KR20020063503A - Cof용 오토핸들러와 cof 촬상용 조명장치 및 방법 - Google Patents
Cof용 오토핸들러와 cof 촬상용 조명장치 및 방법 Download PDFInfo
- Publication number
- KR20020063503A KR20020063503A KR1020020003530A KR20020003530A KR20020063503A KR 20020063503 A KR20020063503 A KR 20020063503A KR 1020020003530 A KR1020020003530 A KR 1020020003530A KR 20020003530 A KR20020003530 A KR 20020003530A KR 20020063503 A KR20020063503 A KR 20020063503A
- Authority
- KR
- South Korea
- Prior art keywords
- cof
- imaging
- light
- lighting
- autohandler
- Prior art date
Links
- 238000000034 method Methods 0.000 title claims description 7
- 230000001154 acute effect Effects 0.000 claims abstract description 12
- 238000005286 illumination Methods 0.000 claims description 29
- 238000003384 imaging method Methods 0.000 claims description 28
- 230000001678 irradiating effect Effects 0.000 claims description 6
- 239000000523 sample Substances 0.000 description 14
- 238000012360 testing method Methods 0.000 description 14
- 238000005259 measurement Methods 0.000 description 10
- 230000031700 light absorption Effects 0.000 description 4
- 238000005452 bending Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 238000004080 punching Methods 0.000 description 2
- 101100000339 Arabidopsis thaliana ABCG11 gene Proteins 0.000 description 1
- 101150058882 COF1 gene Proteins 0.000 description 1
- 101100328842 Dictyostelium discoideum cofA gene Proteins 0.000 description 1
- 230000004308 accommodation Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2893—Handling, conveying or loading, e.g. belts, boats, vacuum fingers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/001—Measuring interference from external sources to, or emission from, the device under test, e.g. EMC, EMI, EMP or ESD testing
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14625—Optical elements or arrangements associated with the device
- H01L27/14629—Reflectors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
- G01N2021/8812—Diffuse illumination, e.g. "sky"
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Electromagnetism (AREA)
- Life Sciences & Earth Sciences (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Health & Medical Sciences (AREA)
- General Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Abstract
Description
Claims (7)
- COF를 공급릴로부터 측정부를 경유하여 수용릴까지 반송하고, 측정부에 COF의 촬상용 조명장치를 구비하는 COF용 오토핸들러로서,상기 측정부의 상기 COF의 배면에 맞접하는 면이 광흡수 색부를 갖는 것을 특징으로 하는 COF용 오토핸들러.
- COF를 공급릴로부터 측정부를 경유하여 수용릴까지 반송하고, 측정부에 COF의 촬상용 조명장치를 구비하는 COF용 오토핸들러로서,상기 촬상용 조명장치는 상기 COF의 표면에 대하여 예각인 입사각으로, 상기 COF 표면에 광을 조사하는 조명부를 갖는 것을 특징으로 하는 COF용 오토핸들러.
- 제 2항에 있어서,상기 촬상용 조명장치가 산란광을 조사하는 것을 특징으로 하는 COF용 오토핸들러.
- COF를 촬상할 때에 사용되는 조명장치로서,상기 COF 표면에 대하여 예각인 입사각으로, 상기 COF 표면에 광을 조사하는 조명부를 갖는 것을 특징으로 하는 COF 촬상용 조명장치.
- 제 4항에 있어서,산란광을 조사하는 것을 특징으로 하는 COF 촬상용 조명장치.
- COF를 촬상할 때의 조명방법으로서,상기 COF 표면에 대하여 예각인 입사각으로, 상기 COF 표면에 광을 조사하는 것을 특징으로 하는 COF 촬상용 조명방법.
- 제 6항에 있어서,상기 COF 표면에 대하여 예각인 입사각으로, 상기 COF 표면에 산란광을 조사하는 것을 특징으로 하는 COF 촬상용 조명방법.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2001020478A JP4380926B2 (ja) | 2001-01-29 | 2001-01-29 | Cof用オートハンドラ |
JPJP-P-2001-00020478 | 2001-01-29 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20020063503A true KR20020063503A (ko) | 2002-08-03 |
KR100622791B1 KR100622791B1 (ko) | 2006-09-13 |
Family
ID=18886178
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020020003530A KR100622791B1 (ko) | 2001-01-29 | 2002-01-22 | Cof용 오토핸들러와 cof 촬상용 조명장치 및 방법 |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP4380926B2 (ko) |
KR (1) | KR100622791B1 (ko) |
TW (1) | TW571376B (ko) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2004074858A1 (ja) * | 2003-02-21 | 2004-09-02 | Nhk Spring Co., Ltd. | チップ実装用テープの検査方法及び検査に用いるプローブユニット |
WO2008132934A1 (ja) * | 2007-04-19 | 2008-11-06 | Advantest Corporation | Tcpハンドリング装置 |
WO2008132935A1 (ja) * | 2007-04-19 | 2008-11-06 | Advantest Corporation | Tcpハンドリング装置 |
-
2001
- 2001-01-29 JP JP2001020478A patent/JP4380926B2/ja not_active Expired - Lifetime
- 2001-12-20 TW TW090131729A patent/TW571376B/zh not_active IP Right Cessation
-
2002
- 2002-01-22 KR KR1020020003530A patent/KR100622791B1/ko active IP Right Grant
Also Published As
Publication number | Publication date |
---|---|
TW571376B (en) | 2004-01-11 |
JP4380926B2 (ja) | 2009-12-09 |
KR100622791B1 (ko) | 2006-09-13 |
JP2002228712A (ja) | 2002-08-14 |
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