KR102848182B1 - 벌크 음향 파 공진기 - Google Patents

벌크 음향 파 공진기

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Publication number
KR102848182B1
KR102848182B1 KR1020190035987A KR20190035987A KR102848182B1 KR 102848182 B1 KR102848182 B1 KR 102848182B1 KR 1020190035987 A KR1020190035987 A KR 1020190035987A KR 20190035987 A KR20190035987 A KR 20190035987A KR 102848182 B1 KR102848182 B1 KR 102848182B1
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KR
South Korea
Prior art keywords
layer
piezoelectric layer
overmode
baw resonator
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
KR1020190035987A
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English (en)
Korean (ko)
Other versions
KR20190113674A (ko
Inventor
조티 스와루프 사두
게르노트 팻팅거
로베르트 아이그너
미카엘 셰퍼
Original Assignee
코르보 유에스, 인크.
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Application filed by 코르보 유에스, 인크. filed Critical 코르보 유에스, 인크.
Publication of KR20190113674A publication Critical patent/KR20190113674A/ko
Priority to KR1020250113019A priority Critical patent/KR20250128936A/ko
Application granted granted Critical
Publication of KR102848182B1 publication Critical patent/KR102848182B1/ko
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H03H9/02062—Details relating to the vibration mode
    • H03H9/02078—Details relating to the vibration mode the vibration mode being overmoded
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/171—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H03H9/02015—Characteristics of piezoelectric layers, e.g. cutting angles
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H03H9/02047—Treatment of substrates
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H03H9/02157—Dimensional parameters, e.g. ratio between two dimension parameters, length, width or thickness
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/13—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials
    • H03H9/131—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials consisting of a multilayered structure
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/171—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
    • H03H9/172—Means for mounting on a substrate, i.e. means constituting the material interface confining the waves to a volume
    • H03H9/174—Membranes
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/171—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
    • H03H9/172—Means for mounting on a substrate, i.e. means constituting the material interface confining the waves to a volume
    • H03H9/175—Acoustic mirrors

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
KR1020190035987A 2018-03-28 2019-03-28 벌크 음향 파 공진기 Active KR102848182B1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020250113019A KR20250128936A (ko) 2018-03-28 2025-08-14 벌크 음향 파 공진기

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US201862649343P 2018-03-28 2018-03-28
US62/649,343 2018-03-28
US16/290,175 US11152913B2 (en) 2018-03-28 2019-03-01 Bulk acoustic wave (BAW) resonator
US16/290,175 2019-03-01

Related Child Applications (1)

Application Number Title Priority Date Filing Date
KR1020250113019A Division KR20250128936A (ko) 2018-03-28 2025-08-14 벌크 음향 파 공진기

Publications (2)

Publication Number Publication Date
KR20190113674A KR20190113674A (ko) 2019-10-08
KR102848182B1 true KR102848182B1 (ko) 2025-08-21

Family

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Family Applications (2)

Application Number Title Priority Date Filing Date
KR1020190035987A Active KR102848182B1 (ko) 2018-03-28 2019-03-28 벌크 음향 파 공진기
KR1020250113019A Pending KR20250128936A (ko) 2018-03-28 2025-08-14 벌크 음향 파 공진기

Family Applications After (1)

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Country Status (4)

Country Link
US (1) US11152913B2 (https=)
JP (3) JP2019176475A (https=)
KR (2) KR102848182B1 (https=)
CN (2) CN120377860A (https=)

Families Citing this family (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10333494B2 (en) 2014-12-24 2019-06-25 Qorvo Us, Inc. Simplified acoustic RF resonator parallel capacitance compensation
US10581403B2 (en) 2016-07-11 2020-03-03 Qorvo Us, Inc. Device having a titanium-alloyed surface
US11165413B2 (en) 2017-01-30 2021-11-02 Qorvo Us, Inc. Coupled resonator structure
US11165412B2 (en) 2017-01-30 2021-11-02 Qorvo Us, Inc. Zero-output coupled resonator filter and related radio frequency filter circuit
US10873318B2 (en) 2017-06-08 2020-12-22 Qorvo Us, Inc. Filter circuits having acoustic wave resonators in a transversal configuration
US11146247B2 (en) 2019-07-25 2021-10-12 Qorvo Us, Inc. Stacked crystal filter structures
WO2021021723A1 (en) * 2019-07-31 2021-02-04 QXONIX Inc. Acoustic device structures, devices and systems
US20230246629A1 (en) * 2019-07-31 2023-08-03 QXONIX Inc. Layers, structures, acoustic wave resonators, devices, circuits and systems
US11757430B2 (en) 2020-01-07 2023-09-12 Qorvo Us, Inc. Acoustic filter circuit for noise suppression outside resonance frequency
US11146245B2 (en) 2020-01-13 2021-10-12 Qorvo Us, Inc. Mode suppression in acoustic resonators
US11146246B2 (en) 2020-01-13 2021-10-12 Qorvo Us, Inc. Phase shift structures for acoustic resonators
JP2021136675A (ja) * 2020-02-28 2021-09-13 学校法人早稲田大学 圧電素子
US11632097B2 (en) 2020-11-04 2023-04-18 Qorvo Us, Inc. Coupled resonator filter device
CN112615599B (zh) * 2020-11-27 2022-11-15 中国电子科技集团公司第十三研究所 薄膜腔声谐振器的Mason电路模型
US11575363B2 (en) 2021-01-19 2023-02-07 Qorvo Us, Inc. Hybrid bulk acoustic wave filter
JP7627174B2 (ja) * 2021-05-31 2025-02-05 太陽誘電株式会社 ラダー型フィルタおよびマルチプレクサ
US12362724B2 (en) * 2021-08-20 2025-07-15 Raytheon Company N-polar rare-earth III-nitride bulk acoustic wave resonator
US12170515B2 (en) 2022-01-31 2024-12-17 Qorvo Us, Inc. Reversed semilattice filter
DE102022203971A1 (de) 2022-04-25 2023-10-26 Robert Bosch Gesellschaft mit beschränkter Haftung Volumenakustische Vorrichtung und Verfahren zum Herstellen einer volumenakustischen Vorrichtung
US12562713B2 (en) * 2023-02-03 2026-02-24 Qorvo Us, Inc. Acoustic resonator structure with improved temperature coefficient of frequency (TCF)
CN116169972B (zh) * 2023-02-10 2026-04-24 武汉敏声新技术有限公司 谐振器的制作方法及谐振器
WO2024187579A1 (zh) * 2023-03-10 2024-09-19 中国科学院上海微系统与信息技术研究所 体声波谐振器及其制备方法
US12587172B2 (en) 2023-03-15 2026-03-24 Qorvo Us, Inc. Pin reconfigurable baw filters
US20250141425A1 (en) * 2023-10-30 2025-05-01 Avago Technologies International Sales Pte. Limited Acoustic resonator devices operating at high-order modes
CN118249774B (zh) * 2024-05-21 2024-09-20 河源市艾佛光通科技有限公司 一种体声波谐振器及其制备方法
CN119582788B (zh) * 2025-02-08 2025-06-06 深圳新声半导体有限公司 一种用于体声波滤波器的制作方法以及体声波滤波器

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20130193808A1 (en) * 2012-01-31 2013-08-01 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Film bulk acoustic resonator with multi-layers of different piezoelectric materials and method of making
JP2017045749A (ja) * 2015-08-24 2017-03-02 株式会社村田製作所 窒化アルミニウム圧電薄膜及びその製造方法、並びに圧電材及び圧電部品及び窒化アルミニウム圧電薄膜の製造方法

Family Cites Families (106)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3731230A (en) 1971-12-17 1973-05-01 Motorola Inc Broadband circuit for minimizing the effects of crystal shunt capacitance
US3875533A (en) 1973-10-15 1975-04-01 Motorola Inc Crystal controlled overtone oscillator having a rejection circuit for preventing oscillation at undesired overtones
DK147560C (da) 1980-03-13 1985-07-22 Bang & Olufsen As Modtagerantenne for magnetiske signaler, f.eks. ferritantenne
US4577168A (en) 1984-12-03 1986-03-18 R. F. Monolithics, Inc. Notch filter
US5291159A (en) 1992-07-20 1994-03-01 Westinghouse Electric Corp. Acoustic resonator filter with electrically variable center frequency and bandwidth
US6067391A (en) 1998-09-02 2000-05-23 The United States Of America As Represented By The Secretary Of The Air Force Multiply periodic refractive index modulated optical filters
TW488044B (en) 2001-02-09 2002-05-21 Asia Pacific Microsystems Inc Bulk acoustic filter and its package
JP3973915B2 (ja) 2001-03-30 2007-09-12 株式会社日立メディアエレクトロニクス 高周波フィルタ、高周波回路、アンテナ共用器及び無線端末
DE10149542A1 (de) * 2001-10-08 2003-04-17 Infineon Technologies Ag BAW-Resonator
US6720844B1 (en) 2001-11-16 2004-04-13 Tfr Technologies, Inc. Coupled resonator bulk acoustic wave filter
US6670866B2 (en) 2002-01-09 2003-12-30 Nokia Corporation Bulk acoustic wave resonator with two piezoelectric layers as balun in filters and duplexers
DE20221966U1 (de) 2002-06-06 2010-02-25 Epcos Ag Mit akustischen Wellen arbeitendes Bauelement mit einem Anpaßnetzwerk
DE10251876B4 (de) * 2002-11-07 2008-08-21 Infineon Technologies Ag BAW-Resonator mit akustischem Reflektor und Filterschaltung
JP3963824B2 (ja) 2002-11-22 2007-08-22 富士通メディアデバイス株式会社 フィルタ素子、それを有するフィルタ装置、分波器及び高周波回路
JP2004304490A (ja) 2003-03-31 2004-10-28 Tdk Corp 薄膜圧電共振子の製造方法、薄膜圧電共振子の製造装置、薄膜圧電共振子および電子部品
DE10319554B4 (de) 2003-04-30 2018-05-09 Snaptrack, Inc. Mit akustischen Volumenwellen arbeitendes Bauelement mit gekoppelten Resonatoren
US6927651B2 (en) * 2003-05-12 2005-08-09 Agilent Technologies, Inc. Acoustic resonator devices having multiple resonant frequencies and methods of making the same
WO2004105237A1 (ja) 2003-05-26 2004-12-02 Murata Manufacturing Co., Ltd. 圧電電子部品、およびその製造方法、通信機
JP2005117641A (ja) 2003-09-17 2005-04-28 Matsushita Electric Ind Co Ltd 圧電体共振器、それを用いたフィルタ及び共用器
EP1528677B1 (en) 2003-10-30 2006-05-10 Agilent Technologies, Inc. Film acoustically-coupled transformer with two reverse c-axis piezoelectric elements
US6946928B2 (en) 2003-10-30 2005-09-20 Agilent Technologies, Inc. Thin-film acoustically-coupled transformer
US7362198B2 (en) 2003-10-30 2008-04-22 Avago Technologies Wireless Ip (Singapore) Pte. Ltd Pass bandwidth control in decoupled stacked bulk acoustic resonator devices
JP3950445B2 (ja) 2003-11-05 2007-08-01 Ｔｄｋ株式会社 デュプレクサ
JP3944161B2 (ja) 2003-12-25 2007-07-11 株式会社東芝 薄膜バルク波音響共振器及び薄膜バルク波音響共振器の製造方法
US6963257B2 (en) 2004-03-19 2005-11-08 Nokia Corporation Coupled BAW resonator based duplexers
DE102004049499B4 (de) 2004-10-11 2017-12-21 Snaptrack, Inc. Mit akustischen Volumenwellen arbeitende Schaltung und Bauelement mit der Schaltung
US7098758B2 (en) 2004-11-03 2006-08-29 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Acoustically coupled thin-film resonators having an electrode with a tapered edge
US7436269B2 (en) 2005-04-18 2008-10-14 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Acoustically coupled resonators and method of making the same
US7535323B2 (en) 2006-07-10 2009-05-19 Skyworks Solutions, Inc. Bulk acoustic wave filter with reduced nonlinear signal distortion
US7515018B2 (en) * 2006-08-31 2009-04-07 Martin Handtmann Acoustic resonator
JP2008172711A (ja) 2007-01-15 2008-07-24 Hitachi Media Electoronics Co Ltd 薄膜バルク弾性波共振器およびフィルタおよびそれを用いた高周波モジュール
US7804374B1 (en) 2007-02-15 2010-09-28 Discera, Inc. Feedthrough capacitance compensation for resonant devices
US7786825B2 (en) 2007-05-31 2010-08-31 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Bulk acoustic wave device with coupled resonators
US7825749B2 (en) 2007-05-31 2010-11-02 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Integrated coupled resonator filter and bulk acoustic wave devices
US7898493B1 (en) 2007-06-13 2011-03-01 The Ohio State University Implementation of ultra wide band (UWB) electrically small antennas by means of distributed non foster loading
US8018303B2 (en) 2007-10-12 2011-09-13 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Bulk acoustic wave device
US7786826B2 (en) 2007-10-12 2010-08-31 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Apparatus with acoustically coupled BAW resonators and a method for matching impedances
FR2926417B1 (fr) 2008-01-15 2010-01-08 Commissariat Energie Atomique Filtre d'amplification de puissance de signaux radiofrequence
KR101352177B1 (ko) * 2008-04-24 2014-01-15 콘트리아 산 리미티드 라이어빌리티 컴퍼니 Ｂａｗ 공진기 및 ｂａｗ 공진기 형성 방법
US7855618B2 (en) 2008-04-30 2010-12-21 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Bulk acoustic resonator electrical impedance transformers
US7889024B2 (en) * 2008-08-29 2011-02-15 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Single cavity acoustic resonators and electrical filters comprising single cavity acoustic resonators
US8991022B2 (en) 2009-01-07 2015-03-31 Daishinku Corporation Method for manufacturing piezoelectric resonator device
US8373519B2 (en) 2009-01-26 2013-02-12 Resonance Semiconductor Corporation Switchable power combiner
US8248185B2 (en) 2009-06-24 2012-08-21 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Acoustic resonator structure comprising a bridge
JP5419617B2 (ja) 2009-09-28 2014-02-19 太陽誘電株式会社 フィルタ、通信モジュール、および通信装置
WO2011049060A1 (ja) 2009-10-19 2011-04-28 株式会社村田製作所 弾性表面波装置
JP2011109306A (ja) 2009-11-16 2011-06-02 Murata Mfg Co Ltd 弾性表面波素子
US9847768B2 (en) * 2009-11-23 2017-12-19 Avago Technologies General Ip (Singapore) Pte. Ltd. Polarity determining seed layer and method of fabricating piezoelectric materials with specific C-axis
US8796904B2 (en) * 2011-10-31 2014-08-05 Avago Technologies General Ip (Singapore) Pte. Ltd. Bulk acoustic resonator comprising piezoelectric layer and inverse piezoelectric layer
US9679765B2 (en) * 2010-01-22 2017-06-13 Avago Technologies General Ip (Singapore) Pte. Ltd. Method of fabricating rare-earth doped piezoelectric material with various amounts of dopants and a selected C-axis orientation
US9243316B2 (en) * 2010-01-22 2016-01-26 Avago Technologies General Ip (Singapore) Pte. Ltd. Method of fabricating piezoelectric material with selected c-axis orientation
US8768267B2 (en) 2010-02-03 2014-07-01 Hollinworth Fund, L.L.C. Switchless band separation for transceivers
US8576024B2 (en) 2010-02-11 2013-11-05 Hollinworth Fund, L.L.C. Electro-acoustic filter
US8508315B2 (en) 2010-02-23 2013-08-13 Avago Technologies General Ip (Singapore) Pte. Ltd. Acoustically coupled resonator filter with impedance transformation ratio controlled by resonant frequency difference between two coupled resonators
JP5519326B2 (ja) 2010-02-25 2014-06-11 太陽誘電株式会社 フィルタ、デュープレクサ、通信モジュール、通信装置
AT509633A1 (de) 2010-03-29 2011-10-15 Ctr Carinthian Tech Res Ag Hochtemperaturbeständige, elektrisch leitfähige dünnschichten
JP5187597B2 (ja) 2010-07-05 2013-04-24 株式会社村田製作所 弾性波素子
US8674789B2 (en) 2010-07-07 2014-03-18 Wei Pang Serially connected first and second coupled resonator filters configured to provide at least one feedback capacitor
US8575820B2 (en) * 2011-03-29 2013-11-05 Avago Technologies General Ip (Singapore) Pte. Ltd. Stacked bulk acoustic resonator
JP2012257050A (ja) 2011-06-08 2012-12-27 Nippon Dempa Kogyo Co Ltd ハイパス型のノッチフィルタ及びこのフィルタを備えた電子機器
WO2013002033A1 (ja) 2011-06-28 2013-01-03 京セラ株式会社 弾性波素子およびそれを用いた弾性波装置
CN103765768B (zh) 2011-08-26 2016-06-01 株式会社村田制作所 压电器件以及压电器件的制造方法
US8923794B2 (en) 2011-11-02 2014-12-30 Triquint Semiconductor, Inc. Temperature compensation of acoustic resonators in the electrical domain
JP6017868B2 (ja) 2011-11-04 2016-11-02 太陽誘電株式会社 分波器、フィルタ及び通信モジュール
US9054671B2 (en) 2011-11-09 2015-06-09 International Business Machines Corporation Tunable filter structures and design structures
JP6116120B2 (ja) 2012-01-24 2017-04-19 太陽誘電株式会社 弾性波デバイス及び弾性波デバイスの製造方法
US8981627B2 (en) 2012-06-04 2015-03-17 Tdk Corporation Piezoelectric device with electrode films and electroconductive oxide film
WO2014064987A1 (ja) 2012-10-24 2014-05-01 株式会社村田製作所 フィルタ装置
JP6036855B2 (ja) 2013-02-08 2016-11-30 トヨタ自動車株式会社 内燃機関の排気浄化装置
WO2014168162A1 (ja) 2013-04-11 2014-10-16 株式会社村田製作所 高周波モジュール
WO2014185331A1 (ja) 2013-05-14 2014-11-20 株式会社村田製作所 弾性波装置およびその製造方法
US9455681B2 (en) * 2014-02-27 2016-09-27 Avago Technologies General Ip (Singapore) Pte. Ltd. Bulk acoustic wave resonator having doped piezoelectric layer
JP6344466B2 (ja) 2014-03-31 2018-06-20 株式会社村田製作所 弾性波装置
US9548438B2 (en) * 2014-03-31 2017-01-17 Avago Technologies General Ip (Singapore) Pte. Ltd. Acoustic resonator comprising acoustic redistribution layers
DE102015107569A1 (de) * 2014-05-15 2015-11-19 Avago Technologies General Ip Pte. Ltd. Verfahren zur Herstellung von mit Seltenerdelement dotiertem piezoelektrischen Material mit verschiedenen Mengen an Dotiermittel und einer ausgewählten C-Achsen Orientierung
DE102014111912B4 (de) 2014-08-20 2024-06-13 Snaptrack, Inc. HF-Filter
JP6508920B2 (ja) 2014-11-13 2019-05-08 太陽誘電株式会社 弾性波デバイスおよび送受信デバイス
US10333494B2 (en) 2014-12-24 2019-06-25 Qorvo Us, Inc. Simplified acoustic RF resonator parallel capacitance compensation
US9837984B2 (en) 2014-12-24 2017-12-05 Qorvo Us, Inc. RF ladder filter with simplified acoustic RF resonator parallel capacitance compensation
KR102117471B1 (ko) 2015-01-12 2020-06-01 삼성전기주식회사 음향 공진기 및 그 제조 방법
US9571048B2 (en) 2015-03-06 2017-02-14 Qorvo Us, Inc. Differential power amplifier for mobile cellular envelope tracking
US9837983B2 (en) 2015-03-13 2017-12-05 Avago Technologies General Ip (Singapore) Pte. Ltd. Acoustic filter device with combined passband
US9929761B2 (en) 2015-04-17 2018-03-27 Qorvo Us, Inc. High band TDD antenna swapping method with improved receiver sensitivity
US9524881B2 (en) 2015-04-30 2016-12-20 Texas Instruments Incorporated Method for fabricating specific termination angles in titanium tungsten layers
JP6589983B2 (ja) 2015-07-02 2019-10-16 株式会社村田製作所 弾性波装置
US10097161B2 (en) 2015-09-25 2018-10-09 Qorvo Us, Inc. Compensation circuit for acoustic resonators
US9847769B2 (en) 2015-09-25 2017-12-19 Qorvo Us, Inc. Tunable compensation circuit for filter circuitry using acoustic resonators
US10243537B2 (en) 2016-01-12 2019-03-26 Qorvo Us, Inc. Compensation circuit for use with acoustic resonators to provide a bandstop
US10141644B2 (en) 2016-04-18 2018-11-27 Qorvo Us, Inc. Acoustic filter for antennas
US10581156B2 (en) 2016-05-04 2020-03-03 Qorvo Us, Inc. Compensation circuit to mitigate antenna-to-antenna coupling
JP2017208629A (ja) 2016-05-17 2017-11-24 株式会社村田製作所 弾性波装置
US10581403B2 (en) 2016-07-11 2020-03-03 Qorvo Us, Inc. Device having a titanium-alloyed surface
KR102776288B1 (ko) 2016-08-08 2025-03-07 삼성전기주식회사 표면 탄성파 필터 장치 및 이의 제조방법
US11050412B2 (en) 2016-09-09 2021-06-29 Qorvo Us, Inc. Acoustic filter using acoustic coupling
US10284174B2 (en) 2016-09-15 2019-05-07 Qorvo Us, Inc. Acoustic filter employing inductive coupling
US10367470B2 (en) 2016-10-19 2019-07-30 Qorvo Us, Inc. Wafer-level-packaged BAW devices with surface mount connection structures
KR101953219B1 (ko) 2016-11-24 2019-02-28 가부시키가이샤 무라타 세이사쿠쇼 탄성파 장치, 고주파 프론트 엔드 회로 및 통신 장치
US11165412B2 (en) 2017-01-30 2021-11-02 Qorvo Us, Inc. Zero-output coupled resonator filter and related radio frequency filter circuit
US11165413B2 (en) 2017-01-30 2021-11-02 Qorvo Us, Inc. Coupled resonator structure
JP6790907B2 (ja) 2017-02-23 2020-11-25 株式会社村田製作所 マルチプレクサ、送信装置および受信装置
US10873318B2 (en) 2017-06-08 2020-12-22 Qorvo Us, Inc. Filter circuits having acoustic wave resonators in a transversal configuration
JP6959819B2 (ja) 2017-10-02 2021-11-05 株式会社村田製作所 マルチプレクサ
KR102722507B1 (ko) 2017-12-07 2024-10-29 인피니언 테크놀로지스 아게 음향적으로 결합된 공진기 노치 및 대역 통과 필터
JP2019114986A (ja) 2017-12-25 2019-07-11 株式会社村田製作所 弾性波装置
US10700662B2 (en) 2017-12-28 2020-06-30 Taiyo Yuden Co., Ltd. Acoustic wave device, filter, and multiplexer
JP6812998B2 (ja) 2018-03-19 2021-01-13 株式会社村田製作所 弾性波装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20130193808A1 (en) * 2012-01-31 2013-08-01 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Film bulk acoustic resonator with multi-layers of different piezoelectric materials and method of making
JP2017045749A (ja) * 2015-08-24 2017-03-02 株式会社村田製作所 窒化アルミニウム圧電薄膜及びその製造方法、並びに圧電材及び圧電部品及び窒化アルミニウム圧電薄膜の製造方法

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