DE10139355A1 - Anordnung und Vorrichtung zur optischen Strahlhomogenisierung - Google Patents

Anordnung und Vorrichtung zur optischen Strahlhomogenisierung

Info

Publication number
DE10139355A1
DE10139355A1 DE10139355A DE10139355A DE10139355A1 DE 10139355 A1 DE10139355 A1 DE 10139355A1 DE 10139355 A DE10139355 A DE 10139355A DE 10139355 A DE10139355 A DE 10139355A DE 10139355 A1 DE10139355 A1 DE 10139355A1
Authority
DE
Germany
Prior art keywords
sections
convex
concave
exit surface
curvature
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE10139355A
Other languages
German (de)
English (en)
Inventor
Alexei Mikhailov
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Focuslight Germany GmbH
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to DE10139355A priority Critical patent/DE10139355A1/de
Priority to KR10-2004-7002338A priority patent/KR20040032928A/ko
Priority to AT02748729T priority patent/ATE549655T1/de
Priority to PCT/EP2002/006042 priority patent/WO2003016963A2/de
Priority to US10/275,157 priority patent/US20040223225A1/en
Priority to AU2002319192A priority patent/AU2002319192A1/en
Priority to CNB028161394A priority patent/CN100414322C/zh
Priority to JP2003521410A priority patent/JP2004521398A/ja
Priority to EP02748729A priority patent/EP1421415B1/de
Publication of DE10139355A1 publication Critical patent/DE10139355A1/de
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses
    • G02B3/02—Simple or compound lenses with non-spherical faces
    • G02B3/08—Simple or compound lenses with non-spherical faces with discontinuous faces, e.g. Fresnel lens
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
    • G02B19/0033—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use
    • G02B19/0047—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source
    • G02B19/0052—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source the light source comprising a laser diode
    • G02B19/0057—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source the light source comprising a laser diode in the form of a laser diode array, e.g. laser diode bar
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
    • G02B19/0004—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed
    • G02B19/0009—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed having refractive surfaces only
    • G02B19/0014—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed having refractive surfaces only at least one surface having optical power
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
    • G02B19/0033—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use
    • G02B19/0095—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with ultraviolet radiation
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0927—Systems for changing the beam intensity distribution, e.g. Gaussian to top-hat
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0938—Using specific optical elements
    • G02B27/095—Refractive optical elements
    • G02B27/0955—Lenses
    • G02B27/0966—Cylindrical lenses
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0938—Using specific optical elements
    • G02B27/0977—Reflective elements

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Lenses (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Recrystallisation Techniques (AREA)
  • Air Bags (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Laser Beam Processing (AREA)
DE10139355A 2001-08-17 2001-08-17 Anordnung und Vorrichtung zur optischen Strahlhomogenisierung Withdrawn DE10139355A1 (de)

Priority Applications (9)

Application Number Priority Date Filing Date Title
DE10139355A DE10139355A1 (de) 2001-08-17 2001-08-17 Anordnung und Vorrichtung zur optischen Strahlhomogenisierung
KR10-2004-7002338A KR20040032928A (ko) 2001-08-17 2002-06-03 광학 빔 균질화 장치 및 설비
AT02748729T ATE549655T1 (de) 2001-08-17 2002-06-03 Anordnung und vorrichtung zur optischen strahlhomogenisierung
PCT/EP2002/006042 WO2003016963A2 (de) 2001-08-17 2002-06-03 Anordnung und vorrichtung zur optischen strahlhomogenisierung
US10/275,157 US20040223225A1 (en) 2001-08-17 2002-06-03 Arrangement and device for optical beam homogenization
AU2002319192A AU2002319192A1 (en) 2001-08-17 2002-06-03 Arrangement and device for optical beam homogenization
CNB028161394A CN100414322C (zh) 2001-08-17 2002-06-03 用于使光束均匀化的装置和设备
JP2003521410A JP2004521398A (ja) 2001-08-17 2002-06-03 光線を光学的に均質化するための配置および装置
EP02748729A EP1421415B1 (de) 2001-08-17 2002-06-03 Anordnung und vorrichtung zur optischen strahlhomogenisierung

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE10139355A DE10139355A1 (de) 2001-08-17 2001-08-17 Anordnung und Vorrichtung zur optischen Strahlhomogenisierung

Publications (1)

Publication Number Publication Date
DE10139355A1 true DE10139355A1 (de) 2003-02-27

Family

ID=7695049

Family Applications (1)

Application Number Title Priority Date Filing Date
DE10139355A Withdrawn DE10139355A1 (de) 2001-08-17 2001-08-17 Anordnung und Vorrichtung zur optischen Strahlhomogenisierung

Country Status (9)

Country Link
US (1) US20040223225A1 (enExample)
EP (1) EP1421415B1 (enExample)
JP (1) JP2004521398A (enExample)
KR (1) KR20040032928A (enExample)
CN (1) CN100414322C (enExample)
AT (1) ATE549655T1 (enExample)
AU (1) AU2002319192A1 (enExample)
DE (1) DE10139355A1 (enExample)
WO (1) WO2003016963A2 (enExample)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10327733B3 (de) * 2003-06-18 2005-03-24 Hentze-Lissotschenko Patentverwaltungs Gmbh & Co.Kg Vorrichtung zur Formung eines Lichtstrahls
DE102004020250A1 (de) * 2004-04-26 2005-11-10 Hentze-Lissotschenko Patentverwaltungs Gmbh & Co. Kg Vorrichtung und Verfahren zur optischen Strahlhomogenisierung
WO2006018167A1 (de) * 2004-08-17 2006-02-23 Hentze-Lissotschenko Patentverwaltungs Gmbh & Co. Kg Vorrichtung zur homogenisierung von licht sowie verfahren zur herstellung der vorrichtung
DE102008017947A1 (de) 2008-04-09 2009-10-15 Limo Patentverwaltung Gmbh & Co. Kg Vorrichtung, Anordnung und Verfahren zur Homogenisierung zumindest teilweise kohärenten Laserlichts
DE102008024697A1 (de) 2008-05-21 2009-11-26 Limo Patentverwaltung Gmbh & Co. Kg Vorrichtung zur Homogenisierung zumindest teilweise kohärenten Laserlichts

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4579575B2 (ja) 2004-05-14 2010-11-10 株式会社半導体エネルギー研究所 レーザ照射方法及びレーザ照射装置
JP3963275B2 (ja) * 2004-07-16 2007-08-22 株式会社エンプラス 面光源装置、照明ユニット及び光束制御部材
US7400456B2 (en) 2004-09-21 2008-07-15 Avago Technologies Ecbu Ip Pte Ltd Lens having seamless profile defined by cubic polynomial function
KR101098338B1 (ko) 2005-04-22 2011-12-26 삼성전자주식회사 광학 패키지, 광학 렌즈 및 이를 갖는 백라이트 어셈블리및 표시장치
WO2007038954A1 (de) * 2005-09-30 2007-04-12 Limo Patentverwaltung Gmbh & Co. Kg Vorrichtung zur homogenisierung von licht
WO2007048622A1 (de) * 2005-10-27 2007-05-03 Limo Patentverwaltung Gmbh & Co. Kg. Vorrichtung zur homogenisierung von licht
US7907341B2 (en) * 2006-09-28 2011-03-15 Sumitomo Electric Industries, Ltd. Laser processing method and laser processing apparatus
DE102008027231B4 (de) * 2008-06-06 2016-03-03 Limo Patentverwaltung Gmbh & Co. Kg Vorrichtung zur Strahlformung
DE102009010693A1 (de) 2009-02-26 2010-09-02 Limo Patentverwaltung Gmbh & Co. Kg Vorrichtung zur Homogenisierung von Laserstrahlung
US9046500B2 (en) * 2012-12-20 2015-06-02 Kla-Tencor Corporation Adaptable illuminating apparatus, system, and method for extreme ultra-violet light
NL2017493B1 (en) * 2016-09-19 2018-03-27 Kulicke & Soffa Liteq B V Optical beam homogenizer based on a lens array

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3476463A (en) * 1965-05-11 1969-11-04 Perkin Elmer Corp Coherent light optical system yielding an output beam of desired intensity distribution at a desired equiphase surface
DE2406168A1 (de) * 1973-02-12 1974-08-15 Bausch & Lomb Lichtstreuschirm fuer optische geraete
US4605282A (en) * 1983-12-22 1986-08-12 Pyramid Optical, Inc. Line lens and method of design therefor
DE19635942A1 (de) * 1996-09-05 1998-03-12 Vitaly Dr Lissotschenko Optisches Strahlformungssystem
US6212012B1 (en) * 1997-03-10 2001-04-03 Semiconductor Energy Laboratory Co., Ltd. Laser optical apparatus

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4560259A (en) * 1980-10-31 1985-12-24 Humphrey Instruments, Inc. Objective refractor for the eye
AU553164B2 (en) * 1980-10-31 1986-07-03 Allergan Humphrey Objective refractor for the eye
US5400114A (en) * 1991-09-05 1995-03-21 Hitachi, Ltd. Rear-projection screen and a rear projection image display employing the rear-projection screen
US6115181A (en) * 1996-11-22 2000-09-05 3M Innovative Properties Company Variable beam splitter having opposed alternating convex and concave lens structures
JP2000111714A (ja) * 1998-09-30 2000-04-21 Konica Corp ソフトフォーカスフィルタおよびソフトフォーカスフィルタユニット
JP2000321404A (ja) * 1999-05-12 2000-11-24 Keiwa Inc 光拡散シート

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3476463A (en) * 1965-05-11 1969-11-04 Perkin Elmer Corp Coherent light optical system yielding an output beam of desired intensity distribution at a desired equiphase surface
DE2406168A1 (de) * 1973-02-12 1974-08-15 Bausch & Lomb Lichtstreuschirm fuer optische geraete
US4605282A (en) * 1983-12-22 1986-08-12 Pyramid Optical, Inc. Line lens and method of design therefor
DE19635942A1 (de) * 1996-09-05 1998-03-12 Vitaly Dr Lissotschenko Optisches Strahlformungssystem
US6212012B1 (en) * 1997-03-10 2001-04-03 Semiconductor Energy Laboratory Co., Ltd. Laser optical apparatus

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
2000111714 A *
JP Patent Abstracts of Japan: 2000321404 A *

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10327733B3 (de) * 2003-06-18 2005-03-24 Hentze-Lissotschenko Patentverwaltungs Gmbh & Co.Kg Vorrichtung zur Formung eines Lichtstrahls
US7085062B2 (en) 2003-06-18 2006-08-01 Hentz-Lissotschenko Patentverwaltungs Gmbh & Co. Kg Apparatus for shaping a light beam
DE10327733C5 (de) * 2003-06-18 2012-04-19 Limo Patentverwaltung Gmbh & Co. Kg Vorrichtung zur Formung eines Lichtstrahls
DE102004020250A1 (de) * 2004-04-26 2005-11-10 Hentze-Lissotschenko Patentverwaltungs Gmbh & Co. Kg Vorrichtung und Verfahren zur optischen Strahlhomogenisierung
WO2006018167A1 (de) * 2004-08-17 2006-02-23 Hentze-Lissotschenko Patentverwaltungs Gmbh & Co. Kg Vorrichtung zur homogenisierung von licht sowie verfahren zur herstellung der vorrichtung
US7414789B2 (en) 2004-08-17 2008-08-19 Limo-Patentverwaltung Gmbh & Co. Kg Apparatus for homogenizing light and method for producing the apparatus
DE102008017947A1 (de) 2008-04-09 2009-10-15 Limo Patentverwaltung Gmbh & Co. Kg Vorrichtung, Anordnung und Verfahren zur Homogenisierung zumindest teilweise kohärenten Laserlichts
DE102008024697A1 (de) 2008-05-21 2009-11-26 Limo Patentverwaltung Gmbh & Co. Kg Vorrichtung zur Homogenisierung zumindest teilweise kohärenten Laserlichts

Also Published As

Publication number Publication date
AU2002319192A1 (en) 2003-03-03
KR20040032928A (ko) 2004-04-17
EP1421415A2 (de) 2004-05-26
WO2003016963A3 (de) 2003-10-23
ATE549655T1 (de) 2012-03-15
US20040223225A1 (en) 2004-11-11
WO2003016963A2 (de) 2003-02-27
CN100414322C (zh) 2008-08-27
EP1421415B1 (de) 2012-03-14
CN1543578A (zh) 2004-11-03
JP2004521398A (ja) 2004-07-15

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Legal Events

Date Code Title Description
OM8 Search report available as to paragraph 43 lit. 1 sentence 1 patent law
8127 New person/name/address of the applicant

Owner name: HENTZE-LISSOTSCHENKO PATENTVERWALTUNGS GMBH & CO.K

8127 New person/name/address of the applicant

Owner name: LIMO PATENTVERWALTUNG GMBH & CO. KG, 36419 GER, DE

8141 Disposal/no request for examination