CN100414322C - 用于使光束均匀化的装置和设备 - Google Patents

用于使光束均匀化的装置和设备 Download PDF

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Publication number
CN100414322C
CN100414322C CNB028161394A CN02816139A CN100414322C CN 100414322 C CN100414322 C CN 100414322C CN B028161394 A CNB028161394 A CN B028161394A CN 02816139 A CN02816139 A CN 02816139A CN 100414322 C CN100414322 C CN 100414322C
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China
Prior art keywords
convex
concave
parts
exit surface
entrance
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CNB028161394A
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English (en)
Chinese (zh)
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CN1543578A (zh
Inventor
阿列克谢·米哈伊洛夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hentze Lissotschenko Patentverwaltungs GmbH and Co KG
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Hentze Lissotschenko Patentverwaltungs GmbH and Co KG
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Publication of CN1543578A publication Critical patent/CN1543578A/zh
Application granted granted Critical
Publication of CN100414322C publication Critical patent/CN100414322C/zh
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses
    • G02B3/02—Simple or compound lenses with non-spherical faces
    • G02B3/08—Simple or compound lenses with non-spherical faces with discontinuous faces, e.g. Fresnel lens
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
    • G02B19/0033—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use
    • G02B19/0047—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source
    • G02B19/0052—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source the light source comprising a laser diode
    • G02B19/0057—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source the light source comprising a laser diode in the form of a laser diode array, e.g. laser diode bar
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
    • G02B19/0004—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed
    • G02B19/0009—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed having refractive surfaces only
    • G02B19/0014—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed having refractive surfaces only at least one surface having optical power
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
    • G02B19/0033—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use
    • G02B19/0095—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with ultraviolet radiation
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0927—Systems for changing the beam intensity distribution, e.g. Gaussian to top-hat
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0938—Using specific optical elements
    • G02B27/095—Refractive optical elements
    • G02B27/0955—Lenses
    • G02B27/0966—Cylindrical lenses
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0938—Using specific optical elements
    • G02B27/0977—Reflective elements

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Lenses (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Recrystallisation Techniques (AREA)
  • Air Bags (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Laser Beam Processing (AREA)
CNB028161394A 2001-08-17 2002-06-03 用于使光束均匀化的装置和设备 Expired - Fee Related CN100414322C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10139355A DE10139355A1 (de) 2001-08-17 2001-08-17 Anordnung und Vorrichtung zur optischen Strahlhomogenisierung
DE10139355.5 2001-08-17

Publications (2)

Publication Number Publication Date
CN1543578A CN1543578A (zh) 2004-11-03
CN100414322C true CN100414322C (zh) 2008-08-27

Family

ID=7695049

Family Applications (1)

Application Number Title Priority Date Filing Date
CNB028161394A Expired - Fee Related CN100414322C (zh) 2001-08-17 2002-06-03 用于使光束均匀化的装置和设备

Country Status (9)

Country Link
US (1) US20040223225A1 (enExample)
EP (1) EP1421415B1 (enExample)
JP (1) JP2004521398A (enExample)
KR (1) KR20040032928A (enExample)
CN (1) CN100414322C (enExample)
AT (1) ATE549655T1 (enExample)
AU (1) AU2002319192A1 (enExample)
DE (1) DE10139355A1 (enExample)
WO (1) WO2003016963A2 (enExample)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10327733C5 (de) * 2003-06-18 2012-04-19 Limo Patentverwaltung Gmbh & Co. Kg Vorrichtung zur Formung eines Lichtstrahls
DE102004020250A1 (de) * 2004-04-26 2005-11-10 Hentze-Lissotschenko Patentverwaltungs Gmbh & Co. Kg Vorrichtung und Verfahren zur optischen Strahlhomogenisierung
JP4579575B2 (ja) 2004-05-14 2010-11-10 株式会社半導体エネルギー研究所 レーザ照射方法及びレーザ照射装置
JP3963275B2 (ja) * 2004-07-16 2007-08-22 株式会社エンプラス 面光源装置、照明ユニット及び光束制御部材
DE102004039936A1 (de) * 2004-08-17 2006-02-23 Hentze-Lissotschenko Patentverwaltungs Gmbh & Co. Kg Vorrichtung zur Homogenisierung von Licht sowie Verfahren zur Herstellung der Vorrichtung
US7400456B2 (en) 2004-09-21 2008-07-15 Avago Technologies Ecbu Ip Pte Ltd Lens having seamless profile defined by cubic polynomial function
KR101098338B1 (ko) 2005-04-22 2011-12-26 삼성전자주식회사 광학 패키지, 광학 렌즈 및 이를 갖는 백라이트 어셈블리및 표시장치
WO2007038954A1 (de) * 2005-09-30 2007-04-12 Limo Patentverwaltung Gmbh & Co. Kg Vorrichtung zur homogenisierung von licht
WO2007048622A1 (de) * 2005-10-27 2007-05-03 Limo Patentverwaltung Gmbh & Co. Kg. Vorrichtung zur homogenisierung von licht
US7907341B2 (en) * 2006-09-28 2011-03-15 Sumitomo Electric Industries, Ltd. Laser processing method and laser processing apparatus
DE102008017947A1 (de) 2008-04-09 2009-10-15 Limo Patentverwaltung Gmbh & Co. Kg Vorrichtung, Anordnung und Verfahren zur Homogenisierung zumindest teilweise kohärenten Laserlichts
DE102008024697B4 (de) 2008-05-21 2014-02-27 Limo Patentverwaltung Gmbh & Co. Kg Vorrichtung zur Homogenisierung zumindest teilweise kohärenten Laserlichts
DE102008027231B4 (de) * 2008-06-06 2016-03-03 Limo Patentverwaltung Gmbh & Co. Kg Vorrichtung zur Strahlformung
DE102009010693A1 (de) 2009-02-26 2010-09-02 Limo Patentverwaltung Gmbh & Co. Kg Vorrichtung zur Homogenisierung von Laserstrahlung
US9046500B2 (en) * 2012-12-20 2015-06-02 Kla-Tencor Corporation Adaptable illuminating apparatus, system, and method for extreme ultra-violet light
NL2017493B1 (en) * 2016-09-19 2018-03-27 Kulicke & Soffa Liteq B V Optical beam homogenizer based on a lens array

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4605282A (en) * 1983-12-22 1986-08-12 Pyramid Optical, Inc. Line lens and method of design therefor
JP2000111714A (ja) * 1998-09-30 2000-04-21 Konica Corp ソフトフォーカスフィルタおよびソフトフォーカスフィルタユニット
US6115181A (en) * 1996-11-22 2000-09-05 3M Innovative Properties Company Variable beam splitter having opposed alternating convex and concave lens structures
US6212012B1 (en) * 1997-03-10 2001-04-03 Semiconductor Energy Laboratory Co., Ltd. Laser optical apparatus
US6212011B1 (en) * 1996-09-05 2001-04-03 Vitaly Lissotschenko Optical beam-shaping system

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3476463A (en) * 1965-05-11 1969-11-04 Perkin Elmer Corp Coherent light optical system yielding an output beam of desired intensity distribution at a desired equiphase surface
JPS49114434A (enExample) * 1973-02-12 1974-10-31
US4560259A (en) * 1980-10-31 1985-12-24 Humphrey Instruments, Inc. Objective refractor for the eye
AU553164B2 (en) * 1980-10-31 1986-07-03 Allergan Humphrey Objective refractor for the eye
US5400114A (en) * 1991-09-05 1995-03-21 Hitachi, Ltd. Rear-projection screen and a rear projection image display employing the rear-projection screen
JP2000321404A (ja) * 1999-05-12 2000-11-24 Keiwa Inc 光拡散シート

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4605282A (en) * 1983-12-22 1986-08-12 Pyramid Optical, Inc. Line lens and method of design therefor
US6212011B1 (en) * 1996-09-05 2001-04-03 Vitaly Lissotschenko Optical beam-shaping system
US6115181A (en) * 1996-11-22 2000-09-05 3M Innovative Properties Company Variable beam splitter having opposed alternating convex and concave lens structures
US6212012B1 (en) * 1997-03-10 2001-04-03 Semiconductor Energy Laboratory Co., Ltd. Laser optical apparatus
JP2000111714A (ja) * 1998-09-30 2000-04-21 Konica Corp ソフトフォーカスフィルタおよびソフトフォーカスフィルタユニット

Also Published As

Publication number Publication date
AU2002319192A1 (en) 2003-03-03
KR20040032928A (ko) 2004-04-17
EP1421415A2 (de) 2004-05-26
WO2003016963A3 (de) 2003-10-23
ATE549655T1 (de) 2012-03-15
US20040223225A1 (en) 2004-11-11
WO2003016963A2 (de) 2003-02-27
EP1421415B1 (de) 2012-03-14
CN1543578A (zh) 2004-11-03
JP2004521398A (ja) 2004-07-15
DE10139355A1 (de) 2003-02-27

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Granted publication date: 20080827

Termination date: 20100603