CN1656373B - 元素特定的x射线荧光显微镜以及操作方法 - Google Patents

元素特定的x射线荧光显微镜以及操作方法 Download PDF

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CN1656373B
CN1656373B CN038123215A CN03812321A CN1656373B CN 1656373 B CN1656373 B CN 1656373B CN 038123215 A CN038123215 A CN 038123215A CN 03812321 A CN03812321 A CN 03812321A CN 1656373 B CN1656373 B CN 1656373B
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imaging
radiation
ray fluorescence
fluorescence microscope
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CN1656373A (zh
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云文兵
肯尼斯·W·尼尔
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Carle Zeiss Aike Ray Microscope Co
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Xradia Inc
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/223—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material by irradiating the sample with X-rays or gamma-rays and by measuring X-ray fluorescence
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
    • G21K1/06—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diffraction, refraction or reflection, e.g. monochromators
    • G21K1/062—Devices having a multilayer structure
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/07—Investigating materials by wave or particle radiation secondary emission
    • G01N2223/076—X-ray fluorescence

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  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Nanotechnology (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Mathematical Physics (AREA)
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  • Crystallography & Structural Chemistry (AREA)
  • General Engineering & Computer Science (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
CN038123215A 2002-05-29 2003-05-29 元素特定的x射线荧光显微镜以及操作方法 Expired - Lifetime CN1656373B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US10/157,089 2002-05-29
US10/157,089 US7245696B2 (en) 2002-05-29 2002-05-29 Element-specific X-ray fluorescence microscope and method of operation
PCT/US2003/016913 WO2003102564A2 (en) 2002-05-29 2003-05-29 Element-specific x-ray fluorescence microscope using multiple imaging systems comprising a zone plate

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CN1656373A CN1656373A (zh) 2005-08-17
CN1656373B true CN1656373B (zh) 2010-06-02

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US (2) US7245696B2 (enExample)
EP (1) EP1511994A2 (enExample)
JP (1) JP2005527833A (enExample)
KR (1) KR20050010835A (enExample)
CN (1) CN1656373B (enExample)
AU (1) AU2003232417A1 (enExample)
WO (1) WO2003102564A2 (enExample)

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US7183547B2 (en) 2007-02-27
AU2003232417A1 (en) 2003-12-19
US20050109936A1 (en) 2005-05-26
CN1656373A (zh) 2005-08-17
WO2003102564A3 (en) 2004-03-18
EP1511994A2 (en) 2005-03-09
AU2003232417A8 (en) 2003-12-19
JP2005527833A (ja) 2005-09-15
WO2003102564A2 (en) 2003-12-11
US20030223536A1 (en) 2003-12-04
KR20050010835A (ko) 2005-01-28
US7245696B2 (en) 2007-07-17

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