KR20060105607A - 집적 회로 장치 및 뒤틀림 제어 방법 - Google Patents

집적 회로 장치 및 뒤틀림 제어 방법 Download PDF

Info

Publication number
KR20060105607A
KR20060105607A KR1020060029103A KR20060029103A KR20060105607A KR 20060105607 A KR20060105607 A KR 20060105607A KR 1020060029103 A KR1020060029103 A KR 1020060029103A KR 20060029103 A KR20060029103 A KR 20060029103A KR 20060105607 A KR20060105607 A KR 20060105607A
Authority
KR
South Korea
Prior art keywords
base
die
layer
thermal expansion
offset
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
KR1020060029103A
Other languages
English (en)
Korean (ko)
Inventor
존 더블유 오센바크
토마스 에이치 실링
웨이동 시에
Original Assignee
에이저 시스템즈 인크
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 에이저 시스템즈 인크 filed Critical 에이저 시스템즈 인크
Publication of KR20060105607A publication Critical patent/KR20060105607A/ko
Ceased legal-status Critical Current

Links

Images

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W40/00Arrangements for thermal protection or thermal control
    • H10W40/20Arrangements for cooling
    • H10W40/25Arrangements for cooling characterised by their materials
    • H10W40/255Arrangements for cooling characterised by their materials having a laminate or multilayered structure, e.g. direct bond copper [DBC] ceramic substrates
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/30Die-attach connectors

Landscapes

  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
KR1020060029103A 2005-03-31 2006-03-30 집적 회로 장치 및 뒤틀림 제어 방법 Ceased KR20060105607A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/095,929 US7408246B2 (en) 2005-03-31 2005-03-31 Controlling warping in integrated circuit devices
US11/095,929 2005-03-31

Related Child Applications (1)

Application Number Title Priority Date Filing Date
KR1020130092155A Division KR20130100074A (ko) 2005-03-31 2013-08-02 집적 회로 장치 및 뒤틀림 제어 방법

Publications (1)

Publication Number Publication Date
KR20060105607A true KR20060105607A (ko) 2006-10-11

Family

ID=37069337

Family Applications (2)

Application Number Title Priority Date Filing Date
KR1020060029103A Ceased KR20060105607A (ko) 2005-03-31 2006-03-30 집적 회로 장치 및 뒤틀림 제어 방법
KR1020130092155A Ceased KR20130100074A (ko) 2005-03-31 2013-08-02 집적 회로 장치 및 뒤틀림 제어 방법

Family Applications After (1)

Application Number Title Priority Date Filing Date
KR1020130092155A Ceased KR20130100074A (ko) 2005-03-31 2013-08-02 집적 회로 장치 및 뒤틀림 제어 방법

Country Status (3)

Country Link
US (4) US7408246B2 (https=)
JP (1) JP5657188B2 (https=)
KR (2) KR20060105607A (https=)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1930943A4 (en) * 2005-09-28 2009-11-11 Ngk Insulators Ltd COOLING BODY MODULE AND PROCESS FOR ITS MANUFACTURE
JP5466578B2 (ja) * 2010-05-27 2014-04-09 株式会社神戸製鋼所 ダイヤモンド・アルミニウム接合体及びその製造方法
US20130308274A1 (en) * 2012-05-21 2013-11-21 Triquint Semiconductor, Inc. Thermal spreader having graduated thermal expansion parameters
US9028628B2 (en) 2013-03-14 2015-05-12 International Business Machines Corporation Wafer-to-wafer oxide fusion bonding
US9058974B2 (en) 2013-06-03 2015-06-16 International Business Machines Corporation Distorting donor wafer to corresponding distortion of host wafer
KR20170054958A (ko) * 2015-11-10 2017-05-18 주식회사 기가레인 고주파 전력 증폭기
WO2024101163A1 (ja) * 2022-11-08 2024-05-16 日本碍子株式会社 電気化学セル

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5339742B2 (https=) 1971-11-08 1978-10-23
JPS63261863A (ja) * 1987-04-20 1988-10-28 Hitachi Cable Ltd 表面実装用基板
JPH08222658A (ja) * 1995-02-17 1996-08-30 Sumitomo Electric Ind Ltd 半導体素子用パッケージ及びその製造方法
JPH1079405A (ja) 1996-09-04 1998-03-24 Hitachi Ltd 半導体装置およびそれが実装された電子部品
JPH10163386A (ja) * 1996-12-03 1998-06-19 Toshiba Corp 半導体装置、半導体パッケージおよび実装回路装置
US6291899B1 (en) * 1999-02-16 2001-09-18 Micron Technology, Inc. Method and apparatus for reducing BGA warpage caused by encapsulation
US6696748B1 (en) * 2002-08-23 2004-02-24 Micron Technology, Inc. Stress balanced semiconductor packages, method of fabrication and modified mold segment
US7164200B2 (en) * 2004-02-27 2007-01-16 Agere Systems Inc. Techniques for reducing bowing in power transistor devices

Also Published As

Publication number Publication date
JP2006287227A (ja) 2006-10-19
US8133799B2 (en) 2012-03-13
US20080258275A1 (en) 2008-10-23
US7923347B2 (en) 2011-04-12
US7408246B2 (en) 2008-08-05
JP5657188B2 (ja) 2015-01-21
US20110250742A1 (en) 2011-10-13
US20060220194A1 (en) 2006-10-05
US20090311853A1 (en) 2009-12-17
US7598602B2 (en) 2009-10-06
KR20130100074A (ko) 2013-09-09

Similar Documents

Publication Publication Date Title
KR20130100074A (ko) 집적 회로 장치 및 뒤틀림 제어 방법
JP5588419B2 (ja) パッケージ
US6316826B1 (en) Semiconductor mounting package
KR20050061452A (ko) 서브 마운트 및 반도체 장치
WO2003094220A1 (en) Submount and semiconductor device
US7888782B2 (en) Apparatus and method configured to lower thermal stresses
JPWO2008105258A1 (ja) 気密封止用キャップ、電子部品収納用パッケージおよび電子部品収納用パッケージの製造方法
US20070029664A1 (en) Integrated circuit package and method of assembling the same
US8415801B2 (en) Semiconductor device having thermal endurance and method of manufacturing the same
CN106488663B (zh) 使用间距保持器将第一焊接件焊接在第二焊接件上的方法
CN104966676B (zh) 共晶键合方法
KR20110086148A (ko) 반도체칩을 위한 복합 기판
JPH11265976A (ja) パワー半導体モジュールおよびその製造方法
JPH08222658A (ja) 半導体素子用パッケージ及びその製造方法
JP2002299744A (ja) 半導体レーザアセンブリ
JP5127617B2 (ja) 半導体装置
US6803653B1 (en) Apparatus for suppressing packaged semiconductor chip curvature while minimizing thermal impedance and maximizing speed/reliability
JP2000068583A (ja) 半導体レーザ装置
WO2021075016A1 (ja) 半導体装置および半導体装置の製造方法
JPH03218031A (ja) 半導体集積回路装置およびそれに用いられるプリフォーム接合材
JPH1126335A (ja) 半導体装置
JP7359317B2 (ja) 半導体装置、半導体装置の製造方法
JPH11204704A (ja) 半導体装置
JPH11243168A (ja) ヒートシンク
WO2025027845A1 (ja) 半導体装置および半導体装置の製造方法

Legal Events

Date Code Title Description
PA0109 Patent application

St.27 status event code: A-0-1-A10-A12-nap-PA0109

PG1501 Laying open of application

St.27 status event code: A-1-1-Q10-Q12-nap-PG1501

R17-X000 Change to representative recorded

St.27 status event code: A-3-3-R10-R17-oth-X000

A201 Request for examination
P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

PA0201 Request for examination

St.27 status event code: A-1-2-D10-D11-exm-PA0201

E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

St.27 status event code: A-1-2-D10-D21-exm-PE0902

T11-X000 Administrative time limit extension requested

St.27 status event code: U-3-3-T10-T11-oth-X000

T11-X000 Administrative time limit extension requested

St.27 status event code: U-3-3-T10-T11-oth-X000

T11-X000 Administrative time limit extension requested

St.27 status event code: U-3-3-T10-T11-oth-X000

T11-X000 Administrative time limit extension requested

St.27 status event code: U-3-3-T10-T11-oth-X000

PN2301 Change of applicant

St.27 status event code: A-3-3-R10-R13-asn-PN2301

St.27 status event code: A-3-3-R10-R11-asn-PN2301

P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

E601 Decision to refuse application
PE0601 Decision on rejection of patent

St.27 status event code: N-2-6-B10-B15-exm-PE0601

T11-X000 Administrative time limit extension requested

St.27 status event code: U-3-3-T10-T11-oth-X000

J201 Request for trial against refusal decision
PJ0201 Trial against decision of rejection

St.27 status event code: A-3-3-V10-V11-apl-PJ0201

A107 Divisional application of patent
PA0107 Divisional application

St.27 status event code: A-0-1-A10-A18-div-PA0107

St.27 status event code: A-0-1-A10-A16-div-PA0107

J301 Trial decision

Free format text: TRIAL DECISION FOR APPEAL AGAINST DECISION TO DECLINE REFUSAL REQUESTED 20130708

Effective date: 20140930

Free format text: TRIAL NUMBER: 2013101005025; TRIAL DECISION FOR APPEAL AGAINST DECISION TO DECLINE REFUSAL REQUESTED 20130708

Effective date: 20140930

PJ1301 Trial decision

St.27 status event code: A-3-3-V10-V15-crt-PJ1301

Decision date: 20140930

Appeal event data comment text: Appeal Kind Category : Appeal against decision to decline refusal, Appeal Ground Text : 2006 0029103

Appeal request date: 20130708

Appellate body name: Patent Examination Board

Decision authority category: Office appeal board

Decision identifier: 2013101005025

P22-X000 Classification modified

St.27 status event code: A-2-2-P10-P22-nap-X000

P22-X000 Classification modified

St.27 status event code: A-2-2-P10-P22-nap-X000