KR102584551B1 - 적층 제조 프로세스를 이용하여 진보된 연마 패드를 형성하기 위한 방법 및 장치 - Google Patents

적층 제조 프로세스를 이용하여 진보된 연마 패드를 형성하기 위한 방법 및 장치 Download PDF

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Publication number
KR102584551B1
KR102584551B1 KR1020187013466A KR20187013466A KR102584551B1 KR 102584551 B1 KR102584551 B1 KR 102584551B1 KR 1020187013466 A KR1020187013466 A KR 1020187013466A KR 20187013466 A KR20187013466 A KR 20187013466A KR 102584551 B1 KR102584551 B1 KR 102584551B1
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South Korea
Prior art keywords
layer
polishing
forming
pattern
disposed
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Korean (ko)
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KR20180056786A (ko
Inventor
시바파키아 가나파티아판
보이 푸
아쉬윈 초칼린감
다니엘 레드필드
라지브 바자즈
마헨드라 씨. 오릴랄
호우 티. 응
제이슨 지. 풍
마유 야마무라
Original Assignee
어플라이드 머티어리얼스, 인코포레이티드
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Priority claimed from US14/885,950 external-priority patent/US10384330B2/en
Priority claimed from US14/887,240 external-priority patent/US10821573B2/en
Priority claimed from US14/920,801 external-priority patent/US10875145B2/en
Priority claimed from US15/002,384 external-priority patent/US10875153B2/en
Application filed by 어플라이드 머티어리얼스, 인코포레이티드 filed Critical 어플라이드 머티어리얼스, 인코포레이티드
Priority to KR1020237033070A priority Critical patent/KR20230145211A/ko
Publication of KR20180056786A publication Critical patent/KR20180056786A/ko
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Publication of KR102584551B1 publication Critical patent/KR102584551B1/ko
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D18/00—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for
    • B24D18/0045—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for by stacking sheets of abrasive material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D11/00—Constructional features of flexible abrasive materials; Special features in the manufacture of such materials
    • B24D11/001—Manufacture of flexible abrasive materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B24B37/22—Lapping pads for working plane surfaces characterised by a multi-layered structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B24B37/24—Lapping pads for working plane surfaces characterised by the composition or properties of the pad materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B24B37/26—Lapping pads for working plane surfaces characterised by the shape of the lapping pad surface, e.g. grooved
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D11/00—Constructional features of flexible abrasive materials; Special features in the manufacture of such materials
    • B24D11/04—Zonally-graded surfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D18/00—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D18/00—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for
    • B24D18/009—Tools not otherwise provided for
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B24D3/02—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
    • B24D3/20—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially organic
    • B24D3/28—Resins or natural or synthetic macromolecular compounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B33—ADDITIVE MANUFACTURING TECHNOLOGY
    • B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
    • B33Y10/00—Processes of additive manufacturing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B33—ADDITIVE MANUFACTURING TECHNOLOGY
    • B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
    • B33Y80/00—Products made by additive manufacturing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C64/00—Additive manufacturing, i.e. manufacturing of three-dimensional [3D] objects by additive deposition, additive agglomeration or additive layering, e.g. by 3D printing, stereolithography or selective laser sintering
    • B29C64/10—Processes of additive manufacturing
    • B29C64/106—Processes of additive manufacturing using only liquids or viscous materials, e.g. depositing a continuous bead of viscous material
    • B29C64/112—Processes of additive manufacturing using only liquids or viscous materials, e.g. depositing a continuous bead of viscous material using individual droplets, e.g. from jetting heads

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Macromonomer-Based Addition Polymer (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
KR1020187013466A 2015-10-16 2016-10-06 적층 제조 프로세스를 이용하여 진보된 연마 패드를 형성하기 위한 방법 및 장치 Active KR102584551B1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020237033070A KR20230145211A (ko) 2015-10-16 2016-10-06 적층 제조 프로세스를 이용하여 진보된 연마 패드를 형성하기 위한 방법 및 장치

Applications Claiming Priority (23)

Application Number Priority Date Filing Date Title
US14/885,950 US10384330B2 (en) 2014-10-17 2015-10-16 Polishing pads produced by an additive manufacturing process
US14/885,950 2015-10-16
US14/887,240 2015-10-19
US14/887,240 US10821573B2 (en) 2014-10-17 2015-10-19 Polishing pads produced by an additive manufacturing process
US14/920,801 US10875145B2 (en) 2014-10-17 2015-10-22 Polishing pads produced by an additive manufacturing process
US14/920,801 2015-10-22
US201662280537P 2016-01-19 2016-01-19
US62/280,537 2016-01-19
US15/002,384 2016-01-20
US15/002,384 US10875153B2 (en) 2014-10-17 2016-01-20 Advanced polishing pad materials and formulations
US201662304134P 2016-03-04 2016-03-04
US62/304,134 2016-03-04
US201662323599P 2016-04-15 2016-04-15
US62/323,599 2016-04-15
US201662331234P 2016-05-03 2016-05-03
US62/331,234 2016-05-03
US201662339807P 2016-05-21 2016-05-21
US62/339,807 2016-05-21
US201662380334P 2016-08-26 2016-08-26
US201662380015P 2016-08-26 2016-08-26
US62/380,334 2016-08-26
US62/380,015 2016-08-26
PCT/US2016/055793 WO2017066077A1 (en) 2015-10-16 2016-10-06 Method and apparatus for forming advanced polishing pads using an additive manufacturing process

Related Child Applications (1)

Application Number Title Priority Date Filing Date
KR1020237033070A Division KR20230145211A (ko) 2015-10-16 2016-10-06 적층 제조 프로세스를 이용하여 진보된 연마 패드를 형성하기 위한 방법 및 장치

Publications (2)

Publication Number Publication Date
KR20180056786A KR20180056786A (ko) 2018-05-29
KR102584551B1 true KR102584551B1 (ko) 2023-10-05

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KR1020187013466A Active KR102584551B1 (ko) 2015-10-16 2016-10-06 적층 제조 프로세스를 이용하여 진보된 연마 패드를 형성하기 위한 방법 및 장치
KR1020237033070A Pending KR20230145211A (ko) 2015-10-16 2016-10-06 적층 제조 프로세스를 이용하여 진보된 연마 패드를 형성하기 위한 방법 및 장치

Family Applications After (1)

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Country Status (7)

Country Link
EP (1) EP3362224B1 (enExample)
JP (3) JP6685392B2 (enExample)
KR (2) KR102584551B1 (enExample)
CN (6) CN112025544B (enExample)
SG (1) SG10202106436WA (enExample)
TW (4) TWI816269B (enExample)
WO (1) WO2017066077A1 (enExample)

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