KR20060096359A - 진동형 자이로 센서 및 그 조정 방법 - Google Patents

진동형 자이로 센서 및 그 조정 방법 Download PDF

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Publication number
KR20060096359A
KR20060096359A KR20060020356A KR20060020356A KR20060096359A KR 20060096359 A KR20060096359 A KR 20060096359A KR 20060020356 A KR20060020356 A KR 20060020356A KR 20060020356 A KR20060020356 A KR 20060020356A KR 20060096359 A KR20060096359 A KR 20060096359A
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KR
South Korea
Prior art keywords
vibrator
gyro sensor
vibration
adjusting
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
KR20060020356A
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English (en)
Korean (ko)
Inventor
가즈오 다까하시
데루오 이나구마
마나부 아이자와
고지 스즈끼
신 사사끼
에이지 나까시오
Original Assignee
소니 가부시끼 가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 소니 가부시끼 가이샤 filed Critical 소니 가부시끼 가이샤
Publication of KR20060096359A publication Critical patent/KR20060096359A/ko
Ceased legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
    • G01C19/5663—Manufacturing; Trimming; Mounting; Housings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
    • G01C19/5614—Signal processing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5698—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using acoustic waves, e.g. surface acoustic wave gyros
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5726—Signal processing
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Manufacturing & Machinery (AREA)
  • Signal Processing (AREA)
  • Acoustics & Sound (AREA)
  • Gyroscopes (AREA)
KR20060020356A 2005-03-04 2006-03-03 진동형 자이로 센서 및 그 조정 방법 Ceased KR20060096359A (ko)

Applications Claiming Priority (8)

Application Number Priority Date Filing Date Title
JPJP-P-2005-00106717 2005-03-04
JP2005106717 2005-03-04
JPJP-P-2005-00176870 2005-06-16
JP2005176870 2005-06-16
JPJP-P-2005-00176871 2005-06-16
JP2005176871 2005-06-16
JP2005380330A JP5145637B2 (ja) 2005-03-04 2005-12-28 振動型ジャイロセンサ
JPJP-P-2005-00380330 2005-12-28

Publications (1)

Publication Number Publication Date
KR20060096359A true KR20060096359A (ko) 2006-09-11

Family

ID=36579243

Family Applications (1)

Application Number Title Priority Date Filing Date
KR20060020356A Ceased KR20060096359A (ko) 2005-03-04 2006-03-03 진동형 자이로 센서 및 그 조정 방법

Country Status (6)

Country Link
US (2) US7325452B2 (https=)
EP (1) EP1698858B1 (https=)
JP (1) JP5145637B2 (https=)
KR (1) KR20060096359A (https=)
CN (1) CN1828224B (https=)
DE (1) DE602006010125D1 (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20220080982A (ko) * 2020-12-08 2022-06-15 주식회사 한화 주파수 변경이 가능한 진동기와 이를 포함하는 관성항법장치용 링 레이저 자이로스코프 구조체

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JP5145637B2 (ja) * 2005-03-04 2013-02-20 ソニー株式会社 振動型ジャイロセンサ
US7928861B2 (en) * 2006-04-19 2011-04-19 Xact Downhole Telemetry Inc. Telemetry wave detection apparatus and method
JP2008157701A (ja) * 2006-12-22 2008-07-10 Sony Corp 圧電素子、振動型ジャイロセンサ、電子機器及び圧電素子の製造方法
JP5088540B2 (ja) * 2007-05-16 2012-12-05 ソニー株式会社 検出装置、検出方法及び電子機器
TW200913175A (en) * 2007-09-05 2009-03-16 Long-Sun Huang Package structure for micro-sensor
JP4640459B2 (ja) * 2008-07-04 2011-03-02 ソニー株式会社 角速度センサ
JP2010060398A (ja) * 2008-09-03 2010-03-18 Alps Electric Co Ltd ジャイロセンサ及びその製造方法
WO2010067793A1 (ja) 2008-12-09 2010-06-17 株式会社村田製作所 振動ジャイロ素子及びその製造方法
JP5506035B2 (ja) * 2010-02-23 2014-05-28 富士フイルム株式会社 アクチュエータの製造方法
JP5506552B2 (ja) * 2010-06-07 2014-05-28 キヤノン株式会社 振動型アクチュエータの制御装置及び振動型アクチュエータの制御方法
JP5327279B2 (ja) * 2011-06-13 2013-10-30 株式会社デンソー 超音波センサ装置
JP5874995B2 (ja) * 2011-09-06 2016-03-02 株式会社日立ハイテクサイエンス カンチレバーのバネ定数特定方法およびその方法を採用した走査型プローブ顕微鏡
WO2016114173A1 (ja) * 2015-01-13 2016-07-21 株式会社村田製作所 圧電デバイスの製造方法
DE112016002627T5 (de) * 2015-06-11 2018-02-22 Georgia Tech Research Corporation MEMS-Trägheitsmessvorrichtung mit geneigten Elektroden zur Abstimmung der Quadratur
JP6764126B2 (ja) * 2016-02-02 2020-09-30 セイコーエプソン株式会社 圧電デバイスの製造方法
FR3052916A1 (fr) * 2016-06-17 2017-12-22 Commissariat Energie Atomique Actionneur electromecanique
JP6819216B2 (ja) * 2016-10-26 2021-01-27 セイコーエプソン株式会社 ジャイロセンサー、ジャイロセンサーの製造方法、電子機器および移動体
JP2019176413A (ja) * 2018-03-29 2019-10-10 セイコーエプソン株式会社 振動素子の周波数調整方法、振動素子の製造方法、振動素子、物理量センサー、慣性計測装置、電子機器および移動体
CN108613686B (zh) * 2018-04-28 2021-10-08 中南大学 一种振动陀螺自动化修调方法
CN110683286A (zh) * 2019-10-11 2020-01-14 青岛大学 一种带式输送机自动绞车式拉紧位移感知与保护装置
CN116124220B (zh) * 2023-02-23 2025-10-28 吉林大学 基于多模态的高精度多痕量质量-位置同步感测装置及方法

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JPH04315056A (ja) * 1991-04-12 1992-11-06 Tokai Rika Co Ltd 加速度センサ
DE69310799T2 (de) * 1992-03-30 1997-11-13 Murata Manufacturing Co Vibrator mit abgeglichenen Kantenbereichen
JP3218813B2 (ja) * 1993-02-03 2001-10-15 松下電器産業株式会社 角速度センサおよびその製造方法
US5802684A (en) * 1993-09-14 1998-09-08 Nikon Corporation Process for producing a vibration angular-velocity sensor
JPH07113643A (ja) * 1993-10-15 1995-05-02 Nikon Corp 圧電振動角速度計
JP3326989B2 (ja) * 1994-08-25 2002-09-24 株式会社豊田中央研究所 振動子とその調整方法および角速度センサ
US5765046A (en) 1994-08-31 1998-06-09 Nikon Corporation Piezoelectric vibration angular velocity meter and camera using the same
JPH0989571A (ja) * 1995-09-26 1997-04-04 Alps Electric Co Ltd 振動型ジャイロスコープの調整方法
JP3682664B2 (ja) * 1995-10-27 2005-08-10 Ｎｅｃトーキン株式会社 圧電振動ジャイロ
JPH1019574A (ja) * 1996-06-27 1998-01-23 Nikon Corp 圧電振動角速度計の製造方法
JPH10153430A (ja) * 1996-11-25 1998-06-09 Toyota Motor Corp 角速度検出装置およびその製造方法
US6578420B1 (en) 1997-01-28 2003-06-17 Microsensors, Inc. Multi-axis micro gyro structure
JPH1194557A (ja) * 1997-09-12 1999-04-09 Murata Mfg Co Ltd 振動ジャイロ
JP2000055666A (ja) * 1998-08-03 2000-02-25 Nippon Soken Inc 角速度センサ及びその製造方法
GB9828478D0 (en) * 1998-12-24 1999-02-17 British Aerospace Method of manufacturing a vibrating structure gyroscope
JP2000292175A (ja) * 1999-04-12 2000-10-20 Denso Corp 角速度センサおよびその製造方法
JP3553418B2 (ja) * 1999-05-25 2004-08-11 シャープ株式会社 振動型ジャイロスコープ、振動型ジャイロスコープの形成方法および調整方法
KR100398364B1 (ko) * 2001-05-24 2003-09-19 삼성전기주식회사 수정진동자의 제조방법 및 그로부터 제조된 수정진동자
US6944931B2 (en) * 2002-08-12 2005-09-20 The Boeing Company Method of producing an integral resonator sensor and case
JP5145637B2 (ja) * 2005-03-04 2013-02-20 ソニー株式会社 振動型ジャイロセンサ

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20220080982A (ko) * 2020-12-08 2022-06-15 주식회사 한화 주파수 변경이 가능한 진동기와 이를 포함하는 관성항법장치용 링 레이저 자이로스코프 구조체

Also Published As

Publication number Publication date
CN1828224B (zh) 2010-07-28
EP1698858B1 (en) 2009-11-04
EP1698858A1 (en) 2006-09-06
US20060196267A1 (en) 2006-09-07
DE602006010125D1 (de) 2009-12-17
JP2007024862A (ja) 2007-02-01
US20080083278A1 (en) 2008-04-10
US7325452B2 (en) 2008-02-05
CN1828224A (zh) 2006-09-06
JP5145637B2 (ja) 2013-02-20
US7578187B2 (en) 2009-08-25

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