor. As can be seen in the cited art, in order to convey the test tray, an operation and a conveying operation for holding or releasing the test tray are required. However, since each operation is generally made by a different mechanical mechanism, a configuration for a transfer operation, such as configuring a separate power source, and a configuration for an operation required for holding or releasing a grip are necessary.

However, as in the cited art, when a holder device configured for gripping or releasing operation is coupled to a moving block configured for a conveying operation, the following problems may occur.

First, in order to arrange the motor or solenoid device in the chamber, the power line must be configured together. Moreover, the power line must be secured longer than the length of the holder device holding the test tray. The structure is complicated, and the layout complexity to avoid the interference between the power line and other devices also occurs.

Second, since the holder device is integrally coupled to the moving block, the holder device is moved together with the moving block, so that the device design must be made so that the space required by the holder device and the space required by other devices do not interfere with each other. That also brings with it the complexity of the design.

Third, since the holder device moves together with the moving block, the mechanical configuration of the holder device becomes weak due to the impact of the numerous repeated movements, thereby shortening the life of the product.

Fourth, in general, the soak chamber or the test chamber maintains a high temperature state of more than 135 degrees or a low temperature of minus 40 degrees in order to severely set the test environment conditions, and is applied to a holder device for holding or releasing a grip. Motors or solenoid devices that can be assumed to be power sources may cause malfunctions or inferior durability due to such harsh conditions.If expensive parts are required to be able to withstand the harsh conditions, As a result, production costs will rise.

The present invention has been made to solve the above problems has the following object.

First, it provides a technology in which the power source required to hold the test tray can be separated from the configuration for moving the test tray.

Second, it provides a technology that allows the power source required to grip the test tray to be independent of the movement of the test tray.

Third, the present invention further provides a technology in which the power source for holding the test tray is not affected by the environment of the chamber.

Test handler according to the present invention for achieving the above object, the loading device for loading the device loaded in the user tray into the test tray; A soak chamber provided for preheating / preheating a device loaded in the test tray which has been loaded by the loading apparatus; a test chamber provided for testing a device loaded in a test tray supplied from the soak chamber; An unloading device for unloading a device in which the test is completed in the test chamber to a user tray; And a tray conveying apparatus installed in at least a part of a test tray conveying path circulating the loading apparatus, the soak chamber, the test chamber, and the unloading apparatus to convey the test tray. The tray transport apparatus includes a gripping block movable in a state of holding or releasing the test tray; A first power source for supplying power required for gripping and releasing the gripping block, the first power source being installed to be independent from the movement of the gripping block; A first power transmission device for transferring power supplied from the first power source to the gripping block; A second power source for supplying power required for movement of the gripping block and installed to be independent from the movement of the gripping block; And a second power transmission device for transmitting power supplied from the second power source to the gripping block. Characterized in having a.

The first power source or the second power source is another feature that is fixed to the outside of the test chamber.

The gripping block may include: a gripping member configured to perform an operation for gripping or releasing a test tray by the power received from the first power transmission device; And a moving member moving by the power received from the second power transmission device. To include, the holding member is characterized in that it is coupled to the moving member to move together in accordance with the movement of the moving member.

The gripping member moves together with the movement of the movable member, and is coupled to the movable member to enable relative access and separation of the movable member, and the test tray according to the relative approach and separation on one side of the gripping member. And a gripping pin inserted or demounted with respect to the first power transmission device, wherein the first power transmission device enables relative access and separation of the gripping member through power supplied by the first power source. do.

The first power transmission device is formed to be elongated in the moving direction of the moving member (hereinafter referred to as "lateral direction") to be straight in the relative approach and half direction (hereinafter referred to as "the longitudinal direction") of the holding member. And a forward and backward progress bar capable of reciprocating, wherein the holding member has a sliding protrusion having a degree of freedom in the transverse direction with respect to the forward and backward progress bar, and a degree of freedom in the longitudinal direction is limited, thereby linearly reciprocating in the longitudinal direction together with the forward and backward progress bar. More specifically, it can move in the transverse direction with the moving member while moving.

The first power source is another feature that is a pneumatic cylinder.

The second power source is a rotary motor, the second power transmission device is characterized in that it further comprises a belt and a pulley.

Hereinafter, one preferred embodiment according to the present invention will be described in detail with reference to the accompanying drawings.

Figure 4 is a schematic view showing the internal structure of the soak chamber 400A and the test chamber 400B of the test handler 40 in accordance with an embodiment of the present invention, Figure 5 is an enlarged view of an enlarged portion A of FIG. 6 is a schematic view of the BB line of FIG. 4 and viewed in the I direction, and FIG. 7 is a perspective view schematically showing the main portion of the test handler 40 of FIG.

4 to 7, the test handler 40 according to the present embodiment includes a soak chamber 400A, a test chamber 400B, a tray feeder 500, and the like.

The soak chamber 400A is supplied from the loading unit to the test chamber 400B disposed at the rear while sequentially moving the test tray 600 loaded downward, and is loaded in the test tray 600 during this process. Preheat or precool the device.

The test chamber 400B is provided at the rear of the soak chamber 400A, and tests the device loaded in the test tray 600 supplied from the soak chamber 400A, and outputs the test chamber 400B to a desock chamber (not shown). . The test chamber 400B includes a test standby part 400b-1 waiting for the test tray 600 supplied from the soak chamber 400A to be tested, and a test part in which the test is performed, as shown in FIG. 400B-2, the test tray 600, in which the device for which the test is completed, is loaded, is divided into an output standby part 400b-3 that waits before being output to a desock chamber (not shown).

The tray transfer apparatus 500 transfers the test tray 600 in the output standby unit 400b-3 to the test unit 400B-2. Of course, the tray transfer apparatus for transferring the test tray 600 loaded with the device completed the test in the test unit 400B-2 to the output standby unit 400b-3 is further configured, the tray transfer apparatus is further configured Has the same configuration that is mutually symmetrical with the tray feeder indicated by reference numeral 500, and thus description thereof is omitted.

On the other hand, the tray transfer device 500, the gripping block 510, the first power source, the first power transmission device 530, the second power source, the second power transmission device 550 and the guiding device 560, etc. It is configured to include. Each of these configurations and detailed configurations will be described in order as follows.

The gripping block 510 is configured to be movable in a state in which the test tray 600 is held or released, and for this purpose, the test tray 600 is driven by the power transmitted from the first power transmission device 530. It has a gripping member 511 to perform the operation for gripping or gripping and a moving member 512 to move by the power received from the second power transmission device 550.

The holding member 511 is coupled to the moving member 512 to move together with the movement of the moving member 512, the test tray by sliding forward and backward independently of the moving member 512 horizontally moving left and right Coupled to gripping or ungripping 600. Accordingly, the gripping member 511 includes a gripping pin 511a which is inserted into or removed from the hole formed in the test tray 600 by the forward and backward movement of the gripping member 511 and the rail groove 534a of the forward and backward bar 534 which will be described later. Sliding protrusion (511b) is inserted to be slidable) and the engaging projection (511c) for coupling to the front and rear sliding with the movable member 512. The gripping member 511 may be moved more accurately by guiding by a guiding member.

The movable member 512 has a coupling groove 512b for coupling with the holding member 511 and a through hole 512a through which a spline shaft to be described later passes, and also coupled to a rotating belt 553 to be described later. It is being guided to the spline shaft by the rotation of the rotary belt 553 is moved horizontally left and right.

The first power source is for supplying power to provide the front and rear vibration force to the holding member 511. In the present embodiment, the first power source includes a pneumatic cylinder 520, and is disposed in front of the test chamber 400B, It is irrelevant to the environmental conditions of 400B). Of course, the pneumatic cylinder 520 may be configured to be replaced by a variety of power sources.

The first power transmission device 530 transmits the power supplied from the first power source to the holding member 511 as a forward and backward force, the rotary bar 531, the first link member 532, the second link member. 533 and forward and backward bars 534 and the like.

The rotation bar 531 is elongated in the left and right directions, and is provided to be capable of forward and reverse rotation, and includes a first protrusion 531a and a second link member 533 inserted into a groove of the first link member 532. The second projection 531b to be inserted into the groove of the cavities is formed in a direction perpendicular to the horizontal direction.

When the first link member 532 is moved forward and backward by the forward and backward movement of the piston rod 520a of the pneumatic cylinder 520, the first groove 531a of the first link member 532 is accommodated. The rotating bar 531 is rotated by pushing or pulling the first protrusion 531a by forward and backward. The first link member 532 is guided by the guiding member 601.

The second link member 533 is advanced back and forth by the rotation of the second projection (531b) that rotates in accordance with the rotation of the rotary bar 531, is coupled to the front and rear progress bar 534.

That is, the first link member 532, the second link member 533, the first protrusions 531a, and the second protrusions 531b change the direction of the force. The first projection 531a converts the forward and backward force into rotational force, and the second link member 533 and the second projection 531b convert the rotational force into forward and backward vibration.

Meanwhile, the first protrusion 531a and the second protrusion 531b may protrude in an arbitrary direction, and the second link member 532 and the second link member 533 may protrude in an arbitrary direction. Once located, it will be enough.

The front and rear progress bars 534 are elongated in the horizontal direction, and are coupled to the second link member 533 to be advanced back and forth by the forward and backward movement of the second link member 533. In addition, the rail groove 534a into which the sliding protrusion 511b can be inserted is formed long in the horizontal direction.

Therefore, when the pneumatic cylinder is driven and the piston rod 520a moves forward and backward, the rotation bar 531 rotates forward and backward, and the forward and backward progress bar 534 moves forward and backward due to the forward and reverse rotation of the rotation bar 531. As a result, the holding member 511 is ultimately moved forward and backward to hold or release the test tray 600.

The second power source is provided to supply power for horizontal movement to the moving member 512, and is composed of a motor 540 capable of forward and reverse rotation, and is disposed above the test chamber 400B so that the test chamber ( 400B) in an environment-independent position.

The second power transmission device 550 includes a power transmission shaft 551 coupled to the rotation shaft 540a of the motor 540, a drive pulley 552a rotated by the power transmission shaft 551, and The driving pulley 552a is configured to include a driven pulley 552b provided to correspond to the horizontal direction, and a rotating belt 553 rotating the driving pulley 552a and the driven pulley 552b as the rotation end points. One point of the rotating belt 553 is coupled to the moving member 512, so that when the rotating belt 553 rotates according to the forward and reverse rotation of the motor 540, the moving member 512 moves horizontally.

The guiding device 560 is composed of two upper and lower spline shafts configured to extend in the horizontal direction, each spline shaft is configured to pass through the through hole 512a of the moving member 512, the motor ( As the moving member 512 moves as the 540 rotates, the moving member 512 is guided by the spline shaft.

Hereinafter, the operation of the tray feeder 500 operated by the test handler 40 will be described with reference to FIGS. 8A to 8E.

FIG. 8A shows a state immediately before the holding of the test tray 600 currently waiting in the test standby part 400b-1.

When the pneumatic cylinder 520 operates in the state of FIG. 8A, the piston rod 520a moves forward, and in conjunction with this, the first link member 532 moves forward, the rotation bar 531 rotates, and the second link member ( 533, forward and backward of the front and rear bars 534 and advance of the holding member 511, so that the holding pin (511a) of the holding member 511 as shown in Figure 8b is the hole of the test tray 600 ( The gripping member 511 grips the test tray 600 by being inserted into the 600a.

Subsequently, as the motor 540 is driven in the state of FIG. 8B and the rotation shaft 540a is rotated forward, the driving pulley 552a and the driven pulley 552b rotate in the direction of the arrow as shown in FIG. 8C. As the rotating belt 553 rotates in the direction of the arrow, the movable member 512 coupled to the rotating belt 553 is moved to the state shown in FIG. Is transferred to the test unit 400B-2.

Thereafter, after the holding member 511 is moved backward by the reverse operation of FIGS. 8A and 8B, the holding member 511 is moved back to the state of FIG. 8E. The holding block 510 is again held by the test standby unit 400b by the reverse rotation of the motor 540. FIG. Will be moved to -1).

As described above, the detailed description of the present invention has been made by the embodiments with reference to the accompanying drawings. However, since the above-described embodiments have only been described with reference to preferred examples of the present invention, the present invention is limited to the above embodiments. It should not be understood that the scope of the present invention is to be understood by the claims and equivalent concepts described below. For example, the first protrusion 531a and the second protrusion 531b of the rotation bar 531 shown as having different angles on the side view may be formed at the same angle according to the needs of the user. In addition, a bottom surface of the second link member 533 capable of linear reciprocating motion may be provided with an LM guide (not shown) fixed at a predetermined position in the test handler to guide the linear reciprocating motion, in which case the second link member The linear reciprocation of 533 will be made more stable.

According to the present invention as described in detail above has the following effects.

First, since the pneumatic cylinder, which is the first power source, is disposed outside the test chamber, there is no reason for the pneumatic line for operating the pneumatic cylinder to be configured inside the chamber, so the structure inside the chamber is neat, and the pneumatic line and the other inside the chamber are clean. Interference with the device is absolutely prevented.

Second, since the pneumatic cylinder and the first power transmission device are separated and installed irrespective of the moving member, the configuration of the holding member is simplified, so that the space inside the chamber is easily secured and the freedom of design is increased.

Third, since the pneumatic cylinder is not related to the movement of the moving member, the moving shock of the moving member does not affect the pneumatic cylinder at all, and thus there is no problem in the operation or life of the pneumatic cylinder.

Fourth, since the pneumatic cylinder and, moreover, the motor is provided outside the test chamber, it is irrelevant to the test chamber's environmental conditions and can maintain abnormal operation or durability regardless of the test chamber's environment. This can be applied to reduce the production cost.

Claims (8)

A loading device for loading a device loaded in the user tray into a test tray; A soak chamber provided to preheat / precool the device loaded in the test tray which has been loaded by the loading apparatus; A test chamber provided for testing a device loaded in a test tray supplied from the soak chamber; An unloading device for unloading a device in which the test is completed in the test chamber to a user tray; And A tray transfer device installed in at least a portion of a test tray transfer path circulating the loading device, the soak chamber, the test chamber, and the unloading device to transfer the test tray; Including, The tray transport apparatus, A holding block movable in a state of holding or releasing the test tray; A first power source for supplying power required for gripping and releasing the gripping block, the first power source being installed to be independent from the movement of the gripping block; A first power transmission device for transferring power supplied from the first power source to the gripping block; A second power source for supplying power required for movement of the gripping block and installed to be independent from the movement of the gripping block; And A second power transmission device for transmitting power supplied from the second power source to the gripping block; A test handler comprising: a. The method of claim 1, The first power source is a test handler, characterized in that fixed to the outside of the test chamber. The method of claim 1, The second power source is a test handler, characterized in that fixed to the outside of the test chamber. The method of claim 1, The gripping block is, A holding member for performing an operation for holding or releasing a test tray by the power received from the first power transmission device; And A moving member moving by the power received from the second power transmission device; Including, And the gripping member is coupled to the moving member to move together with the movement of the moving member. The method of claim 4, wherein The gripping member moves together with the movement of the movable member, and is coupled to the movable member to allow relative access and separation to the movable member. One side of the gripping member is formed with a gripping pin inserted or deviated with respect to the test tray in accordance with the relative approach and separation, And the first power transmission device enables relative access and separation of the gripping member through power supplied by the first power source. The method of claim 5,  The first power transmission device is formed to be elongated in the moving direction of the moving member (hereinafter referred to as "lateral direction") to be straight in the relative approach and half direction (hereinafter referred to as "the longitudinal direction") of the holding member. It includes forward and backward bars that can reciprocate, The gripping member has a sliding protrusion having a degree of freedom in the transverse direction with respect to the forward and backward bars, but limited in the degree of freedom in the longitudinal direction, thereby moving horizontally with the moving member while linearly reciprocating in the longitudinal direction together with the forward and backward bars. Test handler, characterized in that. The method of claim 6, And the first power source is a pneumatic cylinder. The method of claim 1, The second power source is a rotary motor, The second power transmission device is a test handler, characterized in that it comprises a belt and a pulley.

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