KR20050010835A - 대역 판을 포함하는 다중 영상화 시스템을 사용하는 원소특이성 ｘ-선 형광 현미경 - Google Patents
대역 판을 포함하는 다중 영상화 시스템을 사용하는 원소특이성 ｘ-선 형광 현미경 Download PDFInfo
- Publication number
- KR20050010835A KR20050010835A KR10-2004-7019083A KR20047019083A KR20050010835A KR 20050010835 A KR20050010835 A KR 20050010835A KR 20047019083 A KR20047019083 A KR 20047019083A KR 20050010835 A KR20050010835 A KR 20050010835A
- Authority
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- South Korea
- Prior art keywords
- imaging
- radiation
- ray fluorescence
- fluorescence microscope
- detector
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- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
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- 229910052582 BN Inorganic materials 0.000 description 1
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 1
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 229910002794 Si K Inorganic materials 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 238000000441 X-ray spectroscopy Methods 0.000 description 1
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- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
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- 229910052742 iron Inorganic materials 0.000 description 1
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- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
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- 150000003377 silicon compounds Chemical class 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/223—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material by irradiating the sample with X-rays or gamma-rays and by measuring X-ray fluorescence
-
- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
- G21K1/06—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diffraction, refraction or reflection, e.g. monochromators
- G21K1/062—Devices having a multilayer structure
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/07—Investigating materials by wave or particle radiation secondary emission
- G01N2223/076—X-ray fluorescence
Landscapes
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Nanotechnology (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- High Energy & Nuclear Physics (AREA)
- Mathematical Physics (AREA)
- Theoretical Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Engineering & Computer Science (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US10/157,089 | 2002-05-29 | ||
| US10/157,089 US7245696B2 (en) | 2002-05-29 | 2002-05-29 | Element-specific X-ray fluorescence microscope and method of operation |
| PCT/US2003/016913 WO2003102564A2 (en) | 2002-05-29 | 2003-05-29 | Element-specific x-ray fluorescence microscope using multiple imaging systems comprising a zone plate |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| KR20050010835A true KR20050010835A (ko) | 2005-01-28 |
Family
ID=29582384
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR10-2004-7019083A Withdrawn KR20050010835A (ko) | 2002-05-29 | 2003-05-29 | 대역 판을 포함하는 다중 영상화 시스템을 사용하는 원소특이성 ｘ-선 형광 현미경 |
Country Status (7)
| Country | Link |
|---|---|
| US (2) | US7245696B2 (enExample) |
| EP (1) | EP1511994A2 (enExample) |
| JP (1) | JP2005527833A (enExample) |
| KR (1) | KR20050010835A (enExample) |
| CN (1) | CN1656373B (enExample) |
| AU (1) | AU2003232417A1 (enExample) |
| WO (1) | WO2003102564A2 (enExample) |
Families Citing this family (121)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB9618897D0 (en) | 1996-09-10 | 1996-10-23 | Bio Rad Micromeasurements Ltd | Micro defects in silicon wafers |
| US20110128972A1 (en) | 2000-04-17 | 2011-06-02 | Randy Thornton | Peer to peer dynamic network link acceleration |
| US20050282300A1 (en) * | 2002-05-29 | 2005-12-22 | Xradia, Inc. | Back-end-of-line metallization inspection and metrology microscopy system and method using x-ray fluorescence |
| US7245696B2 (en) * | 2002-05-29 | 2007-07-17 | Xradia, Inc. | Element-specific X-ray fluorescence microscope and method of operation |
| KR100524211B1 (ko) * | 2003-02-28 | 2005-10-26 | 삼성전자주식회사 | 반도체 소자 제조과정에서의 박막의 불순물 농도 측정방법및 제어방법 |
| US7202475B1 (en) * | 2003-03-06 | 2007-04-10 | Kla-Tencor Technologies Corporation | Rapid defect composition mapping using multiple X-ray emission perspective detection scheme |
| GB0308182D0 (en) * | 2003-04-09 | 2003-05-14 | Aoti Operating Co Inc | Detection method and apparatus |
| US20080152090A1 (en) * | 2003-08-25 | 2008-06-26 | Takashi Yamada | Euv Light Source |
| US7394890B1 (en) * | 2003-11-07 | 2008-07-01 | Xradia, Inc. | Optimized x-ray energy for high resolution imaging of integrated circuits structures |
| EP1718958B1 (en) * | 2004-02-20 | 2012-08-29 | Philips Intellectual Property & Standards GmbH | Device and method for mapping the distribution of an x-ray fluorescence marker |
| WO2006010091A2 (en) * | 2004-07-09 | 2006-01-26 | Xradia, Inc. | Copper metallization analysis system and method using x-ray fluorescence |
| JP2006029921A (ja) * | 2004-07-14 | 2006-02-02 | Institute Of Physical & Chemical Research | フローサイトメーター |
| US7466796B2 (en) * | 2004-08-05 | 2008-12-16 | Gatan, Inc. | Condenser zone plate illumination for point X-ray sources |
| JP4612355B2 (ja) * | 2004-08-13 | 2011-01-12 | 純一 千川 | 毛髪又は体毛によるカルシウム代謝異常の検出方法 |
| JP4613554B2 (ja) * | 2004-09-08 | 2011-01-19 | カシオ計算機株式会社 | 電子顕微鏡 |
| US7918293B1 (en) | 2005-03-09 | 2011-04-05 | Us Synthetic Corporation | Method and system for perceiving a boundary between a first region and a second region of a superabrasive volume |
| US7312448B2 (en) * | 2005-04-06 | 2007-12-25 | Carl Zeiss Nts Gmbh | Method and apparatus for quantitative three-dimensional reconstruction in scanning electron microscopy |
| US7166838B1 (en) | 2005-05-23 | 2007-01-23 | Kla-Tencor Technologies Corporation | X-ray imaging for patterned film measurement |
| US20070000434A1 (en) * | 2005-06-30 | 2007-01-04 | Accent Optical Technologies, Inc. | Apparatuses and methods for detecting defects in semiconductor workpieces |
| TWI391645B (zh) * | 2005-07-06 | 2013-04-01 | Nanometrics Inc | 晶圓或其他工作表面下污染物及缺陷非接觸測量之差分波長光致發光 |
| TWI439684B (zh) | 2005-07-06 | 2014-06-01 | Nanometrics Inc | 具自晶圓或其他工件特定材料層所發射光致發光信號優先偵測之光致發光成像 |
| US20070008526A1 (en) * | 2005-07-08 | 2007-01-11 | Andrzej Buczkowski | Apparatus and method for non-contact assessment of a constituent in semiconductor workpieces |
| JP5028787B2 (ja) * | 2005-11-04 | 2012-09-19 | カシオ計算機株式会社 | Ｅｐｍａ装置 |
| US20070108387A1 (en) * | 2005-11-14 | 2007-05-17 | Xradia, Inc. | Tunable x-ray fluorescence imager for multi-element analysis |
| AU2007208311A1 (en) * | 2006-01-24 | 2007-08-02 | Brookhaven Science Associates | Systems and methods for detecting an image of an object by use of an X-ray beam having a polychromatic distribution |
| US20070176119A1 (en) * | 2006-01-30 | 2007-08-02 | Accent Optical Technologies, Inc. | Apparatuses and methods for analyzing semiconductor workpieces |
| US7796726B1 (en) * | 2006-02-14 | 2010-09-14 | University Of Maryland, Baltimore County | Instrument and method for X-ray diffraction, fluorescence, and crystal texture analysis without sample preparation |
| US7536266B2 (en) * | 2006-04-17 | 2009-05-19 | Lincoln Global, Inc. | Universal X-ray fluorescence calibration technique for wire surface analysis |
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| US8041006B2 (en) * | 2007-04-11 | 2011-10-18 | The Invention Science Fund I Llc | Aspects of compton scattered X-ray visualization, imaging, or information providing |
| US7711089B2 (en) * | 2007-04-11 | 2010-05-04 | The Invention Science Fund I, Llc | Scintillator aspects of compton scattered X-ray visualization, imaging, or information providing |
| US20080253627A1 (en) * | 2007-04-11 | 2008-10-16 | Searete LLC, a limited liability corporation of | Compton scattered X-ray visualization, imaging, or information provider using image combining |
| US20080253527A1 (en) * | 2007-04-11 | 2008-10-16 | Searete Llc, A Limited Liability Corporation Of The State Of Delaware | Limiting compton scattered x-ray visualizing, imaging, or information providing at particular regions |
| US20080253525A1 (en) * | 2007-04-11 | 2008-10-16 | Boyden Edward S | Compton scattered x-ray visualizing, imaging, or information providing of at least some dissimilar matter |
| US8837677B2 (en) * | 2007-04-11 | 2014-09-16 | The Invention Science Fund I Llc | Method and system for compton scattered X-ray depth visualization, imaging, or information provider |
| US8000438B2 (en) * | 2007-09-28 | 2011-08-16 | The Invention Science Fund I, Llc | Tool based X-ray fluorescence visualizing, imaging, or information providing |
| US7724867B2 (en) | 2007-09-28 | 2010-05-25 | Invention Science Fund I, Llc | Proximity-based X-Ray fluorescence visualizer, imager, or information provider |
| US7702066B2 (en) * | 2007-09-28 | 2010-04-20 | Searete Llc | Portable aspects for x-ray fluorescence visualizer, imager, or information provider |
| US7738627B2 (en) * | 2007-09-28 | 2010-06-15 | The Invention Science Fund I, Llc | Geometric X-ray fluorescence visualizer, imager, or information provider |
| US20090086903A1 (en) * | 2007-09-28 | 2009-04-02 | Searete LLC, a limited liability corporation of | Selective elemental color providing for X-ray fluorescence visualization, imaging, or information providing |
| US20090086899A1 (en) * | 2007-09-28 | 2009-04-02 | Searete Llc, A Limited Liability Corporation Of The State Of Delaware | Repositioning X-ray fluorescence visualizer, imager, or information provider |
| US7773722B2 (en) * | 2007-09-28 | 2010-08-10 | The Invention Science Fund I, Llc | Personal transportable X-ray fluorescence visualizing, imaging, or information providing |
| US8041005B2 (en) * | 2007-09-28 | 2011-10-18 | The Invention Science Fund I, Llc | X-ray fluorescence visualizer, imager, or information provider |
| US7825376B2 (en) * | 2007-09-28 | 2010-11-02 | The Invention Science Fund I | Scintillator aspects for X-ray fluorescence visualizer, imager, or information provider |
| AU2009212187B2 (en) * | 2008-02-06 | 2014-05-01 | Fei Company | A method and system for spectrum data analysis |
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