KR20060047288A - Inspection apparatus - Google Patents

Abstract

(Problem) It is to reduce the kinds of parts of inspection equipment.

(Solution means) The inspection apparatus of a display panel has an inspection stage which inspects a display panel, and a receiving stage which exchanges a display panel. The first moving mechanism has a first attachment portion to which the first panel holding mechanism and the second panel holding mechanism can be attached. The second moving mechanism has a second attachment portion to which the first panel holding mechanism and the second panel holding mechanism can be attached. The first attachment portion and the second attachment portion are identical in shape and dimensions.

Description

Inspection device {INSPECTION APPARATUS}

1 is a front view showing an embodiment of an inspection apparatus using the electrical connection device according to the present invention

2 is a right side view of the inspection apparatus shown in FIG.

3 is an enlarged view of a part of the inspection device shown in FIG.

4 is a left side view of the inspection apparatus shown in FIG.

FIG. 5 is a front view of the inspection device shown in FIG. 1 for explaining the carrier device. FIG.

6 is a cross-sectional view taken along line 6-6 of FIG.

7 is a cross-sectional view taken along line 7-7 of FIG.

FIG. 8 is a view showing an embodiment of a holder used in the conveying apparatus of the inspection apparatus shown in FIG. 1. FIG.

9 is an enlarged view of a part of another embodiment of the inspection device shown in FIG.

Explanation of symbols on the main parts of the drawings

10-Inspection device 12-Display panel

18-Main Base 24-Xiu Stage

28-Inspection stage 30-Probe device

36-Carrier 38-Chuck top

60-Frame 62,64-Carrier

66,68-Carrier Shifter 66a, 68a-Attachment

66b, 68b-Base 72,74,84,92a-Guide Rail

76,78,86,92b-Guide 80-Carrier Base

82-support arms 88,90-first and second arms

98-Binding Means 94-X Holder

96-Y holder 100-ball screw

106-X moving mechanism 108-Y moving mechanism

110-X Drive 112,114-Pulley

116-Stepless Belt 120-Y Drive

122-Shaft 124-Nut

130,140,150-Holder

The present invention relates to an inspection apparatus for inspecting a rectangular display panel.

As an inspection apparatus for inspecting a display panel, such as a lighting inspection apparatus for a liquid crystal display panel, a rectangular display panel is placed on an inspection stage, and the display panel is inspected (for example, Patent Document 1). .

Such a lighting inspection apparatus has the 1st and 2nd conveyance apparatus which can transfer the display panel of an inspected object from a test | inspection stage to a delivery stage, and an uninspected display panel from a delivery stage to an inspection stage.

The first and second conveying apparatuses each have a panel holding mechanism and a moving mechanism for holding a display panel.

However, since the moving mechanism on one side is located above the panel holding mechanism and the moving mechanism on the other side is located below the panel holding mechanism, the shapes of the panel holding mechanisms on one side and the other side are different from each other.

Therefore, when the panel holding mechanism is broken, the user of the inspection apparatus must bring the panel holding mechanism corresponding to the broken panel holding mechanism by order or replace it. Therefore, the manufacturer of the inspection apparatus needs to hold the panel holding mechanisms on one side and the other side as stock, so that the selling price of the inspection apparatus becomes expensive.

(Patent Document 1) Japanese Unexamined Patent Publication No. 2002-14047

An object of the present invention is to reduce the type of components of the inspection apparatus.

The inspection apparatus of the display panel which concerns on this invention is an inspection apparatus of the display panel which has a test | inspection stage which inspects a display panel, and a hand-and-eye stage which exchanges the said display panel, The said display panel of the test piece First and second conveying devices capable of transferring the inspecting stage from the conveyance stage and the uninspected display panel from the conveying stage to the inspecting stage, wherein the first conveying apparatus holds the display panel. A first panel holding mechanism and a first moving mechanism for selectively moving the first panel holding mechanism to the inspection stage or the feeding stage, wherein the second conveying apparatus is a second panel holding mechanism for holding the display panel; A second mover for selectively moving the mechanism and the second panel holding mechanism to the inspection stage or the delivery stage; Having a sphere, wherein the first moving mechanism has a first attachment portion to attach the first panel holding mechanism and the second panel holding mechanism, and the second moving mechanism includes the first panel holding mechanism and the second panel. It has a 2nd attachment part to which a panel holding mechanism can be attached. The first attachment portion and the second attachment portion are the same in shape and dimension.

The first panel holding mechanism and the second panel holding mechanism may be the same in shape and dimensions.

According to this configuration, the first moving mechanism has a first attachment portion to which the first panel holding mechanism and the second panel holding mechanism can be attached, and the second moving mechanism includes the first panel holding mechanism and the second panel holding mechanism. Since it has a second attachment part that can be attached, the manufacturer of the inspection apparatus only needs to manufacture a common panel holding mechanism that can be applied to the first panel holding mechanism and the second panel holding mechanism. Can be reduced.

In addition, as long as a 1st attachment part and a 2nd attachment part are the same in a shape and a dimension, a 1st panel holding mechanism and a 2nd panel holding mechanism need only form a common attachment part. Therefore, the place which should be processed of a 1st panel holding mechanism and a 2nd panel holding mechanism can be reduced.

In addition, if the first panel holding mechanism and the second panel holding mechanism are the same in shape and dimensions, the inspection apparatus can apply a common panel holding mechanism.

Embodiment of the Invention

EMBODIMENT OF THE INVENTION Hereinafter, the inspection apparatus which concerns on this invention is demonstrated with reference to drawings.

The inspection apparatus 10 is a lighting inspection apparatus of the display panel 12 which forms a rectangle as shown in FIGS. In the illustrated example, the rectangular display panel 12 is provided with a plurality of electrodes on each of its three sides (two opposite short sides and one long side). The electrodes formed on each side are formed at intervals in the direction of the side (that is, the longitudinal direction of the side), and extend in the direction orthogonal to the side.

The inspection apparatus 10 accommodates various devices for lighting inspection in the casing 14 produced by a plurality of long members and a plurality of plate members. The casing 14 is supported by a pair of main body bases 18 provided in the X direction at intervals in the inclined direction.

The upper part of the front surface of the test | inspection apparatus 10 becomes the inclined surface 16 which retreats to a rear side toward the upper side (refer FIG. 2).

In the example shown in FIG. 1, the left and right directions in FIG. 1 become the X direction and are perpendicular to the X direction in a plane parallel to the display panel 12 placed on the inspection apparatus 10. The vertical direction becomes the Y direction. The Z direction is a direction perpendicular to the display panel 12 placed on the inspection apparatus 10 (see FIG. 2).

The inspection apparatus 10 includes a panel set portion for sending and receiving the display panel 12 to the inspection apparatus 10 and an inspection portion for inspecting the display panel 12. In the main body base 18 on one side, rectangular openings 20 and 22 larger than the display panel 12 are formed at positions corresponding to the panel set portion and the inspection portion, respectively.

In the panel set portion, a hand-carrying stage 24 on which the display panel 12 is inclined is disposed, and two sets of pushers 26 for prealigning the placed display panel 12. On the other hand, the inspection part is provided with the inspection stage 28 (refer FIG. 4) in which the display panel 12 is inclined, and the probe apparatus 30 which acts as an electrical connection device.

The feeding stage 24 includes a panel receiving part 32 formed by a plurality of long members so that the display panel 12 is placed horizontally, and a panel receiving part (not shown) to move the placed display panel 12 in the Z direction. A Z stage 34 supporting the 32 and a rotating stage 35 supporting the Z stage 34 are included.

The rotation stage 35 is supported by the support 37 so that rotation is angularly about the axis line extended in a X direction. The drive mechanism which rotates the rotation stage 35 angularly may be arrange | positioned at the rotation stage 35, or may be arrange | positioned at the support stand 37. FIG.

The Z stage 34 and the panel receiving part 32 are positions where the display panel 12 is horizontal by the angular rotation of the rotation stage 35 and the position where the display panel 12 is inclined with respect to the horizontal plane. Is selectively displaced into This displacement is performed every time the display panel 12 is exchanged with respect to the conveying apparatus 36 mentioned later.

The feeding stage 24 has a panel receiving part (when placing the uninspected display panel 12 on the panel receiving part 32 and removing the inspected display panel 12 from the panel receiving part 32). The display panel 12 placed on 32 is kept horizontal.

On the other hand, the delivery stage 24 passes the uninspected display panel to the conveying apparatus 36, and performs the pre-alignment by the pusher 26, and conveys the display panel 12 of the inspected conveyance apparatus 36. ), The display panel 12 placed on the panel receiving portion 32 is maintained in an inclined state at a predetermined angle with respect to the horizontal plane.

The pushers 26 spaced apart in the X direction are arranged to be movable in a direction (X direction) approaching and disengaging from the elongated members provided in the X direction, and are moved in the X direction by a moving mechanism (not shown). On the other hand, the pushers 26 spaced apart in the Y direction are arranged to be movable in the direction (Y direction) approaching and detaching from each other in the long member installed in the Y direction, and in the Y direction by a moving mechanism (not shown). Is moved.

The display panel 12 is arrange | positioned by a human hand or a detachable robot between these pushers 26 in the state in which the pushers 26 of each group are separated from each other. The display panel 12 arranged is moved relative to the delivery stage 24 by moving in the direction in which the pushers 26 of each pair approach each other, and performs prealignment with respect to the test | inspection apparatus 10. FIG.

The non-inspection display panel 12 is disposed in the panel receiving part 32 waiting in a horizontal state, and is pre-aligned by the pusher 26 in the feeding stage 24, and in the horizontal plane by the rotating stage 35. Inclined at a predetermined angle. Then, this display panel 12 is conveyed to the test | inspection stage 28 by the conveying apparatus 36 (refer FIG. 1), and a lighting test is performed by a test | inspection part.

In the illustrated example, the lighting inspection may be visual inspection by the naked eye of an operator or automatic lighting inspection using a video camera, an image processing apparatus, or the like not shown.

The display panel 12 for inspection is conveyed from the inspection stage 28 to the sorghum stage 24 by the conveying apparatus 36, and is then lifted out of the sorghum stage 24 by a human hand or a detachable robot. It is stored in a storage cassette.

The inspection stage 28 opposes the panel adsorption surface to the opening 22 so that the display panel 12 is inclined to the panel adsorption surface of the chuck top 38.

The chuck top 38 has a plurality of adsorption grooves on the panel adsorption surface for vacuum adsorption of the display panel 12, and a backlight unit for illuminating the display panel 12 from the rear thereof. Equipped with.

The inspection stage 28 is a three-dimensional (X, Y and Z) stage for moving the inclined display panel 12 in two directions of X and Y parallel thereto and in a Z direction perpendicular to the display panel 12. It has (40, 42 and 44), and is equipped with the (theta) stage 46 which rotates angularly around the axis line extended in a Z direction.

The inspection stage 28 receives the display panel 12 from the conveyance device 36 in the state where the chuck saw 38 is retracted (falled) with respect to the probe device 30 by the Z stage 44, and X And the two-dimensional movement by the Y stages 40 and 42, and rotationally angularly by the θ stage 46 for precise alignment of the passed display panel 12, At the time of inspection, the chuck saw 38 is advanced (raised) with respect to the probe device 30 by the Z stage 44.

Moreover, the inspection stage 28 passes the display panel 12 of the inspection to the conveying apparatus 36, and waits in the state which retracted the chuck saw 38. As shown in FIG.

The probe device 30 includes four base members 48 corresponding to virtual rectangular sides, three probe units 50 disposed on the three base members 48, and a probe unit ( And a moving mechanism (not shown) for moving the three base members 48 along their corresponding sides (i.e., in the longitudinal direction of the sides) for the alignment of 50).

Each base member 48 has a long plate shape in the longitudinal direction of the side corresponding to the base member 48, and is supported on the rear surface side of the main body base 18, and part of the base member 48 is exposed to the opening 22. As shown in FIG. Adjacent base members 48 are spaced apart so as not to touch each other.

The probe unit 50 is disposed in a pair of opposing base members 48 and one base member 48 adjacent to these base members 48. On the other hand, the movement mechanism is provided in the other pair of base member 48 which opposes, and the one base member 48 which adjoins these base members 48. As shown in FIG.

The base member 48, which is not connected to the moving mechanism, is immovably attached to and supported by the main body base 18 by a plurality of fasteners (not shown) such as spacers (not shown) and bolts.

The remaining base members 48 are attached to and supported by the body base 18 so as to be movable in the longitudinal direction of the corresponding side by a guide mechanism (not shown) such as a linear guide.

Each probe unit 50 includes a long plate-shaped probe base 52 attached to a corresponding base member 48 along its longitudinal direction, a plurality of probe blocks 54 disposed on the probe base 52, A plurality of probes 56 arranged in each probe block 54 are provided.

The probe base 52 is firmly attached to the outside of the edge portion which becomes the center side of the rectangle (that is, the tip side) among the edge portions in the width direction of the base member 48 by a plurality of screw members (not shown). have.

Each probe block 54 is firmly attached to the outer side of the edge part of the front end side in the width direction of the probe base 52 by the some screw member (not shown). Each probe 56 is attached to the lower surface of the distal end of the probe block 54 by using a suitable means in a state where the distal end is projected forward.

Each moving mechanism for the base member 48 may use a general mechanism including a motor attached to the main body base 18, a lead screw rotated by the motor, and a lead nut screwed to the lead screw. .

Each probe 56 is in pressure contact with the electrode of the display panel 12 when the chuck top 38 is raised during the inspection of the display panel 12 conveyed to the inspection stage 28. In this state, the display panel 12 is energized through the electrode.

The conveying apparatus 36 carries a pair of carriers 62 and 64 which can be moved to the X direction arrange | positioned at the pair of main body base 18, spaced in the Z direction, and the carriers 62 and 64 to the X direction. A pair of carrier moving mechanisms 66 and 68 are respectively provided to move each other. Here, the carrier 62 and the carrier 64 are the same in shape and dimension.

The carrier moving mechanism 66 includes a base portion 66b. The base portion 66b has a carrier 62 and an attachment portion 66a to which the carrier 64 can be attached. The carrier moving mechanism 68 includes a base portion 68b. The base portion 68b has a carrier 62 and an attachment portion 68a to which the carrier 64 can be attached.

The carrier 62 is detachably attached to the attachment portion 66a by, for example, a bolt 69. The carrier 64 is detachably attached to the attachment portion 68a by, for example, a bolt 69.

At this time, the bolt 69 is screwed into the plurality of screw holes formed in the attachment portions 66a and 68a through the through holes formed in the carrier base 80 of the carriers 62 and 64.

The plurality of screw holes formed in the attachment portion 66a and the attachment portion 68a are identical in shape and dimensions. Moreover, in the plane extended in a X direction and a Y direction, the arrangement | positioning relationship of the some screw hole formed in the attachment part 66a and the some screw hole formed in the attachment part 68a is the same in dimension.

Thus, the carrier 62 can be attached to the carrier moving mechanism 68. In addition, the carrier 64 can be attached to the carrier moving mechanism 66. Therefore, the kind of carrier can be reduced.

Two guide rails 72 and 74 are attached to the lower main body base 18 in a state in which the guide rails 72 and 74 are provided in the X direction at intervals in the Z direction. Guides 76 and 78 are movably fitted to guide rails 72 and 74, respectively.

Two guide rails 72 and 74 are attached to the main body base 18 on the upper side in a state in which the guide rails 72 and 74 are provided in the X direction at intervals in the Y direction. Guides 76 and 78 are movably fitted to guide rails 72 and 74, respectively.

Base portions 66b and 68b are attached to both ends of the carriers 62 and 64, respectively. Guides 76 and 78 are attached to base portions 66b and 68b, respectively. Accordingly, the carrier 62 is movably supported by the main body base 18 through the guide rail 72 and the guide 76, and the carrier 64 is the main body through the guide rail 74 and the guide 78. It is supported by the base 18 so that a movement is possible.

Each carrier 62 and 64 has a pair of support arms 82 installed in the X direction at intervals in the Y direction and a pair of guide rails 84 and four guides 86 on the rectangular carrier base 80. ) Is arranged to be movable in the Y direction.

The pair of guide rails 84 are attached to the corresponding carrier bases 80 in a state in which they are provided in parallel in the Y direction at intervals in the X direction. The four guides 86 are fitted to both guide rails 84 so as to be movable in the Y direction at intervals in the Y direction.

Each support arm 82 has guides 86 attached to both ends thereof. Therefore, each support arm 82 has a girder shape in which both ends are supported by the carrier base 80.

A pair of first arms 88 are attached to each support arm 82 at intervals in the X direction, and a second arm 90 is attached between the pair of first arms 88. The pair of first arms 88 and the second arm 90 protrude from the corresponding support arms 82 toward the support arms 82 on the opposite side, and cantilevered to the corresponding support arms 82. Supported girder shape.

Each first arm 88 is movably attached to the corresponding support arm 82 by a suitable engagement means 92 such as a linear guide comprising a guide rail 92a and a guide 92b. . Both of the first arms 88 attached to the respective support arms 82 are moved in a direction (X direction) to approach and separate from each other.

Each second arm 90 is immovably attached to the corresponding support arm 82. The distal end side of each second arm 90 is composed of two distal ends extending in opposite directions in the X direction from the proximal end of the second arm 90.

Each 1st arm 88 has the X holder 94 attached to the front-end | tip part. On the other hand, each 2nd arm 90 attaches the Y holder 96 to both front-end | tip parts, spaced apart in the X direction. The two X holder 94 and the two Y holder 96 respectively collide with each other by contacting both edge portions in the X direction and one edge portion in the Y direction of the display panel 12 to joint the display panel 12. I support it.

Either of the X holder 94 and the Y holder 96 may be supported by sandwiching the display panel 12 with a holder facing each other. The display panel 12 may be supported on the receiving piece.

Each carrier movement mechanism 66 and 68 rotatably supports the ball screw 100 installed in the X direction to the main body base 18, and carries a nut (not shown) screwed to the ball screw 100 to the carrier base. It is attached to (80). The ball screw 100 is rotated by the carrier motor 104.

The carrier motors 104 and 104 of the carrier moving mechanisms 66 and 68 are rotated in synchronization with each other in reverse directions. Thus, both carriers 62 and 64 are moved from the delivery stage 24 to the inspection stage 28 or vice versa respectively.

At the time of conveyance of the display panel 12 by the carrier moving mechanisms 66 and 68, the inspected display panel 12 and the non-inspected display panel 12 are moved in a state maintained at a predetermined inclination angle. Thereby, the amount of curvature of the display panel 12 is small, and the distance of each other required when the display panel 12 of the test | inspected and the display panel 12 of an unexaggerated mutually cross can be made small.

In each arm, firstly, the second arms 90 and 90 are moved in the Y direction synchronously by the Y moving mechanisms 108 and 108. Subsequently, the first arms 88 and 88 are moved synchronously in the X direction by the X moving mechanisms 106 and 106, respectively.

Each X moving mechanism 106 is spaced in the X direction from the X drive source 110 that can be reversed like an electric motor, the first pulley 112 rotated by the X drive source 110, and the first pulley 112. A second pulley 114 is provided and an endless belt 116 hooked to the first and second pulleys 112 and 114.

The upper first arm 88 is attached to the upper position of the endless belt 116, and the lower first arm 88 is attached to the lower position of the endless belt 116. Therefore, both first arms 88 and 88 are moved in a direction approaching each other when the X driving source 110 is rotated in one direction, and is moved in a direction away from each other when rotated in the other direction. As a result, both of the first arms 88 and 88 perform gripping of the display panel 12 and release thereof.

The Y moving mechanism 108 includes a Y drive source 120 that can be reversed like an electric motor, a shaft 122 rotated around an axis extending in the X direction by the Y drive source 120, and the amount of the shaft 122. First pulleys 122a and 122a assembled rotatably relative to the end, second pulleys 122b and 122b spaced in the Y direction from the first pulley 122a, and first and second pulleys 122a. And endless belts 122c and 122c fastened to 122b).

Linear guides can be used as the guide rails 72, 74, 84, 92a and the guides 76, 78, 86, 92b.

In the example shown in the figure, the upper support arm 82 is attached to the upper position of the endless belt 122c, and the lower support arm 82 is attached to the lower position of the endless belt 122c. Therefore, both support arms 82 and 82 are moved in a direction approaching each other when the Y drive source 120 is rotated in one direction, and is moved in a direction away from each other when rotated in another direction. As a result, both of the support arms 82 and 82 grasp and release the display panel 12.

In the inspection apparatus 10, during the inspection of the display panel 12 by the inspection stage 28, the display panel 12 for inspection to the delivery stage 24 by the carrier 62 (or 64) is examined. Conveyance and placement, removal of the inspected display panel 12 from the delivery stage 24, arrangement of the non-inspection display panel 12 to the delivery stage 24, and the display panel of the inspection already The pre-alignment of (12) and the unexamined display panel 12 to the carrier 64 (or 62) are arranged.

When the inspection is finished, the uninspected display panel 12 on the delivery stage 24 side is held by one carrier 62 (or 64), and the inspected display panel 12 on the inspection stage 28 side. The other side carrier 64 (or 62) is hold | maintained, and these are conveyed to the test | inspection stage 28 and the delivery stage 24, respectively.

The conveyance of the uninspected and inspected display panel 12 by the carriers 62 and 64 is performed by rotating the carrier movement mechanisms 66 and 68, respectively, in opposite directions.

The holding of the display panel 12 by the carriers 62 and 64 rotates the X drive sources 110 and 110 and the Y drive source 120 in one direction to move the X holders 94 and 94 and the Y holders 96 and 96. This is done by moving in a direction approaching each other, whereby the holders 94, 94, 96 and 96 support the edges of the display panel 12.

As a result, in the delivery stage 24, the carriers 62 and 64 hold the uninspected display panel 12 so that the already inspected display panel 12 is centered and pre-aligned.

The conveyance of the display panel 12 by the carriers 62 and 64 is carried out in the plural places which spaced the X holder 94 and the Y holder 96 in the Y direction of each edge part of an X direction, and each in the Y direction. This is performed in a state in which the display panel 12 is releasably supported while abutting a plurality of locations spaced apart in the X direction of the edge portion. Therefore, the support of the display panel 12 becomes stable.

The release of the display panel 12 by the carriers 62 and 64 rotates the X drive sources 110 and 110 and the Y drive source 120 in the other directions so that the X holders 94 and 94 and the Y holders 96 and 96 are rotated. By moving in the direction away from each other.

The delivery stage 24 and the inspection stage 28 move the panel receiving part 32 and the chuck saw 38 at least once in the Z direction each time the display panel 12 is exchanged with respect to the carriers 62 and 64. Reciprocate.

If the display panel 12 is supported at four edge portions corresponding to four rectangular sides, as in the inspection apparatus 10, even if the panel is large, the curvature of the panel in the center region in the X direction and Y Curvature of the panel in the direction center region is prevented from each other by the support of the Y-direction edge portion and the support of the X-direction edge portion. As a result, it can be conveyed stably without damaging a large sized panel.

As shown to (A), (B), (C), and (D) of FIG. 8, the holder 130 has the L-shaped holder piece 132, and the L-shaped recessed part becomes a panel support side. The holder piece 132 is provided with a drop preventing piece 134 which is attached to the first arm 88 or the second arm 90 in a state of being at the panel engaging side, and prevents the display panel 12 from falling. A fixing member 138 formed on the panel engaging side of the fixing frame 132a formed at the lower end of the fixing frame 132a and abutting the display panel 12 on the L-shaped recess of the holder piece 132. I attach it by).

The thickness dimension (dimensions in the direction perpendicular to the ground) of the drop preventing piece 134 is smaller than that of the holder piece 132, respectively. The elastic block 136 is made of a rubber material such as urethane rubber. Holders 94 and 96 used in the embodiment shown in FIGS. 1 to 7 are holders 130.

All of the holders 130 support the display panel 12 by frictionally engaging the elastic block 136 by bringing the edge portion of the display panel 12 into contact with the elastic block 136. However, the holder may be of another type such as supporting the display panel 12 by placing it on the receiving piece.

The conveying device 36 is a carrier for conveying a display panel to one side of the receiving stage and the inspection stage in the case of the inspection apparatus in which the receiving stage 24 is disposed on both sides in the X direction with respect to the inspection stage 28. You may make it provide the carrier conveyed to the other handing stage and an inspection stage. Even in this case, both carriers are equal in shape and dimensions.

As shown in FIG. 9, two guide rails 72 and 74 are attached to each main body base 18 on the upper side in a state where they are provided in the X direction at intervals in the Z direction. Guides 76 and 78 are movably fitted to guide rails 72 and 74, respectively.

The base portion 66b holding the upper portion of the carrier 62 and the base portion 68b holding the upper portion of the carrier 64 are the same in shape and dimension. Therefore, since the base part 66b holding the upper part of the carrier 62 and the base part 68b holding the upper part of the carrier 64 can apply a common base part, an inspection apparatus can be made cheap. .

The present invention can be applied not only to liquid crystal display panels but also to electrical connection devices of other display panels such as glass substrates, organic ELs, and the like.

The present invention is not limited to the above embodiment, and various modifications can be made without departing from the spirit thereof.

As described above, according to the inspection apparatus of the present invention, the first moving mechanism has a first attachment portion to which the first panel holding mechanism and the second panel holding mechanism can be attached, and the second moving mechanism includes the first panel holding mechanism and Having a second attachment portion for attaching the second panel holding mechanism, the manufacturer of the inspection apparatus only needs to manufacture a common panel holding mechanism applicable to the first panel holding mechanism and the second panel holding mechanism. The number of panel holding mechanisms can be reduced.

In addition, as long as a 1st attachment part and a 2nd attachment part are the same in a shape and a dimension, a 1st panel holding mechanism and a 2nd panel holding mechanism need only form a common attachment part. Therefore, the place which should be processed of a 1st panel holding mechanism and a 2nd panel holding mechanism can be reduced.

In addition, if the first panel holding mechanism and the second panel holding mechanism are the same in shape and dimensions, the inspection apparatus can apply a common panel holding mechanism.

Claims (2)

An apparatus for inspecting a display panel, comprising: an inspection stage for inspecting a display panel; and a passing stage for exchanging the display panel; First and second conveying devices capable of transferring the inspected display panel from the inspecting stage to the sorghum stage and the unexamined display panel from the sorghum stage to the inspecting stage, The first conveying apparatus has a first panel holding mechanism for holding the display panel, and a first moving mechanism for selectively moving the first panel holding mechanism to the inspection stage or the feeding stage, The second conveying apparatus has a second panel holding mechanism for holding the display panel, and a second moving mechanism for selectively moving the second panel holding mechanism to the inspection stage or the feeding stage, The first moving mechanism has a first attachment portion capable of attaching the first panel holding mechanism and the second panel holding mechanism, The second moving mechanism has a second attachment portion to which the first panel holding mechanism and the second panel holding mechanism can be attached. And the first attachment portion and the second attachment portion are identical in shape and dimensions. The method according to claim 1, And said first panel holding mechanism and said second panel holding mechanism are identical in shape and dimensions.

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