KR102776034B1 - 기화기 및 기화 공급 장치 - Google Patents

기화기 및 기화 공급 장치 Download PDF

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Publication number
KR102776034B1
KR102776034B1 KR1020237012789A KR20237012789A KR102776034B1 KR 102776034 B1 KR102776034 B1 KR 102776034B1 KR 1020237012789 A KR1020237012789 A KR 1020237012789A KR 20237012789 A KR20237012789 A KR 20237012789A KR 102776034 B1 KR102776034 B1 KR 102776034B1
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KR
South Korea
Prior art keywords
vaporization chamber
heater
ultrapure water
pressure
vaporizer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
KR1020237012789A
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English (en)
Korean (ko)
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KR20230069985A (ko
Inventor
이치로 토쿠다
미즈키 나카가와
케이지 히라오
유키오 미나미
Original Assignee
가부시키가이샤 후지킨
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Publication of KR20230069985A publication Critical patent/KR20230069985A/ko
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Publication of KR102776034B1 publication Critical patent/KR102776034B1/ko
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Classifications

    • H01L21/67017—
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00—Treatment of water, waste water, or sewage
    • C02F1/02—Treatment of water, waste water, or sewage by heating
    • C02F1/04—Treatment of water, waste water, or sewage by heating by distillation or evaporation
    • C02F1/045—Treatment of water, waste water, or sewage by heating by distillation or evaporation for obtaining ultra-pure water
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F22—STEAM GENERATION
    • F22B—METHODS OF STEAM GENERATION; STEAM BOILERS
    • F22B1/00—Methods of steam generation characterised by form of heating method
    • F22B1/28—Methods of steam generation characterised by form of heating method in boilers heated electrically
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F22—STEAM GENERATION
    • F22B—METHODS OF STEAM GENERATION; STEAM BOILERS
    • F22B37/00—Component parts or details of steam boilers
    • F22B37/02—Component parts or details of steam boilers applicable to more than one kind or type of steam boiler
    • F22B37/42—Applications, arrangements or dispositions of alarm or automatic safety devices
    • F22B37/44—Applications, arrangements or dispositions of alarm or automatic safety devices of safety valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F22—STEAM GENERATION
    • F22D—PREHEATING, OR ACCUMULATING PREHEATED, FEED-WATER FOR STEAM GENERATION; FEED-WATER SUPPLY FOR STEAM GENERATION; CONTROLLING WATER LEVEL FOR STEAM GENERATION; AUXILIARY DEVICES FOR PROMOTING WATER CIRCULATION WITHIN STEAM BOILERS
    • F22D1/00—Feed-water heaters, i.e. economisers or like preheaters
    • F22D1/003—Feed-water heater systems
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F22—STEAM GENERATION
    • F22D—PREHEATING, OR ACCUMULATING PREHEATED, FEED-WATER FOR STEAM GENERATION; FEED-WATER SUPPLY FOR STEAM GENERATION; CONTROLLING WATER LEVEL FOR STEAM GENERATION; AUXILIARY DEVICES FOR PROMOTING WATER CIRCULATION WITHIN STEAM BOILERS
    • F22D1/00—Feed-water heaters, i.e. economisers or like preheaters
    • F22D1/36—Water and air preheating systems
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F22—STEAM GENERATION
    • F22D—PREHEATING, OR ACCUMULATING PREHEATED, FEED-WATER FOR STEAM GENERATION; FEED-WATER SUPPLY FOR STEAM GENERATION; CONTROLLING WATER LEVEL FOR STEAM GENERATION; AUXILIARY DEVICES FOR PROMOTING WATER CIRCULATION WITHIN STEAM BOILERS
    • F22D5/00—Controlling water feed or water level; Automatic water feeding or water-level regulators
    • F22D5/26—Automatic feed-control systems
    • F22D5/30—Automatic feed-control systems responsive to both water level and amount of steam withdrawn or steam pressure
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26—Processing photosensitive materials; Apparatus therefor
    • G03F7/42—Stripping or agents therefor
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P50/00—Etching of wafers, substrates or parts of devices
    • H10P50/20—Dry etching; Plasma etching; Reactive-ion etching
    • H10P50/24—Dry etching; Plasma etching; Reactive-ion etching of semiconductor materials
    • H10P50/242—Dry etching; Plasma etching; Reactive-ion etching of semiconductor materials of Group IV materials
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0402—Apparatus for fluid treatment
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F2103/00—Nature of the water, waste water, sewage or sludge to be treated
    • C02F2103/02—Non-contaminated water, e.g. for industrial water supply
    • C02F2103/04—Non-contaminated water, e.g. for industrial water supply for obtaining ultra-pure water
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F2209/00—Controlling or monitoring parameters in water treatment
    • C02F2209/03—Pressure
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F2209/00—Controlling or monitoring parameters in water treatment
    • C02F2209/38—Gas flow rate
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F2209/00—Controlling or monitoring parameters in water treatment
    • C02F2209/42—Liquid level

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Sustainable Development (AREA)
  • Sustainable Energy (AREA)
  • Chemical & Material Sciences (AREA)
  • Hydrology & Water Resources (AREA)
  • Environmental & Geological Engineering (AREA)
  • Water Supply & Treatment (AREA)
  • Organic Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
  • Drying Of Semiconductors (AREA)
  • Filling Or Discharging Of Gas Storage Vessels (AREA)
KR1020237012789A 2021-03-11 2022-02-01 기화기 및 기화 공급 장치 Active KR102776034B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JPJP-P-2021-038960 2021-03-11
JP2021038960 2021-03-11
PCT/JP2022/003750 WO2022190711A1 (ja) 2021-03-11 2022-02-01 気化器および気化供給装置

Publications (2)

Publication Number Publication Date
KR20230069985A KR20230069985A (ko) 2023-05-19
KR102776034B1 true KR102776034B1 (ko) 2025-03-07

Family

ID=83226673

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020237012789A Active KR102776034B1 (ko) 2021-03-11 2022-02-01 기화기 및 기화 공급 장치

Country Status (5)

Country Link
US (1) US20240101446A1 (https=)
JP (1) JP7577382B2 (https=)
KR (1) KR102776034B1 (https=)
TW (1) TWI800264B (https=)
WO (1) WO2022190711A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2025019830A (ja) * 2023-07-28 2025-02-07 東京エレクトロン株式会社 気化装置、水蒸気処理システムおよび水蒸気処理方法

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5312612U (https=) * 1976-07-15 1978-02-02
JPH0242697U (https=) * 1988-09-14 1990-03-23
US6814897B2 (en) * 1998-03-27 2004-11-09 Discovision Associates Method for manufacturing a molding tool used for substrate molding
JP3661757B2 (ja) 1999-09-30 2005-06-22 横河電機株式会社 気化器
JP2001308070A (ja) 2000-04-24 2001-11-02 Matsushita Electric Ind Co Ltd ドライエッチング装置およびそれを用いた半導体基板の処理方法
JP2002110611A (ja) 2000-10-04 2002-04-12 Texas Instr Japan Ltd 半導体ウェハの洗浄方法及び装置
KR20050113549A (ko) * 2002-05-29 2005-12-02 가부시키가이샤 와타나베 쇼코 기화기 및 이를 사용한 각종 장치 그리고 기화방법
JP2004063715A (ja) 2002-07-29 2004-02-26 Hitachi Kokusai Electric Inc 半導体装置の製造方法および基板処理装置
US6977047B2 (en) * 2003-09-15 2005-12-20 Mechanical Equipment Company, Inc. Method and system for the manufacture of pharmaceutical water
US20080073559A1 (en) * 2003-12-12 2008-03-27 Horsky Thomas N Controlling the flow of vapors sublimated from solids
JP4324619B2 (ja) * 2007-03-29 2009-09-02 東京エレクトロン株式会社 気化装置、成膜装置及び気化方法
TWI413149B (zh) * 2008-01-22 2013-10-21 山米奎普公司 離子源氣體反應器及用於將氣體饋給材料轉化成不同分子或原子物種之方法
US8460509B2 (en) * 2008-02-11 2013-06-11 Total Water Management, LLC Water evaporation system and method
JP6372998B2 (ja) 2013-12-05 2018-08-15 株式会社フジキン 圧力式流量制御装置
JP6578125B2 (ja) * 2015-04-30 2019-09-18 株式会社フジキン 気化供給装置
WO2018070464A1 (ja) 2016-10-14 2018-04-19 株式会社フジキン 流体制御装置

Also Published As

Publication number Publication date
TW202244307A (zh) 2022-11-16
JP7577382B2 (ja) 2024-11-05
JPWO2022190711A1 (https=) 2022-09-15
KR20230069985A (ko) 2023-05-19
WO2022190711A1 (ja) 2022-09-15
US20240101446A1 (en) 2024-03-28
TWI800264B (zh) 2023-04-21

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