KR20010103428A - 액정표시장치용 기판 세척장치 - Google Patents
액정표시장치용 기판 세척장치 Download PDFInfo
- Publication number
- KR20010103428A KR20010103428A KR1020000024968A KR20000024968A KR20010103428A KR 20010103428 A KR20010103428 A KR 20010103428A KR 1020000024968 A KR1020000024968 A KR 1020000024968A KR 20000024968 A KR20000024968 A KR 20000024968A KR 20010103428 A KR20010103428 A KR 20010103428A
- Authority
- KR
- South Korea
- Prior art keywords
- substrate
- roller
- cleaning
- guide
- strip
- Prior art date
Links
Classifications
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1316—Methods for cleaning the liquid crystal cells, or components thereof, during manufacture: Materials therefor
Landscapes
- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Crystallography & Structural Chemistry (AREA)
- Optics & Photonics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mathematical Physics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Liquid Crystal (AREA)
- Cleaning By Liquid Or Steam (AREA)
Abstract
Description
Claims (7)
- 기판의 세정장치로서,상기 기판을 수평방향으로 일측에서 타측으로 이송하는 이송부와;상기 이송부에 의해 이송되는 기판의 저면과 접촉하면서 상기 기판의 이송방향으로 회전하는 롤러브러쉬와;상기 이송부의 일측 상부에 위치하여 상기 이송되는 기판에 세정액을 분사하는 세정액 분사장치와;상기 세정액 분사장치에서 분사된 세정액을 상기 롤러브러쉬로 안내하는 가이드를 포함하는 기판의 세정장치.
- 제 1 항에 있어서,상기 이송부는 상/하로 상기 기판의 두께만큼 서로 이격되어 평행하게 배치되고, 상기 기판의 이송방향으로 각각 회전하는 상부롤러와 하부롤러를 가지고 있는 기판의 세정장치.
- 제 1 항에 있어서,상기 롤러브러쉬는 상기 이송부의 상기 일측에 위치한 기판의 세정장치.
- 제 1 항 또는 제 3 항 중 어느 한 항에 있어서,상기 가이드는 플레이트형상인 기판의 세정장치.
- 제 4 항에 있어서,상기 가이드는 일측과 상기 일측 보다 낮은 위치의 타측을 가지고 경사져 있으며, 상기 타측에는 상기 롤러브러쉬가 위치한 기판의 세정장치.
- 제 5 항에 있어서,상기 가이드의 상기 일측은 상기 수평방향으로 이송되는 기판의 위치보다 낮고, 상기 세정액 분사장치는 상기 가이드의 일측과 타측 사이의 상부에 위치한 기판의 세정장치.
- 제 6 항에 있어서,상기 플레이트형상인 가이드의 타측의 너비는 상기 롤러부러쉬의 길이와 같거나 큰 기판의 세정장치.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020000024968A KR100670571B1 (ko) | 2000-05-10 | 2000-05-10 | 액정표시장치용 기판 세척장치 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020000024968A KR100670571B1 (ko) | 2000-05-10 | 2000-05-10 | 액정표시장치용 기판 세척장치 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20010103428A true KR20010103428A (ko) | 2001-11-23 |
KR100670571B1 KR100670571B1 (ko) | 2007-01-17 |
Family
ID=41557831
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020000024968A KR100670571B1 (ko) | 2000-05-10 | 2000-05-10 | 액정표시장치용 기판 세척장치 |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR100670571B1 (ko) |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR960024542A (ko) * | 1994-12-31 | 1996-07-20 | 엄길용 | 기판 세척 방법 |
-
2000
- 2000-05-10 KR KR1020000024968A patent/KR100670571B1/ko not_active IP Right Cessation
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Publication number | Publication date |
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KR100670571B1 (ko) | 2007-01-17 |
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