KR20030027709A - 외관검사장치 - Google Patents
외관검사장치 Download PDFInfo
- Publication number
- KR20030027709A KR20030027709A KR1020020057997A KR20020057997A KR20030027709A KR 20030027709 A KR20030027709 A KR 20030027709A KR 1020020057997 A KR1020020057997 A KR 1020020057997A KR 20020057997 A KR20020057997 A KR 20020057997A KR 20030027709 A KR20030027709 A KR 20030027709A
- Authority
- KR
- South Korea
- Prior art keywords
- light
- polarizing plate
- mounting table
- inspection apparatus
- transmitted
- Prior art date
Links
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
- G01B11/2513—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object with several lines being projected in more than one direction, e.g. grids, patterns
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2408—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures for measuring roundness
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
- G01B11/2518—Projection by scanning of the object
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
- G01B11/254—Projection of a pattern, viewing through a pattern, e.g. moiré
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Computer Vision & Pattern Recognition (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
Description
Claims (9)
- 피검사물을 재치하는 재치대와, 재치대 위의 피검사물을 조명하는 조명수단과, 피검사물에 대향하여 마련되어진 촬상수단을 갖춘 외관검사장치에 있어서,재치대를 광투과재로 구성하는 것을 특징으로 하는 외관검사장치.
- 제 1항에 있어서, 상기 재치대는 투명 세라믹스로 이루어지는 것을 특징으로 하는 외관검사장치.
- 제 1항 또는 제 2항에 있어서, 상기 재치대의 뒷면에 재치대를 투과한 빛을 제거하는 투과광제거수단을 갖추는 것을 특징으로 하는 외관검사장치.
- 제 3항에 있어서, 상기 투과광제거수단은 재치대를 투과한 빛을 재치대와 다른 방향으로 반사시키는 프리즘과, 프리즘에 의해 반사되어진 빛을 흡수하는 편광판을 가지는 것을 특징으로 하는 외관검사장치.
- 제 4항에 있어서, 상기 프리즘의 입사면 및 출사면을 제외하는 외주는 외부로부터의 빛을 제거시키는 광차폐막을 가지고 있는 것을 특징으로 하는 외관검사장치.
- 제 4항에 있어서, 상기 편광판은 제1편광판과, 상기 제1편광판에 대해 평행 또는 편광방향을 직각으로 마련한 제2편광판으로 이루어지는 것을 특징으로 하는 외관검사장치.
- 제 3항에 있어서, 상기 투과광제거수단은 재치대를 투과한 빛을 흡수하는 광흡수체로 이루어지고 있는 것을 특징으로 하는 외관검사장치.
- 제 7항에 있어서, 상기 광흡수체는 제1편광판과, 상기 제1편광판에 대해 평행 또는 편광방향을 직각으로 마련한 제2편광판으로 이루어지는 것을 특징으로 하는 외관검사장치.
- 제 7항에 있어서, 상기 광흡수체는 재치대를 투과한 빛을 흡수하는 흑체(黑體)로 이루어지는 것을 특징으로 하는 외관검사장치.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2001294660A JP2003098120A (ja) | 2001-09-26 | 2001-09-26 | 外観検査装置 |
JPJP-P-2001-00294660 | 2001-09-26 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20030027709A true KR20030027709A (ko) | 2003-04-07 |
KR100490455B1 KR100490455B1 (ko) | 2005-05-19 |
Family
ID=19116227
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR10-2002-0057997A KR100490455B1 (ko) | 2001-09-26 | 2002-09-25 | 외관검사장치 |
Country Status (2)
Country | Link |
---|---|
JP (1) | JP2003098120A (ko) |
KR (1) | KR100490455B1 (ko) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8637674B2 (en) | 2009-09-02 | 2014-01-28 | Ewha University-Industry Collaboration Foundation | Pyrazole derivatives, preparation method thereof, and composition for prevention and treatment of osteoporosis containing same |
US10047067B2 (en) | 2012-08-27 | 2018-08-14 | Ewha University-Industry Collaboration Foundation | Composition for treating kidney disease comprising pyrazole derivative |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4668639B2 (ja) * | 2005-02-10 | 2011-04-13 | 株式会社フジクラ | プリント基板の観察方法 |
JP2008089489A (ja) * | 2006-10-04 | 2008-04-17 | Mitsubishi Electric Corp | 形状測定方法及び形状測定装置 |
JP7093569B2 (ja) * | 2020-02-05 | 2022-06-30 | 株式会社 コアーズ | 測定装置及び測定方法 |
JPWO2022181128A1 (ko) * | 2021-02-24 | 2022-09-01 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0776684B2 (ja) * | 1985-07-03 | 1995-08-16 | 北陽電機株式会社 | 光学式外形測定装置 |
JPH0221372A (ja) * | 1988-07-08 | 1990-01-24 | Sharp Corp | はんだ付検査装置 |
JPH0666727A (ja) * | 1992-05-27 | 1994-03-11 | Nec Corp | 印刷配線板用外観検査装置 |
JP3215858B2 (ja) * | 1998-12-25 | 2001-10-09 | ライオンエンジニアリング株式会社 | 物品外観検査装置 |
JP2001141662A (ja) * | 1999-11-18 | 2001-05-25 | Central Glass Co Ltd | 透明板状体の欠点検出方法および検出装置 |
-
2001
- 2001-09-26 JP JP2001294660A patent/JP2003098120A/ja active Pending
-
2002
- 2002-09-25 KR KR10-2002-0057997A patent/KR100490455B1/ko active IP Right Grant
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8637674B2 (en) | 2009-09-02 | 2014-01-28 | Ewha University-Industry Collaboration Foundation | Pyrazole derivatives, preparation method thereof, and composition for prevention and treatment of osteoporosis containing same |
US10047067B2 (en) | 2012-08-27 | 2018-08-14 | Ewha University-Industry Collaboration Foundation | Composition for treating kidney disease comprising pyrazole derivative |
Also Published As
Publication number | Publication date |
---|---|
JP2003098120A (ja) | 2003-04-03 |
KR100490455B1 (ko) | 2005-05-19 |
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