KR20040032928A - 광학 빔 균질화 장치 및 설비 - Google Patents

광학 빔 균질화 장치 및 설비 Download PDF

Info

Publication number
KR20040032928A
KR20040032928A KR10-2004-7002338A KR20047002338A KR20040032928A KR 20040032928 A KR20040032928 A KR 20040032928A KR 20047002338 A KR20047002338 A KR 20047002338A KR 20040032928 A KR20040032928 A KR 20040032928A
Authority
KR
South Korea
Prior art keywords
convex
sections
concave
section
cross
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
KR10-2004-7002338A
Other languages
English (en)
Korean (ko)
Inventor
알렉쎄이미하일로프
Original Assignee
헨처-리쏘췐코 파텐트페어발퉁스 게엠베하 운트 코. 카게
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 헨처-리쏘췐코 파텐트페어발퉁스 게엠베하 운트 코. 카게 filed Critical 헨처-리쏘췐코 파텐트페어발퉁스 게엠베하 운트 코. 카게
Publication of KR20040032928A publication Critical patent/KR20040032928A/ko
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses
    • G02B3/02—Simple or compound lenses with non-spherical faces
    • G02B3/08—Simple or compound lenses with non-spherical faces with discontinuous faces, e.g. Fresnel lens
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
    • G02B19/0033—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use
    • G02B19/0047—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source
    • G02B19/0052—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source the light source comprising a laser diode
    • G02B19/0057—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source the light source comprising a laser diode in the form of a laser diode array, e.g. laser diode bar
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
    • G02B19/0004—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed
    • G02B19/0009—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed having refractive surfaces only
    • G02B19/0014—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed having refractive surfaces only at least one surface having optical power
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
    • G02B19/0033—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use
    • G02B19/0095—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with ultraviolet radiation
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0927—Systems for changing the beam intensity distribution, e.g. Gaussian to top-hat
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0938—Using specific optical elements
    • G02B27/095—Refractive optical elements
    • G02B27/0955—Lenses
    • G02B27/0966—Cylindrical lenses
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0938—Using specific optical elements
    • G02B27/0977—Reflective elements

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Lenses (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Laser Beam Processing (AREA)
  • Recrystallisation Techniques (AREA)
  • Air Bags (AREA)
  • Spectrometry And Color Measurement (AREA)
KR10-2004-7002338A 2001-08-17 2002-06-03 광학 빔 균질화 장치 및 설비 Ceased KR20040032928A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE10139355A DE10139355A1 (de) 2001-08-17 2001-08-17 Anordnung und Vorrichtung zur optischen Strahlhomogenisierung
DE10139355.5 2001-08-17
PCT/EP2002/006042 WO2003016963A2 (de) 2001-08-17 2002-06-03 Anordnung und vorrichtung zur optischen strahlhomogenisierung

Publications (1)

Publication Number Publication Date
KR20040032928A true KR20040032928A (ko) 2004-04-17

Family

ID=7695049

Family Applications (1)

Application Number Title Priority Date Filing Date
KR10-2004-7002338A Ceased KR20040032928A (ko) 2001-08-17 2002-06-03 광학 빔 균질화 장치 및 설비

Country Status (9)

Country Link
US (1) US20040223225A1 (enExample)
EP (1) EP1421415B1 (enExample)
JP (1) JP2004521398A (enExample)
KR (1) KR20040032928A (enExample)
CN (1) CN100414322C (enExample)
AT (1) ATE549655T1 (enExample)
AU (1) AU2002319192A1 (enExample)
DE (1) DE10139355A1 (enExample)
WO (1) WO2003016963A2 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101282582B1 (ko) * 2004-04-26 2013-07-04 리모 파텐트페어발퉁 게엠베하 운트 코. 카게 광 빔 균일화 장치 및 방법

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10327733C5 (de) * 2003-06-18 2012-04-19 Limo Patentverwaltung Gmbh & Co. Kg Vorrichtung zur Formung eines Lichtstrahls
JP4579575B2 (ja) 2004-05-14 2010-11-10 株式会社半導体エネルギー研究所 レーザ照射方法及びレーザ照射装置
JP3963275B2 (ja) * 2004-07-16 2007-08-22 株式会社エンプラス 面光源装置、照明ユニット及び光束制御部材
DE102004039936A1 (de) * 2004-08-17 2006-02-23 Hentze-Lissotschenko Patentverwaltungs Gmbh & Co. Kg Vorrichtung zur Homogenisierung von Licht sowie Verfahren zur Herstellung der Vorrichtung
US7400456B2 (en) 2004-09-21 2008-07-15 Avago Technologies Ecbu Ip Pte Ltd Lens having seamless profile defined by cubic polynomial function
KR101098338B1 (ko) 2005-04-22 2011-12-26 삼성전자주식회사 광학 패키지, 광학 렌즈 및 이를 갖는 백라이트 어셈블리및 표시장치
WO2007038954A1 (de) * 2005-09-30 2007-04-12 Limo Patentverwaltung Gmbh & Co. Kg Vorrichtung zur homogenisierung von licht
WO2007048622A1 (de) * 2005-10-27 2007-05-03 Limo Patentverwaltung Gmbh & Co. Kg. Vorrichtung zur homogenisierung von licht
US7907341B2 (en) * 2006-09-28 2011-03-15 Sumitomo Electric Industries, Ltd. Laser processing method and laser processing apparatus
DE102008017947A1 (de) 2008-04-09 2009-10-15 Limo Patentverwaltung Gmbh & Co. Kg Vorrichtung, Anordnung und Verfahren zur Homogenisierung zumindest teilweise kohärenten Laserlichts
DE102008024697B4 (de) 2008-05-21 2014-02-27 Limo Patentverwaltung Gmbh & Co. Kg Vorrichtung zur Homogenisierung zumindest teilweise kohärenten Laserlichts
DE102008027231B4 (de) * 2008-06-06 2016-03-03 Limo Patentverwaltung Gmbh & Co. Kg Vorrichtung zur Strahlformung
DE102009010693A1 (de) 2009-02-26 2010-09-02 Limo Patentverwaltung Gmbh & Co. Kg Vorrichtung zur Homogenisierung von Laserstrahlung
US9046500B2 (en) * 2012-12-20 2015-06-02 Kla-Tencor Corporation Adaptable illuminating apparatus, system, and method for extreme ultra-violet light
NL2017493B1 (en) * 2016-09-19 2018-03-27 Kulicke & Soffa Liteq B V Optical beam homogenizer based on a lens array

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3476463A (en) * 1965-05-11 1969-11-04 Perkin Elmer Corp Coherent light optical system yielding an output beam of desired intensity distribution at a desired equiphase surface
JPS49114434A (enExample) * 1973-02-12 1974-10-31
US4560259A (en) * 1980-10-31 1985-12-24 Humphrey Instruments, Inc. Objective refractor for the eye
AU553164B2 (en) * 1980-10-31 1986-07-03 Allergan Humphrey Objective refractor for the eye
US4605282A (en) * 1983-12-22 1986-08-12 Pyramid Optical, Inc. Line lens and method of design therefor
US5400114A (en) * 1991-09-05 1995-03-21 Hitachi, Ltd. Rear-projection screen and a rear projection image display employing the rear-projection screen
DE19635942A1 (de) * 1996-09-05 1998-03-12 Vitaly Dr Lissotschenko Optisches Strahlformungssystem
US6115181A (en) * 1996-11-22 2000-09-05 3M Innovative Properties Company Variable beam splitter having opposed alternating convex and concave lens structures
JPH10253916A (ja) * 1997-03-10 1998-09-25 Semiconductor Energy Lab Co Ltd レーザー光学装置
JP2000111714A (ja) * 1998-09-30 2000-04-21 Konica Corp ソフトフォーカスフィルタおよびソフトフォーカスフィルタユニット
JP2000321404A (ja) * 1999-05-12 2000-11-24 Keiwa Inc 光拡散シート

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101282582B1 (ko) * 2004-04-26 2013-07-04 리모 파텐트페어발퉁 게엠베하 운트 코. 카게 광 빔 균일화 장치 및 방법

Also Published As

Publication number Publication date
AU2002319192A1 (en) 2003-03-03
EP1421415A2 (de) 2004-05-26
WO2003016963A3 (de) 2003-10-23
ATE549655T1 (de) 2012-03-15
US20040223225A1 (en) 2004-11-11
WO2003016963A2 (de) 2003-02-27
CN100414322C (zh) 2008-08-27
EP1421415B1 (de) 2012-03-14
CN1543578A (zh) 2004-11-03
JP2004521398A (ja) 2004-07-15
DE10139355A1 (de) 2003-02-27

Similar Documents

Publication Publication Date Title
KR20040032928A (ko) 광학 빔 균질화 장치 및 설비
US7085062B2 (en) Apparatus for shaping a light beam
DE69922224T2 (de) Beleuchtungssystem mit einem kantenbeleuchteten hohllichtleiter und linsenförmigen optische strukturen
CN103270437B (zh) 提供均质和均匀光束的光学光混合器
DE102004026530B3 (de) Optikkörper
US7532406B2 (en) Device for homogenizing light
KR101282582B1 (ko) 광 빔 균일화 장치 및 방법
EP1359443A1 (de) Optisches koppelsystem
DE102010053781B4 (de) Vorrichtung zur Umwandlung von Laserstrahlung in Laserstrahlung mit einem M-Profil
KR101194972B1 (ko) 광 균일화 장치
EP3214477A2 (de) Vorrichtung zur formung von laserstrahlung
EP3168657A1 (de) Vorsatzoptik und vorsatzoptikanordnung mit mehreren vorsatzoptiken
EP3084497B1 (de) Vorrichtung zur formung von laserstrahlung
DE19532340B4 (de) Vorrichtung zur Erzeugung parallelen Lichts unter Verwendung zweier in Reihe angeordneter Spiegel
JP4820377B2 (ja) シュワルツシルト対物鏡を使用してフォトマスクの縮写像を投影する装置
WO2019072633A1 (de) Optische vorrichtung für eine abstandsmessvorrichtung nach dem lidar-prinzip
DE102010052675A1 (de) Phasenmischeinrichtung, Beleuchtungseinrichtung und Verfahren zum Verringern der räumlichen Kohärenz elektromagnetischer Strahlung
DE102005005355B4 (de) Vorrichtung zur Formung eines Lichtstrahls
WO2019219488A1 (de) Head-up-display
DE10109592C2 (de) Anordnung zum Erzeugen eines leuchtenden Feldes
WO2025026993A1 (de) Mems-projektor mit wellenleiter zur projektion von licht
DE19940207A1 (de) Reflektorsystem zum Führen von Licht unter kleinen Einfallswinkeln
WO2024256409A1 (de) Mikroscannersystem mit einer strahlungsquelle und einem mikroscanner mit strahlungsdurchgangsbereich für von der strahlungsquelle abgegebene strahlung
KR20070099581A (ko) 광 균일화 장치
WO2006037566A1 (de) Laseranordnung

Legal Events

Date Code Title Description
PA0105 International application

Patent event date: 20040217

Patent event code: PA01051R01D

Comment text: International Patent Application

PG1501 Laying open of application
A201 Request for examination
PA0201 Request for examination

Patent event code: PA02012R01D

Patent event date: 20070531

Comment text: Request for Examination of Application

E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

Comment text: Notification of reason for refusal

Patent event date: 20081218

Patent event code: PE09021S01D

E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

Comment text: Notification of reason for refusal

Patent event date: 20090716

Patent event code: PE09021S01D

E601 Decision to refuse application
PE0601 Decision on rejection of patent

Patent event date: 20100114

Comment text: Decision to Refuse Application

Patent event code: PE06012S01D

Patent event date: 20090716

Comment text: Notification of reason for refusal

Patent event code: PE06011S01I

Patent event date: 20081218

Comment text: Notification of reason for refusal

Patent event code: PE06011S01I