KR102602540B1 - 초순수 제조 장치 및 초순수 제조 장치의 운전 방법 - Google Patents
초순수 제조 장치 및 초순수 제조 장치의 운전 방법 Download PDFInfo
- Publication number
- KR102602540B1 KR102602540B1 KR1020187023019A KR20187023019A KR102602540B1 KR 102602540 B1 KR102602540 B1 KR 102602540B1 KR 1020187023019 A KR1020187023019 A KR 1020187023019A KR 20187023019 A KR20187023019 A KR 20187023019A KR 102602540 B1 KR102602540 B1 KR 102602540B1
- Authority
- KR
- South Korea
- Prior art keywords
- water
- boron
- chamber
- subsystem
- pure water
- Prior art date
Links
- 239000012498 ultrapure water Substances 0.000 title claims abstract description 67
- 229910021642 ultra pure water Inorganic materials 0.000 title claims abstract description 66
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 46
- 238000000034 method Methods 0.000 title claims description 16
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 215
- 229910052796 boron Inorganic materials 0.000 claims abstract description 146
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims abstract description 140
- 238000002242 deionisation method Methods 0.000 claims abstract description 64
- 238000005342 ion exchange Methods 0.000 claims abstract description 58
- 239000012528 membrane Substances 0.000 claims abstract description 46
- 238000001223 reverse osmosis Methods 0.000 claims abstract description 19
- 238000010612 desalination reaction Methods 0.000 claims description 24
- 239000008367 deionised water Substances 0.000 claims description 22
- 229910021641 deionized water Inorganic materials 0.000 claims description 22
- 150000002500 ions Chemical class 0.000 claims description 22
- 238000011033 desalting Methods 0.000 claims description 20
- 239000003011 anion exchange membrane Substances 0.000 claims description 9
- 238000005341 cation exchange Methods 0.000 claims description 9
- 238000012545 processing Methods 0.000 claims description 5
- 230000001172 regenerating effect Effects 0.000 abstract description 35
- 238000000108 ultra-filtration Methods 0.000 abstract description 18
- 230000003647 oxidation Effects 0.000 abstract description 16
- 238000007254 oxidation reaction Methods 0.000 abstract description 16
- 238000005259 measurement Methods 0.000 abstract description 5
- 230000007423 decrease Effects 0.000 description 6
- 239000003957 anion exchange resin Substances 0.000 description 5
- -1 boron ions Chemical class 0.000 description 5
- 238000007872 degassing Methods 0.000 description 5
- 238000001514 detection method Methods 0.000 description 5
- 238000009296 electrodeionization Methods 0.000 description 5
- 239000003456 ion exchange resin Substances 0.000 description 5
- 229920003303 ion-exchange polymer Polymers 0.000 description 5
- 239000000126 substance Substances 0.000 description 5
- NWUYHJFMYQTDRP-UHFFFAOYSA-N 1,2-bis(ethenyl)benzene;1-ethenyl-2-ethylbenzene;styrene Chemical compound C=CC1=CC=CC=C1.CCC1=CC=CC=C1C=C.C=CC1=CC=CC=C1C=C NWUYHJFMYQTDRP-UHFFFAOYSA-N 0.000 description 4
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 4
- 150000003839 salts Chemical class 0.000 description 4
- 238000000926 separation method Methods 0.000 description 4
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 150000007524 organic acids Chemical class 0.000 description 3
- 235000005985 organic acids Nutrition 0.000 description 3
- 229910052760 oxygen Inorganic materials 0.000 description 3
- 239000001301 oxygen Substances 0.000 description 3
- 150000001450 anions Chemical class 0.000 description 2
- 229910002092 carbon dioxide Inorganic materials 0.000 description 2
- 239000001569 carbon dioxide Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000010419 fine particle Substances 0.000 description 2
- 238000012544 monitoring process Methods 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000002351 wastewater Substances 0.000 description 2
- 150000001638 boron Chemical class 0.000 description 1
- 150000001768 cations Chemical class 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000004090 dissolution Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 238000011049 filling Methods 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 238000005189 flocculation Methods 0.000 description 1
- 230000016615 flocculation Effects 0.000 description 1
- 238000005188 flotation Methods 0.000 description 1
- 230000002209 hydrophobic effect Effects 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000005374 membrane filtration Methods 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000005416 organic matter Substances 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 238000004062 sedimentation Methods 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D61/00—Processes of separation using semi-permeable membranes, e.g. dialysis, osmosis or ultrafiltration; Apparatus, accessories or auxiliary operations specially adapted therefor
- B01D61/42—Electrodialysis; Electro-osmosis ; Electro-ultrafiltration; Membrane capacitive deionization
- B01D61/44—Ion-selective electrodialysis
- B01D61/46—Apparatus therefor
- B01D61/48—Apparatus therefor having one or more compartments filled with ion-exchange material, e.g. electrodeionisation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D61/00—Processes of separation using semi-permeable membranes, e.g. dialysis, osmosis or ultrafiltration; Apparatus, accessories or auxiliary operations specially adapted therefor
- B01D61/14—Ultrafiltration; Microfiltration
- B01D61/145—Ultrafiltration
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D61/00—Processes of separation using semi-permeable membranes, e.g. dialysis, osmosis or ultrafiltration; Apparatus, accessories or auxiliary operations specially adapted therefor
- B01D61/42—Electrodialysis; Electro-osmosis ; Electro-ultrafiltration; Membrane capacitive deionization
- B01D61/44—Ion-selective electrodialysis
- B01D61/52—Accessories; Auxiliary operation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D61/00—Processes of separation using semi-permeable membranes, e.g. dialysis, osmosis or ultrafiltration; Apparatus, accessories or auxiliary operations specially adapted therefor
- B01D61/42—Electrodialysis; Electro-osmosis ; Electro-ultrafiltration; Membrane capacitive deionization
- B01D61/44—Ion-selective electrodialysis
- B01D61/54—Controlling or regulating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D61/00—Processes of separation using semi-permeable membranes, e.g. dialysis, osmosis or ultrafiltration; Apparatus, accessories or auxiliary operations specially adapted therefor
- B01D61/58—Multistep processes
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/42—Treatment of water, waste water, or sewage by ion-exchange
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/44—Treatment of water, waste water, or sewage by dialysis, osmosis or reverse osmosis
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/44—Treatment of water, waste water, or sewage by dialysis, osmosis or reverse osmosis
- C02F1/444—Treatment of water, waste water, or sewage by dialysis, osmosis or reverse osmosis by ultrafiltration or microfiltration
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/46—Treatment of water, waste water, or sewage by electrochemical methods
- C02F1/469—Treatment of water, waste water, or sewage by electrochemical methods by electrochemical separation, e.g. by electro-osmosis, electrodialysis, electrophoresis
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/46—Treatment of water, waste water, or sewage by electrochemical methods
- C02F1/469—Treatment of water, waste water, or sewage by electrochemical methods by electrochemical separation, e.g. by electro-osmosis, electrodialysis, electrophoresis
- C02F1/4693—Treatment of water, waste water, or sewage by electrochemical methods by electrochemical separation, e.g. by electro-osmosis, electrodialysis, electrophoresis electrodialysis
- C02F1/4695—Treatment of water, waste water, or sewage by electrochemical methods by electrochemical separation, e.g. by electro-osmosis, electrodialysis, electrophoresis electrodialysis electrodeionisation
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F2103/00—Nature of the water, waste water, sewage or sludge to be treated
- C02F2103/02—Non-contaminated water, e.g. for industrial water supply
- C02F2103/04—Non-contaminated water, e.g. for industrial water supply for obtaining ultra-pure water
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02A—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
- Y02A20/00—Water conservation; Efficient water supply; Efficient water use
- Y02A20/124—Water desalination
Landscapes
- Water Supply & Treatment (AREA)
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Hydrology & Water Resources (AREA)
- Environmental & Geological Engineering (AREA)
- Organic Chemistry (AREA)
- Urology & Nephrology (AREA)
- General Chemical & Material Sciences (AREA)
- Electrochemistry (AREA)
- Molecular Biology (AREA)
- Analytical Chemistry (AREA)
- Water Treatment By Electricity Or Magnetism (AREA)
- Separation Using Semi-Permeable Membranes (AREA)
- Treatment Of Water By Ion Exchange (AREA)
- Physical Water Treatments (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JPJP-P-2016-014922 | 2016-01-28 | ||
| JP2016014922A JP6119886B1 (ja) | 2016-01-28 | 2016-01-28 | 超純水製造装置および超純水製造装置の運転方法 |
| PCT/JP2016/076555 WO2017130454A1 (ja) | 2016-01-28 | 2016-09-09 | 超純水製造装置および超純水製造装置の運転方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR20180103964A KR20180103964A (ko) | 2018-09-19 |
| KR102602540B1 true KR102602540B1 (ko) | 2023-11-15 |
Family
ID=58666492
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020187023019A KR102602540B1 (ko) | 2016-01-28 | 2016-09-09 | 초순수 제조 장치 및 초순수 제조 장치의 운전 방법 |
Country Status (6)
| Country | Link |
|---|---|
| JP (1) | JP6119886B1 (ja) |
| KR (1) | KR102602540B1 (ja) |
| CN (1) | CN108602705A (ja) |
| SG (1) | SG11201806360WA (ja) |
| TW (1) | TWI710529B (ja) |
| WO (1) | WO2017130454A1 (ja) |
Families Citing this family (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2019089018A (ja) * | 2017-11-14 | 2019-06-13 | オルガノ株式会社 | 純水製造装置の運転方法および純水製造装置 |
| JP7454330B2 (ja) | 2018-06-20 | 2024-03-22 | オルガノ株式会社 | 被処理水中のホウ素除去方法、ホウ素除去システム、超純水製造システム及びホウ素濃度の測定方法 |
| JP7314133B2 (ja) * | 2018-06-27 | 2023-07-25 | 野村マイクロ・サイエンス株式会社 | 電気式脱イオン装置、超純水製造システムおよび超純水製造方法 |
| JP7192519B2 (ja) * | 2019-01-22 | 2022-12-20 | 栗田工業株式会社 | ホウ素超高純度除去型超純水製造装置及びホウ素超高純度除去超純水の製造方法 |
| JP2020142178A (ja) * | 2019-03-05 | 2020-09-10 | 栗田工業株式会社 | 超純水製造装置及び超純水製造装置の運転方法 |
| JP7289206B2 (ja) * | 2019-03-13 | 2023-06-09 | オルガノ株式会社 | ホウ素除去装置及びホウ素除去方法、並びに、純水製造装置及び純水の製造方法 |
| CN110185676A (zh) * | 2019-06-05 | 2019-08-30 | 深圳市粤永能源环保科技有限公司 | 一种纯水液压系统 |
| CN110217924A (zh) * | 2019-06-21 | 2019-09-10 | 长沙如洋环保科技有限公司 | 一种实验室用纯水机 |
| JP6863510B1 (ja) * | 2019-12-25 | 2021-04-21 | 栗田工業株式会社 | 超純水製造装置の制御方法 |
| JP7129965B2 (ja) * | 2019-12-25 | 2022-09-02 | 野村マイクロ・サイエンス株式会社 | 純水製造方法、純水製造システム、超純水製造方法及び超純水製造システム |
| JP7368310B2 (ja) * | 2020-05-20 | 2023-10-24 | オルガノ株式会社 | ホウ素除去装置及びホウ素除去方法、並びに、純水製造装置及び純水の製造方法 |
| CN112337323B (zh) * | 2020-09-28 | 2021-06-15 | 南京工业大学 | 一种pvdf聚合物分离膜及其制备方法 |
| JP2022060806A (ja) * | 2020-10-05 | 2022-04-15 | オルガノ株式会社 | 純水製造システムおよび純水製造方法 |
| JP7205576B1 (ja) | 2021-07-19 | 2023-01-17 | 栗田工業株式会社 | 純水製造システムの運転方法 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100295399B1 (ko) * | 1996-01-17 | 2001-09-17 | 마에다 히로카쓰 | 초순수 제조장치 |
| JP2014188456A (ja) * | 2013-03-27 | 2014-10-06 | Kurita Water Ind Ltd | イオン交換樹脂装置の運転方法及びイオン交換樹脂装置 |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08117744A (ja) * | 1994-10-21 | 1996-05-14 | Nomura Micro Sci Co Ltd | イオン交換装置のブレーク検知方法 |
| JP3794268B2 (ja) * | 2001-01-05 | 2006-07-05 | 栗田工業株式会社 | 電気脱イオン装置及びその運転方法 |
| JP2003266097A (ja) * | 2002-03-13 | 2003-09-24 | Kurita Water Ind Ltd | 超純水製造装置 |
| JP3794354B2 (ja) * | 2002-07-08 | 2006-07-05 | 栗田工業株式会社 | 電気脱イオン装置 |
| JP2004261643A (ja) * | 2003-02-14 | 2004-09-24 | Kurita Water Ind Ltd | 電気脱イオン装置及びその運転方法 |
| JP2009028695A (ja) * | 2007-07-30 | 2009-02-12 | Kurita Water Ind Ltd | 純水製造装置及び純水製造方法 |
| JP4993136B2 (ja) * | 2008-08-08 | 2012-08-08 | 栗田工業株式会社 | 純水製造装置及び純水製造方法 |
| JP5617231B2 (ja) * | 2009-11-27 | 2014-11-05 | 栗田工業株式会社 | イオン交換樹脂の精製方法及び精製装置 |
| EP2735546B1 (en) * | 2012-11-21 | 2018-02-07 | Ovivo Inc. | Treatment of water, particularly for obtaining ultrapure water |
| JP6205865B2 (ja) * | 2013-06-04 | 2017-10-04 | 栗田工業株式会社 | 純水製造装置の運転管理方法 |
-
2016
- 2016-01-28 JP JP2016014922A patent/JP6119886B1/ja active Active
- 2016-09-09 KR KR1020187023019A patent/KR102602540B1/ko active IP Right Grant
- 2016-09-09 WO PCT/JP2016/076555 patent/WO2017130454A1/ja active Application Filing
- 2016-09-09 SG SG11201806360WA patent/SG11201806360WA/en unknown
- 2016-09-09 CN CN201680080295.5A patent/CN108602705A/zh active Pending
- 2016-09-13 TW TW105129663A patent/TWI710529B/zh active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100295399B1 (ko) * | 1996-01-17 | 2001-09-17 | 마에다 히로카쓰 | 초순수 제조장치 |
| JP2014188456A (ja) * | 2013-03-27 | 2014-10-06 | Kurita Water Ind Ltd | イオン交換樹脂装置の運転方法及びイオン交換樹脂装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP6119886B1 (ja) | 2017-04-26 |
| KR20180103964A (ko) | 2018-09-19 |
| TW201726557A (zh) | 2017-08-01 |
| JP2017131846A (ja) | 2017-08-03 |
| TWI710529B (zh) | 2020-11-21 |
| CN108602705A (zh) | 2018-09-28 |
| SG11201806360WA (en) | 2018-08-30 |
| WO2017130454A1 (ja) | 2017-08-03 |
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