KR102601415B1 - 밸브 로드에 대한 밸브판의 장착 구조 - Google Patents

밸브 로드에 대한 밸브판의 장착 구조 Download PDF

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Publication number
KR102601415B1
KR102601415B1 KR1020190002555A KR20190002555A KR102601415B1 KR 102601415 B1 KR102601415 B1 KR 102601415B1 KR 1020190002555 A KR1020190002555 A KR 1020190002555A KR 20190002555 A KR20190002555 A KR 20190002555A KR 102601415 B1 KR102601415 B1 KR 102601415B1
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KR
South Korea
Prior art keywords
valve
hole
rod
mounting
valve plate
Prior art date
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KR1020190002555A
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English (en)
Korean (ko)
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KR20190085488A (ko
Inventor
히로미 시모다
타카시 나가오
츠요시 오치
히로시 오가와
Original Assignee
에스엠시 가부시키가이샤
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Publication of KR20190085488A publication Critical patent/KR20190085488A/ko
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Publication of KR102601415B1 publication Critical patent/KR102601415B1/ko
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
    • F16K1/32—Details
    • F16K1/48—Attaching valve members to screw-spindles
    • F16K1/487—Attaching valve members to screw-spindles by a fixing element extending in the axial direction of the spindle, e.g. a screw
    • H01L21/67772—
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/34—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H10P72/3406—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving removal of lid, door or cover
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/30—Details
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/0281—Guillotine or blade-type valves, e.g. no passage through the valve member
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/30—Details
    • F16K3/314—Forms or constructions of slides; Attachment of the slide to the spindle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
    • H01L21/67207—
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0451—Apparatus for manufacturing or treating in a plurality of work-stations
    • H10P72/0468—Apparatus for manufacturing or treating in a plurality of work-stations comprising a chamber adapted to a particular process

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Sliding Valves (AREA)
  • Details Of Valves (AREA)
  • Check Valves (AREA)
  • Compressor (AREA)
  • Snaps, Bayonet Connections, Set Pins, And Snap Rings (AREA)
KR1020190002555A 2018-01-10 2019-01-09 밸브 로드에 대한 밸브판의 장착 구조 Active KR102601415B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2018002203A JP7057584B2 (ja) 2018-01-10 2018-01-10 弁ロッドに対する弁板の取付構造
JPJP-P-2018-002203 2018-01-10

Publications (2)

Publication Number Publication Date
KR20190085488A KR20190085488A (ko) 2019-07-18
KR102601415B1 true KR102601415B1 (ko) 2023-11-13

Family

ID=64664972

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020190002555A Active KR102601415B1 (ko) 2018-01-10 2019-01-09 밸브 로드에 대한 밸브판의 장착 구조

Country Status (6)

Country Link
US (1) US10876639B2 (https=)
EP (2) EP3511600A1 (https=)
JP (1) JP7057584B2 (https=)
KR (1) KR102601415B1 (https=)
CN (1) CN110017384B (https=)
TW (1) TWI791714B (https=)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7385185B2 (ja) * 2019-06-19 2023-11-22 Smc株式会社 ゲート弁における弁ロッドに対する弁板の取付構造、及びその取付構造を有するゲート弁
DE102020109920A1 (de) * 2020-04-08 2021-10-14 Westnetz Gmbh Absperrschieber, Gestänge für einen Absperrschieber und Verfahren zum Entlüften eines Absperrschiebers
JP7479586B2 (ja) * 2020-06-16 2024-05-09 Smc株式会社 ゲートバルブ
JP7474924B2 (ja) 2020-07-03 2024-04-26 中国電力株式会社 仕切弁、仕切弁用補助具および仕切弁改修方法
US12125688B2 (en) 2020-11-20 2024-10-22 Applied Materials, Inc. L-motion slit door for substrate processing chamber
DE102021102283A1 (de) 2021-02-01 2022-08-04 Vat Holding Ag Verschlussvorrichtung zum vakuumdichten Verschließen einer Öffnung in einer Wand
DE102021102284A1 (de) 2021-02-01 2022-08-04 Vat Holding Ag Ventilplatte für eine Verschlusseinrichtung zum vakuumdichten Verschließen einer Öffnung in einer Wand
JP7636714B2 (ja) * 2021-04-20 2025-02-27 Smc株式会社 ゲートバルブ
KR20240056878A (ko) * 2022-10-21 2024-05-02 주식회사 원익아이피에스 게이트 밸브 어셈블리 및 이를 포함하는 기판 처리 시스템
US12292131B2 (en) * 2023-05-17 2025-05-06 Lasalle Bristol Corporation Gate valve and valve actuator
CN118728985A (zh) * 2024-06-21 2024-10-01 浙江先导精密机械有限公司 一种半导体真空传输阀结构及加工方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005291221A (ja) 2004-03-31 2005-10-20 Vat Holding Ag 真空ゲートバルブ、バルブ板および多機能工具
US20160238154A1 (en) 2015-02-12 2016-08-18 Fisher Controls International Llc Valve stem and plug connections and staking tools
CN206438198U (zh) 2016-12-19 2017-08-25 包头市山晟新能源有限责任公司 单晶炉籽晶夹头和具有其的籽晶夹头机构

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58196483U (ja) * 1982-06-24 1983-12-27 中川　進 小型電磁弁ユニツト
US5158264A (en) 1991-02-22 1992-10-27 Baroid Technology, Inc. Parallel expanding gate valve
JP3771797B2 (ja) * 2000-12-27 2006-04-26 Ｓｍｃ株式会社 ゲートバルブ
DE102008061315B4 (de) * 2008-12-11 2012-11-15 Vat Holding Ag Aufhängung einer Ventilplatte an einer Ventilstange
JP5664846B2 (ja) * 2010-05-25 2015-02-04 Smc株式会社 真空用バルブ
JP5811320B2 (ja) * 2011-04-21 2015-11-11 Smc株式会社 ゲートバルブ
JP5533839B2 (ja) * 2011-11-04 2014-06-25 Ｓｍｃ株式会社 無摺動型ゲートバルブ
JP6485689B2 (ja) * 2015-02-12 2019-03-20 Smc株式会社 ゲートバルブ

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005291221A (ja) 2004-03-31 2005-10-20 Vat Holding Ag 真空ゲートバルブ、バルブ板および多機能工具
US20160238154A1 (en) 2015-02-12 2016-08-18 Fisher Controls International Llc Valve stem and plug connections and staking tools
CN206438198U (zh) 2016-12-19 2017-08-25 包头市山晟新能源有限责任公司 单晶炉籽晶夹头和具有其的籽晶夹头机构

Also Published As

Publication number Publication date
TW201938936A (zh) 2019-10-01
CN110017384A (zh) 2019-07-16
JP7057584B2 (ja) 2022-04-20
US20190211936A1 (en) 2019-07-11
US10876639B2 (en) 2020-12-29
CN110017384B (zh) 2023-03-28
JP2019120380A (ja) 2019-07-22
KR20190085488A (ko) 2019-07-18
EP4379243A3 (en) 2024-08-14
EP4379243A2 (en) 2024-06-05
EP4379243B1 (en) 2025-09-03
EP3511600A1 (en) 2019-07-17
TWI791714B (zh) 2023-02-11

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