KR102781731B1 - 리세싱된 피처에서의 상향식 금속화 방법 - Google Patents

리세싱된 피처에서의 상향식 금속화 방법 Download PDF

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KR102781731B1
KR102781731B1 KR1020227008755A KR20227008755A KR102781731B1 KR 102781731 B1 KR102781731 B1 KR 102781731B1 KR 1020227008755 A KR1020227008755 A KR 1020227008755A KR 20227008755 A KR20227008755 A KR 20227008755A KR 102781731 B1 KR102781731 B1 KR 102781731B1
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metal
layer
substrate
recess
depositing
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KR20220079526A (ko
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카이-훙 유
조디 그르제스코위악
니콜라스 조이
제프리 스미스
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도쿄엘렉트론가부시키가이샤
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    • H01L21/743—
    • H01L21/76843—
    • H01L21/76865—
    • H01L21/76877—
    • H01L23/5286—
    • H01L23/53242—
    • H01L23/535—
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/01—Manufacture or treatment
    • H10D84/0123—Integrating together multiple components covered by H10D12/00 or H10D30/00, e.g. integrating multiple IGBTs
    • H10D84/0126—Integrating together multiple components covered by H10D12/00 or H10D30/00, e.g. integrating multiple IGBTs the components including insulated gates, e.g. IGFETs
    • H10D84/0165—Integrating together multiple components covered by H10D12/00 or H10D30/00, e.g. integrating multiple IGBTs the components including insulated gates, e.g. IGFETs the components including complementary IGFETs, e.g. CMOS devices
    • H10D84/0186—Manufacturing their interconnections or electrodes, e.g. source or drain electrodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00—Interconnections in chips, wafers or substrates
    • H10W20/01—Manufacture or treatment
    • H10W20/021—Manufacture or treatment of interconnections within wafers or substrates
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00—Interconnections in chips, wafers or substrates
    • H10W20/01—Manufacture or treatment
    • H10W20/031—Manufacture or treatment of conductive parts of the interconnections
    • H10W20/032—Manufacture or treatment of conductive parts of the interconnections of conductive barrier, adhesion or liner layers
    • H10W20/033—Manufacture or treatment of conductive parts of the interconnections of conductive barrier, adhesion or liner layers in openings in dielectrics
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00—Interconnections in chips, wafers or substrates
    • H10W20/01—Manufacture or treatment
    • H10W20/031—Manufacture or treatment of conductive parts of the interconnections
    • H10W20/032—Manufacture or treatment of conductive parts of the interconnections of conductive barrier, adhesion or liner layers
    • H10W20/054—Manufacture or treatment of conductive parts of the interconnections of conductive barrier, adhesion or liner layers by selectively removing parts thereof
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00—Interconnections in chips, wafers or substrates
    • H10W20/01—Manufacture or treatment
    • H10W20/031—Manufacture or treatment of conductive parts of the interconnections
    • H10W20/056—Manufacture or treatment of conductive parts of the interconnections by filling conductive material into holes, grooves or trenches
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00—Interconnections in chips, wafers or substrates
    • H10W20/01—Manufacture or treatment
    • H10W20/031—Manufacture or treatment of conductive parts of the interconnections
    • H10W20/056—Manufacture or treatment of conductive parts of the interconnections by filling conductive material into holes, grooves or trenches
    • H10W20/0595—Manufacture or treatment of conductive parts of the interconnections by filling conductive material into holes, grooves or trenches by using multiple deposition steps separated by etching steps
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00—Interconnections in chips, wafers or substrates
    • H10W20/20—Interconnections within wafers or substrates, e.g. through-silicon vias [TSV]
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00—Interconnections in chips, wafers or substrates
    • H10W20/40—Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes
    • H10W20/41—Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes characterised by their conductive parts
    • H10W20/427—Power or ground buses
    • H01L2221/1063—
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/01—Manufacture or treatment
    • H10D84/02—Manufacture or treatment characterised by using material-based technologies
    • H10D84/03—Manufacture or treatment characterised by using material-based technologies using Group IV technology, e.g. silicon technology or silicon-carbide [SiC] technology
    • H10D84/038—Manufacture or treatment characterised by using material-based technologies using Group IV technology, e.g. silicon technology or silicon-carbide [SiC] technology using silicon technology, e.g. SiGe
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00—Interconnections in chips, wafers or substrates
    • H10W20/01—Manufacture or treatment
    • H10W20/071—Manufacture or treatment of dielectric parts thereof
    • H10W20/074—Manufacture or treatment of dielectric parts thereof of dielectric parts comprising thin functional dielectric layers, e.g. dielectric etch-stop, barrier, capping or liner layers
    • H10W20/076—Manufacture or treatment of dielectric parts thereof of dielectric parts comprising thin functional dielectric layers, e.g. dielectric etch-stop, barrier, capping or liner layers in via holes or trenches
    • H10W20/0765—Manufacture or treatment of dielectric parts thereof of dielectric parts comprising thin functional dielectric layers, e.g. dielectric etch-stop, barrier, capping or liner layers in via holes or trenches the thin functional dielectric layers being temporary, e.g. sacrificial layers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00—Interconnections in chips, wafers or substrates
    • H10W20/40—Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes
    • H10W20/41—Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes characterised by their conductive parts
    • H10W20/44—Conductive materials thereof
    • H10W20/4403—Conductive materials thereof based on metals, e.g. alloys, metal silicides
    • H10W20/4432—Conductive materials thereof based on metals, e.g. alloys, metal silicides the principal metal being a noble metal, e.g. gold

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  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Electrodes Of Semiconductors (AREA)
KR1020227008755A 2019-09-16 2020-09-16 리세싱된 피처에서의 상향식 금속화 방법 Active KR102781731B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201962900794P 2019-09-16 2019-09-16
US62/900,794 2019-09-16
PCT/US2020/050962 WO2021055399A1 (en) 2019-09-16 2020-09-16 Method of bottom-up metallization in a recessed feature

Publications (2)

Publication Number Publication Date
KR20220079526A KR20220079526A (ko) 2022-06-13
KR102781731B1 true KR102781731B1 (ko) 2025-03-13

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Country Status (6)

Country Link
US (1) US11450562B2 (https=)
JP (1) JP7554538B2 (https=)
KR (1) KR102781731B1 (https=)
CN (1) CN114600232B (https=)
TW (1) TWI857139B (https=)
WO (1) WO2021055399A1 (https=)

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US10573522B2 (en) 2016-08-16 2020-02-25 Lam Research Corporation Method for preventing line bending during metal fill process
KR20210081436A (ko) 2018-11-19 2021-07-01 램 리써치 코포레이션 텅스텐을 위한 몰리브덴 템플릿들
SG11202108217UA (en) 2019-01-28 2021-08-30 Lam Res Corp Deposition of metal films
WO2021046058A1 (en) 2019-09-03 2021-03-11 Lam Research Corporation Molybdenum deposition
CN114667600A (zh) 2019-10-15 2022-06-24 朗姆研究公司 钼填充
JP7686761B2 (ja) 2021-02-23 2025-06-02 ラム リサーチ コーポレーション ３ｄ－ｎａｎｄ用の酸化物表面上へのモリブデン膜の堆積
WO2022221210A1 (en) 2021-04-14 2022-10-20 Lam Research Corporation Deposition of molybdenum
US12588475B2 (en) 2021-05-14 2026-03-24 Lam Research Corporation High selectivity doped hardmask films
WO2023286192A1 (ja) * 2021-07-14 2023-01-19 株式会社日立ハイテク プラズマ処理方法
US12394660B2 (en) 2021-11-22 2025-08-19 International Business Machines Corporation Buried power rail after replacement metal gate
WO2023215135A1 (en) * 2022-05-05 2023-11-09 Lam Research Corporation Molybdenum halides in memory applications
US12506029B2 (en) * 2022-06-30 2025-12-23 Taiwan Semiconductor Manufacturing Company, Ltd. Gap filling method in semiconductor manufacturing process
US20240290655A1 (en) * 2023-02-28 2024-08-29 Applied Materials, Inc. Selective via-fill with conformal sidewall coverage

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US20040197541A1 (en) * 2001-08-02 2004-10-07 Joseph Zahka Selective electroless deposition and interconnects made therefrom
US20070190362A1 (en) * 2005-09-08 2007-08-16 Weidman Timothy W Patterned electroless metallization processes for large area electronics
DE102007004884A1 (de) * 2007-01-31 2008-08-14 Advanced Micro Devices, Inc., Sunnyvale Verfahren zur Herstellung einer Metallschicht über einem strukturierten Dielektrikum durch stromlose Abscheidung unter Anwendung einer selektiv vorgesehenen Aktivierungsschicht
KR101556238B1 (ko) * 2009-02-17 2015-10-01 삼성전자주식회사 매립형 배선라인을 갖는 반도체 소자의 제조방법
KR20120033640A (ko) 2010-09-30 2012-04-09 주식회사 하이닉스반도체 텅스텐 갭필을 이용한 반도체장치 제조 방법
KR101185990B1 (ko) * 2010-12-20 2012-09-25 에스케이하이닉스 주식회사 반도체 소자의 형성방법
JP5599350B2 (ja) * 2011-03-29 2014-10-01 東京エレクトロン株式会社 成膜装置及び成膜方法
WO2016204771A1 (en) * 2015-06-18 2016-12-22 Intel Corporation Bottom-up fill (buf) of metal features for semiconductor structures
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KR102432719B1 (ko) * 2015-12-23 2022-08-17 에스케이하이닉스 주식회사 매립금속게이트구조를 구비한 반도체장치 및 그 제조 방법, 그를 구비한 메모리셀, 그를 구비한 전자장치
JP2018207110A (ja) * 2017-06-06 2018-12-27 東京エレクトロン株式会社 二重金属電力レールを有する集積回路の製造方法
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Also Published As

Publication number Publication date
US11450562B2 (en) 2022-09-20
TWI857139B (zh) 2024-10-01
CN114600232B (zh) 2026-01-16
JP7554538B2 (ja) 2024-09-20
TW202127521A (zh) 2021-07-16
US20210082750A1 (en) 2021-03-18
CN114600232A (zh) 2022-06-07
WO2021055399A1 (en) 2021-03-25
JP2022547126A (ja) 2022-11-10
KR20220079526A (ko) 2022-06-13

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